Patents by Inventor Tsung Wang
Tsung Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250219292Abstract: Disclosed is a dual-band dipole antenna including a dielectric carrier with a first surface, a first radiator, a second radiator, a coupled radiator, a coaxial cable and a balun line. The first radiator and the second radiator in opposite areas of the first surface have different structural shapes. The coupled radiator on the first surface extends from the second radiator toward the first radiator. There is a coupling slot between the coupled radiator and the first radiator. An inner conductor and an outer conductor of the coaxial cable are electrically connected to the second radiator and the first radiator respectively. The balun line disposed on the first surface has a serpentine structure, and is connected to the first radiator and the second radiator. The first radiator, the second radiator and the coupled radiator are configured to generate a first resonance mode, a second resonance mode and a third resonance mode.Type: ApplicationFiled: September 10, 2024Publication date: July 3, 2025Applicant: LUXSHARE PRECISION INDUSTRY COMPANY LIMITEDInventors: Yao-Yuan CHANG, Yu-Tsung WANG, Wei-Hsin CHEN
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Publication number: 20250203990Abstract: A semiconductor device includes a substrate, a first active structure, a conductive portion and a first helmet. The first active structure is formed on the substrate and includes a plurality of first active channel sheets and a plurality of first metal gate structures vertically stacked to each other, wherein the topmost first metal gate structure includes a first inner spacer. The conductive portion is connected with the topmost first active channel sheet. The first helmet is formed above the first inner spacer and covers a lateral surface of the conductive portion.Type: ApplicationFiled: December 13, 2023Publication date: June 19, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Meng-Huan JAO, Chen Luo CHENG, Sheng-Tsung WANG, Chia-Hao CHANG, Huan-Chieh SU, Chih-Hao WANG
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Patent number: 12336215Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a fin structure formed over a substrate, and a gate structure formed over the fin structure. The semiconductor device structure includes a first source/drain (S/D) structure formed adjacent to the gate structure, and a first S/D contact structure formed over the first S/D structure. The semiconductor device structure includes a first filling layer formed over the first S/D structure, and the first S/D contact structure is surrounded by the first filling layer. The semiconductor device structure includes a dielectric layer formed adjacent to the gate structure and the first filling layer, and the dielectric layer and the first filling layer are made of different materials. The first filling layer is surrounded by the dielectric layer.Type: GrantFiled: September 8, 2021Date of Patent: June 17, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Lin-Yu Huang, Sheng-Tsung Wang, Li-Zhen Yu, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
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Publication number: 20250185353Abstract: A semiconductor device and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes first and second dummy epitaxial layers disposed in first and second base structures, first and second active epitaxial layers disposed on the first and second dummy epitaxial layers, a first active nanostructured layer disposed adjacent to and in contact with the first active epitaxial layer, a second active nanostructured layer disposed adjacent to and in contact with the second active epitaxial layer, a dummy nanostructured layer disposed adjacent to and in contact with the second dummy epitaxial layer, a first gate structure surrounding the first active nanostructured layer, and a second gate structure surrounding the second active nanostructured layer and the dummy nanostructured layer.Type: ApplicationFiled: June 27, 2024Publication date: June 5, 2025Applicant: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Sheng-Tsung Wang, Chun-Yuan Chen, Huan-Chieh Su, Lo-Heng Chang, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20250183040Abstract: In a semiconductor structure, a first conductive feature is formed in a trench by PVD and a glue layer is then deposited on the first conductive feature in the trench before CVD deposition of a second conductive feature there-over. The first conductive feature acts as a protection layer to keep silicide from being damaged by later deposition of metal or a precursor by CVD. The glue layer extends along the extent of the sidewall to enhance the adhesion of the second conductive features to the surrounding dielectric layer.Type: ApplicationFiled: February 12, 2025Publication date: June 5, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Min-Hsuan LU, Kan-Ju LIN, Lin-Yu HUANG, Sheng-Tsung WANG, Hung-Yi HUANG, Chih-Wei CHANG, Ming-Hsing TSAI, Chih-Hao WANG
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Patent number: 12324188Abstract: A device includes a substrate and a gate structure wrapping around at least one vertical stack of nanostructure channels. The device includes a source/drain region abutting the gate structure, and a source/drain contact over the source/drain region. The device includes an etch stop layer laterally between the source/drain contact and the gate structure and having a first sidewall in contact with the source/drain contact, and a second sidewall opposite the first sidewall. The device includes a source/drain contact isolation structure embedded in the source/drain contact and having a third sidewall substantially coplanar with the second sidewall of the etch stop layer.Type: GrantFiled: September 23, 2021Date of Patent: June 3, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Meng-Huan Jao, Lin-Yu Huang, Sheng-Tsung Wang, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 12318880Abstract: The present invention relates to a pipe feeding machine in which the frame is equipped with plural conveying devices, plural lifting plates, plural pipe diameter limiting devices, a group loading device and an independent loading device; wherein the conveying device comprises a conveying belt, and the group and independent loading devices comprise a pusher plate and a positioning plate; when the lifting plate with the pipes is raised to the plane of the conveying belt and the pipes are conveyed between the pusher plate and positioning plate, which is able to further transport a single pipe to the center of the chuck assembly for processing, which replaces the conventional feeding belt to avoid the collision during the lifting and conveying of the pipes, and to improve the efficiency and yield of pipe production.Type: GrantFiled: September 6, 2022Date of Patent: June 3, 2025Assignee: CHIAO SHENG MACHINERY CO., LTD.Inventor: Sheng Tsung Wang
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Patent number: 12300727Abstract: A method includes providing a structure having source/drain electrodes and a first dielectric layer over the source/drain electrodes; forming a first etch mask covering a first area of the first dielectric layer; performing a first etching process to the first dielectric layer, resulting in first trenches over the source/drain electrodes; filling the first trenches with a second dielectric layer that has a different material than the first dielectric layer; removing the first etch mask; performing a second etching process including isotropic etching to the first area of the first dielectric layer, resulting in a second trench above a first one of the source/drain electrodes; depositing a metal layer into at least the second trench; and performing a chemical mechanical planarization (CMP) process to the metal layer.Type: GrantFiled: July 28, 2023Date of Patent: May 13, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Huan Jao, Lin-Yu Huang, Sheng-Tsung Wang, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 12300734Abstract: Methods and devices that provide for a fin structure and a dielectric fin structure. A gate structure is formed over the fin structure and the hybrid fin structure. A plurality of dielectric layers is adjacent the gate structure and over the hybrid fin structure between the gate structure and a contact element over the dielectric fin structure. The plurality of dielectric layers includes an air gap, formed by removal of a dummy spacer layer.Type: GrantFiled: August 30, 2021Date of Patent: May 13, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Hao Chang, Lin-Yu Huang, Sheng-Tsung Wang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
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Publication number: 20250118666Abstract: A semiconductor structure and method of manufacturing a semiconductor structure are provided. The semiconductor structure includes a substrate and at least one contact plug. The substrate has an epi-layer. The contact plug is formed on the epi-layer and includes a silicide cap disposed on the epi-layer; a conductive pillar disposed on the silicide cap such that the conductive pillar electrically connects to the epi-layer via the silicide cap; and a hybrid liner. The hybrid liner surrounds the conductive pillar and includes a lower portion abutting the silicide cap and having a nitride material and an upper portion abutting the conductive pillar and having an oxidized nitride material. Due to the hybrid liner, a semiconductor structure with increased capacitance and decreased resistivity can be obtained.Type: ApplicationFiled: October 10, 2023Publication date: April 10, 2025Inventors: TZU PEI CHEN, MIN-HSUAN LU, HAO-HENG LIU, YUTING CHENG, HSU-KAI CHANG, PO-CHIN CHANG, OLIVIA PEI-HUA LEE, SHENG-TSUNG WANG, HUAN-CHIEH SU, SUNG-LI WANG, PINYEN LIN
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Publication number: 20250113565Abstract: Embodiments of the present disclosure provide a semiconductor device with backside source/drain contacts formed using a buried source/drain feature and a semiconductor cap layer formed between the buried source/drain feature and a source/drain region. The buried source/drain feature and the semiconductor cap layer enable self-aligned backside source/drain contact and backside isolation. The semiconductor cap layer functions as an etch stop layer during backside contact formation while enabling source/drain region growth without fabrication penalty, such as voids in the source/drain regions.Type: ApplicationFiled: February 2, 2024Publication date: April 3, 2025Inventors: Lo-Heng CHANG, Huan-Chieh SU, Chun-Yuan CHEN, Sheng-Tsung WANG, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20250109847Abstract: A connecting device used for electrically connecting a power source with a power consuming module is provided. The connecting device includes a female connecting base and a male connecting base. The female connecting base has two opposite surfaces, a rim disposed on one of the surfaces and two terminals exposed on the surfaces. The terminals are connected to the live wire and neutral wire of the power source separately. The male connecting base includes a clamp, two conductive strips, and a ground strip. The rim is clamped, and the male connecting base is fastened to the female connecting base by the clamp. The terminals are connected to the conductive strips, while the end surface of each conductive strip protrudes from the surface of the male connecting base. The ground strip includes a ground surface which protrudes from the end surfaces of the conductive strips.Type: ApplicationFiled: May 16, 2024Publication date: April 3, 2025Inventors: Chih-Hung JU, Chung-Kuang CHEN, Yi-An LIN, Guo-Hao HUANG, Pin-Tsung WANG
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Patent number: 12261082Abstract: The present disclosure describes a semiconductor device with a nitrided capping layer and methods for forming the same. One method includes forming a first conductive structure in a first dielectric layer on a substrate, depositing a second dielectric layer on the first conductive structure and the first dielectric layer, and forming an opening in the second dielectric layer to expose the first conductive structure and a portion of the first dielectric layer. The method further includes forming a nitrided layer on a top portion of the first conductive structure, a top portion of the portion of the first dielectric layer, sidewalls of the opening, and a top portion of the second dielectric layer, and forming a second conductive structure in the opening, where the second conductive structure is in contact with the nitrided layer.Type: GrantFiled: January 18, 2022Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Chin Chang, Lin-Yu Huang, Shuen-Shin Liang, Sheng-Tsung Wang, Cheng-Chi Chuang, Chia-Hung Chu, Tzu Pei Chen, Yuting Cheng, Sung-Li Wang
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Patent number: 12255070Abstract: In a semiconductor structure, a first conductive feature is formed in a trench by PVD and a glue layer is then deposited on the first conductive feature in the trench before CVD deposition of a second conductive feature there-over. The first conductive feature acts as a protection layer to keep silicide from being damaged by later deposition of metal or a precursor by CVD. The glue layer extends along the extent of the sidewall to enhance the adhesion of the second conductive features to the surrounding dielectric layer.Type: GrantFiled: September 30, 2021Date of Patent: March 18, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Min-Hsuan Lu, Kan-Ju Lin, Lin-Yu Huang, Sheng-Tsung Wang, Hung-Yi Huang, Chih-Wei Chang, Ming-Hsing Tsai, Chih-Hao Wang
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Publication number: 20250087578Abstract: A semiconductor device and a method of manufacturing thereof are provided. The method comprises: forming a gate electrode over a substrate; forming source/drain regions beside the gate electrode; forming contact plugs on the source/drain regions; forming a dielectric layer over the contact plugs and the gate electrode; forming first openings and a second opening in the dielectric layer to expose portions of the contact plugs and a portion of the gate electrode respectively; performing a pre-clean process such as applying an ozone-containing source to the exposed portions of the contact plugs and the gate electrode; performing a surface treatment to the first and second openings to passivate sidewalls of the first and second openings; forming a conductive layer to fill the first openings and the second opening in a same deposition process by using a same metal precursor; and performing a planarization process.Type: ApplicationFiled: September 8, 2023Publication date: March 13, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Yuan Chen, Sheng-Tsung Wang, Huan-Chieh Su, Chih-Hao Wang, Meng-Huan Jao
