Patents by Inventor Wei-Hang Huang

Wei-Hang Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11258007
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10937956
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: March 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20210043832
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: October 8, 2020
    Publication date: February 11, 2021
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10840438
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10825825
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a first gate electrode formed over the substrate. The semiconductor structure further includes a dielectric layer formed on a sidewall of the first gate electrode and a second gate electrode formed over the substrate and separated from the first gate electrode by the dielectric layer. The semiconductor structure further includes a contact formed over the second gate electrode. In addition, the contact has a first extending portion and a second extending portion extending along opposite sidewalls of the second gate electrode.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: November 3, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20200083441
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: November 14, 2019
    Publication date: March 12, 2020
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10529916
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: January 7, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20190333926
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a first gate electrode formed over the substrate. The semiconductor structure further includes a dielectric layer formed on a sidewall of the first gate electrode and a second gate electrode formed over the substrate and separated from the first gate electrode by the dielectric layer. The semiconductor structure further includes a contact formed over the second gate electrode. In addition, the contact has a first extending portion and a second extending portion extending along opposite sidewalls of the second gate electrode.
    Type: Application
    Filed: July 12, 2019
    Publication date: October 31, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 10355011
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a control gate over a substrate and forming a dielectric layer covering the control gate. The method further includes forming a conductive layer having a first portion and a second portion over the dielectric layer. In addition, the first portion of the conductive layer is separated from the control gate by the dielectric layer. The method further includes forming an oxide layer on a top surface of the first portion of the conductive layer and removing the second portion of the conductive layer to form a memory gate.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: July 16, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20190140169
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Application
    Filed: December 28, 2018
    Publication date: May 9, 2019
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 10181558
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: January 15, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20180122820
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a control gate over a substrate and forming a dielectric layer covering the control gate. The method further includes forming a conductive layer having a first portion and a second portion over the dielectric layer. In addition, the first portion of the conductive layer is separated from the control gate by the dielectric layer. The method further includes forming an oxide layer on a top surface of the first portion of the conductive layer and removing the second portion of the conductive layer to form a memory gate.
    Type: Application
    Filed: December 27, 2017
    Publication date: May 3, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 9859295
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a word line cell over a substrate and forming a dielectric layer over the word line cell. The method further includes forming a conductive layer over the dielectric layer and polishing the conductive layer until the dielectric layer is exposed. The method further includes forming an oxide layer on a top surface of the conductive layer and removing portions of the conductive layer not covered by the oxide layer to form a memory gate.
    Type: Grant
    Filed: February 6, 2017
    Date of Patent: January 2, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20170194559
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: March 20, 2017
    Publication date: July 6, 2017
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20170186946
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Application
    Filed: March 10, 2017
    Publication date: June 29, 2017
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9685604
    Abstract: A magnetoresistive random-access memory (MRAM) cell includes a free layer having a variable magnetic polarity, wherein the free layer has a first width; a pin layer having a fixed magnetic polarity, wherein the pin layer has the first width; a barrier layer located between the pin layer and the free layer, wherein the barrier layer has a second width that is less than the first width; a top electrode layer located above the free layer, the pin layer, and the barrier layer; a bottom electrode layer located beneath the free layer, the pin layer, and the barrier layer; and a capping layer encapsulating a sidewall of the barrier layer.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: June 20, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Shih-Chang Liu
  • Publication number: 20170148803
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a word line cell over a substrate and forming a dielectric layer over the word line cell. The method further includes forming a conductive layer over the dielectric layer and polishing the conductive layer until the dielectric layer is exposed. The method further includes forming an oxide layer on a top surface of the conductive layer and removing portions of the conductive layer not covered by the oxide layer to form a memory gate.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 9620372
    Abstract: A method includes forming a selection gate and a control gate for a flash memory cell in a memory device region. The selection gate and the control gate are over a semiconductor substrate. A protection layer is formed to cover the selection gate and the control gate. Stacked layers are formed in a logic device region, wherein the stacked layers extend to overlap the selection gate and the control gate. The stacked layers are patterned to form a gate stack for a logic device in the logic device region. After the patterning, an etching step is performed to etch a residue of the stacked layers in a boundary region of the memory device region. After the etching step, the protection layer is removed from the memory device region. Source and drain regions are formed for each of the flash memory cell and the logic device.
    Type: Grant
    Filed: August 5, 2015
    Date of Patent: April 11, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Chyi Liu, Wei-Hang Huang, Yu-Hsing Chang, Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 9614145
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: April 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9608195
    Abstract: A device includes creating an opening in a dielectric layer that is disposed over a bottom electrode layer. A top electrode layer is disposed over the dielectric layer. A magnetic tunnel junction (MTJ) layer is formed in the opening over the bottom electrode layer.
    Type: Grant
    Filed: August 7, 2015
    Date of Patent: March 28, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai