Patents by Inventor Van H. Le

Van H. Le has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200152635
    Abstract: Embodiments herein describe techniques for a semiconductor device including a TFT having a gate electrode with a gate length determined by a spacer. Embodiments may include a gate electrode above a substrate, a channel layer above the gate electrode, and a source electrode, a drain electrode, and a spacer above the channel layer. The drain electrode may be separated from the source electrode by the spacer. The drain electrode and the source electrode may have different widths or include different materials. Furthermore, the spacer may overlap with the gate electrode, hence the gate length of the gate electrode may be determined by the spacer width. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: March 31, 2017
    Publication date: May 14, 2020
    Inventors: ABHISHEK A. SHARMA, VAN H. LE, GILBERT DEWEY, SHRIRAM SHIVARAMAN, YIH WANG, TAHIR GHANI, JACK T. KAVALIEROS
  • Patent number: 10644111
    Abstract: An embodiment includes a device comprising: a substrate; a dielectric layer on the substrate and including a trench; a first portion of the trench including a first material that comprises at least one of a group III-V material and a group IV material; and a second portion of the trench, located between the first portion and the substrate, which includes a second material and an upper region and a lower region; wherein: (a)(i) the second material in the upper region has fewer defects than the second material in the lower region, and (a)(ii) the first material is strained. Other embodiments are described herein.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: May 5, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Van H. Le, Ashish Agrawal, Jack T. Kavalieros, Matthew V. Metz, Seung Hoon Sung, Rafael Rios, Gilbert Dewey
  • Patent number: 10644123
    Abstract: In accordance with disclosed embodiments, there are provided systems, methods, and apparatuses for implementing a high mobility low contact resistance semiconducting oxide in metal contact vias for thin film transistors.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: May 5, 2020
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Van H. Le, Rafael Rios, Jack T. Kavalieros, Shriram Shivaraman
  • Publication number: 20200135700
    Abstract: An apparatus is formed. The apparatus includes a stack of semiconductor chips. The stack of semiconductor chips includes a logic chip and a memory stack, wherein, the logic chip includes at least one of a GPU and CPU. The apparatus also includes a semiconductor chip substrate. The stack of semiconductor chips are mounted on the semiconductor chip substrate. At least one other logic chip is mounted on the semiconductor chip substrate. The semiconductor chip substrate includes wiring to interconnect the stack of semiconductor chips to the at least one other logic chip.
    Type: Application
    Filed: December 26, 2019
    Publication date: April 30, 2020
    Inventors: Abhishek SHARMA, Hui Jae YOO, Van H. LE, Huseyin Ekin SUMBUL, Phil KNAG, Gregory K. CHEN, Ram KRISHNAMURTHY
  • Publication number: 20200127142
    Abstract: Thin film core-shell fin and nanowire transistors are described. In an example, an integrated circuit structure includes a fin on an insulator layer above a substrate. The fin has a top and sidewalls. The fin is composed of a first semiconducting oxide material. A second semiconducting oxide material is on the top and sidewalls of the fin. A gate electrode is over a first portion of the second semiconducting oxide material on the top and sidewalls of the fin. A first conductive contact is adjacent the first side of the gate electrode, the first conductive contact over a second portion of the second semiconducting oxide material on the top and sidewalls of the fin. A second conductive contact is adjacent the second side of the gate electrode, the second conductive contact over a third portion of the second semiconducting oxide material on the top and sidewalls of the fin.
    Type: Application
    Filed: June 20, 2017
    Publication date: April 23, 2020
    Inventors: Gilbert DEWEY, Van H. LE, Abhishek A. SHARMA, Shriram SHIVARAMAN, Ravi PILLARISETTY, Tahir GHANI, Jack T. KAVALIEROS
  • Publication number: 20200119169
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a base; a fin extending away from the base, wherein the fin includes a quantum well layer; and one or more gates disposed on the fin. In some such embodiments, the one or more gates may include first, second, and third gates. Spacers may be disposed on the sides of the first and second gates, such that a first spacer is disposed on a side of the first gate proximate to the second gate, and a second spacer, physically separate from the first spacer, is disposed on a side of the second gate proximate to the first gate. The third gate may be disposed on the fin between the first and second gates and extend between the first and second spacers.
    Type: Application
    Filed: June 8, 2016
    Publication date: April 16, 2020
    Applicant: Intel Corporation
    Inventors: Ravi Pillarisetty, Jeanette M. Roberts, David J. Michalak, Van H. Le, Zachary R. Yoscovits, James S. Clarke
  • Publication number: 20200105892
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT). The transistor includes a source electrode oriented in a horizontal direction, and a channel layer in contact with a portion of the source electrode and oriented in a vertical direction substantially orthogonal to the horizontal direction. A gate dielectric layer conformingly covers a top surface of the source electrode and surfaces of the channel layer. A gate electrode conformingly covers a portion of the gate dielectric layer. A drain electrode is above the channel layer, oriented in the horizontal direction. A current path is to include a current portion from the source electrode along a gated region of the channel layer under the gate electrode in the vertical direction, and a current portion along an ungated region of the channel layer in the horizontal direction from the gate electrode to the drain electrode. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Nazila HARATIPOUR, Tahir GHANI, Jack T. KAVALIEROS, Gilbert DEWEY, Benjamin CHU-KUNG, Seung Hoon SUNG, Van H. LE, Shriram SHIVARAMAN, Abhishek SHARMA
  • Publication number: 20200105833
    Abstract: A DIMA semiconductor structure is disclosed. The DIMA semiconductor structure includes a frontend including a semiconductor substrate, a transistor switch of a memory cell coupled to the semiconductor substrate and a computation circuit on the periphery of the frontend coupled to the semiconductor substrate. Additionally, the DIMA includes a backend that includes an RRAM component of the memory cell that is coupled to the transistor switch.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Jack T. KAVALIEROS, Ian A. YOUNG, Ram KRISHNAMURTHY, Ravi PILLARISETTY, Sasikanth MANIPATRUNI, Gregory CHEN, Hui Jae YOO, Van H. LE, Abhishek SHARMA, Raghavan KUMAR, Huichu LIU, Phil KNAG, Huseyin SUMBUL
  • Publication number: 20200098934
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, where the channel layer includes a first region and a second region, and the first region has a first dopant concentration. A gate electrode is above the first region of the channel layer and separated from the channel layer by a gate dielectric layer. A spacer is next to the gate electrode to separate the gate electrode from a drain electrode or a source electrode above the channel layer. The spacer includes a dopant material in contact with the second region of the channel layer, and the second region has a second dopant concentration different from the first dopant concentration in the first region. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: Shriram SHIVARAMAN, Gilbert DEWEY, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Seung Hoon SUNG, Nazila HARATIPOUR, Abhishek SHARMA
  • Publication number: 20200098931
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate oriented in a horizontal direction and a transistor above the substrate. The transistor includes a gate electrode above the substrate, a gate dielectric layer around the gate electrode, and a channel layer around the gate dielectric layer, all oriented in a vertical direction substantially orthogonal to the horizontal direction. Furthermore, a first metal electrode located in a first metal layer is coupled to a first portion of the channel layer by a first short via, and a second metal electrode located in a second metal layer is coupled to a second portion of the channel layer by a second short via. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Abhishek SHARMA, Nazila HARATIPOUR, Seung Hoon SUNG, Benjamin CHU-KUNG, Gilbert DEWEY, Shriram SHIVARAMAN, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Matthew V. METZ, Arnab SEN GUPTA
  • Publication number: 20200098754
    Abstract: Techniques and mechanisms for operating transistors that are in a stacked configuration. In an embodiment, an integrated circuit (IC) device includes transistors arranged along a line of direction which is orthogonal to a surface of a semiconductor substrate. A first epitaxial structure and a second epitaxial structure are coupled, respectively, to a first channel structure of a first transistor and a second channel structure of a second transistor. The first epitaxial structure and the second epitaxial structure are at different respective levels relative to the surface of the semiconductor substrate. A dielectric material is disposed between the first epitaxial structure and the second epitaxial structure to facilitate electrical insulation of the channels from each other. In another embodiment, the stacked transistors are coupled to provide a complementary metal-oxide-semiconductor (CMOS) inverter circuit.
    Type: Application
    Filed: June 29, 2017
    Publication date: March 26, 2020
    Inventors: Ravi PILLARISETTY, Willy RACHMADY, Marko RADOSAVLJEVIC, Van H. LE, Jack T. KAVALIEROS
  • Publication number: 20200098875
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a contact electrode having a conductive material above the substrate, an epitaxial layer above the contact electrode, and a channel layer including a channel material above the epitaxial layer and above the contact electrode. The channel layer is in contact at least partially with the epitaxial layer. A conduction band of the channel material and a conduction band of a material of the epitaxial layer are substantially aligned with an energy level of the conductive material of the contact electrode. A bandgap of the material of the epitaxial layer is smaller than a bandgap of the channel material. Furthermore, a gate electrode is above the channel layer, and separated from the channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Seung Hoon SUNG, Justin WEBER, Matthew METZ, Arnab SEN GUPTA, Abhishek SHARMA, Benjamin CHU-KUNG, Gilbert DEWEY, Charles KUO, Nazila HARATIPOUR, Shriram SHIVARAMAN, Van H. LE, Tahir GHANI, Jack T. KAVALIEROS, Sean MA
  • Publication number: 20200098887
