Abstract: The present invention is a film deposition apparatus configured to deposit a film on a substrate that has been loaded into a vacuum container via a transfer opening and placed on a table in the vacuum container, by supplying a process gas to the substrate from a process-gas supply part opposed to the table under a vacuum atmosphere, while heating a table surface of the table, the film deposition apparatus comprising: an elevating mechanism configured to vertically move the table between a process position at which the substrate is subjected to a film deposition process, and a transfer position at which the substrate is transferred to and from an external transfer mechanism that has entered from the transfer opening; a surrounding part configured to surround the table with a gap therebetween, when the table is located at the process position, so that the surrounding part and the table divide an inside of the vacuum container into an upper space, which is located above the table, and a lower space, which is loc

Abstract: An optical module with an arrangement is disclosed in which the module has the LD, the TEC, and the lens with the lens carrier also mounted on the TEC. The signal light from the LD is concentrated by the lens and reflected by the mirror each assembled with the lens carrier mounted on the TEC. The TEC is mounted on the bottom metal that covers the bottom of the ceramic package, the first layer of which is widely cut to set the TEC therein. The FPC is coupled in at least two edges of the first ceramic layer left from the cut.

Abstract: A method to manufacture an optical module is disclosed, wherein the optical module has an optically active device on a lead frame and a lens co-molded with the active device and the lead frame by a transparent resin as positioning the lens with respect to the lead frame. The molding die of the present invention has a positioning pin to support the lens during the molding. Because the lead frame is aligned with the molding die, the precise alignment between the active device on the lead frame and the lens is not spoiled during the molding.

Abstract: An optical module is disclosed where an optical coupling efficiency between an optical device and an external fiber may be improved. The optical module includes an optical receptacle and a device unit assembled with the optical receptacle only via a stub as forming a gap to isolate these two components. The gap is filled with insulating resin or tightly covered by an insulating ring to reinforce the stub to be hard for an increased moment by the optical assemblies in the device unit.

Abstract: It is expected to provide an optical communication module that does not require making a conductive plate, such as a leadframe, become thinner in response to the downsizing of the photoelectric conversion device, such as a laser diode or a photodiode, and does not require downsizing a lens. A laser diode is connected and fixed to a conductive plate on the top surface of a transparent light-passing board. The light-passing board is connected and fixed to a conductive plate on the top surface of a transparent base. A first lens and a second lens are integrally formed on the top and the bottom surfaces of the base, respectively. The laser diode performs transmission of optical signals through the gap of conductive plate, the transparent light-passing board, the opening portion of a conductive plate, the opening portion of conductive plate, the first lens, the transparent base and the second lens.

Abstract: A method of processing a substrate by a substrate processing apparatus is disclosed. The substrate processing apparatus includes a processing container including a first space where a first processing gas or a second processing gas is supplied onto the substrate and a second space formed around the first space; a first exhaust unit configured to evacuate the first space; and a second exhaust unit configured to evacuate the second space. The method includes a first step of supplying the first processing gas into the first space; a second step of discharging the first processing gas from the first space; a third step of supplying the second processing gas into the first space; and a fourth step of discharging the second processing gas from the first space; wherein the pressure in the second space is adjusted by a pressure-adjusting gas supplied into the second space.

Abstract: A system for editing sheet metal components using a computer, comprising a sheet metal object having graphic element data defining the graphic elements of a sheet metal and connection data defining face data comprising graphic elements and linkage of the faces, wherein the sheet metal object includes a sheet metal edition object corresponding to editing of a sheet metal, e.g., editing of butting or lapping of sheets, and the burden is lessened by automating reformation at the butting or lapping part of the sheet metals.

Abstract: An optical module with an arrangement is disclosed in which the module has the LD, the TEC, and the lens with the lens carrier also mounted on the TEC. The signal light from the LD is concentrated by the lens and reflected by the mirror each assembled with the lens carrier mounted on the TEC. The TEC is mounted on the bottom metal that covers the bottom of the ceramic package, the first layer of which is widely cut to set the TEC therein. The FPC is coupled in at least two edges of the first ceramic layer left from the cut.

Abstract: The present invention is a film deposition apparatus configured to deposit a film on a substrate that has been loaded into a vacuum container via a transfer opening and placed on a table in the vacuum container, by supplying a process gas to the substrate from a process-gas supply part opposed to the table under a vacuum atmosphere, while heating a table surface of the table, the film deposition apparatus comprising: an elevating mechanism configured to vertically move the table between a process position at which the substrate is subjected to a film deposition process, and a transfer position at which the substrate is transferred to and from an external transfer mechanism that has entered from the transfer opening; a surrounding part configured to surround the table with a gap therebetween, when the table is located at the process position, so that the surrounding part and the table divide an inside of the vacuum container into an upper space, which is located above the table, and a lower space, which is loc

Abstract: A film forming apparatus includes a processing chamber, and a mounting table disposed in the processing chamber to mount a substrate thereon. The film forming apparatus further includes a gas shower head having gas supply holes and including a central region facing a central portion of the substrate and a peripheral region facing a peripheral portion of the substrate, a first processing gas supply unit for supplying a first processing gas to the central region, a second processing gas supply unit for supplying a second processing gas to the central region, an energy supply unit for supplying energy to react the first processing gas with the second processing gas on the substrate, and a purge gas supply unit for supplying a purge gas to the central region and the peripheral region when one of the first and the second processing gas is switched by the other.

Abstract: A method of processing a substrate by a substrate processing apparatus is disclosed. The substrate processing apparatus includes a processing container including a first space where a first processing gas or a second processing gas is supplied onto the substrate and a second space formed around the first space; a first exhaust unit configured to evacuate the first space; and a second exhaust unit configured to evacuate the second space. The method includes a first step of supplying the first processing gas into the first space; a second step of discharging the first processing gas from the first space; a third step of supplying the second processing gas into the first space; and a fourth step of discharging the second processing gas from the first space; wherein the pressure in the second space is adjusted by a pressure-adjusting gas supplied into the second space.

Abstract: A shower head structure disposed in a device 2 for processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower head 12 having a plurality of gas injection holes 20B for supplying the processing gas and a light introducing rod 68 of a radiation thermometer 66 inserted into at least one of the gas injection holes 20B.

Abstract: A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.

Abstract: A shower head structure disposed in a device 2 for processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower head 12 having a plurality of gas injection holes 20B for supplying the processing gas and a light introducing rod 68 of a radiation thermometer 66 inserted into at least one of the gas injection holes 20B.

Abstract: A structure for automatic cleaning of a water quality purification cartridge includes a water quality purification cartridge having a water purification flow path and a raw water flow path. An upstream side surface of the water quality purification cartridge is cleaned by raw water flowing through the raw water flow path.

Abstract: A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.

Abstract: An optical module capable of suppressing an increase in the number of the components and the complexity of the structure is provided. The optical module has a box package, and a cylindrical sleeve portion extending from a front wall of the package. This sleeve portion has a lens holder holding a lens. The lens holder and the front wall of the package are connected by projection-welding.

Abstract: The object of the present invention is to provide an optical module for the WDM communication system, in which the oscillation wavelength is on the grid of the WDM regulation, moreover the optical output power and the oscillation wavelength can be controlled independently. The present module comprises a semiconductor light-emitting device, a wedge shaped etalon device and two light-receiving devices. The etalon device contains a first portion, on which the anti-reflection films are coated, and a second portion. One of the receiving devices detects light transmitted through the first portion of the etalon device, while the other device detects light through the second portion. Signal from the former device controls the output power of the light-emitting device, while the signal from the latter receiving device controls the oscillation wavelength of the laser.

Abstract: One object of the present invention is to provide a new arrangement for an optical module that enables to align the optical fiber with the semiconductor optical device in active alignment technique. The optical module of the present invention includes a container, a base and a ferrule assembly. The ferrule assembly integrates the optical fiber, the ferrule and the holder, in which the ferrule secures the optical fiber in a center thereof and the holder having a V-groove secures the ferrule in the V-groove. The container has a depression, one end of which is opened, for receiving the ferrule therein. The semiconductor optical device is mounted on a region opposite to the open of the depression of the container. Both sides of the depression are regions on a primary surface of the container, and, when the holder is placed on these two regions, the ferrule is set within the depression with gaps against side surfaces of the depression.

Abstract: A shower head for purifying water includes a filter cartridge positioned within in a holding part, a purified water flow path passing through a purification material and a raw water flow path not passing through the purification material. A flow path switching valve switching between the purified and raw water flow paths is incorporated in a head part. A delivery flow switching valve positioned downstream of the flow path switching valve switches between a straight delivery port and a shower delivery port. The valves are controlled independently of each other. A germicidal ceramic and/or sintered magnetic body is installed in the flow path between the valves.