Abstract: An input device and an electronic apparatus using such an input device capable of providing visual amusement at the time of operating thereof and allowing the down sizing and thinning are provided. The input device has a reversible chromatic layer exhibiting color change in response to temperature change, and a sheet-type input portion laminated on the reversible chromatic layer and activates ON operation upon being pressed.

Abstract: An organic electroluminescence device in which device sealing is facilitated and in which a display employing the device as a light emitting device may be increased in size. The organic electroluminescence device includes a transparent substrate, an electrode film, a transparent electrode film, a first insulating film having an opening, an organic electroluminescence light emitting film, a metal electrode film and a second insulating film. The first and second insulating films exhibit gas barrier characteristics. The opening is tapered so that its opening degree is increased in a direction away from the transparent electrode film side. The transparent electrode film is electrically connected via electrode film to a first electrode formed on the second insulating film as it is passed through the first and second insulating films to be exposed on the second insulating film.

Abstract: In order to provide a vapor deposition method for forming an organic thin film, which is advantageous in that a deposition rate can be easily controlled and deposition can be conducted with stable high controllability, there is prepared a crucible which is provided with an opening portion at an upper portion of the body, and a projection in a cone shape on an inner bottom surface of the crucible so as to be opposite to the opening portion. When the crucible is irradiated with an infrared light from the bottom side of the crucible, the light in one region among the infrared light transmits the bottom of the crucible and is then radiated to an organic material contained in the crucible. Therefore, the organic material is heated and vaporized at a desired temperature in the range of about 100 to 400° C. by controlling the irradiation dose of the infrared light.

Abstract: In order to provide a vapor deposition method for forming an organic thin film, which is advantageous in that a deposition rate can be easily controlled and deposition can be conducted with stable high controllability, there is prepared a crucible which is provided with an opening portion at an upper portion of the body, and a projection in a cone shape on an inner bottom surface of the crucible so as to be opposite to the opening portion. When the crucible is irradiated with an infrared light from the bottom side of the crucible, the light in one region among the infrared light transmits the bottom of the crucible and is then radiated to an organic material contained in the crucible. Therefore, the organic material is heated and vaporized at a desired temperature in the range of about 100 to 400° C. by controlling the irradiation dose of the infrared light.

Abstract: In order to provide a vapor deposition method for forming an organic thin film, which is advantageous in that a deposition rate can be easily controlled and deposition can be conducted with stable high controllability, there is prepared a crucible which is provided with an opening portion at an upper portion of the body, and a projection in a cone shape on an inner bottom surface of the crucible so as to be opposite to the opening portion. When the crucible is irradiated with an infrared light from the bottom side of the crucible, the light in one region among the infrared light transmits the bottom of the crucible and is then radiated to an organic material contained in the crucible. Therefore, the organic material is heated and vaporized at a desired temperature in the range of about 100 to 400° C. by controlling the irradiation dose of the infrared light.

Abstract: A display apparatus which enables the display screen to be increased in size. The display apparatus includes a panel substrate operating as a display screen, plural display devices arranged in a matrix on the panel substrate, and a drive circuit substrate having a drive circuit for driving each display device. The panel substrate is subdivided into plural areas by driving wiring adapted for driving the display devices, and a plurality of the drive circuit substrates are provided in association with the respective areas.

Abstract: An organic electroluminescence device in which device sealing is facilitated and in which a display employing the device as a light emitting device may be increased in size. The organic electroluminescence device includes a transparent substrate, an electrode film, a transparent electrode film, a first insulating film having an opening, an organic electroluminescence light emitting film, a metal electrode film and a second insulating film. The first and second insulating films exhibit gas barrier characteristics. The opening is tapered so that its opening degree is increased in a direction away from the transparent electrode film side. The transparent electrode film is electrically connected via electrode film to a first electrode formed on the second insulating film as it is passed through the first and second insulating films to be exposed on the second insulating film.

Abstract: The present invention provides a method for plasma control, in which an electric field is generated in the direction perpendicular to the surface of an object to be processed in plasma atmosphere generated in a processing chamber and another electric field is generated in the direction parallel to the surface, and the direction of ion or electron in plasma atmosphere is controlled by controlling the composite electric field composed of both the electric fields. The invention provides also an apparatus for plasma control provided with a perpendicular electric field generating means for generating an electric field in the direction perpendicular to the surface of the object, and a parallel electric field generating means for generating an electric field in the direction parallel to the surface of the object.

Abstract: According to the present invention, when power is supplied from a high frequency power supply to an antenna 14, a quasi-electrostatic induced electric field E.sub.PS is generated in a chamber 11, and plasma P of high density is generated over a broad area. Further, an alternating current (frequency: several tens Hz to several tens KHz) flows in polyphase AC magnets 17 by a polyphase AC inverter power supply, whereby a horizontal magnetic field (magnetic flux density B) is generated on a semiconductor wafer 13. The magnetic field thus generated rotates at the rotational number corresponding to the frequency which is set in the polyphase AC inverter power supply, and the rotation of the magnetic field causes a rotating electric field E to occur on the surface of the semiconductor wafer 13. In a surface area of the semiconductor wafer 13, an electric field E.sub.V (plasma sheath electric field E.sub.sheath) is generated in the vertical direction while an electric field E.sub.

Abstract: The present invention provides a method for plasma control, in which an electric field is generated in the direction perpendicular to the surface of an object to be processed in plasma atmosphere generated in a processing chamber and another electric field is generated in the direction parallel to the surface, and the direction of ion or electron in plasma atmosphere is controlled by controlling the composite electric field composed of both the electric fields. The invention provides also an apparatus for plasma control provided with a perpendicular electric field generating means for generating an electric field in the direction perpendicular to the surface of the object, and a parallel electric field generating means for generating an electric field in the direction parallel to the surface of the object.