Abstract: Semiconductor structures and method of forming the same are provided. A method according to the present disclosure includes providing an intermediate structure that includes an opening, conformally depositing a metal liner over the opening, depositing a dummy fill material over the metal liner, recessing the dummy fill material such that a portion of the metal liner is exposed, removing the exposed portion of the metal liner, removing the recessed dummy fill material, and after the removing of the recessed dummy fill material, depositing a metal fill layer over the opening.

Abstract: A method includes forming a first semiconductor channel region and a second semiconductor channel region, wherein the second semiconductor channel region overlaps the first semiconductor channel region, forming a first gate dielectric on the first semiconductor channel region, and forming a second gate dielectric on the second semiconductor channel region. A first dipole film and a second dipole film are formed on the first gate dielectric and the second gate dielectric, respectively. The Dipole dopants in the first dipole film and the second dipole film are driven into the first gate dielectric and the second gate dielectric, respectively. The first dipole film and the second dipole film are then removed. A gate electrode is formed on both of the first gate dielectric and the second gate dielectric to form first transistor and a second transistor, respectively.

Abstract: A thermoelectric cooler (TEC) is positioned to move heat away from a hot spot on a semiconductor chip and toward a dielectric substrate. This approach to thermal management is particularly effective when used in conjunction with a buried rail and back side power delivery. The TEC may be in a layer that contains solder connections be between two device layers an IC package. Alternatively, the TEC may be in a metal interconnect structure over the semiconductor substrate such as in a passivation stack at the top of the metal interconnect structure. TECs at either of these locations may be formed by wafer-level processing.

Abstract: A low thermal budget dielectric material deposition process is provided. The dielectric material may be deposited using spin-on coating, and treated with a microwave plasma treatment. In some implementations, the dielectric material is used adjacent a contact feature of a CFET device, such as a contact feature providing connection to a source/drain region of a bottom transistor of a CFET device.

Abstract: A method of forming a semiconductor structure includes forming a conductive feature in a first dielectric layer, forming a second dielectric layer over the conductive feature, forming an opening in the second dielectric layer to expose a top surface of the conductive feature, forming an inhibitor film at the top surface of the conductive feature, depositing a thermal conductive layer having a first portion on sidewalls of the opening and a second portion on a top surface of second dielectric layer, removing the inhibitor film to expose the top surface of the conductive feature, depositing a conductive material in the opening and on the second portion of the thermal conductive layer, removing a portion of the conductive material to expose the second portion of the thermal conductive layer, and forming a third dielectric layer on the second portion of the thermal conductive layer and on the second dielectric layer.

Abstract: An electronic device including a plurality of pixels and a driving element is provided. Each of the plurality of pixels includes a first sub-pixel, a second sub-pixel, and a third sub-pixel. The driving element drives each first sub-pixel of the plurality of pixels.

Abstract: The present disclosure relates to an integrated circuit (IC) structure. The IC structure includes a semiconductor device having a frontside and a backside opposite the frontside. A first interconnect structure disposed on the frontside of the semiconductor device. The first interconnect structure comprises a first dielectric structure having a plurality of inter-level dielectric (ILD) layers. A second dielectric structure disposed on the backside of the semiconductor device. The second dielectric structure comprises a first high thermal conductivity layer having a thermal conductivity greater than that of the ILD layers.

Abstract: A method includes providing a wafer including a layer; performing a surface treatment to the layer; polishing the layer using a polishing pad; determining whether a surface roughness or a thickness of the layer reaches a pre-determined condition; and stopping polishing the layer when the surface roughness or the thickness of the layer reaches the pre-determined condition.

Abstract: A method includes providing a wafer including a layer; projecting a beam for a surface treatment on the layer to form a material-modified portion at a top of the layer, wherein the material-modified portion is spaced apart from a bottom surface of the layer; and polishing, by using a polishing pad, the material-modified portion of the layer.

Abstract: A method of forming a semiconductor device includes depositing a target metal layer in an opening. Depositing the target metal layer comprises performing a plurality of deposition cycles. An initial deposition cycle of the plurality of deposition cycles comprises: flowing a first precursor in the opening, flowing a second precursor in the opening after flowing the first precursor, and flowing a reactant in the opening. The first precursor attaches to upper surfaces in the opening, and the second precursor attaches to remaining surfaces in the opening. The first precursor does not react with the second precursor, and the reactant reacts with the second precursor at a greater rate than the reactant reacts with the first precursor.

Abstract: An electronic device is provided. The electronic device includes a substrate, a thin-film transistor, a first organic layer, a conductive layer, a second organic layer and a photoresist element. The thin-film transistor is disposed on the substrate. The first organic layer is disposed on the thin-film transistor and has a through-hole. The conductive layer is disposed on the first organic layer and electrically connected to the thin-film transistor through the through-hole. The second organic layer includes a first portion and a second portion. The first portion of the second organic layer is disposed in the through-hole, and the second portion of the second organic layer covers at least a portion of a flat portion of an upper surface of the first organic layer. The photoresist element is disposed on the second organic layer.

Abstract: A method includes forming a fin structure over a bottom dielectric isolator and a substrate. The fin structure includes a bottom channel layer, a sacrificial layer over the bottom channel layer, and a top channel layer over the sacrificial layer. A dummy gate is formed across the fin structure. Portions of the fin structure not covered by the gate structure are removed to expose a top surface of the bottom dielectric isolator. First source/drain epitaxial structures are epitaxially grown over the bottom dielectric isolator and are connected to the bottom channel layer. Second source/drain epitaxial structures are epitaxially grown over the first source/drain epitaxial structures and are connected to the top channel layer. The dummy gate and the sacrificial layer are replaced with a gate structure.

Abstract: A semiconductor device and an isolation structure and a contact etch stop layer thereof are provided. According to an embodiment of the present disclosure, a semiconductor device is provided, which includes a first dielectric layer and a second dielectric layer. The first dielectric layer is deposited on the sidewall of an active device or formed in a trench of a gate structure. The second dielectric layer covers the first dielectric layer, wherein the dielectric constant of the first dielectric layer is between 2 and 2.5, and the dielectric constant of the second dielectric layer is less than or equal to 4. In some embodiments, a dielectric bilayer is composed of amorphous boron nitride and crystalline boron nitride.

Abstract: The present disclosure provides source/drain epitaxial structures and source/drain contacts wrapped with graphene layers in fin structures of field effect transistors, and fabricating methods thereof. In some embodiments, a disclosed semiconductor device includes a fin structure on a substrate. The fin structure includes an epitaxial region. The semiconductor device further includes a metal contact above the epitaxial region, and a graphene film covering a top surface and sidewalls of the epitaxial region and covering a bottom surface and sidewalls of the metal contact.

Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a first spacer adjacent to the gate structure, wherein the first spacer comprises silicon carbon nitride (SiCN); forming a second spacer adjacent to the first spacer, wherein the second spacer comprises silicon oxycarbonitride (SiOCN); and forming a source/drain region adjacent to two sides of the second spacer.

Abstract: An electronic device including a plurality of pixels and a driving element is provided. Each of the plurality of pixels includes a first sub-pixel, a second sub-pixel, and a third sub-pixel. The driving element drives each first sub-pixel of the plurality of pixels.

Abstract: The present disclosure provides a method that includes providing a semiconductor structure having a bottom channel region and a top channel region over the bottom channel region; forming a gate dielectric layer over and wrapping around top channels in the top channel region; performing a radical treatment on the dielectric layer in a supercritical fluid; and forming a metal gate electrode on the dielectric layer.

Abstract: Method to implement heat dissipation multilayer and reduce thermal boundary resistance for high power consumption semiconductor devices is provided. The heat dissipation multilayer comprises a first crystalline layer that possesses a first phonon frequency range, a second crystalline layer that has a second phonon frequency range which does not overlap with the first phonon frequency range, and an amorphous layer located between the first and second crystalline layers. The amorphous layer has a third phonon frequency range that overlaps both the first and second phonon frequency ranges.

Abstract: A semiconductor structure includes a semiconductor substrate, a first source/drain portion, a second source/drain portion, a first metal contact, a second metal contact and a first conductive carbon layer. The first and second source/drain portions are formed over the semiconductor substrate, and are spaced apart from each other. The first source/drain portion has a conductivity type different from that of the second source/drain portion. The first and second metal contacts are respectively formed on the first and second source/drain portions. The first conductive carbon layer is formed between the first source/drain portion and the first metal contact.

Abstract: Methods of forming a metal gate structure of a stacked multi-gate device are provided. A method according to the present disclosure includes depositing a titanium nitride (TiN) layer over a channel region that includes bottom channel layers and top channel layers, depositing a dummy fill layer to cover sidewalls of the bottom channel layers, after the depositing of the dummy fill layer, selectively forming a blocking layer over the TiN layer along sidewalls of the top channel layers, selectively removing the dummy fill layer to release the bottom channel layers, selectively depositing a first work function metal layer to wrap around each of the bottom channel layers, forming a gate isolation layer over a top surface of the first work function metal layer, removing the blocking layer, releasing the top channel layers, and selectively depositing a second work function metal layer to wrap around each of the top channel layers.