Patents by Inventor Tomoyuki Matsuyama

Tomoyuki Matsuyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180039827
    Abstract: To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
    Type: Application
    Filed: October 6, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventors: Tetsuya YAMAMOTO, Masahiro NEI, Isao TOTSUKA, Tomoyuki MATSUYAMA, Masamitsu YANAGIHARA, Satoshi HAGIWARA, Masakazu SEKIGUCHI
  • Publication number: 20170363962
    Abstract: A simulation apparatus has: a first processing part configured to obtain a value of a parameter in a first set relating to the forming of the pattern; a second processing part configured to obtain a value of a parameter in a second set that is at least partially same as the parameter in the first set and relating to the forming of the pattern; and an integration processing part configured to evaluate, based on the value of the parameter in the first set and the value of the parameter in the second set, a state of the pattern formed on the substrate and a forming condition when the pattern is formed, and to determine based on the result of the evaluation whether or not to make at least one of the first processing part and the second processing part recalculate the value of the parameter in the corresponding set.
    Type: Application
    Filed: June 1, 2015
    Publication date: December 21, 2017
    Applicant: NIKON CORPORATION
    Inventors: Tomoyuki MATSUYAMA, Shintaro KUDO, Hirotaka KOHNO
  • Publication number: 20170363951
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Application
    Filed: August 30, 2017
    Publication date: December 21, 2017
    Inventors: Jacek TYMINSKI, Raluca POPESCU, Tomoyuki MATSUYAMA
  • Patent number: 9753363
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Grant
    Filed: February 11, 2016
    Date of Patent: September 5, 2017
    Assignees: NIKON CORPORATION, NIKON PRECISION INC
    Inventors: Jacek Tyminski, Raluca Popescu, Tomoyuki Matsuyama
  • Publication number: 20170227854
    Abstract: A polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: April 26, 2017
    Publication date: August 10, 2017
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Patent number: 9684246
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9684247
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 9551938
    Abstract: Disclosed is a light source optimizing method wherein: a light source shape obtained as the result of SMO is set as a target, the SMO being an optimizing calculation method for optimizing a mask pattern and illumination light source, a spatial light modulator is controlled such that a deviation from the target is within an acceptable range, and the shape of the illumination light source is set; the image of the pattern obtained as the results of the SMO is formed on a wafer, using illumination light emitted from the illumination light source having the set light source shape, an OPE is evaluated as image-forming performance using the detection results obtained by detecting the image of the pattern thus formed; and the light source shape is optimized.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: January 24, 2017
    Assignee: NIKON CORPORATION
    Inventors: Tomoyuki Matsuyama, Naonori Kita
  • Patent number: 9423694
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: August 23, 2016
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Publication number: 20160161842
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Application
    Filed: February 11, 2016
    Publication date: June 9, 2016
    Inventors: Jacek TYMINSKI, Raluca POPESCU, Tomoyuki MATSUYAMA
  • Patent number: 9286416
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: March 15, 2016
    Assignees: NIKON CORPORATION, NIKON PRECISION INC.
    Inventors: Jacek Tyminski, Raluca Popescu, Tomoyuki Matsuyama
  • Patent number: 9140990
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: September 22, 2015
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Publication number: 20150235077
    Abstract: To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
    Type: Application
    Filed: April 30, 2015
    Publication date: August 20, 2015
    Inventors: Tetsuya YAMAMOTO, Masahiro NEI, Isao TOTSUKA, Tomoyuki MATSUYAMA, Masamitsu YANAGIHARA, Satoshi HAGIWARA, Masakazu SEKIGUCHI
  • Patent number: 9047751
    Abstract: To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: June 2, 2015
    Assignee: NIKON CORPORATION
    Inventors: Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Tomoyuki Matsuyama, Masamitsu Yanagihara, Satoshi Hagiwara, Masakazu Sekiguchi
  • Publication number: 20140028990
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: October 8, 2013
    Publication date: January 30, 2014
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Publication number: 20130321625
    Abstract: Provided is an electronic device capable of controlling an appropriate voice device, the electronic device including: an acquisition device that acquires an image capturing result from at least one image capturing device capable of capturing an image containing a subject person; a control device configured to control a voice device located outside an image capturing region of the image capturing device in accordance with the image capturing result of the image capturing device.
    Type: Application
    Filed: March 21, 2012
    Publication date: December 5, 2013
    Applicant: NIKON CORPORATION
    Inventors: Masamitsu Yanagihara, Tetsuya Yamamoto, Masahiro Nei, Satoshi Hagiwara, Isao Totsuka, Masakazu Sekiguchi, Tomoyuki Matsuyama
  • Publication number: 20130271945
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: June 7, 2013
    Publication date: October 17, 2013
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Publication number: 20130242074
    Abstract: To appropriately guide a subject person while protecting a privacy of the subject person despite use of an captured image of the subject person, a guidance system includes: an image capturing unit capable of capturing an image containing a subject person from a first direction; a detection unit that detects a size of an image of the subject person from the image captured by the image capturing unit; and a guidance unit that provides guidance for the subject person based on a detection result of the detection unit.
    Type: Application
    Filed: October 25, 2011
    Publication date: September 19, 2013
    Applicant: NIKON CORPORATION
    Inventors: Masakazu Sekiguchi, Tetsuya Yamamoto, Masahiro Nei, Masamitsu Yanagihara, Satoshi Hagiwara, Isao Totsuka, Tomoyuki Matsuyama
  • Publication number: 20130242527
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: May 8, 2013
    Publication date: September 19, 2013
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Patent number: 8365107
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns for an integrated circuit is compared against the simulated, corrected reticle design. A determination is made as to whether a difference between the simulated, corrected reticle design and exposure results of the image of the test patterns (?1) is less than a predetermined criteria (?1). The technique further includes completing the model the difference between the simulated, corrected reticle design and the exposure results of the image of the test patterns is less than the predetermined criteria.
    Type: Grant
    Filed: January 16, 2008
    Date of Patent: January 29, 2013
    Assignees: Nikon Corporation, Nikon Precision Inc.
    Inventors: Jacek Tyminski, Raluca Popescu, Tomoyuki Matsuyama