Abstract: A nozzle assembly for an inkjet printhead is provided. The nozzle assembly comprises a nozzle chamber having a roof, the roof having a moving portion moveable relative to a static portion and a nozzle opening defined in the roof, such that movement of the moving portion relative to the static portion causes ejection of ink through the nozzle opening. The nozzle assembly also comprises an actuator for moving the moving portion relative to the static portion, and a mechanical seal interconnecting the moving portion and the static portion. The mechanical seal comprises a polymeric material selected from the group comprising: polymerized siloxanes and fluorinated polyolefins.

Abstract: An inkjet nozzle assembly includes: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator includes: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.

Abstract: A thermal bend actuator comprising: (a) a pair of electrical contacts positioned at one end of the actuator; (b) an active beam connected to the electrical contacts and extending longitudinally away from the contacts, the active beam defining a bent current flow path between the contacts; and (c) a passive beam fused to the active beam. When a current is passed through the active beam, the active beam heats and expands relative to the passive beam, resulting in bending of the actuator. The active beam comprises a resistive heating bar having a relatively smaller cross-sectional area than any other part of the current flow path. Heating of the active beam is concentrated in the heating bar.

Abstract: A printhead integrated circuit comprises a substrate having drive circuitry and a plurality of nozzle assemblies positioned on the substrate. Each nozzle assembly has a moving portion moveable relative to a stationary portion for ejection of ink. The printhead integrated circuit is covered with a polymeric layer. The polymeric layer covers a gap defined between each moving portion and each stationary portion.

Abstract: A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam is comprised of first and second layers, and the second layer is sandwiched between the first layer and the active beam. The second layer is relatively more thermally insulating than the first layer.

Abstract: A method of fabricating a thermal bend actuator comprises the steps of: (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold; (b) depositing a second layer comprised of silicon dioxide onto the first layer; (c) depositing an active beam layer onto the second layer; (d) etching the active beam layer, the first layer and the second layer to define the thermal bend actuator; and (e) releasing the thermal bend actuator by removing the sacrificial scaffold.

Abstract: A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.

Abstract: An inkjet printer configured for ejecting ink droplets having a volume in the range of 1 to 2.5 pL, the printer comprising: a printhead having a plurality of nozzles assemblies, each nozzle assembly comprising: a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet, the nozzle opening having a maximum dimension in the range of 4 to 12 microns; and a bend actuator for ejecting ink droplets from the nozzle opening by generating a positive pressure pulse in the ink during bending of the actuator; and an ink supply system configured for supplying ink to the printhead at a positive hydrostatic pressure in the range of 1 to 300 mm H2O.

Abstract: An inkjet nozzle assembly comprises: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator comprises: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.

Abstract: A method of fabricating a printhead having a hydrophobic ink ejection face is provided. The method comprises the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face; (b) depositing a layer of relatively hydrophobic polymeric material onto the nozzle surface, the polymeric material being resistant to removal by ashing; and (c) defining a plurality of nozzle openings in the nozzle surface, thereby providing a printhead having a relatively hydrophobic ink ejection face. Steps (b) and (c) may be performed in any order.

Abstract: A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.

Abstract: A MEMS integrated circuit comprises: a silicon substrate having a passivated CMOS layer, a MEMS layer disposed on the passivated CMOS layer, and a polymer layer disposed on the MEMS layer. The CMOS layer comprises drive circuitry for actuating actuator devices in the MEMS layer and the polymer layer comprises a polymerized siloxane.

Abstract: A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.

Abstract: A thermal bend actuator, having a plurality of elements, is provided. The actuator includes a first active element for connection to drive circuitry a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. The second element includes a material having negative thermal expansion.

Abstract: A wafer assembly comprises a wafer having a MEMS layer formed on a frontside and a polymer coating covering the MEMS layer. A holding means is releasably attached to the polymer coating so that the wafer assembly facilitates performance of backside operations on a backside of the wafer. The polymer coating is comprised of a polymerized siloxane.

Abstract: An inkjet printer configured for ejecting ink droplets having a volume in the range of 1 to 2.5 pL, the printer comprising: a printhead having a plurality of nozzles assemblies, each nozzle assembly comprising: a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet, the nozzle opening having a maximum dimension in the range of 4 to 12 microns; and a bend actuator for ejecting ink droplets from the nozzle opening by generating a positive pressure pulse in the ink during bending of the actuator; and an ink supply system configured for supplying ink to the printhead at a positive hydrostatic pressure in the range of 1 to 300 mm H2O.

Abstract: An inkjet printer comprising: a printhead having a plurality of nozzles assemblies, each nozzle assembly comprising: a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet; and a bend actuator for ejecting ink droplets from the nozzle opening by generating a positive pressure pulse in the ink during bending of the actuator; and an ink supply system for supplying ink to the printhead; and means for varying a hydrostatic pressure of ink supplied to the printhead, wherein increasing the hydrostatic ink pressure increases a volume of the ejected ink droplets, and decreasing the hydrostatic ink pressure decreases a volume of the ejected ink droplets.

Abstract: A printhead having a hydrophobic ink ejection face is provided. At least part of the ink ejection face is coated with a hydrophobic polymeric material selected from the group comprising: polymerized siloxanes and fluorinated polyolefins.

Abstract: A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam is comprised of first and second layers, and the second layer is sandwiched between the first layer and the active beam. The second layer is relatively more thermally insulating than the first layer.

Abstract: A thermal bend actuator, having a plurality of elements, is provided. The actuator comprises a first active element for connection to drive circuitry and a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. One of the plurality of elements is comprised of a porous material.