Abstract: Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.

Abstract: A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.

Abstract: Provided is a fluid drive valve, which facilitates continuation of monitoring all the time, and which allows detection of leakage of an operation fluid from an actuator even when the actuator is operating. A pressure sensor is disposed on a pressure receiving surface, inside an actuator, on which pressure of an operation fluid acts. A pressure sensor is disposed on a non-pressure receiving surface, inside the actuator, on which pressure of the operation fluid does not act. In addition, a position sensor is disposed to detect the position of a valve stem.

Abstract: Provided is a flow rate control apparatus capable of being used continuously when the apparatus is used in equipment that operates continuously, and a flow rate control method for the flow rate control apparatus. A flow rate of a fluid is controlled via any one of control valves disposed in branch passages, respectively. When replacement of the one control valve is determined to be necessary on the basis of a signal outputted from a monitoring portion of the one control valve, the one control valve performing flow rate control is closed, and another control valve disposed in another one of the branch passages, is opened, to perform flow rate control with a flow rate equivalent to that before the replacement. Furthermore, on-off valves disposed at upstream and downstream sides of the closed control valve are closed.

Abstract: A first on-off valve (2) and a second on-off valve (3) each are a two-port valve. A first passage block (5) is provided with a first on-off valve-corresponding inflow passage (11) and a first on-off valve-corresponding outflow passage (12). A second passage block (6) is provided with a second on-off valve-corresponding inflow passage (14) and a second on-off valve-corresponding outflow passage (15). The second on-off valve-corresponding outflow passage (15) is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage (12) via a communicating passage (13) formed in the first passage block (5). An orifice (20) is provided between the second on-off valve-corresponding outflow passage (15) and the communicating passage (13).

Abstract: A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. The holding member is provided with a plurality of notches at a portion to be caulked.

Abstract: A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Abstract: Provided is a flow rate control apparatus capable of being used continuously when the apparatus is used in equipment that operates continuously, and a flow rate control method for the flow rate control apparatus. A flow rate of a fluid is controlled via any one of control valves disposed in branch passages, respectively. When replacement of the one control valve is determined to be necessary on the basis of a signal outputted from a monitoring portion of the one control valve, the one control valve performing flow rate control is closed, and another control valve disposed in another one of the branch passages, is opened, to perform flow rate control with a flow rate equivalent to that before the replacement. Furthermore, on-off valves disposed at upstream and downstream sides of the closed control valve are closed.

Abstract: A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Abstract: Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment means 11 which changes the vertical movement amount of the stem 8 associated with the opening and closing operations, within a range of not greater than the upper limit value.

Abstract: A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.

Abstract: Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an inner periphery thereof and which is rotatably supported by a casing 4; a movable body 42 in which a male screw 46b is provided on an outer periphery thereof and is screwed into the inner periphery of the handle 41; and a guide means 43 which prevents rotation of the movable body 42 relative to the casing 4 and which enables vertical movement of the movable body 42.

Abstract: Provided is a diaphragm valve whose durability is improved by proper caulking. On a bottom surface 2d of a depression 2c of a body 2, an annular inner projection 22 having a relatively small diameter and an annular outer projection 23 having a relatively large diameter are provided. A seat 5 is made of synthetic resin and is inserted between the inner projection 22 and the outer projection 23. Both projections 22, 23 are caulked, whereby the seat 5 is prevented from coming off. The height of the inner projection 22 is less than that of the outer projection 23, and a corner 22a on the outside of the inner projection 22 has a curved surface.

Abstract: A first on-off valve 2 and a second on-off valve 3 each are a two-port valve. A first passage block 5 is provided with a first on-off valve-corresponding inflow passage 11 and a first on-off valve-corresponding outflow passage 12. A second passage block 6 is provided with a second on-off valve-corresponding inflow passage 14 and a second on-off valve-corresponding outflow passage 15. The second on-off valve-corresponding outflow passage 15 is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage 12 via a communicating passage 13 formed in the first passage block 5. An orifice 20 is provided between the second on-off valve-corresponding outflow passage 15 and the communicating passage 13.

Abstract: A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Abstract: Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment means 11 which changes the vertical movement amount of the stem 8 associated with the opening and closing operations, within a range of not greater than the upper limit value.

Abstract: Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an inner periphery thereof and which is rotatably supported by a casing 4; a movable body 42 in which a male screw 46b is provided on an outer periphery thereof and is screwed into the inner periphery of the handle 41; and a guide means 43 which prevents rotation of the movable body 42 relative to the casing 4 and which enables vertical movement of the movable body 42.

Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Abstract: A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. The holding member is provided with a plurality of notches at a portion to be caulked.

Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.