Patents by Inventor Tsung-Yu CHIANG

Tsung-Yu CHIANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240129167
    Abstract: A communication receiver includes a first signal processing circuit and a second signal processing circuit. The first signal processing circuit includes a first feedforward equalizer and a decision circuit. The first feedforward equalizer processes a received signal to generate a first equalized signal. The decision circuit performs hard decision upon the first equalized signal to generate a first symbol decision signal. The second signal processing circuit includes a second feedforward equalizer, a decision feedforward equalizer, and a first decision feedback equalizer. The second feedforward equalizer processes the first equalized signal to generate a second equalized signal. The decision feedforward equalizer processes the first symbol decision signal to generate a third equalized signal. The first decision feedback equalizer generates a second symbol decision signal according to the second equalized signal and the third equalized signal.
    Type: Application
    Filed: September 18, 2023
    Publication date: April 18, 2024
    Applicant: MEDIATEK INC.
    Inventors: Chung-Hsien Tsai, Che-Yu Chiang, Yu-Ting Liu, Tsung-Lin Lee, Chia-Sheng Peng, Ting-Ming Yang
  • Publication number: 20230387256
    Abstract: Various examples of a circuit device that includes gate stacks and gate seals are disclosed herein. In an example, a substrate is received that has a fin extending from the substrate. A placeholder gate is formed on the fin, and first and second gate seals are formed on sides of the placeholder gate. The placeholder gate is selectively removed to form a recess between side surfaces of the first gate seal and the second gate seal. A functional gate is formed within the recess and between the side surfaces of the first gate seal and the second gate seal.
    Type: Application
    Filed: August 10, 2023
    Publication date: November 30, 2023
    Inventors: Sheng-Chou Lai, Tsung-Yu Chiang
  • Publication number: 20230387210
    Abstract: Embodiments of the present disclosure provides a solution to address any issues caused by non-uniform channel heights across a substrate. Particularly, an isolation layer is selectively implanted to alter etching rate of the isolation layer around semiconductor fin structures prior to STI recess.
    Type: Application
    Filed: May 24, 2022
    Publication date: November 30, 2023
    Inventors: Jui-Lin CHANG, Tsung-Yu CHIANG, Mi-Hua LIN, Cing-Yao JHAN
  • Patent number: 11830930
    Abstract: Various examples of a circuit device that includes gate stacks and gate seals are disclosed herein. In an example, a substrate is received that has a fin extending from the substrate. A placeholder gate is formed on the fin, and first and second gate seals are formed on sides of the placeholder gate. The placeholder gate is selectively removed to form a recess between side surfaces of the first gate seal and the second gate seal. A functional gate is formed within the recess and between the side surfaces of the first gate seal and the second gate seal.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sheng-Chou Lai, Tsung-Yu Chiang
  • Publication number: 20230275138
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The method includes forming a first gate structure over a substrate, and the first gate structure includes a first metal electrode. The method includes forming a second gate structure adjacent to the first gate structure, and the second gate structure includes a second metal electrode. The method also includes forming a mask structure covering the first gate structure and exposing the second gate structure, and etching a portion of the second metal electrode of the second gate structure to form an extending conductive portion. The method includes forming a metal layer over the first gate structure and the extending conductive portion, and etching the metal layer, such that no metal layer is remaining over the first gate structure, and a remaining portion of the metal layer is over the extending conductive portion.
    Type: Application
    Filed: May 4, 2023
    Publication date: August 31, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Ching HUANG, Tsung-Yu CHIANG
  • Publication number: 20230260792
    Abstract: The present disclosure describes a semiconductor device with a diffusion barrier layer on source/drain (S/D) contact structures and a method of fabricating the semiconductor device. The method of fabricating the semiconductor device includes forming a S/D region on a fin structure, forming a S/D contact structure including a metal on the S/D region, forming a barrier layer including silicon and the metal on the S/D contact structure, and forming a via contact structure on the barrier layer. The barrier layer blocks a diffusion of the metal in the S/D contact structure to the via contact structure.
