Patents by Inventor Wayne McMillan

Wayne McMillan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190278005
    Abstract: Embodiments herein describe a sub-micron 3D diffractive optics element and a method for forming the sub-micron 3D diffractive optics element. In a first embodiment, a method is provided for forming a sub-micron 3D diffractive optics element on a substrate without planarization. The method includes depositing a material stack to be patterned on a substrate, depositing and patterning a thick mask material on a portion of the material stack, etching the material stack down one level, trimming a side portion of the thick mask material, etching the material stack down one more level, repeating trim and etch steps above ā€˜nā€™ times, and stripping the thick mask material from the material stack.
    Type: Application
    Filed: March 5, 2019
    Publication date: September 12, 2019
    Inventors: Michael Yu-tak YOUNG, Ludovic GODET, Robert Jan VISSER, Naamah ARGAMAN, Christopher Dennis BENCHER, Wayne MCMILLAN
  • Patent number: 10409001
    Abstract: Embodiments described herein relate to apparatus and methods for display structure fabrication. In one embodiment, a waveguide structure having an input grating structure and an output grating structure is fabricated and a spacer material is deposited on the waveguide. The spacer material is etched from various portions of the waveguide structure and a high refractive index material is deposited on the waveguide. Portions of the spacer material remaining on the waveguide structure are removed leaving the high refractive index material disposed on desired surfaces of the waveguide structure.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: September 10, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael Yu-tak Young, Wayne McMillan, Rutger Meyer Timmerman Thijssen, Robert Jan Visser
  • Publication number: 20190235142
    Abstract: Embodiments described herein relate to augmented waveguide regions. The augmented waveguide regions generally include pluralities of gratings having duty cycles and refractive indices. In certain embodiments, the duty cycles are different, the refractive indices are different, or both the duty cycles and the refractive indices are different. Also described herein are methods for forming the augmented waveguide regions.
    Type: Application
    Filed: January 26, 2018
    Publication date: August 1, 2019
    Inventors: Rutger MEYER TIMMERMAN THIJSSEN, Wayne MCMILLAN
  • Publication number: 20190019828
    Abstract: Embodiments described herein generally relate to an apparatus for capturing an image and a photoactive device for that apparatus. In one embodiment, the apparatus for capturing an image includes a lens and a photoactive device. The photoactive device is positioned behind the lens. The photoactive device includes a substrate, one or more photodiodes, and a color filter array. The one or more photodiodes are formed in the substrate. The color filter array is positioned over the substrate. The color filter array has one or more color filters. Each color filter has a radiation receiving surface that is shaped to re-direct radiation to a respective photodiode.
    Type: Application
    Filed: July 12, 2017
    Publication date: January 17, 2019
    Inventors: Joseph R. JOHNSON, Robert Jan VISSER, Wayne MCMILLAN, Rutger MEYER TIMMERMAN THIJSSEN
  • Publication number: 20180348522
    Abstract: Embodiments described herein relate to a waveguide imaging structure. The waveguide imaging structure generally includes an input coupling region, a waveguide region, and an output coupling region. In certain embodiments, a photochromic material layer is disposed on an output coupling region of the imaging structure. Also described herein are methods and materials for forming the photochromic material layer.
    Type: Application
    Filed: May 30, 2018
    Publication date: December 6, 2018
    Inventors: Michael Yu-tak YOUNG, Wayne MCMILLAN, Rutger THIJSSEN, Robert Jan VISSER
  • Publication number: 20180348429
    Abstract: Embodiments described herein relate to apparatus and methods for display structure fabrication. In one embodiment, a waveguide structure having an input grating structure and an output grating structure is fabricated and a spacer material is deposited on the waveguide. The spacer material is etched from various portions of the waveguide structure and a high refractive index material is deposited on the waveguide. Portions of the spacer material remaining on the waveguide structure are removed leaving the high refractive index material disposed on desired surfaces of the waveguide structure.
    Type: Application
    Filed: May 30, 2018
    Publication date: December 6, 2018
    Inventors: Michael Yu-tak YOUNG, Wayne MCMILLAN, Rutger THIJSSEN, Robert Jan VISSER
  • Patent number: 9916965
    Abstract: Hybrid inspectors are provided. One system includes computer subsystem(s) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: March 13, 2018
    Assignee: KLA-Tencor Corp.
    Inventors: Kris Bhaskar, Grace Hsiu-Ling Chen, Keith Wells, Wayne McMillan, Jing Zhang, Scott Young, Brian Duffy
  • Publication number: 20170194126
    Abstract: Hybrid inspectors are provided. One system includes computer subsystems) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.
    Type: Application
    Filed: December 29, 2016
    Publication date: July 6, 2017
    Inventors: Kris Bhaskar, Grace Hsiu-Ling Chen, Keith Wells, Wayne McMillan, Jing Zhang, Scott Young, Brian Duffy
  • Publication number: 20130062536
    Abstract: Methods are presented for analysing semiconductor materials (8), and silicon photovoltaic cells and cell precursors in particular, using imaging of photoluminescence (12) generated with high intensity illumination (16). The high photoluminescence signal levels (16) obtained with such illumination (30) enable the acquisition of images from moving samples with minimal blurring. Certain material defects of interest to semiconductor device manufacturers, especially cracks, appear sharper under high intensity illumination. In certain embodiments images of photoluminescence generated with high and low intensity illumination are compared to highlight selected material properties or defects.
    Type: Application
    Filed: January 4, 2011
    Publication date: March 14, 2013
    Applicant: BT Imaging Pty. Ltd.
