Patents by Inventor Tsung-Yu CHIANG

Tsung-Yu CHIANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150221743
    Abstract: Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a first gate stack. The first gate stack includes a gate dielectric layer, a first work function metal layer and a second work function metal layer directly on the first work function metal layer. The second work function metal layer and the first work function metal layer have the same metal element. The semiconductor device also includes a second gate stack. The second gate stack includes a gate dielectric layer, a barrier layer and a second work function metal layer. The second work function metal layer and the barrier layer do not have the same metal element. A first thickness of the second work function metal layer of the first gate stack is larger than a second thickness of the second work function metal layer of the second gate stack.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 6, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Wei-Shuo HO, Tsung-Yu CHIANG, Chia-Chun LIAO, Kuang-Hsin CHEN
  • Publication number: 20150221555
    Abstract: An integrated circuit structure is provided including a substrate, a low voltage device and a high voltage device. The low voltage device has a first beeline distance from a first epitaxial structure to an adjacent gate stack; and the high voltage structure has a second beeline distance from a second epitaxial structure to an adjacent gate stack. The second beeline distance of the high voltage device is greater than the first beeline distance of the low voltage device, so that the leakage current in the high voltage device may be decreased under high voltage operation. Further, a method for manufacturing the integrated circuit structure also provides herein.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 6, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu CHIANG, Kuang-Hsin Chen
  • Publication number: 20150206963
    Abstract: The present disclosure provides a semiconductor structure includes a semiconductor layer having a first surface, and an interlayer dielectric (ILD) defining a metal gate over the first surface of the semiconductor layer. The metal gate includes a high-k dielectric layer, a barrier layer, and a work function metal layer. A thickness of a first portion of the barrier layer at the sidewall of the metal gate is substantially thinner than a thickness of the barrier layer at the bottom of the metal gate. The present disclosure provides a method for manufacturing a semiconductor structure. The method includes forming a metal gate trench in an ILD, forming a barrier layer in a bottom and a sidewall of the metal gate trench, removing a first portion of the barrier layer at the sidewall of the metal gate trench, and forming a work function metal layer conforming to the barrier layer.
    Type: Application
    Filed: January 17, 2014
    Publication date: July 23, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: WEI-SHUO HO, TSUNG-YU CHIANG, KUANG-HSIN CHEN
  • Publication number: 20150187634
    Abstract: Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a first fin partially surrounded by a first isolation structure and protruding through a top surface thereof. The semiconductor device also includes a second fin partially surrounded by a second isolation structure and protruding through a top surface thereof. The top surface of the first isolation structure is higher than the top surface of the second isolation structure such that the second fin has a height higher than that of the first fin. The second isolation structure has a dopant concentration higher than that of the first isolation structure.
    Type: Application
    Filed: December 27, 2013
    Publication date: July 2, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Tsung-Yu CHIANG, Chung-Wei LIN, Kuang-Hsin CHEN, Bor-Zen TIEN
  • Publication number: 20150069528
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 12, 2015
    Inventors: Tsung-Yu Chiang, Chen Chu-Hsuan, Chen Kuang-Hsin, Hsin-Lung Chao
  • Publication number: 20150061016
    Abstract: Among other things, one or more semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. A layer, such as a poly layer or an inter layer dielectric (ILD) layer, is formed over a substrate. A photoresist mask is formed over the layer. The photoresist mask comprises an open region overlaying a target region of the layer and comprises a protection region overlaying a second region of the layer. An etching process is performed through the open region to reduce a height of the layer in the target region in relation to a height of the layer in the second region because the protection region inhibits the etching process from affecting the layer in the second region. A first structure, having a first height, is formed within the target region. A second structure, having a second height greater than the first height, is formed within the second region.
    Type: Application
    Filed: August 30, 2013
    Publication date: March 5, 2015
    Inventors: Tsung-Yu Chiang, Chen Kuang-Hsin, Bor-Zen Tien, Tzong-Sheng Chang
  • Publication number: 20140344770
    Abstract: A system and method of designing a layout for a plurality of different logic operation (LOP) cell technologies includes defining a priority for each LOP cell technology in the plurality of different LOP technologies and forming a layout of the plurality of different LOP cells for formation on a substrate with at least some of the LOP cells of higher priority LOP technologies overlapping LOP cells of lower priority LOP technologies. The system can include a processor coupled to memory where stored code defines the priority for each different cell technology in the plurality of LOP cells and (when the code is executed) the processor forms the layout of a plurality of different LOP cells. All of the LOP cells of higher priority LOP technologies overlap LOP cells of lower priority. The system or method also avoids the overlap of higher priority LOP cells by lower priority LOP cells.
    Type: Application
    Filed: May 17, 2013
    Publication date: November 20, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Yu CHIANG, Kuang-Hsin Chen, Song-Bor Lee, Bor-Zen Tien, Tzong-Sheng Chang
  • Publication number: 20140231932
    Abstract: Methods and devices for forming a contact over a metal gate for a transistor are provided. The device may comprise an active area, an isolation area surrounding the active area, and a metal gate above the isolation area, wherein the metal gate comprises a conductive layer. The contact comprises a first contact part within the conductive layer, above the isolation area without vertically overlapping the active area, and a second contact part above the first contact part, connected to the first contact part, and substantially vertically contained within the first contact part.
    Type: Application
    Filed: February 21, 2013
    Publication date: August 21, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen, Bor-Zen Tien, Tzong-Sheng Chang
  • Publication number: 20140144980
    Abstract: A dynamic tag generating apparatus and a dynamic tag generating method thereof are provided. The dynamic tag generating apparatus is disposed in a display apparatus, and the display apparatus is connected to a server. The dynamic tag generating apparatus receives tag update information from the server through the display apparatus, and updates a tag content of the display apparatus according to the tag update information. The dynamic tag generating apparatus provides the tag content to a tag analyzing apparatus so that the tag analyzing apparatus analyzes the tag content.
    Type: Application
    Filed: January 22, 2013
    Publication date: May 29, 2014
    Applicant: INSTITUTE FOR INFORMATION INDUSTRY
    Inventors: Chi-Hsien LIU, Tsung-Yu CHIANG, Li-Ting CHEN, Chien-Wen HUANG