Patents by Inventor Tsuneyuki Okabe

Tsuneyuki Okabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid control apparatus
    Patent number: 6382238
    Abstract: Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting element 50 is removable upward.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: May 7, 2002
    Assignees: Tokyo Electron Limited, Fujikin Incorporated
    Inventors: Ken Ishii, Tsuneyuki Okabe, Yuji Kawano, Michio Yamaji
  • Fluid control device
    Publication number: 20020031417
    Abstract: Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.
    Type: Application
    Filed: June 29, 2001
    Publication date: March 14, 2002
    Inventors: George Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
  • Fluid control apparatus
    Publication number: 20010020488
    Abstract: Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting means 50 is removable upward.
    Type: Application
    Filed: March 9, 2001
    Publication date: September 13, 2001
    Applicant: Tokyo Electron Limited
    Inventors: Ken Ishii, Tsuneyuki Okabe, Yuji Kawano, Michio Yamaji