Wafer boat

- Tokyo Electron Limited
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Description

FIG. 1 is a front, top, and left side perspective view of a wafer boat, showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a cross-sectional view thereof, taken along line 5-5 in FIG. 2;

FIG. 6 is an enlarged portion view thereof, taken along line 6-6 in FIG. 5;

FIG. 7 is an enlarged cross-sectional view thereof, taken along line 7-7 in FIG. 2;

FIG. 8 is an enlarged cross-sectional view thereof, taken along line 8-8 in FIG. 2; and,

FIG. 9 is an enlarged cross-sectional view thereof, taken along line 9-9 in FIG. 2.

The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.

Claims

The ornamental design for a wafer boat, as shown and described.

Referenced Cited
U.S. Patent Documents
4165584 August 28, 1979 Scherrer
D361752 August 29, 1995 Yamaga
D366868 February 6, 1996 Ohsawa
D378675 April 1, 1997 Iwai
D378823 April 15, 1997 Watanabe
D380454 July 1, 1997 Iwai
D383377 September 9, 1997 Sellers
D404015 January 12, 1999 Honma
D404371 January 19, 1999 Shimazu
D409158 May 4, 1999 Shimazu
D411176 June 22, 1999 Shimazu
D517073 March 14, 2006 McDonald
D570308 June 3, 2008 Sato
D570309 June 3, 2008 Sato
D614593 April 27, 2010 Lee
8216379 July 10, 2012 Ishikawa
D674759 January 22, 2013 Chang
D686175 July 16, 2013 Gurary
D686582 July 23, 2013 Krishnan
D690671 October 1, 2013 Gurary
D695241 December 10, 2013 Gurary
D695242 December 10, 2013 Gurary
D704155 May 6, 2014 Chang
D716742 November 4, 2014 Jang
D723077 February 24, 2015 Sakata
D724553 March 17, 2015 Choi
D731409 June 9, 2015 Erlich
D734730 July 21, 2015 Yoshida
D737785 September 1, 2015 Yoshida
D738329 September 8, 2015 Yoshida
D747279 January 12, 2016 Yoshida
D760180 June 28, 2016 Dempster
D761745 July 19, 2016 Shinkai
D771622 November 15, 2016 Akana
9633822 April 25, 2017 Tanaka
D790489 June 27, 2017 Toyomura
D793971 August 8, 2017 Krishnan
D793972 August 8, 2017 Krishnan
D839219 January 29, 2019 Yoshida
D846514 April 23, 2019 Yoshida
D860146 September 17, 2019 Rashkovsky
20060102081 May 18, 2006 Ueno
20080102199 May 1, 2008 Gurary
20090017190 January 15, 2009 Sferlazzo
20090155028 June 18, 2009 Boguslavskiy
20100190418 July 29, 2010 Yasuoka
20120234229 September 20, 2012 Nguyen
20120240859 September 27, 2012 Chen
20130276704 October 24, 2013 Krishnan
20140261698 September 18, 2014 Krishnan
20150118009 April 30, 2015 Hsieh
Patent History
Patent number: D893438
Type: Grant
Filed: Feb 2, 2018
Date of Patent: Aug 18, 2020
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Tomoya Hasegawa (Iwate), Koichi Shimada (Iwate)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/635,787