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Patent number: 12235552Abstract: A method for repairing a white defect of a LCD panel includes providing a substrate, the substrate defining pixel areas which themselves comprise a base, a first metal layer, a first insulating layer, a semi-conductor layer, an ohmic contact layer, a source electrode, a drain electrode, and a second insulating layer; forming a through hole by laser in the second insulating layer, the through hole extending through the second insulating layer and separating the drain electrode into two spaced parts; forming a third insulating layer to cover the first conductive layers, the second insulating layer and the though hole and forming a second conductive layer by laser on the third insulating layer to couple the first conductive layer to the second conductive layer.Type: GrantFiled: June 29, 2021Date of Patent: February 25, 2025Assignee: Century Technology (Shenzhen) Corporation LimitedInventors: Yuan Xiong, Chih-Chung Liu, Ming-Tsung Wang, Meng-Chieh Tai
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Publication number: 20250031404Abstract: A semiconductor device may include one or more transistor structures that include a plurality of source/drain regions and a gate structure between the source/drain regions. The semiconductor device may further include one or more dielectric layers between a source/drain contact structure and a gate structure of the one or more of the transistor structures. The one or more dielectric layers may be manufactured using on oxidation treatment process to tune the dielectric constant of the one or more dielectric layers. The dielectric constant of the one or more dielectric layers may be tuned to reduce the parasitic capacitance between the source/drain contact structure and the gate structure (which are conductive structures). In particular, the dielectric constant of the one or more spacer dielectric may be tuned using the oxidation treatment process to lower the as-deposited dielectric constant of the one or more dielectric layers.Type: ApplicationFiled: July 21, 2023Publication date: January 23, 2025Inventors: Min-Hsuan LU, Sheng-Tsung WANG, Huan-Chieh SU, Tzu Pei CHEN, Hao-Heng LIU, Chien-Hung LIN, Chih-Hao WANG
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Publication number: 20240404882Abstract: Embodiments of the present disclosure provide semiconductor devices having conductive features with reduced height and increased width, and methods for forming the semiconductor devices. Particularly, sacrificial self-aligned contact (SAC) layer and sacrificial metal contact etch stop layer (M-CESL) are used to form conductive features with reduced resistance. After formation of the conductive features, the sacrificial SAC and sacrificial M-CESL are removed and replaced with a low-k material to reduce capacitance in the device. As a result, performance of the device is improved.Type: ApplicationFiled: May 27, 2024Publication date: December 5, 2024Inventors: Sheng-Tsung WANG, Chia-Hao CHANG, Lin-Yu HUANG, Cheng-Chi CHUANG, Chih-Hao WANG
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Publication number: 20240387261Abstract: Semiconductor structures and methods of forming the same are provided. In one embodiment, a semiconductor structure includes an active region over a substrate, a gate structure disposed over the active region, and a gate contact that includes a lower portion disposed over the gate structure and an upper portion disposed over the lower portion.Type: ApplicationFiled: July 26, 2024Publication date: November 21, 2024Inventors: Cheng-Chi Chuang, Huan-Chieh Su, Sheng-Tsung Wang, Lin-Yu Huang, Chih-Hao Wang
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Publication number: 20240379422Abstract: A device includes a substrate, a gate structure wrapping around a vertical stack of nanostructure semiconductor channels, and a source/drain abutting the vertical stack and in contact with the nanostructure semiconductor channels. The device includes a gate via in contact with the first gate structure. The gate via includes a metal liner layer having a first flowability, and a metal fill layer having a second flowability higher than the first flowability.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Inventors: Sheng-Tsung WANG, Lin-Yu HUANG, Cheng-Chi CHUANG, Sung-Li WANG, Chih-Hao WANG