Abstract: A diamond-like thin film of good quality is prepared homogeneously and fast in a deposition. A mesh-like acceleration electrode is provided at the opening of a chamber including a filament, and a plasma is generated in the chamber. Because the chamber is isolated electrically from the electric system of the apparatus, the high density and the equilibrium state are maintained, and the plasma density and the potential are homogenized around the mesh-like electrode. In this state, a bias potential is applied to the substrate, and the ions are accelerated according to the potential difference between the plasma and the substrate to deposit a diamond-like thin film on the substrate. Preferably, a negative potential electrode is provided before or around the substrate. Further, an insulating member is provided to surround a flight path of ions between the chamber and the substrate.

Abstract: A tape driving mechanism for a magnetic recording apparatus has a capstan rotated to advance a magnetic tape by pinching the magnetic tape between the capstan and a pinch roller. The pinch roller is pressed onto the magnetic tape against the capstan. The capstan surface is coated with a diamond-like carbon film which is smooth and highly wear-resistant. The difference between the tangential speed of the capstan and the tape transfer speed is almost zero. Thus, the state of contact is static. A static frictional coefficient between the diamond-like carbon film of the capstan and the magnetic tape is almost equal to twice the static frictional coefficient between the metal surface of the capstan and the magnetic tape in the conventional tape driving mechanism. The tape driving force thus remains sufficient even if the pressure exerted by the pinch roller is reduced to half the value employed in the conventional tape driving mechanism. The diamond-like carbon film may be coated on a rough surface of the capstan.

Abstract: A plasma CVD apparatus for continuously forming a diamond-like film on a length of magnetic tape, includes a first vacuum vessel, a plasma generating vessel for transforming a gaseous medium into a plasma, and an electrode for accelerating ions of the plasma toward the substrate. The plasma generating vessel has a gas outflow port of a shape complementary to that of the portion of the magnetic tape readied for deposition. A portion of the plasma generating vessel is disposed within the vacuum vessel, with the gas outflow port facing the substrate. A gap between the substrate and the gas outflow port is set to maintain the pressure of plasma in the gap uniform.

Abstract: A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.

Abstract: A photosensitive body has an electrically conductive substrate, and a photoconductive film formed on the substrate. A multiple optical film is formed on the photosensitive layer. The multiple optical film allows permeation of light beams in specific wavelength. Further, a diamond-like carbon film is formed on the multiple optical film. The diamond-like carbon film has thickness of at least 1,500.ANG. and Noop hardness of at least 1,000 kg/mm.sup.2. The multiple optical film and the diamond-like carbon film are provided in order to improve resistance against wear, ozone, and light.

Abstract: A magnetic recording medium has a non-magnetic substrate, a magnetic layer formed on the surface of the substrate containing a ferromagnetic material, and a protective film formed on the magnetic layer. The protective film is constituted by a singular layer of continuous or dispersed molecular structures in which carbon and an element constituting the magnetic layer are bonded directly or indirectly through oxygen and at least one fluorine is bonded to the carbon. This magnetic recording medium can be produced by a method comprising preparing a substrate of a non-magnetic material, forming a magnetic layer of a ferromagnetic material on the surface of the substrate, and forming, by a plasma CVD method, a protective film of a fluorine-containing molecular body having a thickness not greater than a value equivalent to 5 .ANG. on the surface of the magnetic layer.

Abstract: A magnetic recording medium is provided with a protective film made of a diamond like carbon film and an organic compound film on a ferromagnetic metal recording film; and it realizes excellent durability and small spacing loss or the like; and as a result high density magnetic recording is obtainable.

Abstract: A magnetic recording medium has a protective layer made of high hardness carbon synthesized under a low-temperature and a low-pressure by blowing hydrocarbon gas plasma onto a magnetic recording layer. The resistance thereof is large, and therefore, high density magnetic recording can be realized in a magnetic recording system wherein the magnetic head contacts the magnetic recording medium. Durability of the magnetic recording medium is substantially improved.

Abstract: A plasma CVD apparatus comprises a first vacuum enclosure with a plasma generating means, an accelerating means for accelerating ions in a plasma toward a substrate and a second vacuum enclosure connected to the first vacuum enclosure, so that the plasma gas flows into the second vacuum enclosure and forms a film of uniform and superior quality at high speed.