    Inventors: Robert A. Bardos, Juergen Weber, Thorsten Trupke, Ian A. Maxwell, Wayne McMillan
  • Publication number: 20100150662
    Abstract: A system comprising a subsea structure defining an interior of the system, the structure subject to a water current; a sleeve exterior to the subsea structure, covering at least a portion of an outside surface of the subsea structure; and a vortex induced vibration suppression device exterior to the sleeve.
    Type: Application
    Filed: February 13, 2008
    Publication date: June 17, 2010
    Inventors: Donald Wayne Allen, Stephen Paul Armstrong, David Wayne McMillan, Janet Kay McMillan, Christopher Steven West
  • Publication number: 20100098497
    Abstract: A system comprising a subsea structure beneath a body of water, subject to a water current; an installation vessel floating on the body of water; a line connected to the subsea structure and the installation vessel; and one or more vortex induced vibration suppression devices connected to the line, which have been lowered from the vessel to be installed on the subsea structure.
    Type: Application
    Filed: March 12, 2008
    Publication date: April 22, 2010
    Inventors: Donald Wayne Allen, Stephen Paul Armstrong, Richard Bruce McDaniel, Catherine Anne Preator, David Wayne McMillan, Janet Kay McMillan, Christopher Steven West
  • Publication number: 20100061809
    Abstract: There is disclosed a system for reducing drag and/or vortex induced vibration of a structure, the system comprising a fairing comprising a dampening mechanism adapted to dampen the rotation of the fairing about the structure.
    Type: Application
    Filed: November 16, 2007
    Publication date: March 11, 2010
    Applicant: Shell Oil Company
    Inventors: Donald Wayne Allen, Dean Leroy Henning, Li Lee, David Wayne McMillan, Janet Kay McMillan
  • Patent number: 7669491
    Abstract: There is disclosed a current tank system comprising a first current tank adapted to produce a first current in a first direction; a second current tank adapted to rotate to produce a second current in a second direction; a sample adapted to be exposed to the first current and the second current.
    Type: Grant
    Filed: March 14, 2007
    Date of Patent: March 2, 2010
    Assignee: Shell Oil Company
    Inventors: Donald Wayne Allen, Dean Leroy Henning, Li Lee, David Wayne McMillan, Raghunath Gopal Menon, Christopher Steven West
  • Publication number: 20090220307
    Abstract: There is disclosed a system comprising a structural element, at least one helical strake about the structural element, and at least one ramp to provide a transition from the structural element to the helical strake.
    Type: Application
    Filed: August 30, 2006
    Publication date: September 3, 2009
    Inventors: Donald Wayne Allen, Stephen Paul Armstrong, Dean Leroy Henning, Damon Michael McMillan, David Wayne McMillan, Christopher Steven West
  • Patent number: 7578038
    Abstract: Apparatus and methods for remotely installing vortex-induced vibration (VIV) reduction and drag reduction devices on elongated structures in flowing fluid environments. The apparatus is a tool for transporting and installing the devices. The devices installed can include clamshell-shaped strakes, shrouds, fairings, sleeves and flotation modules.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: August 25, 2009
    Assignee: Shell Oil Company
    Inventors: David Wayne McMillan, Richard Bruce McDaniel
  • Patent number: 7548308
    Abstract: An apparatus and associated method for reducing thermal damage on a specimen during an inspection which includes a radiation source for supplying a beam of radiation, and a means for adjusting a first energy level of the beam of radiation to a second energy level as the beam of radiation is variably positioned from a first location on the surface of the wafer to a second location on the surface of the wafer.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: June 16, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Wayne Mcmillan, Christian Wolters
  • Patent number: 7398697
    Abstract: Sensors, including fiber optic sensors and their umbilicals, are mounted on support structures designed to be retro-fitted to in-place structures, including subsea structures. The sensor support structures are designed to monitor structure conditions, including strain, temperature, and in the instance of pipelines, the existence of production slugs. Moreover the support structures are designed for installation in harsh environments, such as deep water conditions using remotely operated vehicles.
    Type: Grant
    Filed: November 3, 2005
    Date of Patent: July 15, 2008
    Assignee: Shell Oil Company
    Inventors: Donald Wayne Allen, David Wayne McMillan
  • Publication number: 20070216285
    Abstract: There is disclosed a current tank system comprising a first current tank adapted to produce a first current in a first direction; a second current tank adapted to rotate to produce a second current in a second direction; a sample adapted to be exposed to the first current and the second current.
    Type: Application
    Filed: March 14, 2007
    Publication date: September 20, 2007
    Inventors: Donald Wayne Allen, Dean Leroy Henning, Li Lee, David Wayne McMillan, Raghunath Gopal Menon, Christopher Steven West
  • Publication number: 20060256325
    Abstract: An apparatus and associated method for reducing thermal damage on a specimen during an inspection which includes a radiation source for supplying a beam of radiation, and a means for adjusting a first energy level of the beam of radiation to a second energy level as the beam of radiation is variably positioned from a first location on the surface of the wafer to a second location on the surface of the wafer.
    Type: Application
    Filed: May 11, 2005
    Publication date: November 16, 2006
    Inventors: Wayne Mcmillan, Christian Wolters
  • Patent number: 7130036
    Abstract: Methods for inspecting a wafer are provided. One method includes directing light to a center portion and an edge portion of a wafer in a single scan. The method also includes detecting light scattered from the center portion using a first detection channel and detecting light scattered from the edge portion using a second detection channel. Another method for inspecting an edge portion of a wafer includes scanning the edge portion of the wafer with light. The method also includes separately detecting different portions of light scattered from the edge portion. In addition, the method includes separating light scattered from edge features in the edge portion from other light scattered from the edge portion. The method further includes detecting defects in the edge portion of the wafer using the other scattered light.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: October 31, 2006
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Lionel Kuhlmann, Wayne McMillan