Abstract: Spring arrangement for mounting a vibration- or shock-sensitive device attached to a supporting member in a housing, with the supporting member being fastened to the housing by helical spring elements. The supporting member is suspended in the housing by helical spring elements so that each elastic force component of one spring applied to the supporting member in a specific direction is counteracted by at least one elastic force component of another spring applied in the opposite direction so that the supporting member remains approximately in the center of the vibration clearance provided regardless of the position in which the housing is mounted in a motor vehicle. Due to the opposing elastic forces of the springs, the spring constant and therefore the natural frequency of the overall system can be advantageously increased, thus avoiding undesired points of resonance at low frequencies.

Abstract: A device and a method for etching a substrate, in particular a silicon body, by using an inductively coupled plasma. A high-frequency electromagnetic alternating field is generated using an ICP source, and an inductively coupled plasma composed of reactive particles is generated by the action of a high-frequency electromagnetic alternating field on a reactive gas in a reactor. In addition, a static or time-variable magnetic field is generated between the substrate and the ICP source, for which purpose at least two magnetic field coils arranged one above the other are provided. The direction of the resulting magnetic field is also approximately parallel to the direction defined by the tie line connecting the substrate and the inductively coupled plasma.

Abstract: Spring arrangement for mounting a vibration- or shock-sensitive device attached to a supporting member in a housing, with the supporting member being fastened to the housing by helical spring elements. The supporting member is suspended in the housing by helical spring elements so that each elastic force component of one spring applied to the supporting member in a specific direction is counteracted by at least one elastic force component of another spring applied in the opposite direction so that the supporting member remains approximately in the center of the vibration clearance provided regardless of the position in which the housing is mounted in a motor vehicle. Due to the opposing elastic forces of the springs, the spring constant and therefore the natural frequency of the overall system can be advantageously increased, thus avoiding undesired points of resonance at low frequencies.

Abstract: A method for applying a protective resist, such as a negative resist, to a prepatterned wafer in which the resist is applied to the previously generated patterns by a distribution system which includes a holder for the wafer, an xy sliding unit with a programming device, and a dispensing device with a syringe.

Abstract: Method, apparatus and plasma processing system for anisotropic etching of a substrate using a plasma. A high-frequency alternating electromagnetic field is generated using an inductive coupled plasma source, and a reactive gas or reactive gas mixture is exposed to that high-frequency alternating electromagnetic field in order to generate the plasma. The electrically charged particles of the plasma are accelerated onto the substrate. An aperture having at least one effective surface for electron-ion recombination is inserted between the plasma source and the substrate.

Abstract: A method for detecting the transition between different materials in semiconductor structures during alternating etching and covering steps for anisotropic depthwise etching of defined patterns performed using a plasma. Provision is made for ascertaining, by way of an intensity measurement of at least one specific substance contained in the plasma, the beginning of each etching step by the fact that a characteristic threshold is reached, this also being achievable by way of an external synchronization signal which indicates the beginning and end of each etching step; for then, when the threshold value is reached, starting a delay time which is longer than the course of a first concentration maximum; for a second concentration maximum then to be ascertained after the delay time has elapsed; and for the second concentration maxima of the etching steps to be monitored as to whether they exceed or fall below the predefined value, in order to detect a material transition.

Abstract: A device for playing compact disks, particularly for motor vehicles, including a magazine for a plurality of compact disks that is arranged in and is removable from a housing, and a playback unit for playing a compact disk from the magazine, the playback unit being swing-mounted in the housing separately from the magazine and being adjustable by an adjusting mechanism, is characterized in that the magazine includes a swivel mechanism, which enables at least a portion of the compact disks located in holding compartments of the magazine to swivel away from a compact disk positioned on the playback unit, to form an unencumbered swing space between the compact disk to be played that is positioned on the playback unit and the compact disks arranged in the holding compartments of the magazine.