Patents by Inventor Varun Sharma

Varun Sharma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10453701
    Abstract: Processes are provided herein for deposition of organic films. Organic films can be deposited, including selective deposition on one surface of a substrate relative to a second surface of the substrate. For example, polymer films may be selectively deposited on a first metallic surface relative to a second dielectric surface. Selectivity, as measured by relative thicknesses on the different layers, of above about 50% or even about 90% is achieved. The selectively deposited organic film may be subjected to an etch process to render the process completely selective. Processes are also provided for particular organic film materials, independent of selectivity. Masking applications employing selective organic films are provided. Post-deposition modification of the organic films, such as metallic infiltration and/or carbon removal, is also disclosed.
    Type: Grant
    Filed: April 12, 2017
    Date of Patent: October 22, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Eva E. Tois, Hidemi Suemori, Viljami J. Pore, Suvi P. Haukka, Varun Sharma, Jan Willem Maes, Delphine Longrie, Krzysztof Kachel
  • Publication number: 20190287769
    Abstract: A reactor for processing substrates and methods for manufacturing and using the reactor are disclosed. Specifically, the reactor can include a material that forms gas compounds. The gas compounds are then easily removed from the reactor, thus reducing or avoiding contamination of the substrates in the reactor that would otherwise arise.
    Type: Application
    Filed: March 16, 2018
    Publication date: September 19, 2019
    Inventors: Tom Blomberg, Varun Sharma, Chiyu Zhu
  • Publication number: 20190272270
    Abstract: A database system populates various fields with information from a plurality of data sources which is matched to geographic and segment information for different reference identifiers. A series of data unions provide a selectable result set. A selection of elements from the selectable result set are used to generate qualifiers that are monitored in real time to determine when the qualifiers have been satisfied in order to set a semaphore allowing access to the selection of elements.
    Type: Application
    Filed: May 17, 2019
    Publication date: September 5, 2019
    Inventors: Ranjan Dutta, Varun Sharma, Aman Madaan, Somashekhar Pammar, Zian Huang
  • Publication number: 20190249312
    Abstract: Thermal atomic layer etching processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase halide reactant and a second vapor halide reactant. In some embodiments, the first reactant may comprise an organic halide compound. During the thermal ALE cycle, the substrate is not contacted with a plasma reactant.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 15, 2019
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi P. Haukka, Marko J. Tuominen, Chiyu Zhu
  • Publication number: 20190242019
    Abstract: Thermal atomic layer etching processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase halide reactant and a second vapor halide reactant. In some embodiments, the first reactant may comprise an organic halide compound. During the thermal ALE cycle, the substrate is not contacted with a plasma reactant.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 8, 2019
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu
  • Publication number: 20190244786
    Abstract: Atomic layer etching (ALE) processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase non-metal halide reactant and a second vapor phase halide reactant. In some embodiments both the first and second reactants are chloride reactants. In some embodiments the first reactant is fluorinating gas and the second reactant is a chlorinating gas. In some embodiments a thermal ALE cycle is used in which the substrate is not contacted with a plasma reactant.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 8, 2019
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi P. Haukka, Marko J. Tuominen, Chiyu Zhu
  • Patent number: 10373820
    Abstract: Processes are provided herein for deposition of organic films. Organic films can be deposited, including selective deposition on one surface of a substrate relative to a second surface of the substrate. For example, polymer films may be selectively deposited on a first metallic surface relative to a second dielectric surface. Selectivity, as measured by relative thicknesses on the different layers, of above about 50% or even about 90% is achieved. The selectively deposited organic film may be subjected to an etch process to render the process completely selective. Processes are also provided for particular organic film materials, independent of selectivity.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: August 6, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Eva E. Tois, Hidemi Suemori, Viljami J. Pore, Suvi P. Haukka, Varun Sharma
  • Patent number: 10346400
    Abstract: A database system populates various fields with information from a plurality of data sources which is matched to geographic and segment information for different reference identifiers. A series of data unions provide a selectable result set. A selection of elements from the selectable result set are used to generate qualifiers that are monitored in real time to determine when the qualifiers have been satisfied in order to set a semaphore allowing access to the selection of elements.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: July 9, 2019
    Assignee: VISA INTERNATIONAL SERVICE ASSOCIATION
    Inventors: Ranjan Dutta, Varun Sharma, Aman Madaan, Somashekhar Pammar, Zian Huang
  • Patent number: 10280519
    Abstract: Thermal atomic layer etching processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase halide reactant and a second vapor halide reactant. In some embodiments, the first reactant may comprise an organic halide compound. During the thermal ALE cycle, the substrate is not contacted with a plasma reactant.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: May 7, 2019
    Assignee: ASM IP HOLDING B.V.
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu
  • Patent number: 10283319
    Abstract: Atomic layer etching (ALE) processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase non-metal halide reactant and a second vapor phase halide reactant. In some embodiments both the first and second reactants are chloride reactants. In some embodiments the first reactant is fluorinating gas and the second reactant is a chlorinating gas. In some embodiments a thermal ALE cycle is used in which the substrate is not contacted with a plasma reactant.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: May 7, 2019
    Assignee: ASM IP HOLDING B.V.
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu
  • Patent number: 10273584
    Abstract: Thermal atomic layer etching processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase halide reactant and a second vapor halide reactant. In some embodiments, the first reactant may comprise an organic halide compound. During the thermal ALE cycle, the substrate is not contacted with a plasma reactant.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: April 30, 2019
    Assignee: ASM IP HOLDING B.V.
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu
  • Publication number: 20190096708
    Abstract: A chemical dispensing apparatus for providing a chlorine vapor to a reaction chamber is disclosed. The chemical dispensing apparatus may include: a chemical storage vessel configured for storing a chlorine-containing chemical species, a reservoir vessel in fluid communication with the chemical storage vessel, the reservoir vessel configured for converting the chlorine-containing chemical species to the chlorine vapor, and a reaction chamber in fluid communication with the reservoir vessel. Methods for dispensing a chlorine vapor to a reaction chamber are also disclosed.
    Type: Application
    Filed: September 28, 2017
    Publication date: March 28, 2019
    Inventor: Varun Sharma
  • Patent number: 10241777
    Abstract: A method and a system are provided to manage analytics assets associated with at least one computer accessible to an organization using operating system (OS) containers. The method comprising receiving a request to process of a task on the user computing device. The method further select a set of analytics assets from a first category, based on at least one of a role of the user in the organization and a historical usage of the one or more analytics assets or a second category that corresponds to the user and are included in the container image associated with the user. The method further update the container image of the user, based on at least the selection of the set of analytics assets from the first category. The method further render the selected set of analytics assets through the updated container image on the user computing device of the user.
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: March 26, 2019
    Assignee: CONDUENT BUSINESS SERVICES, LLC
    Inventors: Rahul Ghosh, Varun Sharma, Ajith Ramanath, Atul Singh, Koustuv Dasgupta
  • Publication number: 20190017170
    Abstract: Passivation layers to inhibit vapor deposition can be used on reactor surfaces to minimize deposits while depositing on a substrate housed therein, or on particular substrate surfaces, such as metallic surfaces on semiconductor substrates to facilitate selective deposition on adjacent dielectric surfaces. Passivation agents that are smaller than typical self-assembled monolayer precursors can have hydrophobic or non-reactive ends and facilitate more dense passivation layers more quickly than self-assembled monolayers, particularly over complex three-dimensional structures.
    Type: Application
    Filed: July 12, 2018
    Publication date: January 17, 2019
    Inventors: Varun Sharma, Eva Tois
  • Publication number: 20180374126
    Abstract: A system and method to communicate individualized/customized messages to a vehicle based on the location of the vehicle, operation statuses the vehicle, and/or mobile devices of occupants of the vehicle.
