Abstract: A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.

Abstract: A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.

Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

Abstract: A gyroscope comprises four Coriolis masses arranged around a center point where a lateral axis crosses a transversal axis orthogonally in the device plane. The first and second masses are aligned on the lateral axis, and the third and fourth masses are aligned on the transversal axis. The gyroscope further comprises four pairs of elongated mass elements. The mass elements of the first pair are transversally aligned on opposite sides of the lateral axis outside of the first mass. The mass elements of the second pair are transversally aligned on opposite sides of the lateral axis outside of the second mass. The mass elements of the third pair are laterally aligned on opposite sides of the first transversal axis outside of the third mass. The mass elements of the fourth pair are laterally aligned on opposite sides of the first transversal axis outside of the fourth mass.

Abstract: This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.

Abstract: A capacitive micromechanical accelerometer comprising a first proof mass, a second proof mass, a third proof mass and a fourth proof mass. Each proof mass is configured as a seesaw which undergoes rotation out of the xy-plane in response to z-axis acceleration. The four proof masses are suspended from the same central anchor point with torsionally flexible suspension arrangements. Errors introduced into the output signal by wafer bending can be automatically compensated in a differential capacitive measurement.

Abstract: The disclosure relates to a microelectromechanical device where the device structure includes a rotating mass structure and a linear mass structure. The rotating mass structure is formed of two rotating mass parts elastically coupled to the support through one or more springs that enable rotary motion of each of the rotating mass parts about respective rotary axes that extend parallel to each other along a first in-plane direction (IP1). The linear mass structure includes at least one elongate rigid body that extends in a second in-plane direction (IP2). One end of the linear mass structure is coupled to the first rotating mass part and the other end of the linear mass structure is coupled to the second rotating mass part such that rotary motions of the first and second masses result into linear motion of the linear mass structure in the out-of-plane direction (OP).

Abstract: This disclosure describes a multiaxis gyroscope comprising a first proof mass quartet centered around a first quartet center point and a second proof mass quartet centered around a second quartet center point. In the primary oscillation mode all masses in each proof mass quartet move simultaneously either radially toward and away from the corresponding quartet center point, or in the same tangential direction in relation to the corresponding quartet center point.

Abstract: A scanning microelectromechanical reflector system comprising a mobile reflector mass and a mobile frame mass which surrounds the mobile reflector mass when the reflector plane coincides with the mobile frame plane. The mobile frame mass is suspended from a fixed frame which at least partly surrounds the mobile frame mass when the mobile frame plane coincides with the fixed frame plane. The reflector system further comprises a pair of first torsion beams aligned on a first axis in the mobile frame plane, and one or more first actuation units which can be configured to rotate the reflector mass and the mobile frame mass about the first axis.

Abstract: A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.

Abstract: A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.

Abstract: The disclosure relates to a microelectromechanical gyroscope which comprises first and second proof masses which form a first proof mass pair and third and fourth proof masses which form a second proof mass pair. The oscillation of the first and second proof mass pairs is synchronized by a synchronization element which comprises a ringlike body and torsion bars which extend along the x-axis from the ringlike body to the first, second, third and fourth proof masses.

Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.

Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using at least two symmetric out-of-plane proof masses for both out-of-plane and in-plane axes. Movement of the proof masses in one or more in-plane sense axes is measured by comb capacitors with mirrored comb electrodes that minimise cross-axis error from in-plane movement of the proof mass out of the sense axis of the capacitor. The two out-of-plane proof masses rotate in opposite directions, thus maintaining their combined centre of mass at the centre of the accelerometer even as they rotate out of plane.

Abstract: The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.

Abstract: A capacitive micromechanical accelerometer comprising a first proof mass, a second proof mass, a third proof mass and a fourth proof mass. Each proof mass is configured as a seesaw which undergoes rotation out of the xy-plane in response to z-axis acceleration. The four proof masses are suspended from the same central anchor point with torsionally flexible suspension arrangements. Errors introduced into the output signal by wafer bending can be automatically compensated in a differential capacitive measurement.

Abstract: This disclosure describes a capacitive micromechanical accelerometer with at least a first sensor which comprises a rotor which is a two-sided seesaw frame. The rotor comprises one or more first damping plates on the first side of its rotation axis and one or more first damping plates on the second side of its rotation axis. One or more second damping plates are fixed to the inner package plane above or below at least some of the one or more first damping plates, so that at least one first damping plate overlaps with the projection of a second damping plate on each side of the axis. The frame-shaped rotor may surround second and third acceleration sensors located in the substrate plane.

Abstract: A micromechanical accelerometer comprises a sensor for measuring acceleration along a vertical axis perpendicular to a substrate plane, and an accelerometer package with at least one inner package plane adjacent and parallel to the substrate plane. The first sensor comprises a rotor which is mobile in relation to the substrate, a rotor suspender and one or more stators which are immobile in relation to the substrate. The rotor is a seesaw frame where longitudinal rotor bar comprise one or more first deflection electrodes, and second deflection electrodes are fixed to the inner package plane above or below each of the one or more first deflection electrodes, so that they overlap. The accelerometer can perform a self-test by applying a test voltage to at least one first deflection electrode and at least one second deflection electrode. A self-test response signal can be read with a measurement between rotor and stator electrodes.

Abstract: A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.

Abstract: A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.