Patents by Inventor Tomotaka Tsuchimura

Tomotaka Tsuchimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8361681
    Abstract: Disclosed is a polymerizable composition characterized by containing at least (A) a photopolymerization initiator represented by the following general formula (1); (B) a coloring agent; (C) a polymerizable monomer; (D) a binder polymer; and (E) a solvent. wherein, in formula (1), R1 represents an aromatic group; R2 represents a group represented by any one of the above Formulae (2-1) to (2-3); R3 represents an alkyl group or the like; and A represents a single bond or —C(?O)—; X1, X2, and Y each independently represent a hydrogen atom, an alkyl group or the like and Z represents an atomic group which may form an arbitrary ring structure containing a carbon-carbon double bond.
    Type: Grant
    Filed: February 23, 2009
    Date of Patent: January 29, 2013
    Assignee: FUJIFILM Corporation
    Inventors: Masaomi Makino, Tomotaka Tsuchimura
  • Publication number: 20130004888
    Abstract: An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition that can form independent line patterns with high resolution and excellent shapes and shows excellent resist performances including roughness characteristics, and to provide an actinic ray-sensitive or radiation-sensitive film and a pattern forming method using the composition. The actinic ray-sensitive or radiation-sensitive resin composition contains a compound (P) that contains at least one phenolic hydroxyl group and at least one group in which a hydrogen atom of a phenolic hydroxyl group is substituted with a group represented by the following General Formula (1) (the respective symbols in the formula represent the same definitions as in the claims and the specification).
    Type: Application
    Filed: June 20, 2012
    Publication date: January 3, 2013
    Applicant: FUJIFILM Corporation
    Inventors: Takeshi INASAKI, Tomotaka TSUCHIMURA
  • Patent number: 8329379
    Abstract: Provided is an actinic ray-sensitive or radiation-sensitive resin composition, a resist film formed with the composition, and a pattern-forming method using the same. The actinic ray-sensitive or radiation-sensitive resin composition includes (P) a resin that contains the following repeating units (A), (B) and (C); and a solvent having a boiling temperature of 150° C. or less, (A) a repeating unit containing a group capable of decomposing and forming an acid upon irradiation with an actinic ray or radiation, (B) a repeating unit containing a group capable of decomposing and forming a carboxylic acid by the action of an acid, and (C) a repeating unit containing a carbon-carbon unsaturated bond.
    Type: Grant
    Filed: March 29, 2010
    Date of Patent: December 11, 2012
    Assignee: FUJIFILM Corporation
    Inventors: Takayuki Ito, Hidenori Takahashi, Tomotaka Tsuchimura, Shohei Kataoka, Takeshi Inasaki
  • Publication number: 20120301817
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.
    Type: Application
    Filed: January 27, 2011
    Publication date: November 29, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Takeshi Inasaki, Takayuki Ito, Tomotaka Tsuchimura, Tadateru Yatsuo, Koutarou Takahashi
  • Patent number: 8278386
    Abstract: A dispersion composition is provided in which the dispersibility of titanium black is high, the sedimentation of titanium black over time is suppressed, and overall dispersibility and storage stability are high. Further, a polymerizable composition is provided in which favorable coating property on a substrate and even film thickness can be obtained, generation of residue in an unexposed region when a pattern is formed can be suppressed, and favorable pattern shape having any steps after exposure/development can be obtained. The dispersion composition contains (A) titanium black, (B) a graft copolymer and (C) a solvent.
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: October 2, 2012
    Assignee: FUJIFILM Corporation
    Inventors: Yuzo Nagata, Tomotaka Tsuchimura, Makoto Kubota, Kazuhiro Fujimaki, Yushi Kaneko, Kazuto Shimada
  • Publication number: 20120244472
    Abstract: Provided is an actinic ray-sensitive or radiation-sensitive resin composition comprising (A) a specific compound represented by a general formula, (B) a resin which is alkali-insoluble or sparingly alkali-soluble and becomes easily alkali-soluble in the presence of an acid, and (C) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; a film formed using the composition; and a pattern forming method using the same.
    Type: Application
    Filed: November 30, 2010
    Publication date: September 27, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Tomotaka Tsuchimura, Takayuki Ito, Toru Fujimori, Kana Fujii
  • Publication number: 20120231393
    Abstract: According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin that is decomposed when acted on by an acid to thereby increase its solubility in an alkali developer, a compound that generates an acid when exposed to actinic rays or radiation, and any of basic compounds of general formula (1) below.
    Type: Application
    Filed: March 15, 2012
    Publication date: September 13, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Kana FUJII, Tomotaka TSUCHIMURA, Toru FUJIMORI, Hidenori TAKAHASHI, Takayuki ITO
  • Patent number: 8252490
    Abstract: A color filter or solid state imaging device comprising a colored pattern formed from a curable composition which includes (A) a pigment, (B) a compound having a defined cyclic urea structure and having an acid group or a basic group, (C) a dispersant, (D) a solvent, (E) a radical polymerizable compound, and (F) a photopolymerization initiator. The pigment may be a pigment having a urea structure or an imide structure. The pigment may also be a pigment having a barbituric skeleton.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: August 28, 2012
    Assignee: Fujifilm Corporation
    Inventors: Kazuto Shimada, Yushi Kaneko, Tomotaka Tsuchimura
  • Publication number: 20120214091
    Abstract: A resist film formed by using a chemical amplification type resist composition containing (A) a high molecular compound having a structure wherein a hydrogen atom of a phenolic hydroxyl group is substituted by a group represented by the following general formula (I), (B) a compound generating an acid upon irradiation with actinic rays or radiation, and an organic solvent, and the film thickness is 10 to 200 nm. wherein, R1 represents a hydrocarbon group, R2 represents a hydrogen atom or a hydrocarbon group, and Ar represents an aryl group. R1 may also bind to Ar to form a ring which may also contain a heteroatom. * represents a binding position with an oxygen atom of the phenolic hydroxyl group.
    Type: Application
    Filed: February 7, 2012
    Publication date: August 23, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Tomotaka TSUCHIMURA, Takeshi INASAKI, Hiroo TAKIZAWA
  • Publication number: 20120202141
    Abstract: The object of the present invention is to solve the technical problems in the microfabrication of photomasks or semiconductors and is, in particular, to provide a chemical amplification type positive resist film, and a resist film, resist coated mask blanks and a method of forming a resist pattern using the composition, which satisfy at the same time all of high sensitivity, high resolution (for example, high resolving power), good exposure latitude (EL), and good line edge roughness (LER). A chemical amplification type positive resist composition comprising: a high molecular compound (A) having a repeating unit represented by the following general formula (1), a repeating unit represented by the following general formula (2), and a repeating unit represented by the following general formula (3).
    Type: Application
    Filed: January 31, 2012
    Publication date: August 9, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Takeshi INASAKI, Tomotaka TSUCHIMURA, Hiroo TAKIZAWA
  • Patent number: 8211598
    Abstract: A black photosensitive resin composition, a light-shielding color filter using the composition and its production method are provided, the black photosensitive resin composition including: a black colorant; a compound represented by Formula (I) or (II) as defined in the specification; and a photopolymerization initiator.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: July 3, 2012
    Assignee: FUJIFILM Corporation
    Inventors: Hiroyuki Einaga, Yoichi Maruyama, Kazuto Shimada, Tomotaka Tsuchimura, Hiroshi Taguchi
  • Publication number: 20120100481
    Abstract: An actinic ray-sensitive or radiation-sensitive composition, including: (1) a low molecular compound having a molecular weight of 500 to 5,000 and containing (G) an acid-decomposable group; and (2) a compound capable of generating an acid of 305 ?3 or more in volume upon irradiation with an actinic ray or radiation, an actinic ray-sensitive or radiation-sensitive composition, including: a solvent; and (1A) a compound which is a low molecular compound having a molecular weight of 500 to 5,000 and containing (Z) one or more groups capable of decomposing upon irradiation with an actinic ray or radiation to produce an acid, (G) one or more acid-decomposable groups and (S) one or more dissolution auxiliary groups, wherein assuming that the number of the functional groups in one molecule of (Z), (G) and (S) is z, q and s, respectively, q/z?2 and s/z?2, and a pattern forming method using the composition are provided.
    Type: Application
    Filed: July 28, 2010
    Publication date: April 26, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Takayuki Ito, Tomotaka Tsuchimura, Takeshi Kawabata
  • Publication number: 20120094235
    Abstract: According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin (A) whose solubility in an alkali developer is increased by the action of an acid, the resin containing any of the units of general formula (AI) below and any of the units of general formula (AII) below, and a compound (B) that when exposed to actinic rays or radiation, generates an acid with any of the structures of general formula (BI) below.
    Type: Application
    Filed: May 20, 2010
    Publication date: April 19, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Toru Tsuchihashi, Hideaki Tsubaki, Koji Shirakawa, Hidenori Takahashi, Tomotaka Tsuchimura
  • Publication number: 20120082939
    Abstract: An active light ray sensitive or radioactive ray sensitive resin composition which satisfies high sensitivity, high resolution, good pattern configuration, and good line edge roughness at the same time to a great extent, while having sufficiently good outgassing performance during exposure, and an active light ray sensitive or radioactive ray sensitive film formed by using the composition, and a pattern-forming method, are provided. The active light ray sensitive or radioactive ray sensitive resin composition according to the present invention includes a resin (P) containing a repeating unit (A) which decomposes by irradiation with active light ray or radioactive ray to generate an acid, and a repeating unit (C) containing a primary or secondary hydroxyl group.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 5, 2012
    Applicant: FUJIFILM Corporation
    Inventors: Takeshi KAWABATA, Hidenori Takahashi, Tomotaka Tsuchimura, Shuji Hirano, Hideaki Tsubaki
  • Patent number: 8148044
    Abstract: A positive photosensitive composition includes at least one compound that when exposed to actinic rays or radiation, generates any of the sulfonic acids of general formula (I) and a resin whose solubility in an alkali developer is increased by the action of an acid, wherein each of X1 and X2 independently represents a fluorine atom or a fluoroalkyl group, R1 represents a group with a polycyclic structure, provided that the polycyclic structure may have a substituent, and R2 represents a hydrogen atom, a chain alkyl group, a monocyclic alkyl group, a group with a polycyclic structure or a monocyclic aryl group, provided that each of the chain alkyl group, monocyclic alkyl group, polycyclic structure and monocyclic aryl group may have a substituent, and provided that R1 and R2 may be bonded to each other to thereby form a polycyclic structure.
    Type: Grant
    Filed: October 29, 2009
    Date of Patent: April 3, 2012
    Assignee: Fujifilm Corporation
    Inventors: Shuhei Yamaguchi, Tomotaka Tsuchimura, Yuko Tada
  • Patent number: 8119311
    Abstract: A photosensitive resin composition is provided that includes at least (A) titanium black, (B) a polymerizable compound, (C) a photopolymerization initiator (D) a resin, and (E) an organic solvent, the photopolymerization initiator (C) using in combination two or more types of photopolymerization initiators including at least one type of oxime-based photopolymerization initiator. There are also provided a light-shielding color filter having a pattern formed by using the photosensitive resin composition, a process for producing a light-shielding color filter that includes a step of coating a substrate with the photosensitive resin composition, a step of imagewise exposing, and a step of developing to form a pattern, and an image sensor having the light-shielding color filter.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: February 21, 2012
    Assignee: Fujifilm Corporation
    Inventors: Toru Fujimori, Yoichi Maruyama, Hiroyuki Einaga, Kazuto Shimada, Tomotaka Tsuchimura, Yushi Kaneko
  • Patent number: 8110324
    Abstract: A photosensitive resin composition is provided that includes at least (A) titanium black, (B) two or more types of polymerizable compounds, (C) a resin, (D) a photopolymerization initiator, and (E) an organic solvent. There are also provided a light-shielding color filter formed by using the photosensitive resin composition, and a process for producing a light-shielding color filter, the process including a step of coating a substrate with the photosensitive resin composition, a step of imagewise exposing, and a step of developing to form a pattern. Furthermore, there is provided an image sensor that includes the light-shielding color filter.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: February 7, 2012
    Assignee: Fujifilm Corporation
    Inventors: Toru Fujimori, Yoichi Maruyama, Hiroyuki Einaga, Kazuto Shimada, Tomotaka Tsuchimura, Yushi Kaneko
  • Patent number: 8110333
    Abstract: A resist composition includes (A) a compound represented by the following formula (I): wherein each of R1 to R13 independently represents a hydrogen atom or a substituent, provided that at least one of R1 to R13 is a substituent containing an alcoholic hydroxyl group; Z represents a single bond or a divalent linking group; and X? represents an anion containing a proton acceptor functional group.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: February 7, 2012
    Assignee: Fujifilm Corporation
    Inventors: Sou Kamimura, Yasutomo Kawanishi, Kenji Wada, Tomotaka Tsuchimura
  • Publication number: 20120003585
    Abstract: According to one embodiment, an actinic-ray- or radiation-sensitive resin composition comprises (A) any of the compounds of General Formula (I) below and (B) a resin that contains the residue (c) of a compound having an ionization potential value lower than that of phenol and when acted on by an acid, exhibits an increased solubility in an alkali developer, wherein Ar represents an aromatic ring having Cy groups and optionally further other substituents, n is an integer of 2 or greater, Cy represents a group having a substituted or unsubstituted alkyl group or a group having a substituted or unsubstituted cycloaliphatic group, provided that a plurality of Cy groups may be identical with or different from each other, and M+ represents an organic onium ion.
    Type: Application
    Filed: March 12, 2010
    Publication date: January 5, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Hideaki Tsubaki, Koji Shirakawa, Tadateru Yatsuo, Toru Tsuchihashi, Tomotaka Tsuchimura
  • Publication number: 20120003590
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition containing a resin having (A) a repeating unit represented by a specific formula (I) and (B) a repeating unit capable of generating an acid upon irradiation with an actinic ray or radiation.
    Type: Application
    Filed: February 23, 2011
    Publication date: January 5, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Shuji HIRANO, Hidenori TAKAHASHI, Tomotaka TSUCHIMURA, Takeshi KAWABATA, Hideaki TSUBAKI