Abstract: A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.

Abstract: There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser includes a shaft portion and a cylinder portion provided at a lower edge portion of the shaft portion, and presses an upper side peripheral edge portion of a through hole of a biasing member by a lower end of the cylinder portion. The shaft portion penetrates an outer side spring presser and extends upwardly. An adjustment screw which positions the inner side spring presser as a lower end abuts against an upper surface of the shaft portion of the inner side spring presser, is screwed to a top wall of a casing.

Abstract: A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Abstract: Provided is a diaphragm valve whose durability is improved by proper caulking. On a bottom surface 2d of a depression 2c of a body 2, an annular inner projection 22 having a relatively small diameter and an annular outer projection 23 having a relatively large diameter are provided. A seat 5 is made of synthetic resin and is inserted between the inner projection 22 and the outer projection 23. Both projections 22, 23 are caulked, whereby the seat 5 is prevented from coming off. The height of the inner projection 22 is less than that of the outer projection 23, and a corner 22a on the outside of the inner projection 22 has a curved surface.

Abstract: A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.

Abstract: There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and assembly does not take time and effort, and further, in which a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser (15) includes a shaft portion (22) and a cylinder portion (23) provided at a lower edge portion of the shaft portion (22), and presses an upper side peripheral edge portion of a through hole (12a) of a biasing member (12) by a lower end of the cylinder portion (23). The shaft portion (22) penetrates an outer side spring presser (16) and extends upwardly. An adjustment screw (19) which positions the inner side spring presser (15) as a lower end abuts against an upper surface of the shaft portion (22) of the inner side spring presser (15), is screwed to a top wall (11d) of a casing (11).

Abstract: A heater built-in valve usable even under a high-temperature condition beyond 200° C. is provided. Piston driving means 7 has an upper compressed-air introducing chamber 24 for moving a piston 6 downward, and a lower compressed-air introducing chamber 25 for moving the piston 6 upward. Piston sealing means 8 has an upper bellows 29 that seals the upper compressed-air introducing chamber 24, and a lower bellows 30 that seals the lower compressed air introducing chamber 25.

Abstract: A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.

Abstract: A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height ?h of the afore-mentioned metal diaphragm.

Abstract: A heater built-in valve usable even under a high-temperature condition beyond 200° C. is provided. Piston driving means 7 has an upper compressed-air introducing chamber 24 for moving a piston 6 downward, and a lower compressed-air introducing chamber 25 for moving the piston 6 upward. Piston sealing means 8 has an upper bellows 29 that seals the upper compressed-air introducing chamber 24, and a lower bellows 30 that seals the lower compressed air introducing chamber 25.

Abstract: A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height ?h of the afore-mentioned metal diaphragm.

Abstract: Provided are a heating method making it possible that when a gas inside the body of a piping member, such as a pipe, is heated, the heating efficiency is improved; and a gas-heating piping member making it possible to perform such a heating method easily. A heat keeping member 4 which can transmit a gas to be heated is inserted to the inside of a piping member body 1 into which the gas can be passed in a state that the heat keeping member is brought into close contact with the inside, and further the piping member body 1 is heated from the outside thereof by means of a heating means 2.

Abstract: A fluid control device 1 has an upper space S1 formed between and defined by the upper surface of a piston 10 and the lower surface of top wall 8a of an upper casing 8, and a lower space S2 formed between and defined by the lower surface of the piston 10 and the upper surface of bottom wall 7a of a lower casing 7. A compression coil spring 11 for biasing the piston 10 is disposed in one of the upper space S1 and the lower space S2, and a compressed air admitting passage 15 communicates with the other space.

Abstract: The fluid controller (1) having a projecting joint (4) at the side surfaces and an operation driving part arranged at the top surface of the block shaped body (2) is heated using a heating device (11) incorporating the heaters (14) (15) and including a pair of holding members (12) (13) for sandwiching the fluid controller (1) to be heated from both sides. The body (2) is heated from both side surfaces while controlling the temperature of a bottom surface of the body (2) of the fluid controller (1).

Abstract: A fluid controller, wherein the recessed port (25) of a body (22) is formed of larger diameter part (25a) near an opening and a small diameter part (25c) continued to the lower part of the large diameter part (25a) through a step part (25b). A flow passage forming disk (26) is fitted to the recessed portion (25). The fluid passage forming disk (26) comprises a large diameter cylindrical part (31) fitted to the large diameter part (25a) in the recessed portion, a connection part (32) supported by the step part (25b) in the recessed portion, and a small diameter cylindrical part (33) having an outer diameter smaller than the inner diameter of the small diameter part (25c) in the recessed portion and having a lower end supported by the bottom surface of the recessed portion (25).

Abstract: Booster means 11 for transmitting a force acting on a piston 10 to a valve stem 9 on amplification comprises pivotal members 25 each supported by casings 7, 8 so as to hold an outer end and an inner end thereof in contact with an outer peripheral portion of the piston 10 and a flange portion 22a formed on the valve stem 9 respectively from below and to be pivotally movable about a horizontal rod 26 positioned closer to the inner end. Metal bellows 16 are provided between an outer peripheral portion of the casing top wall 8a and the outer peripheral portion of the piston 10 for sealing off a compressed air admitting space.

Abstract: A fluid controller, wherein the recessed port (25) of a body (22) is formed of larger diameter part (25a) near an opening and a small diameter part (25c) continued to the lower part of the large diameter part (25a) through a step part (25b). A flow passage forming disk (26) is fitted to the recessed portion (25). The fluid passage forming disk (26) comprises a large diameter cylindrical part (31) fitted to the large diameter part (25a) in the recessed portion, a connection part (32) supported by the step part (25b) in the recessed portion, and a small diameter cylindrical part (33) having an outer diameter smaller than the inner diameter of the small diameter part (25c) in the recessed portion and having a lower end supported by the bottom surface of the recessed portion (25).

Abstract: A fluid control device 1 has an upper space S1 formed between and defined by the upper surface of a piston 10 and the lower surface of top wall 8a of an upper casing 8, and a lower space S2 formed between and defined by the lower surface of the piston 10 and the upper surface of bottom wall 7a of a lower casing 7. A compression coil spring 11 for biasing the piston 10 is disposed in one of the upper space S1 and the lower space S2, and a compressed air admitting passage 15 communicates with the other space.