Patents by Inventor Tsung-Chieh Tsai
Tsung-Chieh Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190244950Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.Type: ApplicationFiled: April 22, 2019Publication date: August 8, 2019Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Patent number: 10366900Abstract: In a method for manufacturing a semiconductor device, a first dielectric layer is formed over an underlying structure disposed on a substrate. A planarization resistance layer is formed over the first dielectric layer. A second dielectric layer is formed over the first dielectric layer and the planarization resistance layer. A planarization operation is performed on the second dielectric layer, the planarization resistance layer and the first dielectric layer. The planarization resistance film is made of a material different from the first dielectric layer.Type: GrantFiled: March 25, 2016Date of Patent: July 30, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Juing-Yi Wu, Liang-Yao Lee, Tsung-Chieh Tsai
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Patent number: 10325849Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip has a plurality of gate structures arranged over a substrate. A plurality of first MOL (middle-of-line) structures are arranged at a first pitch over the substrate at locations interleaved between the plurality of gate structures. The plurality of first MOL structures connect active regions within the substrate to an overlying metal interconnect layer. A plurality of second MOL structures are arranged at a second pitch over the plurality of gate structures at locations interleaved between the plurality of first MOL structures. The plurality of second MOL structures connect the plurality of gate structures to the metal interconnect layer. The second pitch is different than the first pitch. The different pitches avoid misalignment errors between the plurality of gate structures and the metal interconnect layer.Type: GrantFiled: February 5, 2016Date of Patent: June 18, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Liang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee
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Patent number: 10283495Abstract: A semiconductor device includes two elongated active regions that include source/drain regions for multiple transistor devices, a first contact layer that includes an electrical connection between the two active regions, a second contact layer that includes a connection between two gate lines, and a gate contact layer that provides connections to the gate lines.Type: GrantFiled: April 1, 2016Date of Patent: May 7, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ru-Gun Liu, Chun-Yi Lee, Jyh-Kang Ting, Juing-Yi Wu, Liang-Yao Lee, Tung-Heng Hsieh, Tsung-Chieh Tsai
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Patent number: 10269785Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.Type: GrantFiled: September 30, 2016Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Publication number: 20180253522Abstract: A post placement abutment treatment for cell row design is provided. In an embodiment a first cell and a second cell are placed in a first cell row and a third cell and a fourth cell are placed into a second cell row. After placement vias connecting power and ground rails to the underlying structures are analyzed to determine if any can be merged or else removed completely. By merging and removing the closely placed vias, the physical limitations of photolithography may be by-passed, allowing for smaller structures to be formed.Type: ApplicationFiled: May 4, 2018Publication date: September 6, 2018Inventors: Tung-Heng Hsieh, Sheng-Hsiung Wang, Hui-Zhong Zhuang, Yu-Cheng Yeh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Patent number: 9991158Abstract: A semiconductor device includes a substrate having an active area, a gate structure over the active area, a lower conductive layer over and electrically coupled to the active area, and an upper conductive layer over and electrically coupled to the lower conductive layer. The lower conductive layer is at least partially co-elevational with the gate structure. The lower conductive layer includes first and second conductive segments spaced from each other. The upper conductive layer includes a third conductive segment overlapping the first and second conductive segments. The third conductive segment is electrically coupled to the first conductive segment, and electrically isolated from the second conductive segment.Type: GrantFiled: September 12, 2014Date of Patent: June 5, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tung-Heng Hsieh, Hui-Zhong Zhuang, Chung-Te Lin, Sheng-Hsiung Wang, Ting-Wei Chiang, Li-Chun Tien, Tsung-Chieh Tsai
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Patent number: 9984191Abstract: A post placement abutment treatment for cell row design is provided. In an embodiment a first cell and a second cell are placed in a first cell row and a third cell and a fourth cell are placed into a second cell row. After placement vias connecting power and ground rails to the underlying structures are analyzed to determine if any can be merged or else removed completely. By merging and removing the closely placed vias, the physical limitations of photolithography may be by-passed, allowing for smaller structures to be formed.Type: GrantFiled: August 29, 2014Date of Patent: May 29, 2018Assignee: Taiwan Semiconductor Manufacturing CompanyInventors: Tung-Heng Hsieh, Sheng-Hsiung Wang, Hui-Zhong Zhuang, Yu-Cheng Yeh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Publication number: 20170278717Abstract: In a method for manufacturing a semiconductor device, a first dielectric layer is formed over an underlying structure disposed on a substrate. A planarization resistance layer is formed over the first dielectric layer. A second dielectric layer is formed over the first dielectric layer and the planarization resistance layer. A planarization operation is performed on the second dielectric layer, the planarization resistance layer and the first dielectric layer. The planarization resistance film is made of a material different from the first dielectric layer.Type: ApplicationFiled: March 25, 2016Publication date: September 28, 2017Inventors: Juing-Yi WU, Liang-Yao LEE, Tsung-Chieh TSAI
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Patent number: 9746783Abstract: A method for ameliorating corner rounding effects in a photolithographic process is provided. A semiconductor workpiece having an active device region is provided, and a photoresist layer is formed over the semiconductor workpiece. A mask is provided for patterning for the photoresist layer, wherein the mask comprises pattern having a sharp corner associated with the active device region. The sharp corner is separated from the active device region by a first distance in a first direction and a second distance in a second direction, wherein the first distance meets a minimum criteria for the photolithographic process, and wherein the second distance is greater than the first distance. The photoresist layer is then exposed to a radiation source, and the radiation source patterns the photoresist layer through the mask, defining an exposure region on the semiconductor workpiece having a rounded corner associated with the sharp corner.Type: GrantFiled: August 15, 2013Date of Patent: August 29, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Liang-Yao Lee, Jyh-Kang Ting, Tsung-Chieh Tsai, Juing-Yi Wu
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Patent number: 9637818Abstract: Among other things, one or more systems and techniques for defining one or more implant regions or for doping a semiconductor arrangement are provided. A first implant region is defined based upon a first implant mask overlaying a first active region of a semiconductor arrangement. A second implant region is defined based upon the first implant mask and a second implant mask overlaying a second active region of the semiconductor arrangement. A third implant region is defined based upon the second implant mask overlaying a third active region of the semiconductor arrangement. One or more doping processes are performed through the first implant mask and the second implant mask to dope the semiconductor arrangement. Because the first implant mask and the second implant mask overlap the second active region, doping area coverage is improved thus mitigating undesirable voltage threshold variations otherwise resulting from inadequate doping area coverage.Type: GrantFiled: July 20, 2015Date of Patent: May 2, 2017Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Juing-Yi Wu, Jyh-Kang Ting, Tsung-Chieh Tsai, Liang-Yao Lee
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Publication number: 20170025401Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.Type: ApplicationFiled: September 30, 2016Publication date: January 26, 2017Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Patent number: 9508791Abstract: A semiconductor device comprises a non-conductive gate feature over a substrate, and a metal gate electrode over the substrate. The metal gate electrode comprises a portion over an active region of the substrate, and a portion over an isolation feature of the substrate ending at an end cap. A vertical profile of the metal gate electrode at the end cap matches a vertical profile of the metal gate electrode in the portion over the active region.Type: GrantFiled: January 7, 2016Date of Patent: November 29, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tsung-Chieh Tsai, Yung-Che Albert Shih, Jyh-Kang Ting, Juing-Yi Wu, Liang-Yao Lee
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Patent number: 9472501Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.Type: GrantFiled: July 28, 2015Date of Patent: October 18, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
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Publication number: 20160293590Abstract: A semiconductor device includes two elongated active regions that include source/drain regions for multiple transistor devices, a first contact layer that includes an electrical connection between the two active regions, a second contact layer that includes a connection between two gate lines, and a gate contact layer that provides connections to the gate lines.Type: ApplicationFiled: April 1, 2016Publication date: October 6, 2016Inventors: Ru-Gun Liu, Chun-Yi Lee, Jyh-Kang Ting, Juing-Yi Wu, Liang-Yao Lee, Tung-Heng Hsieh, Tsung-Chieh Tsai
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Patent number: 9437434Abstract: A semiconductor device includes an inter-layer dielectric (ILD) layer over a substrate; and a first gate feature in the ILD layer, the first gate feature comprising a first gate material and having a first resistance, wherein the first gate material comprises a first conductive material. The semiconductor device further includes a second gate feature in the ILD layer, the second gate feature comprising a second gate material and having a second resistance higher than the first resistance, wherein the second material comprises at least 50% by volume silicon oxide.Type: GrantFiled: March 20, 2014Date of Patent: September 6, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming-Hsi Yeh, Tsung-Chieh Tsai, Chun-Yi Lee
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Patent number: 9391056Abstract: A method for mask optimization, the method including moving any features of a gate contact mask that are in violation of a spacing rule to a second layer contact mask, splitting an elongated feature of the second layer mask that is too close to a feature moved to the second layer mask from the gate contact mask, and connecting two split features of a first layer contact mask, the split features corresponding to the elongated feature of the second layer mask.Type: GrantFiled: August 16, 2013Date of Patent: July 12, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting, Chun-Yi Lee
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Publication number: 20160155704Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip has a plurality of gate structures arranged over a substrate. A plurality of first MOL (middle-of-line) structures are arranged at a first pitch over the substrate at locations interleaved between the plurality of gate structures. The plurality of first MOL structures connect active regions within the substrate to an overlying metal interconnect layer. A plurality of second MOL structures are arranged at a second pitch over the plurality of gate structures at locations interleaved between the plurality of first MOL structures. The plurality of second MOL structures connect the plurality of gate structures to the metal interconnect layer. The second pitch is different than the first pitch. The different pitches avoid misalignment errors between the plurality of gate structures and the metal interconnect layer.Type: ApplicationFiled: February 5, 2016Publication date: June 2, 2016Inventors: Liang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee
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Publication number: 20160133693Abstract: A semiconductor device comprises a non-conductive gate feature over a substrate, and a metal gate electrode over the substrate. The metal gate electrode comprises a portion over an active region of the substrate, and a portion over an isolation feature of the substrate ending at an end cap. A vertical profile of the metal gate electrode at the end cap matches a vertical profile of the metal gate electrode in the portion over the active region.Type: ApplicationFiled: January 7, 2016Publication date: May 12, 2016Inventors: Tsung-Chieh Tsai, Yung-Che Albert Shih, Jyh-Kang Ting, Juing-Yi Wu, Liang-Yao Lee
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Patent number: 9292649Abstract: The present disclosure relates to a method of generating a scaled integrated chip design by scaling a FEOL and a BEOL of an original IC design at different scaling ratios, and an associated apparatus. In some embodiments, the method is performed by forming an original integrated chip (IC) design that is a graphical representation of an integrated chip. The original IC design has a front-end-of-the-line (FEOL) section, a back-end-of-the-line (BEOL) section, and a middle-of-the-line (MOL) section that is disposed between the FEOL and BEOL sections. A scaled integrated chip design is formed by scaling (i.e., shrinking) the FEOL section and the BEOL section of the original integrated chip design at different scaling ratios, and by scaling different design layers within the MOL section at different scaling ratios to avoid misalignment errors between the FEOL section and the BEOL section.Type: GrantFiled: November 18, 2013Date of Patent: March 22, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Liang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee