Abstract: Booster means 11 for transmitting a force acting on a piston 10 to a valve stem 9 on amplification comprises pivotal members 25 each supported by casings 7, 8 so as to hold an outer end and an inner end thereof in contact with an outer peripheral portion of the piston 10 and a flange portion 22a formed on the valve stem 9 respectively from below and to be pivotally movable about a horizontal rod 26 positioned closer to the inner end. Metal bellows 16 are provided between an outer peripheral portion of the casing top wall 8a and the outer peripheral portion of the piston 10 for sealing off a compressed air admitting space.

Abstract: A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

Abstract: A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

Abstract: A three way switching controller (1) for handling high purity gas, and the like, used for a semiconductor manufacturing plant, and the like, prevents lines on switching sides thereof from communicating with each other at time of switching. The three way switching controller includes a body (2), first and second valves (3 and 4), a cylinder (5), and a linking mechanism (6), with the linking mechanism including a disengagement device (7). The cylinder, operating through the linking mechanism, alternately opens and closes normally-closed valves. The disengagement device prevents a driving force of the cylinder from being applied at once to the valves upon initiation of operation of the cylinder, thereby allowing both of the valves to be in a free state (closed state).

Abstract: A fluid controller comprising a valve element and a valve stem rotatably attached at its lower end to the upper end of the valve element, the valve element being movable upward or downward by rotating the valve stem to move the valve stem upward or downward. The valve element is brought into contact with and seated in a valve seat to close a fluid channel by being moved downward. The element is brought out of contact with the valve seat to open the fluid channel by being moved upward. The controller has an elastic member for biasing the valve element upward to press the element against the valve stem with a predetermined force in the vicinity of the seated position where the valve element is in contact with the valve seat.