    Type: Application
    Filed: January 6, 2017
    Publication date: December 27, 2018
    Inventors: Ajit Vilasrao Patil, Santosh Lachhman Achhra, Martin Enriquez, Sukalyan Chakraborty, Varun Sharma, Satyanarayan Belur, Diane C. Salmon, Michael Lemberger, Kelvan Howard
  • Patent number: 10152557
    Abstract: Systems and methods offer an efficient approach to computing similarity rankings in bipartite graphs. An example system includes at least one processor and memory storing a bipartite graph having a first set and a second set of nodes, with nodes in the first set being connected to nodes in the second set by edges. The memory also stores instructions that, when executed by the at least one processor, cause the system to assign each node in the second set to one of a plurality of categories and, for each of the plurality of categories, generate a subgraph. The subgraph comprises of a subset of nodes in the first set and edges linking the nodes in the subset, where the nodes in the subset are selected based on connection to a node in the second set that is assigned to the category. The system uses the subgraph to respond to queries.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: December 11, 2018
    Assignee: Google LLC
    Inventors: Seyed Vahab Mirrokni Banadaki, Silvio Lattanzi, Jonathan Ezra Feldman, Alessandro Epasto, Stefano Leonardi, Hugh Lynch, Varun Sharma
  • Patent number: 10051064
    Abstract: A method and a system for recommending services to a requestor over a communication network. A request comprising one or more keywords and one or more service level agreements (SLAs), is received from a requestor computing device over the communication network, to process one or more tasks. One or more first services from one or more available services are selected based on the request. For a first service from the one or more first services, a first score and a second score is determined. The one or more first services are ranked based on the first score and the second score. A recommendation of the one or more first services is transmitted to the requestor based on the ranking.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: August 14, 2018
    Assignee: Conduent Business Services, LLC
    Inventors: Shruti Kunde, Tridib Mukherjee, Varun Sharma, Aditya Hegde
  • Publication number: 20180211273
    Abstract: A database system populates various fields with information from a plurality of data sources which is matched to geographic and segment information for different reference identifiers. A series of data unions provide a selectable result set. A selection of elements from the selectable result set are used to generate qualifiers that are monitored in real time to determine when the qualifiers have been satisfied in order to set a semaphore allowing access to the selection of elements.
    Type: Application
    Filed: January 24, 2017
    Publication date: July 26, 2018
    Inventors: Ranjan Dutta, Varun Sharma, Aman Madaan, Somashekhar Pammar, Zian Huang
  • Publication number: 20180182597
    Abstract: Atomic layer etching (ALE) processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase non-metal halide reactant and a second vapor phase halide reactant. In some embodiments both the first and second reactants are chloride reactants. In some embodiments the first reactant is fluorinating gas and the second reactant is a chlorinating gas. In some embodiments a thermal ALE cycle is used in which the substrate is not contacted with a plasma reactant.
    Type: Application
    Filed: December 7, 2017
    Publication date: June 28, 2018
    Inventors: Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu
  • Publication number: 20180176311
    Abstract: Described herein is a system and method for estimating wait times at various resource providers based on transaction information submitted to a processing network. In some embodiments, the system identifies a time distance between a target resource provider and a plurality of other resource providers in order to identify resource providers local to the target resource provider. Additionally, the system may identify segments for each of a plurality of users on the system. The processing network may identify recent transaction requests received from each of the resource providers local to the target resource provider. The processing network may then identify users associated with each of those transaction requests. Based on the segments assigned to each of those users, the system may estimate and arrival rate, and subsequently an estimated wait time, for the target resource provider.
    Type: Application
    Filed: December 16, 2016
    Publication date: June 21, 2018
    Inventors: Varun Sharma, Patrick Egbuchulam, Zian Huang, Nandakumar Kandaloo, Srijoy Aditya