Publication number: 20110229791
Abstract: A sealing structure includes: components (1, 2, 11, 16, 21, 22, 33, 34, 44, 51, 52, 61, 62) respectively having sealing surfaces (8, 9, 14, 17, 30, 31, 42, 43, 49, 71, 72) on surfaces thereof facing each other; and a seal member (3, 18, 25, 37, 46, 50, 55, 65, 104, 105, 106, 140, 240) interposed between the sealing surfaces to make the sealing surfaces closely adhere to each other, and at least a hard carbon film (6, 7, 13, 28, 29, 40, 41, 48, 53, 54, 66, 67, 108, 120, 130, 220, 230, 320, 330, 430) is formed on one or both of the sealing surfaces.
Type:
Application
Filed:
October 30, 2009
Publication date:
September 22, 2011
Inventors:
Kazuhiro Kageyama, Yasuhiro Numao, Tomokatsu Himeno, Atsushi Miyazawa, Tsutomu Yamazaki