Abstract: The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Abstract: A technique and method for determining a process dose for a beam lithography process includes accessing a data set that enables associating (i) a plurality of measured dimensions of features exposed by beam lithography with (ii) a plurality of different exposure doses, wherein the features were exposed with the different exposure doses, and with (iii) at least one of a plurality of different densities of the exposed features and a plurality of different nominal dimensions of the exposed features. The method also includes providing a model that is parameterized in at least the following parameters (i) measured feature dimension; (ii) exposure dose; (iii) at least one of feature density and nominal feature dimension; (iv) process dose; and (v) at least one process bias. In a further step, the method includes fitting the model with the data set to determine the process dose and the process bias.

Abstract: The invention relates to an antenna device having at least one antenna element. The antenna element is implemented so as to emit electromagnetic radiation in a beam direction advantageously at frequencies in the GHz range and/or receive same from a beam direction. In addition, the antenna element is arranged on a carrier element which is arranged relative to a holding element. In addition, the carrier element is movable relative to the holding element.

Abstract: A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame.

Abstract: The method according to the invention is used for producing optical components, in particular covers for encapsulating micro-systems, wherein at least one reinforcing element, which is produced before being arranged, is arranged on a first substrate, as a result of which a stack is produced. This stack is heated after being connected to a second substrate, as a result of which the first substrate is deformed such that at least one region, covered by the reinforcing element, of the first substrate is moved and/or is inclined or the first substrate is brought into contact with the reinforcing element. In an alternative method according to the invention, the reinforcing element is arranged on the second substrate, wherein this stack is then connected to the first substrate. The first substrate is subsequently heated and deformed such that a region of the first substrate is brought into contact with the reinforcing element.

Abstract: A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface.

Abstract: What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate.

Abstract: The invention relates to an appliance for detecting objects in a detection region, with a radiation device for emitting an electromagnetic scanning beam into at least a part of the detection region and with a device for modulating the scanning beam as well as with a detection device for the detection of reflected radiation from at least a part of the detection region and with a device for evaluating the time response of the detected, reflected radiation, in dependence on the modulation of the scanning beam. According to the invention, one can envisage the radiation device comprising a radiation source radiating a diffusion device scattering the radiation at least partly into the detection region, in order to be able to apply an as powerful as possible laser as a t source without endangering the eye safety or the general safety of persons.

Abstract: A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.

Abstract: What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate.

Abstract: The invention relates to an MEMS structure with a stack made of different layers and a spring-and-mass system varying in its thickness which is formed of the stack, and wherein, starting from a back side of the stack and the substrate, at laterally different positions, the substrate while leaving the first semiconductor layer, or the substrate, the first etch-stop layer and the first semiconductor layer are removed, and to a method for manufacturing such a structure.

Abstract: A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface.

Abstract: In one embodiment, a tool, comprising: a tool stationary portion comprising a nozzle and a film gate; and a tool movable portion comprising a shut off pin opposite the nozzle and the film gate; wherein the shut off pin prevents polymer melt in the nozzle from leaking into a cavity of the tool after injection of polymer into the tool.

Abstract: A monitoring device has a first flame detector, to receive a first batch of radiation, which is emitted by the first flame, a second flame detector, to receive a second batch of radiation, which is emitted by the second flame, a voltage supplying device to apply an alternating voltage with a first half wave and a second half wave to the two flame detectors and an evaluation circuit that is connected to the two flame detectors via a signal input. A first measurement signal that is present at the common signal input during the first half wave is indicative of the intensity of the first batch of radiation. A second measurement signal that is present at the common signal input during the second half wave is indicative of the intensity of the second batch of radiation. The evaluation circuit independently evaluates the first measurement signal and the second measurement signal.

Abstract: The invention relates to a deflection device for a projection apparatus for projecting Lissajous figures onto an observation field which is made to deflect a light beam about at least one first and one second deflection axis for generating Lissajous figures having a deflection unit for producing oscillations about the deflection axes and having a control apparatus for producing control signals for the deflection unit having a first and second control frequency which substantially corresponds to the resonant frequencies of the deflection unit, wherein the deflection unit has a quality factor of >3,000 and the control apparatus includes a feedback loop which is configured to regulate the first and/or second control frequencies in dependence on a measured phasing of the oscillations of the deflection unit so that the maximum amplitude of the oscillations remains in the resonant range of the deflection unit.

Abstract: In one embodiment, a tool, comprising: a tool stationary portion comprising a nozzle and a film gate; and a tool movable portion comprising a shut off pin opposite the nozzle and the film gate; wherein the shut off pin prevents polymer melt in the nozzle from leaking into a cavity of the tool after injection of polymer into the tool.

Abstract: The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.

Abstract: The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Abstract: A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.

Abstract: The method according to the invention is used for producing optical components, in particular covers for encapsulating micro-systems, wherein at least one reinforcing element, which is produced before being arranged, is arranged on a first substrate, as a result of which a stack is produced. This stack is heated after being connected to a second substrate, as a result of which the first substrate is deformed such that at least one region, covered by the reinforcing element, of the first substrate is moved and/or is inclined or the first substrate is brought into contact with the reinforcing element. In an alternative method according to the invention, the reinforcing element is arranged on the second substrate, wherein this stack is then connected to the first substrate. The first substrate is subsequently heated and deformed such that a region of the first substrate is brought into contact with the reinforcing element.