Abstract: A suction gripping device for picking up a plurality of substrates which are flat and flexible includes: a base body, which defines a plane; at least one gas suction vacuum module which is arranged on the base body and has at least one gas suction opening configured for withdrawing gas by suction and for generating a first vacuum so as to suction a respective one of the plurality of substrates against the suction gripping device; and at least one gas ejection vacuum module which is arranged on the base body and has a gas ejection opening configured for ejecting gas and for generating a second vacuum so as to suction the respective one of the plurality of substrates against the suction gripping device.

Abstract: In a method for creating hydrophilic surfaces or surface regions on one or more silicon surfaces of a substrate, a vapour phase of hydrogen peroxide is generated in a reactor by heating an aqueous hydrogen peroxide solution. The substrate having the silicon surface or surfaces to be treated is exposed to the vapour phase, whereby a hydrophilisation of the silicon surfaces in achieved.

Abstract: The invention relates generally to a process for the preparation of water-absorbent polymer particles, comprising the process steps including of drying the polymer gel particles wherein in process step (viii) the gel particles obtained in process step (vii) are charged onto the surface of the belt material of a belt dryer at a position L0 and are subsequently dried on their way through the belt dryer and wherein the belt material has been cooled before coming into contact with the gel particles. The invention also relates to water-absorbent polymer particles obtainable by such a process.

Abstract: A method for selective etching of an SiGe mixed semiconductor layer on a silicon semiconductor substrate by dry chemical etching of the SiGe mixed semiconductor layer with the aid of an etching gas selected from the group including ClF3 and/or ClF5, a gas selected from the group including Cl2 and/or HCl being added to the etching gas.

Abstract: The invention relates to a process for the preparation of water-absorbent polymer particles, comprising the process steps of preparing an aqueous monomer solution comprising at least partially neutralized, monoethylenically unsaturated monomers bearing carboxylic acid groups (?1) and at least one crosslinker (?3), and at least partially neutralizing acrylic acid by mixing acrylic acid with an aqueous solution of sodium hydroxide, thereby obtaining an aqueous solution of the at least partially neutralized acrylic acid; cooling the aqueous solution with a cooling liquid in a heat exchanger, wherein the cooling liquid used in the heat exchanger has been cooled in an absorption chiller in which at least a part of the heat of the heated cooling liquid obtained in the heat exchanger is consumed by the evaporation of a refrigerant liquid in a vacuum that is created by the absorption of a refrigerant vapor into an absorbent.

Abstract: The invention relates generally to a process for the preparation of water-absorbent polymer particles, comprising the process steps including of drying the polymer gel particles wherein in process step (viii) the gel particles obtained in process step (vii) are charged onto the surface of the belt material of a belt dryer at a position L0 and are subsequently dried on their way through the belt dryer and wherein the belt material has been cooled before coming into contact with the gel particles. The invention also relates to water-absorbent polymer particles obtainable by such a process.

Abstract: A device for positioning a measuring head above a print substrate includes a display device and a motor-driven positioning device for the measuring head. The motor-driven positioning device for the measuring head is controllable by a computer connected to the display device. Measurement locations are selectable on the display device and the measuring head is positioned by the positioning device depending on the selected measurement locations.

Abstract: Absorbent polymer granulate comprising the following process steps: i) polymerization of an aqueous monomer solution to obtain a polymer gel; ii) comminution of the polymer gel to obtain a gel granulate; and iii) drying of the gel granulate, and is characterized in that the gel granulate after step ii) has a spread behavior. The production process of an absorbent polymer distinguishes itself by a particularly efficient drying step iii), which enables a particularly gentle and uniform drying of the gel granulate. The obtained absorbent polymers and products and items produced therefrom have a particularly uniform product quality and constant physical-chemical properties.

Abstract: A method and a device suitable for implementing this method for etching a substrate (10), a silicon body in particular, using an inductively coupled plasma (14) are proposed. For this purpose, a radio-frequency electromagnetic alternating field is generated with an ICP source (13), the alternating field generating an inductively coupled plasma (14) of reactive particles in a reactor (15). The inductively coupled plasma (14) arises by the action of the radio-frequency electromagnetic alternating field on a reactive gas. Furthermore, a device is provided with which a plasma power injected into the inductively coupled plasma (14) via the radio-frequency electromagnetic alternating field with the ICP source (13) is capable of being pulsed so that at least from time to time a pulsed radio-frequency power can be injected into the inductively coupled plasma (14) as a pulsed radio-frequency power.

Abstract: Additional variants of the method of etching structures into an etching body, in particular recesses in a silicon body that are laterally defined in a precise manner by an etching mask, using a plasma, is described. In addition, the use of this method in the introduction of structures, in particular trenches having a high aspect ratio, into a dielectric layer or a dielectric base body and in a layer of silicon is described, isotropic underetching and/or isotropic, sacrificial-layer etching, in particular using fluorine radicals or a highly oxidizing fluorine compound such as ClF3, being performed after the production of the structures in at least some areas in the case of the layer made of silicon.

Abstract: Absorbent polymer granulate comprising the following process steps: i) polymerization of an aqueous monomer solution to obtain a polymer gel; ii) comminution of the polymer gel to obtain a gel granulate; and iii) drying of the gel granulate, and is characterized in that the gel granulate after step ii) has a spread behavior. The production process of an absorbent polymer distinguishes itself by a particularly efficient drying step iii), which enables a particularly gentle and uniform drying of the gel granulate. The obtained absorbent polymers and products and items produced therefrom have a particularly uniform product quality and constant physical-chemical properties.

Abstract: A method for selective etching of an SiGe mixed semiconductor layer on a silicon semiconductor substrate by dry chemical etching of the SiGe mixed semiconductor layer with the aid of an etching gas selected from the group including ClF3 and/or ClF5, a gas selected from the group including Cl2 and/or HCl being added to the etching gas.

Abstract: The process according to the invention for production of an absorbent polymer comprising the following process steps: i) polymerization of an aqueous monomer solution to obtain a polymer gel; ii) comminution of the polymer gel to obtain a gel granulate; and iii) drying of the gel granulate, and is characterized in that the gel granulate after step ii) has a spread behavior. The production process of an absorbent polymer distinguishes itself by a particularly efficient drying step iii), which enables a particularly gentle and uniform drying of the gel granulate. The obtained absorbent polymers and products and items produced therefrom have a particularly uniform product quality and constant physical-chemical properties.

Abstract: A device for positioning a measuring head above a print substrate includes a display device and a motor-driven positioning device for the measuring head. The motor-driven positioning device for the measuring head is controllable by a computer connected to the display device. Measurement locations are selectable on the display device and the measuring head is positioned by the positioning device depending on the selected measurement locations.

Abstract: The process according to the invention for production of an absorbent polymer comprising the following process steps: i) polymerization of an aqueous monomer solution to obtain a polymer gel; ii) comminution of the polymer gel to obtain a gel granulate; and iii) drying of the gel granulate, and is characterized in that the gel granulate after step ii) has a spread behavior. The production process of an absorbent polymer distinguishes itself by a particularly efficient drying step iii), which enables a particularly gentle and uniform drying of the gel granulate. The obtained absorbent polymers and products and items produced therefrom have a particularly uniform product quality and constant physical-chemical properties.

Abstract: A drive for storage disc which permits a convenient means of loading and unloading the storage disc. The drive includes a loading device for transport of a storage disc into the drive, the loading device including a carrier for accommodating the storage disc. In a loading position, the carrier remains generally in the drive and, in the direction of an insertion opening of the drive, includes an opening for insertion of the storage disc.

Abstract: A method for the reproduction of data, such as digital audio data and/or video data, stored on a storage medium, for example, on an optical storage disk, in a playback device, in which an accelerated selection may be possible of storage media to be reproduced or to be rejected by playback device. In a first operating mode, data are filed in, for example, a nonvolatile memory during a play-back process of the storage medium. In a second operating mode, the storage medium is selected, for example, for a playback process and a reproduction process. Within a timespan during which the selected storage medium is brought from a magazine into a playback position, in which the data stored in the storage medium may be read out by a read device, or into an eject position, from which the selected storage medium may be retrieved, at least a part of the data filed in the memory is played back and reproduced.

Abstract: A device and a method for etching a substrate, in particular a silicon body, by using an inductively coupled plasma. A high-frequency electromagnetic alternating field is generated using an ICP source, and an inductively coupled plasma composed of reactive particles is generated by the action of a high-frequency electromagnetic alternating field on a reactive gas in a reactor. In addition, a static or time-variable magnetic field is generated between the substrate and the ICP source, for which purpose at least two magnetic field coils arranged one above the other are provided. The direction of the resulting magnetic field is also approximately parallel to the direction defined by the tie line connecting the substrate and the inductively coupled plasma.

Abstract: A player for storage media having a number of data groups is provided, which player enables a data group to be selected in a clearly organized way, particularly when a large number of data groups is stored on such a storage medium. In this context, a read head is provided for reading out the data of a first storage medium, and a read-head control is provided for positioning the read head in the area of a data group to be played, which data group is stored on the first storage medium. In addition, an input unit is provided where, on the one hand, various storage media and, on the other hand, various data groups, are selectable on a selected storage medium to be played. A conversion device is provided, which, in response to the number of data groups on the first storage medium exceeding a predefined value, forms at least two subsets from the number of data groups of the first storage medium, each of these subsets at the input unit being selectable as a different storage medium.

Abstract: A method for performing a track skip and a playback device for optical storage disks enable an accelerated track skip in the case of a non-moving storage disk in which a time is determined for the track skip of a read device between a current track and a selected track of a storage disk inserted in the playback device, as a function of the tracks to be skipped in this instance, and the read device is moved in the direction of the selected track for the determined time. In response to a track skip request, the read device is moved in the direction of a lead-in area of the optical storage disk until a starting position is detected. The time necessary for the track skip from starting position to the selected track is determined from this track.