Abstract: According to the invention an electron beam pattern transfer device with an improved alignment means is provided.A first and a second mark M.sub.1, M.sub.2 for alignment purposes are formed on the surface of the wafer and the wafer holder, respectively. The first mark M.sub.1 is formed on the wafer by conventional lithographic technique and the second mark M.sub.2 consists of a hole or a heavy metal, such as Ta or Ta.sub.2 O.sub.5. A third alignment mark M.sub.3 is provided on the photocathode mask having a position corresponding to M.sub.2 on the wafer holder and spaced a known distance L.sub.2 from an imaginary reference position M.sub.4 on the mask. The first step of the alignment process requires the detection of a relative distance L.sub.1 between the first and second marks M.sub.1, M.sub.2 by conventional detecting means, such as an optical measuring means. In the next step, the relative position of the photocathode mask and the wafer holder is adjusted so that the distance between the marks M.sub.

Abstract: An electron-beam image transfer device includes an evacuated vessel having a main chamber and spare chamber extended therefrom and a specimen holder and mask holder disposed in the main chamber. A subchamber is formed near the spare chamber to house a specimen. The specimen in the subchamber is transferred to the spare chamber by a movable support through an opening which is always kept in an airtight state, and then brought to the specimen holder by a transferring mechanism.

Abstract: In a precision rotation mechanism, first and second sections of a rotatable disk member are alternately rotated. The first and second sections are coupled together with an elastic hinge which is provided in the center region of the disk. The first and second sections are also coupled with piezoelectric elements. After the first section is locked by a stopper, the piezoelectric element is elongated in a direction and the piezoelectric element is contracted in a direction, whereby the second section is rotated in a direction. Then, the second section is locked by the stopper and the first section is released from the stopper. In this state, one piezoelectric element is contracted and the other piezoelectric element is elongated so that the first section is rotated.

Abstract: A cassette retaining device comprises a pair of retaining mechanisms disposed respectively on both sides of the top surface of a sample table and pressing respectively on both sides of the top surface of a cassette to hold the cassette in said predetermined position between said retaining mechanisms and the sample table. Each retaining mechanism includes a presser capable of moving between a first position where the presser presses on a side portion of the top surface of the cassette to hold the cassette and a second position where the presser is separated from the top surface of the sample table to allow the cassette to be inserted or removed from between the presser and the sample table, a rocking arm rockable around a first pin relatively to the sample table and bearing the presser so that the presser may rock around a second pin parallel to the first pin, and a spring urging the rocking arm to rock in one direction, thereby locating the presser in the first position.

Abstract: A linear bearing apparatus embodying this invention comprises a pair of mutually facing guide rails provided between two physical bodies reciprocating in the prescribed direction relative to each other; a retainer assembly disposed between the paired guide rails and formed of a plurality of rolling elements and a retainer; a pair of racks fitted to the two physical bodies; a pinion engaged with both racks; and elastic coupling means for elastically connecting the pinion to the retainer assembly and causing the retainer assembly to be shifted for the distance through which the pinion is moved.