Abstract: A substrate processing method in substrate processing apparatus comprises repeating cycle including: supplying source gas into process container causing the source gas to be adsorbed to substrate; exhausting excess source gas from the process container; supplying reaction gas into the process container causing the reaction gas to react with the source gas; and exhausting excess reaction gas, wherein at least one of a gap width between placement stage and member forming processing space between the member and the stage and degree of opening of pressure adjustment valve in at least one of the supplying the source gas and the supplying the reaction gas is smaller than at least one of a gap width between the stage and the member and the degree of opening of the pressure adjustment valve in at least one of the exhausting the excess source gas and the exhausting the excess reaction gas, respectively.

Abstract: A method for producing a gas separation membrane includes a step of leaving a dispersion liquid to stand still, the dispersion liquid being obtained by mixing zeolite microcrystalline bodies formed from MFI zeolite and graphene oxide with pure water, and covering the periphery of the zeolite microcrystalline bodies with the graphene oxide; a step of drying the dispersion liquid after being left to stand to obtain a powder; a step of subjecting the powder to a reduction treatment of the graphene oxide by means of heating; and a step of pressure-forming the powder after the reduction treatment so as to be formed into a membrane form.

Abstract: An apparatus for forming a film on a substrate includes: a processing container in which a reaction gas is supplied to a surface of the substrate; a stage installed in the processing container, configured to place the substrate and including a heater; a lifting shaft connected to an external lifting mechanism via a through port formed in the processing container; a casing installed between the processing container and the lifting mechanism and covering the lifting shaft; a lid member disposed to surround the lifting shaft with a gap interposed between the lifting shaft and the lid member, and installed in the processing container; a purge gas supplier configured to supply a purge gas into the casing; and a guide member disposed at a position facing the gap that opens toward an interior of the processing container and including a guide surface configured to guide the purge gas.

Abstract: A showerhead includes a shower plate, a base member in which a gas flow passage is provided, the base member fixing the shower plate, a plurality of gas supply members disposed in a gas diffusion space and connected to the gas flow passage, the gas diffusion space being formed between the shower plate and the base member, and a flow adjusting plate disposed in the gas diffusion space, the flow adjusting plate being disposed on an outer periphery on an outer side from the plurality of gas supply members.

Abstract: A showerhead includes a shower plate and a base member including a gas flow path, the base member fixing the shower plate. The showerhead includes gas supply members disposed at a gas diffusion space, the gas diffusion space being provided between the shower plate and the base member, the gas supply members being connected to the gas flow path, each of the gas supply members including outlets via which gas is radially discharged, and the gas supply members being arranged such that the gas discharged via the outlets of the gas supply members generates a rotational flow.

Abstract: Provided is a water-purification cartridge to be replaceably accommodated in an accommodating portion of a water purifier. The cartridge includes activated carbon that removes impurities from water, forms, within the water purifier, a raw water flow path through which raw water flows downstream without passing through the activated carbon and a water purification flow path through which raw water flows downstream while passing through the activated carbon, and further includes a buffer portion that is disposed, within the water purifier, at a position upstream of flow path switching valves for selecting discharge from the raw water flow path or discharge from the water purification flow path and downstream of the activated carbon and that cuts off a water hammer propagating from the flow path switching valves to the activated carbon.

Abstract: Provided is a filter unit including conductive filters having permeation holes, a pair of electrodes configured to apply a voltage to the conductive filters, and an insulator configured to prevent a current from flowing between the pair of electrodes.

Abstract: The present disclosure provides a carbon material including a carbon-containing layer having opening parts; and a solid body provided so as to cover the opening parts of the carbon-containing layer, in which the solid body has hole parts communicating with the opening parts.

Abstract: A molecular sieve that has high selectivity and enables high-speed molecular permeation is provided. The molecular sieve has a nanowindow formed lacking a portion of carbon atoms in graphene, and one or more heteroatoms substituting for one or more carbon atoms that constitute a rim of this nanowindow, in which an electrostatic field is induced within the nanowindow by the heteroatoms, the rim of the nanowindow is relaxed in cooperation with a permeating molecule having a van der Waals' radius larger than the nanowindow, and the molecular sieve becomes permeable to the permeating molecule.

Abstract: Water is separated into deuterium-depleted water having a low deuterium concentration and deuterium-enriched water having a high deuterium concentration easily and at low cost. A method for separating water into deuterium-depleted water and deuterium-enriched water, the method including: adsorbing water vapor on an adsorbent including a pore body having pores 6 while supplying water vapor to and allowing the water vapor to pass through the adsorbent for a predetermined period of time; recovering deuterium-enriched water containing a large amount of heavy water 8 from the water vapor not adsorbed on the adsorbent; and then recovering deuterium-depleted water containing a large amount of light water 7 from the water vapor adsorbed on the adsorbent.

Abstract: An aspect of the present disclosure provides a graphene oxide adsorbent having a plurality of layered graphene oxides overlapping each other, an interlayer material disposed between the plurality of layered graphene oxides, and pores composed of the plurality of layered graphene oxides and the interlayer material.

Abstract: A water treatment device includes a tubular member configured to allow water to flow between an inlet on one end side and an outlet on the other end side, and a filter member disposed in the tubular member between the inlet and the outlet. The filter member includes a conductive filter having permeable holes through which water can flow, a pair of electrodes configured to apply a voltage to the conductive filter, and an insulator disposed between the pair of electrodes and configured to insulate between the pair of electrodes.

Abstract: A molecular sieve that has high selectivity and enables high-speed molecular permeation is provided. The molecular sieve has a nanowindow formed lacking a portion of carbon atoms in graphene, and one or more heteroatoms substituting for one or more carbon atoms that constitute a rim of this nanowindow, in which an electrostatic field is induced within the nanowindow by the heteroatoms, the rim of the nanowindow is relaxed in cooperation with a permeating molecule having a van der Waals' radius larger than the nanowindow, and the molecular sieve becomes permeable to the permeating molecule.

Abstract: A substrate processing method in substrate processing apparatus comprises repeating cycle including: supplying source gas into process container causing the source gas to be adsorbed to substrate; exhausting excess source gas from the process container; supplying reaction gas into the process container causing the reaction gas to react with the source gas; and exhausting excess reaction gas, wherein at least one of a gap width between placement stage and member forming processing space between the member and the stage and degree of opening of pressure adjustment valve in at least one of the supplying the source gas and the supplying the reaction gas is smaller than at least one of a gap width between the stage and the member and the degree of opening of the pressure adjustment valve in at least one of the exhausting the excess source gas and the exhausting the excess reaction gas, respectively.

Abstract: The present disclosure describes a method of manufacturing a molded filter body, by which a molded filter body can be produced more easily. A method of manufacturing a molded filter body having a layer of a filtering material includes: forming a layer of a support mixed with a template, on a surface of the layer of the filtering material; and forming water passage holes in the layer of the support by removing the template.

Abstract: According to the present invention, water is separated into deuterium-depleted water and deuterium-concentrated water easily at low cost. Provided is a method for producing deuterium-depleted water by removing heavy water and semi-heavy water from water, the method including: supplying water vapor for a predetermined time period to an adsorbent material 11 obtained by adding to a carbon material one or more of metals belonging to Group 8 to Group 13 of the Periodic Table of Elements as additive metals and causing the water vapor to adsorb while passing through the adsorbent material 11; subsequently bringing protium gas into contact with the adsorbent material 11; and then desorbing and collecting the water vapor that has adsorbed to the adsorbent material 11.

Abstract: Provided is a water-purification cartridge to be replaceably accommodated in an accommodating portion of a water purifier. The cartridge includes activated carbon that removes impurities from water, forms, within the water purifier, a raw water flow path through which raw water flows downstream without passing through the activated carbon and a water purification flow path through which raw water flows downstream while passing through the activated carbon, and further includes a buffer portion that is disposed, within the water purifier, at a position upstream of flow path switching valves for selecting discharge from the raw water flow path or discharge from the water purification flow path and downstream of the activated carbon and that cuts off a water hammer propagating from the flow path switching valves to the activated carbon.

Abstract: Provided is a water-purification cartridge to be replaceably accommodated in an accommodating portion of a water purifier. The cartridge includes activated carbon that removes impurities from water, forms, within the water purifier, a raw water flow path through which raw water flows downstream without passing through the activated carbon and a water purification flow path through which raw water flows downstream while passing through the activated carbon, and further includes a buffer portion that is disposed, within the water purifier, at a position upstream of flow path switching valves for selecting discharge from the raw water flow path or discharge from the water purification flow path and downstream of the activated carbon and that cuts off a water hammer propagating from the flow path switching valves to the activated carbon.

Abstract: A film forming apparatus includes a mounting table mounting a substrate thereon, a gas diffusion unit above the mounting table, gas dispersion units above the gas diffusion unit, and an evacuation unit to evacuate a processing chamber. The gas diffusion unit has gas injection holes for injecting a gas in a shower shape. Outermost gas injection holes are arranged outward of an outer circumference of the substrate when seen from the top. The gas dispersion units face the gas diffusion unit through a diffusion space therebetween. Each of the gas dispersion units has gas discharge holes formed along a circumferential direction thereof to disperse a gas horizontally into the diffusion space. The gas dispersion units include at least three first gas dispersion units along a first circle, and at least three second gas dispersion units along a second circle concentrically disposed at an outer side of the first circle.

Abstract: An object is to form a hole having a desired size accurately and uniformly in a carbon nanomaterial used for a filter or the like, such as a graphene, a carbon nanotube, or a carbon nanohorn. Provided is a method for perforating a carbon nanomaterial for forming a hole having a desired size in a carbon nanomaterial, characterized in that the carbon nanomaterial is heated and held at a low temperature in the air containing oxygen of 160 to 250° C. for a predetermined time and that a hole having a desired size is thereby formed uniformly in the carbon nanomaterial by controlling a length of heating time.