Patents by Inventor Wei-Hang Huang

Wei-Hang Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9595661
    Abstract: A magnetoresistive random access memory (MRAM) structure includes a bottom electrode structure. A magnetic tunnel junction (MTJ) element is over the bottom electrode structure. The MTJ element includes an anti-ferromagnetic material layer. A ferromagnetic pinned layer is over the anti-ferromagnetic material layer. A tunneling layer is over the ferromagnetic pinned layer. A ferromagnetic free layer is over the tunneling layer. The ferromagnetic free layer has a first portion and a demagnetized second portion. The MRAM also includes a top electrode structure over the first portion.
    Type: Grant
    Filed: July 18, 2013
    Date of Patent: March 14, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chern-Yow Hsu, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20170062699
    Abstract: A magnetoresistive random-access memory (MRAM) cell includes a free layer having a variable magnetic polarity, wherein the free layer has a first width; a pin layer having a fixed magnetic polarity, wherein the pin layer has the first width; a barrier layer located between the pin layer and the free layer, wherein the barrier layer has a second width that is less than the first width; a top electrode layer located above the free layer, the pin layer, and the barrier layer; a bottom electrode layer located beneath the free layer, the pin layer, and the barrier layer; and a capping layer encapsulating a sidewall of the barrier layer.
    Type: Application
    Filed: August 31, 2015
    Publication date: March 2, 2017
    Inventors: Wei-Hang Huang, Shih-Chang Liu
  • Patent number: 9564448
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a control gate formed over the substrate. The semiconductor device structure further includes a memory gate formed over the substrate and a first spacer formed on a sidewall of the memory gate. The semiconductor device structure further includes a contact formed over the memory gate, wherein a portion of the contact extends into the first spacer.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: February 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9397228
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a first gate stack over the semiconductor substrate. The semiconductor device structure includes a second gate stack over the semiconductor substrate. The semiconductor device structure includes an erase gate between the first gate stack and the second gate stack. The erase gate has a recess recessed toward the semiconductor substrate. The semiconductor device structure includes a first word line adjacent to the first gate stack. The semiconductor device structure includes a second word line adjacent to the second gate stack.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: July 19, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Ming Wu, Wei-Hang Huang, Shih-Chang Liu
  • Patent number: 9391085
    Abstract: Some embodiments of the present disclosure relate to a split gate memory cell which includes a select gate and a memory gate. The select gate has a planar upper surface disposed over a semiconductor substrate and is separated from the substrate by a gate dielectric layer. The memory gate has a planar upper surface arranged at one side of the select gate and is separated from the substrate by a charge trapping layer. The charge trapping layer extends under the memory gate. A first spacer is disposed above the memory gate and is separated from the memory gate by a first dielectric liner. The first dielectric liner extends upwardly along an upper sidewall of the charge trapping layer; and source/drain regions are disposed in the semiconductor substrate at opposite sides of the select gate and the memory gate.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: July 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Chang-Ming Wu, Shih-Chang Liu
  • Publication number: 20160163876
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a first gate stack over the semiconductor substrate. The semiconductor device structure includes a second gate stack over the semiconductor substrate. The semiconductor device structure includes an erase gate between the first gate stack and the second gate stack. The erase gate has a recess recessed toward the semiconductor substrate. The semiconductor device structure includes a first word line adjacent to the first gate stack. The semiconductor device structure includes a second word line adjacent to the second gate stack.
    Type: Application
    Filed: December 4, 2014
    Publication date: June 9, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chang-Ming WU, Wei-Hang HUANG, Shih-Chang LIU
  • Patent number: 9306158
    Abstract: A method of forming and a magnetoresistive random access memory (MRAM) device. In an embodiment, the MRAM device includes a magnetic tunnel junction (MTJ) disposed over a bottom electrode, the magnetic tunnel junction having a first sidewall, a top electrode disposed over the magnetic tunnel junction, and a dielectric spacer supported by the magnetic tunnel junction and extending along sidewalls of the top electrode, the dielectric spacer having a second sidewall substantially co-planar with the first sidewall of the magnetic tunnel junction.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: April 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu, Wei-Hang Huang
  • Publication number: 20160043306
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Application
    Filed: October 21, 2015
    Publication date: February 11, 2016
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20160043097
    Abstract: The present disclosure relates to a self-aligned split gate memory cell, and an associated method. The self-aligned split gate memory cell has memory gate and select gate covered upper surfaces by some spacers. Thus the memory gate and select gate are protected from silicide. The memory gate and select gate are defined self-aligned by the said spacers. The memory gate and select gate are formed by etching back corresponding conductive materials not covered by the spacers instead of recess processes. Thus the memory gate and select gate have flat upper surfaces and are well defined. The disclosed device and method is also capable of further scaling since photolithography processes are reduced.
    Type: Application
    Filed: August 8, 2014
    Publication date: February 11, 2016
    Inventors: Wei-Hang Huang, Chang-Ming Wu, Shih-Chang Liu
  • Publication number: 20160028000
    Abstract: A method of forming and a magnetoresistive random access memory (MRAM) device. In an embodiment, the MRAM device includes a magnetic tunnel junction (MTJ) disposed over a bottom electrode, the magnetic tunnel junction having a first sidewall, a top electrode disposed over the magnetic tunnel junction, and a dielectric spacer supported by the magnetic tunnel junction and extending along sidewalls of the top electrode, the dielectric spacer having a second sidewall substantially co-planar with the first sidewall of the magnetic tunnel junction.
    Type: Application
    Filed: October 2, 2015
    Publication date: January 28, 2016
    Inventors: Chia-Shiung Tsai, Chern-Yow Hsu, Fu-Ting Sung, Shih-Chang Liu, Wei-Hang Huang
  • Publication number: 20150340493
    Abstract: A method includes forming a selection gate and a control gate for a flash memory cell in a memory device region. The selection gate and the control gate are over a semiconductor substrate. A protection layer is formed to cover the selection gate and the control gate. Stacked layers are formed in a logic device region, wherein the stacked layers extend to overlap the selection gate and the control gate. The stacked layers are patterned to form a gate stack for a logic device in the logic device region. After the patterning, an etching step is performed to etch a residue of the stacked layers in a boundary region of the memory device region. After the etching step, the protection layer is removed from the memory device region. Source and drain regions are formed for each of the flash memory cell and the logic device.
    Type: Application
    Filed: August 5, 2015
    Publication date: November 26, 2015
    Inventors: Ming-Chyi Liu, Wei-Hang Huang, Yu-Hsing Chang, Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai, Ru-Liang Lee
  • Publication number: 20150340596
    Abstract: A device includes creating an opening in a dielectric layer that is disposed over a bottom electrode layer. A top electrode layer is disposed over the dielectric layer. A magnetic tunnel junction (MTJ) layer is formed in the opening over the bottom electrode layer.
    Type: Application
    Filed: August 7, 2015
    Publication date: November 26, 2015
    Inventors: Wei-Hang Huang, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9196825
    Abstract: An integrated circuit device includes a substrate and a magnetic tunneling junction (MTJ). The MTJ includes at least a pinned layer, a barrier layer, and a free layer. The MTJ is formed over a surface of the substrate. Of the pinned layer, the barrier layer, and the free layer, the free layer is formed first and is closest to the surface. This enables a spacer to be formed over a perimeter region of the free layer prior to etching the free layer. Any damage to the free layer that results from etching or other free layer edge-defining process is kept at a distance from the tunneling junction by the spacer.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: November 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9172033
    Abstract: A method of forming and a magnetoresistive random access memory (MRAM) device. In an embodiment, the MRAM device includes a magnetic tunnel junction (MTJ) disposed over a bottom electrode, the magnetic tunnel junction having a first sidewall, a top electrode disposed over the magnetic tunnel junction, and a dielectric spacer supported by the magnetic tunnel junction and extending along sidewalls of the top electrode, the dielectric spacer having a second sidewall substantially co-planar with the first sidewall of the magnetic tunnel junction.
    Type: Grant
    Filed: July 3, 2013
    Date of Patent: October 27, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Wei-Hang Huang, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 9142761
    Abstract: A method includes creating an opening in a dielectric layer that is disposed over a bottom electrode layer. A top electrode layer is disposed over the dielectric layer. A magnetic tunnel junction (MTJ) layer is formed in the opening over the bottom electrode layer.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: September 22, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20150263015
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a control gate formed over the substrate. The semiconductor device structure further includes a memory gate formed over the substrate and a first spacer formed on a sidewall of the memory gate. The semiconductor device structure further includes a contact formed over the memory gate, wherein a portion of the contact extends into the first spacer.
    Type: Application
    Filed: May 21, 2015
    Publication date: September 17, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 9136393
    Abstract: A method includes forming a selection gate and a control gate for a flash memory cell in a memory device region. The selection gate and the control gate are over a semiconductor substrate. A protection layer is formed to cover the selection gate and the control gate. Stacked layers are formed in a logic device region, wherein the stacked layers extend to overlap the selection gate and the control gate. The stacked layers are patterned to form a gate stack for a logic device in the logic device region. After the patterning, an etching step is performed to etch a residue of the stacked layers in a boundary region of the memory device region. After the etching step, the protection layer is removed from the memory device region. Source and drain regions are formed for each of the flash memory cell and the logic device.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: September 15, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Chyi Liu, Wei-Hang Huang, Yu-Hsing Chang, Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 9048316
    Abstract: Embodiments of mechanisms of a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a word line cell disposed over the substrate. The semiconductor device further includes a memory gate disposed over the substrate and adjacent to the word line cell and a spacer on a sidewall of the memory gate. The spacer and the word line cell are at opposite sides of the memory gate. In addition, an angle between a top surface of the memory gate and a sidewall of the memory gate is in a range from about 75° to about 90°.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: June 2, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Wei-Hang Huang, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20150137206
    Abstract: A method includes forming a selection gate and a control gate for a flash memory cell in a memory device region. The selection gate and the control gate are over a semiconductor substrate. A protection layer is formed to cover the selection gate and the control gate. Stacked layers are formed in a logic device region, wherein the stacked layers extend to overlap the selection gate and the control gate. The stacked layers are patterned to form a gate stack for a logic device in the logic device region. After the patterning, an etching step is performed to etch a residue of the stacked layers in a boundary region of the memory device region. After the etching step, the protection layer is removed from the memory device region. Source and drain regions are formed for each of the flash memory cell and the logic device.
    Type: Application
    Filed: January 17, 2014
    Publication date: May 21, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Chyi Liu, Wei-Hang Huang, Yu-Hsing Chang, Chang-Ming Wu, Wei Cheng Wu, Shih-Chang Liu, Harry-Hak-Lay Chuang, Chia-Shiung Tsai, Ru-Liang Lee
  • Publication number: 20150061051
    Abstract: A method includes creating an opening in a dielectric layer that is disposed over a bottom electrode layer. A top electrode layer is disposed over the dielectric layer. A magnetic tunnel junction (MTJ) layer is formed in the opening over the bottom electrode layer.
    Type: Application
    Filed: August 29, 2013
    Publication date: March 5, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hang Huang, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai