Abstract: The present disclosure enables measurement with satisfactory sensitivity in a low pressure range, and thus accurate measurement in a wider pressure range, by providing a pressure sensor that includes a diaphragm layer and a pressure receiving region formed in the diaphragm layer. In addition, the pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element.

Abstract: Measurement with satisfactory sensitivity in a low-pressure range, and accurate measurement in a wider pressure range, are realized by a pressure sensor that includes a diaphragm layer and a pressure receiving region formed on the diaphragm layer. The pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element. A switching function unit outputs a pressure value calculated by a second calculation function unit until a pressure value calculated by a first calculation function unit exceeds a set threshold value, and outputs the pressure value calculated by the first calculation function unit when the pressure value calculated by the first calculation function unit exceeds the threshold value.

Abstract: A sensor element includes a sensor chip and a diaphragm base joined to a surface of the sensor chip. The sensor chip includes a first diaphragm for measuring differential pressure between a first pressure and a second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The diaphragm base includes a third diaphragm to directly receive a fluid that is a measurement target and has the first pressure, and a fourth diaphragm to directly receive a fluid that is a measurement target and having the second pressure. The sensor element has a liquid amount adjustment chamber to make an amount of a first pressure transmission medium filled in a first pressure introduction path and an amount of a second pressure transmission medium filled in a second pressure introduction path to be equal to each other.

Abstract: A sensor chip of a sensor element includes a diaphragm for measuring a differential pressure between a first pressure and a second pressure, a diaphragm for measuring an absolute pressure or a gauge pressure of the second pressure, a first pressure introduction path that transmits the first pressure to the diaphragm for measuring a differential pressure, and a second pressure introduction path that transmits the second pressure to the diaphragms. When the transmission of the first pressure or the second pressure to the diaphragms is indicated by an equivalent circuit, a path for transmitting the first pressure and a path for transmitting the second pressure are symmetrically formed.

Abstract: A differential pressure gauge of the invention contains: a diaphragm layer disposed between first and second parts; and a wall between a first region on a pressure-receiving portion side and a second region on a first through-hole side within a second pressure chamber. The diaphragm layer covers the pressure-receiving portion over a first pressure chamber and has the first through-hole with one end disposed in the second pressure chamber away from the pressure-receiving portion. The wall is disposed with gaps formed from inner walls of the second pressure chamber. The first pressure chamber is formed through the first part, the second pressure chamber has an opening facing the diaphragm layer, the first part has a second through-hole continuing to the first through-hole, and a base has a third through-hole with one end disposed in the first pressure chamber and a fourth through-hole continuing to the second through-hole.

Abstract: A curved recess in a stopper includes a groove-pattern region and a groove-free region. When a sensor diaphragm reaches a bottom of the curved recess in the stopper, a groove-free region is divided into a ring-shaped first region with which a sensor diaphragm is in close contact and a ring-shaped second region disposed between an inner wall surface of a ring-shaped wall and the ring-shaped first region. The first region serves as a sealing region and the second region serves as a confinement region so that a pressure transmitting medium that remains in a space adjacent to the inner wall surface of the ring-shaped wall is confined in the confinement region, and abnormal deformation of the sensor diaphragm is prevented.

Abstract: A sensor chip (24) is joined to an inner wall surface (20a) of a base body (21-1), with a lower surface (24a) of a first retaining member (24-2) serving as a joint surface, in such a manner as to allow an enclosing chamber (23) (including a pressure receiving chamber (23-1) and a pressure guiding passage (23-2)) between a pressure receiving diaphragm (22) and the joint surface (24a) of the sensor chip (24) to communicate with a pressure guiding hole (24-2b) in the first retaining member (24-2). In this state, a narrow tube (31) made of stainless steel is passed through the pressure guiding passage (23-2) in the base body (21-1) and inserted and secured in the pressure guiding hole (24-2b) in the first retaining member (24-2).

Abstract: The present disclosure enables measurement with satisfactory sensitivity in a low pressure range, and thus accurate measurement in a wider pressure range, by providing a pressure sensor that includes a diaphragm layer and a pressure receiving region formed in the diaphragm layer. In addition, the pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element.

Abstract: Measurement with satisfactory sensitivity in a low-pressure range, and accurate measurement in a wider pressure range, are realized by a pressure sensor that includes a diaphragm layer and a pressure receiving region formed on the diaphragm layer. The pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element. A switching function unit outputs a pressure value calculated by a second calculation function unit until a pressure value calculated by a first calculation function unit exceeds a set threshold value, and outputs the pressure value calculated by the first calculation function unit when the pressure value calculated by the first calculation function unit exceeds the threshold value.

Abstract: A chip that constitutes a pressure-sensitive sensor and an enclosure are provided. The enclosure is formed with a sensor placement chamber in which the chip is placed. In the sensor placement chamber in which the chip is housed, a first pipe connecting a first communication channel on the side of the sensor placement chamber to a first pressure introduction portion and a second pipe connecting a second communication channel on the side of the sensor placement chamber to the second pressure introduction portion are provided. A side surface of the first pipe and a side surface of the second pipe are disposed out of contact with an inner wall of the sensor placement chamber.

Abstract: The differential pressure gauge includes a base, a first part disposed on an upper surface of the base, a second part disposed on the first part, and a diaphragm layer disposed between the first part and the second part. A wall is formed in a second pressure chamber formed in the second part between a first region on a side including a pressure-receiving portion and a second region on a side including a first through-hole, with a gap defined with respect to inner walls of the second pressure chamber.

Abstract: A sensor element includes diaphragms that are respectively displaced by receiving pressures, and a plurality of pressure inlet passages (a first pressure inlet passage made up of through-holes, a groove, and recessed portions, and a second pressure inlet passage made up of a through-hole, a groove, and a recessed portion) that respectively transmit same or different pressures to the diaphragms. Each of the plurality of pressure inlet passages is filled with a pressure transmission medium capable of transmitting a pressure. A pressure is applied through part or all of the plurality of pressure inlet passages to each of the diaphragms.

Abstract: A sensor element includes a first diaphragm for measuring differential pressure between first pressure and second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The sensor element has a first pressure introduction path (through holes, a groove, and a depression) through which the first pressure is transmitted to the first diaphragm. The sensor element has a second pressure introduction path (through holes, grooves, and depressions) through which the second pressure is transmitted to the first and second diaphragms. The sensor element has a liquid amount adjustment chamber (depression) configured to make an amount of a first pressure transmission medium filled in the first pressure introduction path and an amount of a second pressure transmission medium filled in the second pressure introduction path to be equal to each other.

Abstract: A sensor chip of a sensor element includes a diaphragm for measuring a differential pressure between a first pressure and a second pressure, a diaphragm for measuring an absolute pressure or a gauge pressure of the second pressure, a first pressure introduction path that transmits the first pressure to the diaphragm for measuring a differential pressure, and a second pressure introduction path that transmits the second pressure to the diaphragms. When the transmission of the first pressure or the second pressure to the diaphragms is indicated by an equivalent circuit, a path for transmitting the first pressure and a path for transmitting the second pressure are symmetrically formed.

Abstract: A pressure sensor chip includes a first layer including a pressure introduction channel opening on a first main surface and a second main surface; a second layer including a diaphragm covering one end of the channel, a first strain gauge, and a second strain gauge, the second layer being on the second main surface; and a third layer including a third main surface and a concaved portion disposed at the third main surface, the third main surface being on the second layer. The concaved portion faces the channel with the diaphragm interposed therebetween, and is on an inner side of the channel when viewed from a direction perpendicular to the first main surface. The first strain gauge is on an outer side of the concaved portion when viewed from the direction. The second strain gauge is on an inner side of the first strain gauge when viewed from the direction.

Abstract: A pressure sensor according to the present invention includes a diaphragm (3) including a first principal surface (3A) and a second principal surface (3B) that is opposite thereto, the first principal surface receiving a pressure of a fluid; a semiconductor chip (1) provided with resistors that constitute a strain gauge; and at least three support members (2a, 2b, 2c) made of an insulating material, each support member being fixed to the second principal surface at one end thereof and to the semiconductor chip at the other end thereof and extending perpendicularly to the second principal surface so as to support the semiconductor chip. One of the support members (2a) is provided at a center (30) of the diaphragm in plan view.

Abstract: A curved recess in a stopper includes a groove-pattern region and a groove-free region. When a sensor diaphragm reaches a bottom of the curved recess in the stopper, a groove-free region is divided into a ring-shaped first region with which a sensor diaphragm is in close contact and a ring-shaped second region disposed between an inner wall surface of a ring-shaped wall and the ring-shaped first region. The first region serves as a sealing region and the second region serves as a confinement region so that a pressure transmitting medium that remains in a space adjacent to the inner wall surface of the ring-shaped wall is confined in the confinement region, and abnormal deformation of the sensor diaphragm is prevented.

Abstract: A differential pressure sensor chip (2) includes: first and second pressure introduction holes (21_1 and 21_2); first and second diaphragms (23_1 and 23_2) formed to cover the first and second pressure introduction holes; first and second depressions (24_1 and 24_2) each in a form of a depression respectively provided to face the first and second pressure introduction holes with the first and second diaphragms interposed therebetween; a first communication channel (25) that makes a chamber between the first depression and the first diaphragm and a chamber between the second depression and the second diaphragm communicate to each other; a pressure-transmission-material introduction passage (26) an end of which is an opening and another end of which is joined to the first communication channel; a pressure transmission material (27) that fills the first communication channel, the two chambers, and the pressure-transmission-material introduction passage; and a sealing member (7) formed of a metal formed to seal a

Abstract: A pressure sensor chip according to the present invention includes a non-bonding region that is provided in a stopper member and connected to a periphery of a pressure introduction hole. A plurality of protrusions are discretely formed on at least one of a first surface and a second surface that face each other in the non-bonding region. Passages between the protrusions serve as channels between the periphery of the pressure introduction hole and a peripheral edge of the non-bonding region. Accordingly, stress concentration does not occur at a diaphragm edge and the expected withstand pressure can be obtained.

Abstract: A pressure sensor chip according to the present invention includes two static-pressure diaphragms (2, 3) formed by dividing an annular diaphragm arranged so as to surround a differential-pressure diaphragm (1). A reference pressure is applied to one surface of one static-pressure diaphragm (2), and a measurement pressure (Pa) for one surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (2) along a branched path. A reference pressure is applied to one surface of the other static-pressure diaphragm (3), and a measurement pressure (Pb) for the other surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (3) along a branched path. Accordingly, multiple differential-pressure measurement ranges can be provided.