Patents by Inventor Tsung-Chieh Tsai

Tsung-Chieh Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160079162
    Abstract: A semiconductor device includes a substrate having an active area, a gate structure over the active area, a lower conductive layer over and electrically coupled to the active area, and an upper conductive layer over and electrically coupled to the lower conductive layer. The lower conductive layer is at least partially co-elevational with the gate structure. The lower conductive layer includes first and second conductive segments spaced from each other. The upper conductive layer includes a third conductive segment overlapping the first and second conductive segments. The third conductive segment is electrically coupled to the first conductive segment, and electrically isolated from the second conductive segment.
    Type: Application
    Filed: September 12, 2014
    Publication date: March 17, 2016
    Inventors: Tung-Heng HSIEH, Hui-Zhong ZHUANG, Chung-Te LIN, Sheng-Hsiung WANG, Ting-Wei CHIANG, Li-Chun TIEN, Tsung-Chieh TSAI
  • Publication number: 20160063166
    Abstract: A post placement abutment treatment for cell row design is provided. In an embodiment a first cell and a second cell are placed in a first cell row and a third cell and a fourth cell are placed into a second cell row. After placement vias connecting power and ground rails to the underlying structures are analyzed to determine if any can be merged or else removed completely. By merging and removing the closely placed vias, the physical limitations of photolithography may be by-passed, allowing for smaller structures to be formed.
    Type: Application
    Filed: August 29, 2014
    Publication date: March 3, 2016
    Inventors: Tung-Heng Hsieh, Sheng-Hsiung Wang, Hui-Zhong Zhuang, Yu-Cheng Yeh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Patent number: 9236379
    Abstract: A method of fabricating a semiconductor device includes forming a first metal gate electrode over a substrate, forming a second metal gate electrode over the substrate, removing at least a part of the first metal gate electrode to form a first opening, and filling the first opening with a non-conductive material.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: January 12, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Chieh Tsai, Yung-Che Albert Shih, Jhy-Kang Ting
  • Patent number: 9230962
    Abstract: A semiconductor device includes a non-conductive gate feature over a substrate and a spacer adjoining each sidewall of the non-conductive gate feature.
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: January 5, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Chieh Tsai, Yung-Che Albert Shih, Jhy-Kang Ting
  • Publication number: 20150333002
    Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.
    Type: Application
    Filed: July 28, 2015
    Publication date: November 19, 2015
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Publication number: 20150322565
    Abstract: Among other things, one or more systems and techniques for defining one or more implant regions or for doping a semiconductor arrangement are provided. A first implant region is defined based upon a first implant mask overlaying a first active region of a semiconductor arrangement. A second implant region is defined based upon the first implant mask and a second implant mask overlaying a second active region of the semiconductor arrangement. A third implant region is defined based upon the second implant mask overlaying a third active region of the semiconductor arrangement. One or more doping processes are performed through the first implant mask and the second implant mask to dope the semiconductor arrangement. Because the first implant mask and the second implant mask overlap the second active region, doping area coverage is improved thus mitigating undesirable voltage threshold variations otherwise resulting from inadequate doping area coverage.
    Type: Application
    Filed: July 20, 2015
    Publication date: November 12, 2015
    Inventors: Juing-Yi Wu, Jyh-Kang Ting, Tsung-Chieh Tsai, Liang-Yao Lee
  • Publication number: 20150318367
    Abstract: Methods of forming a semiconductor structure and the semiconductor structure are disclosed. In one embodiment, a semiconductor structure includes a substrate having a first active region, a second active region, and an insulating region separating the first and the second active regions. The structure further includes a vertical gate structure extending over the first and the second active regions and the insulating region, and a horizontal gate structure extending over the insulating region between the first and the second active regions.
    Type: Application
    Filed: June 26, 2015
    Publication date: November 5, 2015
    Inventors: Harry Hak-Lay Chuang, Bao-Ru Young, Kuei Shun Chen, Cheng-Cheng Kuo, Chia-Chu Liu, Tsung-Chieh Tsai, Yuh-Jier Mii
  • Patent number: 9136168
    Abstract: A method includes placing two conductive lines in a layout. Two cut lines are placed over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: September 15, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Patent number: 9087773
    Abstract: Among other things, one or more systems and techniques for defining one or more implant regions or for doping a semiconductor arrangement are provided. A first implant region is defined based upon a first implant mask overlaying a first active region of a semiconductor arrangement. A second implant region is defined based upon the first implant mask and a second implant mask overlaying a second active region of the semiconductor arrangement. A third implant region is defined based upon the second implant mask overlaying a third active region of the semiconductor arrangement. One or more doping processes are performed through the first implant mask and the second implant mask to dope the semiconductor arrangement. Because the first implant mask and the second implant mask overlap the second active region, doping area coverage is improved thus mitigating undesirable voltage threshold variations otherwise resulting from inadequate doping area coverage.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: July 21, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Juing-Yi Wu, Jyh-Kang Ting, Tsung-Chieh Tsai, Liang-Yao Lee
  • Patent number: 9070623
    Abstract: Methods of forming a semiconductor structure and the semiconductor structure are disclosed. In one embodiment, a method includes forming a gate dielectric layer over a substrate, forming a gate electrode layer over the gate dielectric layer, and etching the gate electrode layer and the gate dielectric layer to form a horizontal gate structure and a vertical gate structure, wherein the horizontal gate structure and the vertical gate structure are connected by an interconnection portion. The method further includes forming a photoresist covering the horizontal gate structure and the vertical gate structure, with the photoresist having a gap exposing the interconnection portion between the horizontal gate structure and the vertical gate structure, and then etching the interconnection portion.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: June 30, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry-Hak-Lay Chuang, Bao-Ru Young, Kuei Shun Chen, Cheng Cheng Kuo, George Liu, Tsung-Chieh Tsai, Yuhi-Jier Mii
  • Patent number: 9047437
    Abstract: Provided is a system and method for designing the layout of integrated circuits or other semiconductor devices while directly accessing design rules and a library of design features by interfacing with a GUI upon which the design layout is displayed. The design rules may be directly linked to the design features of the pattern library and imported into the device layout. The design rules may be directly accessed while designing the layout or while conducting a design rule check and the design features from the pattern library may be used in creating the layout.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-An Chen, Pei-Tzu Wu, Tsung-Chieh Tsai, Juing-Yi Wu, Jyh-Kang Ting
  • Publication number: 20150143319
    Abstract: The present disclosure relates to a method of generating a scaled integrated chip design by scaling a FEOL and a BEOL of an original IC design at different scaling ratios, and an associated apparatus. In some embodiments, the method is performed by forming an original integrated chip (IC) design that is a graphical representation of an integrated chip. The original IC design has a front-end-of-the-line (FEOL) section, a back-end-of-the-line (BEOL) section, and a middle-of-the-line (MOL) section that is disposed between the FEOL and BEOL sections. A scaled integrated chip design is formed by scaling (i.e., shrinking) the FEOL section and the BEOL section of the original integrated chip design at different scaling ratios, and by scaling different design layers within the MOL section at different scaling ratios to avoid misalignment errors between the FEOL section and the BEOL section.
    Type: Application
    Filed: November 18, 2013
    Publication date: May 21, 2015
    Applicant: Taiwan Semicondutor Manufacturing Co., Ltd.
    Inventors: Liang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee
  • Publication number: 20150072480
    Abstract: Among other things, one or more systems and techniques for defining one or more implant regions or for doping a semiconductor arrangement are provided. A first implant region is defined based upon a first implant mask overlaying a first active region of a semiconductor arrangement. A second implant region is defined based upon the first implant mask and a second implant mask overlaying a second active region of the semiconductor arrangement. A third implant region is defined based upon the second implant mask overlaying a third active region of the semiconductor arrangement. One or more doping processes are performed through the first implant mask and the second implant mask to dope the semiconductor arrangement. Because the first implant mask and the second implant mask overlap the second active region, doping area coverage is improved thus mitigating undesirable voltage threshold variations otherwise resulting from inadequate doping area coverage.
    Type: Application
    Filed: September 11, 2013
    Publication date: March 12, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Juing-Yi Wu, Jyh-Kang Ting, Tsung-Chieh Tsai, Liang-Yao Lee
  • Publication number: 20150050810
    Abstract: A method for ameliorating corner rounding effects in a photolithographic process is provided. A semiconductor workpiece having an active device region is provided, and a photoresist layer is formed over the semiconductor workpiece. A mask is provided for patterning for the photoresist layer, wherein the mask comprises pattern having a sharp corner associated with the active device region. The sharp corner is separated from the active device region by a first distance in a first direction and a second distance in a second direction, wherein the first distance meets a minimum criteria for the photolithographic process, and wherein the second distance is greater than the first distance. The photoresist layer is then exposed to a radiation source, and the radiation source patterns the photoresist layer through the mask, defining an exposure region on the semiconductor workpiece having a rounded corner associated with the sharp corner.
    Type: Application
    Filed: August 15, 2013
    Publication date: February 19, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Liang-Yao Lee, Jyh-Kang Ting, Tsung-Chieh Tsai, Juing-Yu Wu
  • Publication number: 20150048457
    Abstract: A method for mask optimization, the method including moving any features of a gate contact mask that are in violation of a spacing rule to a second layer contact mask, splitting an elongated feature of the second layer mask that is too close to a feature moved to the second layer mask from the gate contact mask, and connecting two split features of a first layer contact mask, the split features corresponding to the elongated feature of the second layer mask.
    Type: Application
    Filed: August 16, 2013
    Publication date: February 19, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting, Chun-Yi Lee
  • Publication number: 20150001734
    Abstract: A method includes placing two conductive lines in a layout. Two cut lines are placed over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 1, 2015
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Publication number: 20140291741
    Abstract: A method of fabricating a semiconductor device includes forming a first metal gate electrode over a substrate, forming a second metal gate electrode over the substrate, removing at least a part of the first metal gate electrode to form a first opening, and filling the first opening with a non-conductive material.
    Type: Application
    Filed: June 12, 2014
    Publication date: October 2, 2014
    Inventors: Tsung-Chieh TSAI, Yung-Che Albert SHIH, Jhy-Kang TING
  • Publication number: 20140282294
    Abstract: Provided is a system and method for designing the layout of integrated circuits or other semiconductor devices while directly accessing design rules and a library of design features by interfacing with a GUI upon which the design layout is displayed. The design rules may be directly linked to the design features of the pattern library and imported into the device layout. The design rules may be directly accessed while designing the layout or while conducting a design rule check and the design features from the pattern library may be used in creating the layout.
    Type: Application
    Filed: May 28, 2014
    Publication date: September 18, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-An CHEN, Pei-Tzu WU, Tsung-Chieh TSAI, Juing-Yi WU, Jyh-Kang TING
  • Publication number: 20140203372
    Abstract: A semiconductor device includes an inter-layer dielectric (ILD) layer over a substrate; and a first gate feature in the ILD layer, the first gate feature comprising a first gate material and having a first resistance, wherein the first gate material comprises a first conductive material. The semiconductor device further includes a second gate feature in the ILD layer, the second gate feature comprising a second gate material and having a second resistance higher than the first resistance, wherein the second material comprises at least 50% by volume silicon oxide.
    Type: Application
    Filed: March 20, 2014
    Publication date: July 24, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hsi YEH, Tsung-Chieh TSAI, Chun-Yi LEE
  • Patent number: 8769475
    Abstract: Provided is a system and method for designing the layout of integrated circuits or other semiconductor devices while directly accessing design rules and a library of design features by interfacing with a GUI upon which the design layout is displayed. The design rules may be directly linked to the design features of the pattern library and imported into the device layout. The design rules may be directly accessed while designing the layout or while conducting a design rule check and the design features from the pattern library may be used in creating the layout.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: July 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-An Chen, Pei-Tzu Wu, Tsung-Chieh Tsai, Juing-Yi Wu, Jyh-Kang Ting