    Abstract: Embodiments herein describe techniques for a transistor above the substrate. The transistor includes a first gate dielectric layer with a first gate dielectric material above a gate electrode, and a second dielectric layer with a second dielectric material above a portion of the first gate dielectric layer. A first portion of a channel layer overlaps with only the first gate dielectric layer, while a second portion of the channel layer overlaps with the first gate dielectric layer and the second dielectric layer. A first portion of a contact electrode overlaps with the first portion of the channel layer, and overlaps with only the first gate dielectric layer, while a second portion of the contact electrode overlaps with the second portion of the channel layer, and overlaps with the first gate dielectric layer and the second dielectric layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Gilbert DEWEY, Van H. LE, Abhishek SHARMA, Jack T. KAVALIEROS, Sean MA, Seung Hoon SUNG, Nazila HARATIPOUR, Tahir GHANI, Justin WEBER, Shriram SHIVARAMAN
  • Publication number: 20200098930
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate oriented in a horizontal direction and a transistor above the substrate. The transistor includes a gate electrode above the substrate, a gate dielectric layer around the gate electrode, and a channel layer around the gate dielectric layer, all oriented in a vertical direction substantially orthogonal to the horizontal direction. Furthermore, a source electrode or a drain electrode is above or below the channel layer, separated from the gate electrode, and in contact with a portion of the channel layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: Van H. LE, Tahi GHANI, Jack T. KAVALIEROS, Gilbert DEWEY, Matthew METZ, Miriam RESHOTKO, Benjamin CHU-KUNG, Shriram SHIVARAMAN, Abhishek SHARMA, NAZILA HARATIPOUR
  • Publication number: 20200098926
    Abstract: Disclosed herein are transistors with ferroelectric gates, and related methods and devices. For example, in some embodiments, a transistor may include a channel material, and a gate stack, and the gate stack may include a gate electrode material and a ferroelectric material between the gate electrode material and the channel material.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Ravi Pillarisetty, Brian S. Doyle, Elijah V. Karpov, Prashant Majhi, Gilbert W. Dewey, Benjamin Chu-Kung, Van H. Le, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20200098880
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a gate electrode above the substrate, and a channel layer above the substrate, separated from the gate electrode by a gate dielectric layer. The transistor further includes a contact electrode above the channel layer and in contact with a contact area of the channel layer. The contact area has a thickness determined based on a Schottky barrier height of a Schottky barrier formed at an interface between the contact electrode and the contact area, a doping concentration of the contact area, and a contact resistance at the interface between the contact electrode and the contact area. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Abhishek SHARMA, Cory WEBER, Van H. LE, Sean MA
  • Publication number: 20200098657
    Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a conductive contact stack above the substrate and in contact with the channel layer, and a gate electrode separated from the channel layer by a gate dielectric layer. The conductive contact stack may be a drain electrode or a source electrode. In detail, the conductive contact stack includes at least a metal layer, and at least a metal sealant layer to reduce hydrogen diffused into the channel layer through the conductive contact stack. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Arnab SEN GUPTA, Matthew METZ, Benjamin CHU-KUNG, Abhishek SHARMA, Van H. LE, Miriam R. RESHOTKO, Christopher J. JEZEWSKI, Ryan ARCH, Ande KITAMURA, Jack T. KAVALIEROS, Seung Hoon SUNG, Lawrence WONG, Tahir GHANI
  • Publication number: 20200098932
    Abstract: Embodiments herein describe techniques for a semiconductor device including a capacitor and a transistor above the capacitor. A contact electrode may be shared between the capacitor and the transistor. The capacitor includes a first plate above a substrate, and the shared contact electrode above the first plate and separated from the first plate by a capacitor dielectric layer, where the shared contact electrode acts as a second plate for the capacitor. The transistor includes a gate electrode above the substrate and above the capacitor; a channel layer separated from the gate electrode by a gate dielectric layer, and in contact with the shared contact electrode; and a source electrode above the channel layer, separated from the gate electrode by the gate dielectric layer, and in contact with the channel layer. The shared contact electrode acts as a drain electrode of the transistor. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Travis W. LAJOIE, Abhishek SHARMA, Van H. LE, Chieh-Jen KU, Pei-Hua WANG, Jack T. KAVALIEROS, Bernhard SELL, Tahir GHANI, Juan ALZATE VINASCO
  • Publication number: 20200098874
    Abstract: Embodiments herein describe techniques for an integrated circuit that includes a substrate, a semiconductor device on the substrate, and a contact stack above the substrate and coupled to the semiconductor device. The contact stack includes a contact metal layer, and a semiconducting oxide layer adjacent to the contact metal layer. The semiconducting oxide layer includes a semiconducting oxide material, while the contact metal layer includes a metal with a sufficient Schottky-barrier height to induce an interfacial electric field between the semiconducting oxide layer and the contact metal layer to reject interstitial hydrogen from entering the semiconductor device through the contact stack. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: Justin WEBER, Harold KENNEL, Abhishek SHARMA, Christopher JEZEWSKI, Matthew V. METZ, Tahir GHANI, Jack T. KAVALIEROS, Benjamin CHU-KUNG, Van H. LE, Arnab SEN GUPTA
  • Publication number: 20200091274
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a gate dielectric layer adjacent to the channel layer, and a gate electrode separated from the channel layer by the gate dielectric layer. The gate dielectric layer includes a non-linear gate dielectric material. The gate electrode, the channel layer, and the gate dielectric layer form a non-linear capacitor. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 18, 2018
    Publication date: March 19, 2020
    Inventors: Abhishek SHARMA, Ravi PILLARISETTY, Brian DOYLE, Elijah KARPOV, Prashant MAJHI, Gilbert DEWEY, Benjamin CHU-KUNG, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI