Patents by Inventor Van H. Le

Van H. Le has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10748993
    Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: August 18, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Benjamin Chu-Kung, Harold Hal W. Kennel, Willy Rachmady, Ravi Pillarisetty, Jack T. Kavalieros
  • Publication number: 20200258884
    Abstract: Techniques and mechanisms for providing a complementary metal-oxide-semiconductor (CMOS) circuit which includes a group III-nitride (III-N) material. In an embodiment, an n-type transistor of the CMOS circuit comprises structures which are variously disposed on a group III-N semiconductor material. The n-type transistor is coupled to a p-type transistor of the CMOS circuit, wherein a channel region of the p-type transistor comprises a group III-V semiconductor material. The channel region is configured to conduct current along a first direction, where a surface portion of the group III-N semiconductor material extends along a second direction perpendicular to the second direction. In another embodiment, the group III-N semiconductor material includes a gallium-nitride (GaN) compound, and the group III-V semiconductor material includes a nanopillar of an indium antimonide (InSb) compound.
    Type: Application
    Filed: September 29, 2017
    Publication date: August 13, 2020
    Applicant: INTEL CORPORATION
    Inventors: Willy Rachmady, Ravi Pillarisetty, Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta, Van H. Le
  • Patent number: 10734488
    Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: August 4, 2020
    Assignee: Intel Corporation
    Inventors: Matthew V. Metz, Willy Rachmady, Harold W. Kennel, Van H. Le, Benjamin Chu-Kung, Jack T. Kavalieros, Gilbert Dewey
  • Patent number: 10727339
    Abstract: Vertical semiconductor devices having selectively regrown top contacts and method of fabricating vertical semiconductor devices having selectively regrown top contacts are described. For example, a semiconductor device includes a substrate having a surface. A first source/drain region is disposed on the surface of the substrate. A vertical channel region is disposed on the first source/drain region and has a first width parallel with the surface of the substrate. A second source/drain region is disposed on the vertical channel region and has a second width parallel with and substantially greater than the first width. A gate stack is disposed on and completely surrounds a portion of the vertical channel region.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Gilbert Dewey, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Ravi Pillarisetty, Han Wui Then, Niloy Mukherjee, Sansaptak Dasgupta
  • Patent number: 10727138
    Abstract: A monocrystalline semiconductor layer is formed on a conductive layer on an insulating layer on a substrate. The conductive layer is a part of an interconnect layer. The monocrystalline semiconductor layer extends laterally on the insulating layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Marko Radosavljevic, Benjamin Chu-Kung, Rafael Rios, Gilbert Dewey
  • Publication number: 20200235246
    Abstract: Techniques are disclosed for forming thin-film transistors (TFTs) with low contact resistance. As disclosed in the present application, the low contact resistance can be achieved by intentionally thinning one or both of the source/drain (S/D) regions of the thin-film layer of the TFT device. As the TFT layer may have an initial thickness in the range of 20-65 nm, the techniques for thinning the S/D regions of the TFT layer described herein may reduce the thickness in one or both of those S/D regions to a resulting thickness of 3-10 nm, for example. Intentionally thinning one or both of the S/D regions of the TFT layer induces more electrostatic charges inside the thinned S/D region, thereby increasing the effective dopant in that S/D region. The increase in effective dopant in the thinned S/D region helps lower the related contact resistance, thereby leading to enhanced overall device performance.
    Type: Application
    Filed: January 10, 2018
    Publication date: July 23, 2020
    Applicant: INTEL CORPORATION
    Inventors: Abhishek A. Sharma, Van H. Le, Li Huey Tan, Tristan A. Tronic, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
  • Patent number: 10720508
    Abstract: Methods of selectively nitriding surfaces of semiconductor devices are disclosed. For example, a hardmask is formed on the top portion of the fins to create SOI structure. The hardmask may be formed by nitriding the top portion of the fin. In other embodiments, silicon nitride is grown on the top portion of the fin to form the hard masks. In another example, internal spacers are formed between adjacent nanowires in a gate-all-around structure. The internal spacers may be formed by nitriding the remaining interlayer material between the channel region and source and drain regions.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: July 21, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Scott B. Clendenning, Martin M. Mitan, Szuya S. Liao
  • Publication number: 20200227535
    Abstract: Thin film transistor structures and processes are disclosed that include stacked nanowire bodies to mitigate undesirable short channel effects, which can occur as gate lengths scale down to sub-100 nanometer (nm) dimensions, and to reduce external contact resistance. In an example embodiment, the disclosed structures employ a gate-all-around architecture, in which the gate stack (including a high-k dielectric layer) wraps around each of the stacked channel region nanowires (or nanoribbons) to provide improved electrostatic control. The resulting increased gate surface contact area also provides improved conduction. Additionally, these thin film structures can be stacked with relatively small spacing (e.g., 1 to 20 nm) between nanowire bodies to increase integrated circuit transistor density. In some embodiments, the nanowire body may have a thickness in the range of 1 to 20 nm and a length in the range of 5 to 100 nm.
    Type: Application
    Filed: January 12, 2018
    Publication date: July 16, 2020
    Applicant: INTEL CORPORATION
    Inventors: Seung Hoon Sung, Abhishek A. Sharma, Van H. Le, Gilbert Dewey, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20200227568
    Abstract: Embodiments herein describe techniques for a semiconductor device, which may include a substrate, and a U-shaped channel above the substrate. The U-shaped channel may include a channel bottom, a first channel wall and a second channel wall parallel to each other, a source area, and a drain area. A gate dielectric layer may be above the substrate and in contact with the channel bottom. A gate electrode may be above the substrate and in contact with the gate dielectric layer. A source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 29, 2017
    Publication date: July 16, 2020
    Inventors: Van H. LE, Abhishek A. SHARMA, Benjamin CHU-KUNG, Gilbert DEWEY, Ravi PILLARISETTY, Miriam R. RESHOTKO, Shriram SHIVARAMAN, Li Huey TAN, Tristan A. TRONIC, Jack T. KAVALIEROS
  • Publication number: 20200220024
    Abstract: A back-gated thin-film transistor (TFT) includes a gate electrode, a gate dielectric on the gate electrode, an active layer on the gate dielectric and having source and drain regions and a semiconductor region physically connecting the source and drain regions, a capping layer on the semiconductor region, and a charge trap layer on the capping layer. In an embodiment, a memory cell includes this back-gated TFT and a capacitor, the gate electrode being electrically connected to a wordline and the source region being electrically connected to a bitline, the capacitor having a first terminal electrically connected to the drain region, a second terminal, and a dielectric medium electrically separating the first and second terminals. In another embodiment, an embedded memory includes wordlines extending in a first direction, bitlines extending in a second direction crossing the first direction, and several such memory cells at crossing regions of the wordlines and bitlines.
    Type: Application
    Filed: September 29, 2017
    Publication date: July 9, 2020
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Cory E. Weber, Sean T. Ma, Tahir Ghani, Shriram Shivaraman, Gilbert Dewey
  • Publication number: 20200211911
    Abstract: A semiconductor device may include a first gate electrode and a second gate electrode. A first channel area and a second channel area may be above the first gate electrode, where the first channel area may include a first type channel material, and the second channel area may include a second type channel material. A third channel area and a fourth channel area may be above the second gate electrode, where the third channel area may include the first type channel material, and the fourth channel area may include the second type channel material. The third channel area may be separated from the first channel area by a spacer. An inverter may include the first gate electrode, the first channel area, and the second channel area, while another inverter may include the second gate electrode, the third channel area, and the fourth channel area. Other embodiments may be described/claimed.
    Type: Application
    Filed: September 29, 2017
    Publication date: July 2, 2020
    Inventors: Abhishek A. SHARMA, Van H. LE, Gilbert DEWEY, Willy RACHMADY
  • Publication number: 20200212186
    Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.
    Type: Application
    Filed: September 11, 2015
    Publication date: July 2, 2020
    Applicant: Intel Corporation
    Inventors: Matthew V. Metz, Willy Rachmady, Harold W. Kennel, Van H. Le, Benjamin Chu-Kung, Jack T. Kavalieros, Gilbert Dewey
  • Publication number: 20200203593
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.
    Type: Application
    Filed: June 9, 2016
    Publication date: June 25, 2020
    Applicant: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
  • Publication number: 20200202918
    Abstract: Disclosed herein are thyristors and related devices and techniques. In some embodiments, an integrated circuit (IC) device may include a metal portion and a thyristor on the metal portion. The thyristor may include a stack of alternating p-type and n-type material layers, and the stack may be on the metal portion.
    Type: Application
    Filed: September 14, 2017
    Publication date: June 25, 2020
    Applicant: Intel Corporation
    Inventors: Van H. Le, Abhishek A. Sharma, Ravi Pillarisetty
  • Patent number: 10693008
    Abstract: An apparatus including a semiconductor body including a channel region and junction regions disposed on opposite sides of the channel region, the semiconductor body including a first material including a first band gap; and a plurality of nanowires including a second material including a second band gap different than the first band gap, the plurality of nanowires disposed in separate planes extending through the first material so that the first material surrounds each of the plurality of nanowires; and a gate stack disposed on the channel region. A method including forming a plurality of nanowires in separate planes above a substrate, each of the plurality of nanowires including a material including a first band gap; individually forming a cladding material around each of the plurality of nanowires, the cladding material including a second band gap; coalescing the cladding material; and disposing a gate stack on the cladding material.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: June 23, 2020
    Assignee: Intel Corporation
    Inventors: Niloy Mukherjee, Marko Radosavljevic, Jack T. Kavalieros, Ravi Pillarisetty, Niti Goel, Van H. Le, Gilbert Dewey, Benjamin Chu-Kung
  • Publication number: 20200194434
    Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate oriented in a horizontal direction, and a memory cell including a transistor and a capacitor above the substrate. The transistor includes a gate electrode oriented in a vertical direction substantially orthogonal to the horizontal direction, and a channel layer oriented in the vertical direction, around the gate electrode and separated by a gate dielectric layer from the gate electrode. The capacitor is within an inter-level dielectric layer above the substrate. The capacitor includes a first plate coupled with a second portion of the channel layer of the transistor, and a second plate separated from the first plate by a capacitor dielectric layer. The first plate of the capacitor is also a source electrode of the transistor. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 17, 2018
    Publication date: June 18, 2020
    Inventors: Juan G. ALZATE VINASCO, Abhishek A. SHARMA, Fatih HAMZAOGLU, Bernhard SELL, Pei-Hua WANG, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Chieh-Jen KU, Travis W. LAJOIE, Umut ARSLAN
  • Publication number: 20200185504
    Abstract: An embodiment includes an apparatus comprising: a substrate; a thin film transistor (TFT) comprising: source, drain, and gate contacts; a semiconductor material, comprising a channel, between the substrate and the gate contact; a gate dielectric layer between the gate contact and the channel; and an additional layer between the channel and the substrate; wherein (a)(i) the channel includes carriers selected from the group consisting of hole carriers or electron carriers, (a)(ii) the additional layer includes an insulator material that includes charged particles having a polarity equal to a polarity of the carriers. Other embodiments are described herein.
    Type: Application
    Filed: September 27, 2017
    Publication date: June 11, 2020
    Inventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Tahir Ghani, Gilbert Dewey, Shriram Shivaraman, Sean T. Ma, Benjamin Chu-Kung
  • Publication number: 20200185457
    Abstract: Disclosed herein are selector devices and related devices and techniques. In some embodiments, a selector device may include a first electrode, a second electrode, and a selector material between the first electrode and the second electrode. The selector material may include a dielectric material and a conductive dopant.
    Type: Application
    Filed: August 29, 2017
    Publication date: June 11, 2020
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Ravi Pillarisetty, Van H. Le, Gilbert W. Dewey, Willy Rachmady
  • Publication number: 20200168634
    Abstract: Described herein are apparatuses, systems, and methods associated with a voltage regulator circuit that includes one or more thin-film transistors (TFTs). The TFTs may be formed in the back-end of an integrated circuit. Additionally, the TFTs may include one or more unique features, such as a channel layer treated with a gas or plasma, and/or a gate oxide layer that is thicker than in prior TFTs. The one or more TFTs of the voltage regulator circuit may improve the operation of the voltage regulator circuit and free up front-end substrate area for other devices. Other embodiments may be described and claimed.
    Type: Application
    Filed: September 29, 2017
    Publication date: May 28, 2020
    Inventors: Abhishek A. SHARMA, Van H. LE, Seung Hoon SUNG, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Patent number: 10665688
    Abstract: An apparatus including a substrate; a transistor device on the substrate including a channel and a source and a drain disposed between the channel; a source contact coupled to the source and a drain contact coupled to the drain; and the source and drain each including a composition including a concentration of germanium at an interface with the channel that is greater than a concentration of germanium at a junction with the source contact. A method including defining an area on a substrate for a transistor device; forming a source and a drain each including an interface with the channel; and forming a contact to one of the source and the drain, wherein a composition of each of the source and the drain includes a concentration of germanium at an interface with the channel that is greater than a concentration at a junction with the contact.
    Type: Grant
    Filed: December 24, 2015
    Date of Patent: May 26, 2020
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Matthew V. Metz, Benjamin Chu-Kung, Van H. Le, Gilbert Dewey, Ashish Agrawal, Jack T. Kavalieros