Abstract: A method is proposed for etching a first silicon layer (15) that is provided with an etching mask (10) for defining lateral recesses (21). In a first plasma etching process, trenches (21?) are produced in the region of the lateral recesses (21) by anisotropic etching. The first etching process comes virtually to a standstill as soon as a separating layer (12, 14, 14?, 16), buried between the first silicon layer (15) and a further silicon layer (17), is reached. This separating layer is thereupon etched through in exposed regions (23, 23?) by a second etching process. A subsequent third etching process then etches the further silicon layer (17, 17?). In this manner, free-standing structures for sensor elements can be produced in a simple process which is completely compatible with the method steps in IC integration technology.

Abstract: A disk carrier assembly for a multi-disk clutch includes a drive plate having a plurality of radially extending load teeth and a plurality of radially extending bearing teeth alternately disposed about the circumference of the drive plate. A disk carrier is included that has an axially cylinder segment with a plurality of axial protrusions that extend radially inward and are alternately disposed about the segment with plurality of axial grooves that extend radially outward. The axial grooves are adapted to radially retain a plurality of clutch disks while allowing operative axial movement. The plurality of axial protrusions further include a plurality of axial load protrusions alternately disposed between a plurality of axial bearing protrusions, each of the axial load protrusion have a load tooth cutout formed on its axial end and each of the axial bearing protrusion have an elongated area with an annular retaining groove.

Abstract: A method for providing user-friendly selection of a storage medium, in particular an optical storage disk, from a plurality of storage mediums. The storage mediums are assigned to a playback device, in particular a compact disk changer, for reading out and reproducing stored data and can be stored in a storage apparatus, arrangement or structure, in which a playback probability is determined for each storage medium, and in which the storage medium having the lowest playback probability is then released to be ejected from the playback device or from the storage apparatus, arrangement or structure.

Abstract: A disk drive is described, having a draw-in device for disk-shaped storage media, which prevents damage to the playoff area of such storage media. The draw-in device includes a threaded rod having an axis of rotation in the push-in direction of the storage medium. The course of thread of threaded rod acts together with the edge region of a storage medium inserted into the draw-in device so that the storage medium is drawn into the disk drive or pushed out of the disk drive by the rotation of the threaded rod, depending on the direction of rotation.

Abstract: A device and a method for determining the extent of an at least locally lateral undercut of a structured surface layer on a sacrificial layer. The structured surface layer for this purpose locally has at least one passive electronic component, using which a physical measured quantity can be determined, which is proportional to the extent of the lateral undercut. The method for generating this device proposes, initially on the structured surface layer in a first etching method, to provide the surface layer at least locally with a structuring having trenches and, in a second etching method, proceeding from the trenches, to undertake at least locally a lateral undercut of the structured surface layer. In this context, in the first etching method on the surface layer, locally at least one passive electronic component is additionally delineated out, which in response to a subsequent undercutting of the surface layer is also undercut.

Abstract: A player for storage media having a number of data groups is provided, which player enables a data group to be selected in a clearly organized way, particularly when a large number of data groups is stored on such a storage medium. In this context, a read head is provided for reading out the data of a first storage medium, and a read-head control is provided for positioning the read head in the area of a data group to be played, which data group is stored on the first storage medium. In addition, an input unit is provided where, on the one hand, various storage media and, on the other hand, various data groups, are selectable on a selected storage medium to be played. A conversion device is provided, which, in response to the number of data groups on the first storage medium exceeding a predefined value, forms at least two subsets from the number of data groups of the first storage medium, each of these subsets at the input unit being selectable as a different storage medium.

Abstract: A method and a suitable device for carrying out this method is proposed, for etching a substrate (10), especially a silicon element, with the aid of an inductively coupled plasma (14). For this purpose, a high frequency electromagnetic alternating field is generated, which produces an inductively coupled plasma (14) from reactive particles in a reactor (15). In this connection, the inductively coupled plasma (14) comes about by the action of the high frequency electromagnetic alternating field upon a reactive gas. Furthermore, a device, in particular a magnetic field coil (21) is provided which produces a static or timewise varying magnetic field between the substrate (10) and the ICP source (13). For this, the magnetic field is oriented in such a way that its direction is at least approximately or predominantly parallel to the direction defined by the line connecting the substrate (10) and the inductively coupled plasma (14).

Abstract: A drive for storage disc which permits a convenient means of loading and unloading the storage disc. The drive includes a loading device for transport of a storage disc into the drive, the loading device including a carrier for accommodating the storage disc. In a loading position, the carrier remains generally in the drive and, in the direction of an insertion opening of the drive, includes an opening for insertion of the storage disc.

Abstract: A device and a method for etching a substrate, in particular a silicon body, by using an inductively coupled plasma. A high-frequency electromagnetic alternating field is generated using an ICP source, and an inductively coupled plasma composed of reactive particles is generated by the action of a high-frequency electromagnetic alternating field on a reactive gas in a reactor. In addition, a static or time-variable magnetic field is generated between the substrate and the ICP source, for which purpose at least two magnetic field coils arranged one above the other are provided. The direction of the resulting magnetic field is also approximately parallel to the direction defined by the tie line connecting the substrate and the inductively coupled plasma.

Abstract: In an automotive transmission, with a closeable and separable clutch, which is in the form of a disk clutch, wherein the disk carrier exhibits, distributed about the circumference of a cylindrical segment, disk-facing alternating axial grooves and axial projections, and on one axial end is connected with a hub via a drive plate, and wherein for transmission of torque a connection fixed against rotation is established between the drive plate and the disk carrier via a plug-in gearing, in which teeth arranged radially at the outer circumference of the drive plate engage in corresponding radial recesses in the disk carrier, thereby characterized, that the drive plate is connected with the disk carrier axially free of play, in that the recesses of the disk carrier are in the form of open-ended cutouts, through which the first teeth (load teeth) of the drive plate pass radially and lie against with their axial inner sides, and in that axially outside the disk carrier exhibits a form-fittingly supported securing ri

Abstract: Additional variants of the method of etching structures into an etching body, in particular recesses in a silicon body that are laterally defined in a precise manner by an etching mask, using a plasma, is described. In addition, the use of this method in the introduction of structures, in particular trenches having a high aspect ratio, into a dielectric layer or a dielectric base body and in a layer of silicon is described, isotropic underetching and/or isotropic, sacrificial-layer etching, in particular using fluorine radicals or a highly oxidizing fluorine compound such as ClF3, being performed after the production of the structures in at least some areas in the case of the layer made of silicon.

Abstract: A method for performing a track skip and a playback device (10) for optical storage disks (15) are proposed that enable an accelerated track skip in the case of a non-moving storage disk (15). A time is determined for the track skip of a read device (2) between a current track and a selected track (3) of a storage disk (15) inserted in the playback device (10), as a function of the tracks to be skipped in this instance, and the read device (2) is moved in the direction of the selected track (30) for the determined time. In response to a track skip request, the read device (2) is moved in the direction of a lead-in area (20) of the optical storage disk (15) until a starting position (25) is detected. The time necessary for the track skip from starting position (25) to the selected track (30) is determined from this track (30).

Abstract: A twin clutch, in particular an actively closing, dry friction twin clutch is provided for a twin clutch transmission of a motor vehicle having an internal combustion engine, a crankshaft, and two transmission input shafts. The two transmission input shafts are connected to respective friction clutches and can be selectively connected to the crankshaft. At least one axial bearing is provided at the twin clutch such that axial forces, which are present when the clutch is actuated, can be transferred to the transmission housing.

Abstract: A device and a method capable of being carried out therewith for, preferably, anisotropically etching a substrate (10), in particular, a patterned silicon body, with the assistance of a plasma (14), is proposed. In the process, the plasma (14) is produced by a plasma source (13) to which a high-frequency generator (17) is connected for applying a high-frequency power. Moreover, this high-frequency generator is in communication with a first means which periodically changes the high-frequency power applied to the plasma source (13). Besides, provision is preferably made for a second means which adapts the output impedance of the high-frequency generator (17) to the prevailing impedance of the plasma source (13) which changes as a function of the high-frequency power.

Abstract: A device and a method for etching a substrate, in particular a silicon body, by using an inductively coupled plasma. A high-frequency electromagnetic alternating field is generated using an ICP source, and an inductively coupled plasma composed of reactive particles is generated by the action of a high-frequency electromagnetic alternating field on a reactive gas in a reactor. In addition, a static or time-variable magnetic field is generated between the substrate and the ICP source, for which purpose at least two magnetic field coils arranged one above the other are provided. The direction of the resulting magnetic field is also approximately parallel to the direction defined by the tie line connecting the substrate and the inductively coupled plasma.

Abstract: A disk drive (1) is proposed, having a draw-in device (5) for disk-shaped storage media (10), which prevents damage to the playoff area of such storage media (10). The draw-in device (5) includes a threaded rod (15) having an axis of rotation (20) in the push-in direction (25) of the storage medium (10). The course of thread (30) of threaded rod (15) acts together with the edge region (35) of a storage medium (10) inserted into the draw-in device (5) in such a way that the storage medium (10) is drawn into the disk drive (1) or pushed out of the disk drive (1) by the rotation of the threaded rod (15), depending on the direction of rotation (40).

Abstract: A method of sacrificial layer etching of micromechanical surface structures, in which a sacrificial layer is deposited on a heatable silicon substrate and is structured. A temperature difference between the substrate and the vapor phase of an etching medium is established in such a way that exposed metal contacts made of aluminum alloys are not attacked at the same time and are not subsequently exposed to any risk of corrosion.

Abstract: A plasma processing system for etching a substrate using a highly dense plasma in a reactor. An ICP coil having a first coil end and a second coil end generating a high-frequency electromagnetic alternating field in the reactor which acts on a reactive gas and, as an inductively coupled plasma source, produces the highly dense plasma from reactive particles and ions. The two coil ends each communicate via a feed point with a high-frequency infeed, which applies in each case a high-frequency a.c. voltage of the same frequency to the first coil end and to the second coil end (21, 21′). The two high-frequency a.c. voltages applied at the two coil ends are connected to a symmetrical, capacitive network via a &lgr;2 -delay line linking the first feed point and the second feed point and are, at least nearly in phase opposition to one another, and have at least nearly the same amplitudes.

Abstract: A twin clutch, in particular an actively closing, dry friction twin clutch is provided for a twin clutch transmission of a motor vehicle having an internal combustion engine, a crankshaft, and two transmission input shafts. The two transmission input shafts are connected to respective friction clutches and can be selectively connected to the crankshaft. At least one axial bearing is provided at the twin clutch such that axial forces, which are present when the clutch is actuated, can be transferred to the transmission housing.

Abstract: An apparatus for holding in readiness and selecting at least one storage disk is provided. The apparatus includes threaded rods, each having external threads. The at least one storage disk can be guided in the external threads of the threaded rods. Flights of the external threads coact with individual edge regions of at least one inserted storage disk. The at least one storage disk is displaceable along the threaded rods by rotation of the threaded rods.