    Type: Application
    Filed: April 20, 2023
    Publication date: August 17, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin Hsiang TSENG, Chi-Ruei YEH, Tsung-Yu CHIANG
  • Publication number: 20230245921
    Abstract: The present disclosure provides a method of manufacturing a semiconductor structure. The method includes providing a substrate; forming a fin structure on the substrate; forming a first dummy gate on the fin structure; forming a trench to penetrate the first dummy gate and the fin structure; forming a dielectric stack in the trench; removing a top portion of the dielectric stack in the trench to leave a lower portion of the dielectric stack in the trench; and forming a protective layer in the trench and directly on the lower portion of the dielectric stack.
    Type: Application
    Filed: January 28, 2022
    Publication date: August 3, 2023
    Inventors: KUI-YU CHEN, CHI-RUEI YEH, TSUNG-YU CHIANG
  • Publication number: 20230238381
    Abstract: A method includes forming an n-type Fin-Field Effect Transistor (FinFET) and a p-type FinFET. The forming of the n-type FinFFT includes: forming a first auxiliary gate stack over a first semiconductor fin; forming an n-type source/drain region on the first semiconductor fin adjacent to the first auxiliary gate stack; and performing a first etch to form a first recess with a first depth on a first top surface of the n-type source/drain region. The forming of the p-type FinFFT includes: forming a second auxiliary gate stack over a second semiconductor fin; forming a p-type source/drain region on the second semiconductor fin adjacent to the second auxiliary gate stack; and performing a second etch to form a second recess with a second depth on a second top surface of the p-type source/drain region. The first depth is greater than the second depth.
    Type: Application
    Filed: January 27, 2022
    Publication date: July 27, 2023
    Inventors: LI-WEI LIU, CHI-RUEI YEH, TSUNG-YU CHIANG
  • Patent number: 11682710
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The method includes forming a first metal gate structure in a first dielectric layer. The method includes forming a second metal gate structure in the first dielectric layer, and the second metal gate structure includes a second metal electrode over a second gate dielectric layer. The method also includes forming a mask structure covering the first metal gate structure. The method includes etching a portion of the second gate dielectric layer and a portion of the second metal electrode of the second metal gate structure to form a first conductive portion extending above a top surface of the second gate dielectric layer. The method includes forming a metal layer over the first conductive portion, and the metal layer has a recess, and a top portion of the first conductive portion extends into the recess.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Ching Huang, Tsung-Yu Chiang
  • Publication number: 20230135084
    Abstract: Semiconductor structure and methods of forming the same are provided. A semiconductor structure according to the present disclosure include a substrate that includes a first region and a second region adjacent the first region, a first fin disposed over the first region, a second fin disposed over the second region, a first source/drain feature disposed over the first fin and a second source/drain feature disposed over the second fin, and an isolation structure disposed between the first fin and the second fin. The isolation structure has a protruding feature rising above the rest of the isolation structure and the protruding feature is disposed between the first fin and the second fin.
    Type: Application
    Filed: May 17, 2022
    Publication date: May 4, 2023
    Inventors: Hsin Yang Hung, Wei-Syuan Dai, Tsung-Yu Chiang, Lung Chen
  • Patent number: 11637018
    Abstract: The present disclosure describes a semiconductor device with a diffusion barrier layer on source/drain (S/D) contact structures and a method of fabricating the semiconductor device. The method of fabricating the semiconductor device includes forming a S/D region on a fin structure, forming a S/D contact structure including a metal on the S/D region, forming a barrier layer including silicon and the metal on the S/D contact structure, and forming a via contact structure on the barrier layer. The barrier layer blocks a diffusion of the metal in the S/D contact structure to the via contact structure.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: April 25, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsinhsiang Tseng, Chi-Ruei Yeh, Tsung-Yu Chiang
  • Publication number: 20220344265
    Abstract: A semiconductor device includes a gate structure disposed in a first dielectric layer, a conductive segment disposed in the first dielectric layer and separated from the gate structure, a second dielectric layer disposed over the first dielectric layer, a first contact penetrating the second dielectric layer and electrically connected to the gate structure, a second contact penetrating the second dielectric layer and electrically connected to the conductive segment, and a silicon nitride-based layer surrounding at least one of the first and second contacts and connected between the second dielectric layer and the at least one of the first and second contacts. A method for making the semiconductor device is also provided.
    Type: Application
    Filed: April 22, 2021
    Publication date: October 27, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsinhsiang TSENG, Chi-Ruei YEH, Tsung-Yu CHIANG
  • Patent number: 11469144
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: October 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen, Hsin-Lung Chao, Chen Chu-Hsuan
  • Publication number: 20220130678
    Abstract: The present disclosure describes a semiconductor device with a diffusion barrier layer on source/drain (S/D) contact structures and a method of fabricating the semiconductor device. The method of fabricating the semiconductor device includes forming a S/D region on a fin structure, forming a S/D contact structure including a metal on the S/D region, forming a barrier layer including silicon and the metal on the S/D contact structure, and forming a via contact structure on the barrier layer. The barrier layer blocks a diffusion of the metal in the S/D contact structure to the via contact structure.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsinhsiang Tseng, Chi-Ruei Yeh, Tsung-Yu Chiang
  • Publication number: 20210280575
    Abstract: A semiconductor device includes a FinFET component, a plurality of patterned dummy semiconductor fins arranged aside a plurality of fins of the FinFET component, an isolation structure formed on the patterned dummy semiconductor fins, and a tuning component formed on the patterned dummy semiconductor fins and electrically connected to the FinFET component. A height of the patterned dummy semiconductor fins is shorter than that of the fins of the FinFET component.
    Type: Application
    Filed: May 21, 2021
    Publication date: September 9, 2021
    Inventors: Cheng-Chien Huang, Chi-Wen Liu, Horng-Huei Tseng, Tsung-Yu Chiang
  • Publication number: 20210280687
    Abstract: Various examples of a circuit device that includes gate stacks and gate seals are disclosed herein. In an example, a substrate is received that has a fin extending from the substrate. A placeholder gate is formed on the fin, and first and second gate seals are formed on sides of the placeholder gate. The placeholder gate is selectively removed to form a recess between side surfaces of the first gate seal and the second gate seal. A functional gate is formed within the recess and between the side surfaces of the first gate seal and the second gate seal.
    Type: Application
    Filed: May 17, 2021
    Publication date: September 9, 2021
    Inventors: Sheng-Chou Lai, Tsung-Yu Chiang
  • Patent number: 11018131
    Abstract: A semiconductor device includes a FinFET component, a plurality of patterned dummy semiconductor fins arranged aside a plurality of fins of the FinFET component, an isolation structure formed on the patterned dummy semiconductor fins, and a tuning component formed on the patterned dummy semiconductor fins and electrically connected to the FinFET component. A height of the patterned dummy semiconductor fins is shorter than that of the fins of the FinFET component.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: May 25, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Chien Huang, Chi-Wen Liu, Horng-Huei Tseng, Tsung-Yu Chiang
  • Patent number: 11011618
    Abstract: Various examples of a circuit device that includes gate stacks and gate seals are disclosed herein. In an example, a substrate is received that has a fin extending from the substrate. A placeholder gate is formed on the fin, and first and second gate seals are formed on sides of the placeholder gate. The placeholder gate is selectively removed to form a recess between side surfaces of the first gate seal and the second gate seal. A functional gate is formed within the recess and between the side surfaces of the first gate seal and the second gate seal.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: May 18, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sheng-Chou Lai, Tsung-Yu Chiang
  • Patent number: 10957653
    Abstract: Among other things, one or more semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. A layer, such as a poly layer or an inter layer dielectric (ILD) layer, is formed over a substrate. A photoresist mask is formed over the layer. The photoresist mask comprises an open region overlaying a target region of the layer and comprises a protection region overlaying a second region of the layer. An etching process is performed through the open region to reduce a height of the layer in the target region in relation to a height of the layer in the second region because the protection region inhibits the etching process from affecting the layer in the second region. A first structure, having a first height, is formed within the target region. A second structure, having a second height greater than the first height, is formed within the second region.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: March 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Tsung-Yu Chiang, Chen Kuang-Hsin, Bor-Zen Tien, Tzong-Sheng Chang
  • Publication number: 20210066132
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Application
    Filed: November 16, 2020
    Publication date: March 4, 2021
    Inventors: Tsung-Yu CHIANG, Kuan-Hsin CHEN, Hsin-Lung CHAO, Chen CHU-HSUAN