Abstract: A cleaning method introduces a cleaning gas containing hydrogen fluoride into a reaction tube included in a heat treatment apparatus and having a furnace portion at one end in a state where an inside of the reaction tube with the furnace port being closed by a lid is maintained at a temperature at which water exists as a liquid film and the furnace port is locally heated, thereby removing a deposit from the reaction tube.

Abstract: A method of processing a substrate, includes: mounting at least one substrate on at least one substrate holder configured to rotate about an axis of the at least one substrate holder, the at least one substrate holder being provided along a circumferential direction of a rotary table installed inside a processing chamber; holding the at least one substrate by the at least one substrate holder in a contact manner by bringing a substrate contact portion into contact with at least three points on a lateral surface of the at least one substrate mounted on the at least one substrate holder; and performing a substrate process while rotating the rotary table and rotating the at least one substrate holder about the axis of the at least one substrate holder in a state where the at least one substrate is held by the at least one substrate holder in the contact manner.

Abstract: A deposition method of forming silicon oxide films collectively on a plurality of substrates in a processing container performs a plurality of execution cycles each of which includes: supplying a silicon material gas containing an organoamino-functionalized oligosiloxane compound into the processing container; and supplying an oxidizing gas into the processing container adjusted to a pressure of 1 Torr to 10 Torr (133 Pa to 1333 Pa).

Abstract: A control device controls an operation of a processing apparatus for performing a processing in a processing container that accommodates a substrate. The control device includes: a temperature acquisition unit configured to acquire a temperature inside the processing container; a storage unit configured to store relationship information indicating a relationship between the temperature inside the processing container and an etching rate, and film thickness information including a cumulative film thickness of a deposited film inside the processing container; a rate calculator configured to calculate an etching rate of the deposited film based on the temperature acquired by the temperature acquisition unit and the relationship information stored in the storage unit; and a time calculator configured to calculate an etching time for removing the deposited film based on the etching rate calculated by the rate calculator and the film thickness information stored in the storage unit.

Abstract: A partition wall has a structure with a wall end portion butted against another building structure and exposed to architectural spaces. An end post at the end portion of the wall is constituted from first and second end post elements, which are spaced apart from each other, so that a gap or an isolation zone interrupting a propagation of a solid vibration or insulating a path for propagating the solid vibration is formed between the first and second elements. An interior finishing panel for defining the architectural space on one side of the wall is fixed to the first element and the interior finishing panel for defining the architectural space on an opposite side of the wall is fixed to the second element.

Abstract: A film deposition apparatus includes a process chamber, and a turntable disposed in the process chamber and configured to receive a substrate along a circumferential direction. At least one ozone gas supply part configured to supply ozone gas on the turntable is provided. A plate member is disposed to cover the ozone gas supply part. An ozone gas activator is disposed on or above an upper surface of the plate member and configured to activate the ozone gas.

Abstract: A method of processing a substrate, includes: mounting at least one substrate on at least one substrate holder configured to rotate about an axis of the at least one substrate holder, the at least one substrate holder being provided along a circumferential direction of a rotary table installed inside a processing chamber; holding the at least one substrate by the at least one substrate holder in a contact manner by bringing a substrate contact portion into contact with at least three points on a lateral surface of the at least one substrate mounted on the at least one substrate holder; and performing a substrate process while rotating the rotary table and rotating the at least one substrate holder about the axis of the at least one substrate holder in a state where the at least one substrate is held by the at least one substrate holder in the contact manner.

Abstract: There is provided a wafer boat support table that supports a wafer boat having a plurality of posts from below, the plurality of posts being configured to arrange and support a plurality of wafers at intervals in a vertical direction, the wafer boat support table including: a plurality of support points installed on each of linear lines defined by connecting a center of the wafer boat and the plurality of posts and configured to support a bottom surface of the wafer boat while being brought into contact with the bottom surface of the wafer boat.

Abstract: There is provided a wafer boat support table that supports a wafer boat having a plurality of posts from below, the plurality of posts being configured to arrange and support a plurality of wafers at intervals in a vertical direction, the wafer boat support table including: a plurality of support points installed on each of linear lines defined by connecting a center of the wafer boat and the plurality of posts and configured to support a bottom surface of the wafer boat while being brought into contact with the bottom surface of the wafer boat.

Abstract: The present invention provides a diesel engine capable of preventing a PM accumulation amount from increasing excessively. If DOC inlet exhaust gas temperature (“IEGT”) does not reach a predetermined value T0, a control unit carries out air intake amount feedback control (“AIAFC”), and a target value of intake throttling is set to a predetermined air intake amount. If the DPF regenerating processing is not started even if elapsed time reaches a predetermined value t after AIAFC is started in a state where the DOC IEGT does not reach the predetermined value T0, the control unit changes AIAFC to exhaust gas temperature feedback control (“EGTFC”). In EGTFC, the control unit changes a target value of intake throttling to a predetermined DOC IEGT T0. If application of a load exceeding a predetermined amount is detected before the DOC IEGT reaches the predetermined value T0, the control unit returns EGTFC to AIAFC.

Abstract: The present invention provides a diesel engine capable of preventing a PM accumulation amount from increasing excessively. If DOC inlet exhaust gas temperature (“IEGT”) does not reach a predetermined value T0, a control unit carries out air intake amount feedback control (“AIAFC”), and a target value of intake throttling is set to a predetermined air intake amount. If the DPF regenerating processing is not started even if elapsed time reaches a predetermined value t after AIAFC is started in a state where the DOC IEGT does not reach the predetermined value T0, the control unit changes AIAFC to exhaust gas temperature feedback control (“EGTFC”). In EGTFC, the control unit changes a target value of intake throttling to a predetermined DOC IEGT T0. If application of a load exceeding a predetermined amount is detected before the DOC IEGT reaches the predetermined value T0, the control unit returns EGTFC to AIAFC.

Abstract: A gypsum board having mold resistance includes a gypsum core and gypsum board paper covering two surfaces of the gypsum core. The gypsum core contains first and second anti-mold agents, each having a water solubility of 200 ppm or less, and a waterproofing agent. A mixture consisting of the first and second anti-mold agents and starch is applied on a surface of the gypsum board paper, which surface is out of contact with the gypsum core. The first anti-mold agent is 2-(4-thiazolyl)-benzimidazole (TBZ) or 2-benzimidazol carbamic acid methyl ester (BCM), and the second anti-mold agent is 3-iodo-2-propyl butyl carbamate (IPBC). The total amount of the first and second anti-mold agents contained in the gypsum core is 0.03% to 0.2% of gypsum forming the gypsum core on an active ingredient basis, and the additive amount of the waterproofing agent is 0.3% to 1.5% of the gypsum forming the gypsum core.

Abstract: It is an object of the invention to provide a multi-cylinder diesel engine in which a thermal damage of a common rail, and a rise in fuel temperature can be suppressed. In order to achieve the object, a multi-cylinder diesel engine in which, while the extension direction of a crank shaft 1 is set to the anteroposterior direction, a common rail 3 which is directed in the anteroposterior direction is placed above an intake manifold 2, and an engine cooling fan 4 is placed in front of the engine is configured so that the width direction of the engine which is perpendicular to the anteroposterior direction is set to the lateral direction, an air intake portion 6 of the intake manifold 2 is placed on the outer lateral side of the both lateral sides of the common rail 3, the outer lateral side being opposite to a head cover 5, and the common rail 3 is placed in a place to which engine cooling air produced by the engine cooling fan 4 is blown.

Abstract: A data processing apparatus that can flexibly deal with various needs of a user while effectively utilizing a memory unit thereof that can store a plurality of data. The data processing apparatus, which is equipped with a memory unit capable of storing data, executes processing of transmitting the data of the memory unit to an external apparatus and erasing the data of the object of transmission to the external apparatus from the memory unit. An acceptance of a specific user request related to processing of the data transmitted to the external apparatus is allowed in a case where the data has been transmitted to the external apparatus. The data processing apparatus executes processing using the data transmitted to the external apparatus in a case where the acceptance of the specific user request is performed via the user interface unit.

Abstract: A printing apparatus connected to an external apparatus for temporarily storing a print job including a plurality of pages of image data, receives image data related to the print job from the external apparatus and performs printing using the received image data, comprising a storage unit for temporarily storing the image data received from the external apparatus, a printing unit for performing printing using the image data stored in the storage unit, a determination unit for determining an amount of free area in the storage unit and a control unit for performing a control to switch storage of the image data in the storage unit from storing all of the pages of the image data to storing some of the pages of the image data, in response to the amount of free area determined becoming smaller than a predetermined area during printing.

Abstract: It is an object of the invention to provide a multi-cylinder diesel engine in which a thermal damage of a common rail, and a rise in fuel temperature can be suppressed. In order to achieve the object, a multi-cylinder diesel engine in which, while the extension direction of a crank shaft 1 is set to the anteroposterior direction, a common rail 3 which is directed in the anteroposterior direction is placed above an intake manifold 2, and an engine cooling fan 4 is placed in front of the engine is configured so that the width direction of the engine which is perpendicular to the anteroposterior direction is set to the lateral direction, an air intake portion 6 of the intake manifold 2 is placed on the outer lateral side of the both lateral sides of the common rail 3, the outer lateral side being opposite to a head cover 5, and the common rail 3 is placed in a place to which engine cooling air produced by the engine cooling fan 4 is blown.

Abstract: A gypsum board having mold resistance includes a gypsum core containing a first anti-mold agent poorly soluble in water and a waterproofing agent; and gypsum board paper containing a second anti-mold agent poorly soluble in water.

Abstract: Perforations of a board for building material are formed by a number of recesses (13), or a number of recesses (13) and through-holes (12). A bottom face (16) of the recess forms a face for screwing or driving the fixing element (70) thereto. A color of the bottom face is set to have a brightness of color decreased in comparison with a color of a surface (18) of the board. A substrate of the board is a gypsum board and the bottom face of the recess is formed by a liner paper for gypsum board. According to such a board, a region for screwing or driving the fixing element thereto can be ensured without impairing regularity, uniformity or architectural design of the perforations, and putty finishing or the like for an exposed part of the fixing element can be omitted.

Abstract: A data processing apparatus that can flexibly deal with various needs of a user while effectively utilizing a memory unit thereof that can store a plurality of data. The data processing apparatus, which is equipped with a memory unit capable of storing data, executes processing of transmitting the data of the memory unit to an external apparatus and erasing the data of the object of transmission to the external apparatus from the memory unit. An acceptance of a specific user request related to processing of the data transmitted to the external apparatus is allowed in a case where the data has been transmitted to the external apparatus. The data processing apparatus executes processing using the data transmitted to the external apparatus in a case where the acceptance of the specific user request is performed via the user interface unit.