Patents by Inventor Wen-Chun YOU
Wen-Chun YOU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180175288Abstract: The present disclosure relates to a method for determining a characteristic of a monitored layer of an integrated chip structure. In some embodiments, the method may be performed by forming an integrated chip structure over a substrate. The method further includes forming a monitor layer over the integrated chip structure. The monitor layer includes a plurality of monitor pads. The method also includes measuring an electrical property between a set of monitor pads of the plurality of monitor pads. The set of monitor pads are laterally spaced apart by a monitor pad distance. A characteristic of a region of the integrated chip structure underlying the monitor pad distance between the set of monitor pads is determined based on the measured electrical property.Type: ApplicationFiled: March 3, 2017Publication date: June 21, 2018Inventors: Harry-Hak-Lay Chuang, Tien-Wei Chiang, Wen-Chun You
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Publication number: 20180166501Abstract: Integrated circuit structures and methods for forming the same are provided. An integrated circuit includes a dielectric layer in a memory region and a logic region. The integrated circuit structure also includes a first conductive feature in the dielectric layer in the memory region. The integrated circuit structure further includes a second conductive feature in the dielectric layer in the logic region. In addition, the integrated circuit structure includes an active memory cell over the dielectric layer in the memory region. The active memory cell is connected to the first conductive feature. The integrated circuit structure also includes a dummy memory cell over the dielectric layer in the logic region. The dummy memory cell is connected to the second conductive feature.Type: ApplicationFiled: March 16, 2017Publication date: June 14, 2018Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay CHUANG, Hung-Cho WANG, Wen-Chun YOU
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Patent number: 9985075Abstract: The present disclosure relates an integrated circuit (IC). A plurality of metal layers is disposed within an inter-layer dielectric (ILD) material over the substrate. A memory cell is disposed over a first metal layer at a memory region and comprising a bottom electrode directly above a first metal line within the first metal layer and a top electrode separated from the bottom electrode by a resistance switching element. A dummy structure comprises a dummy bottom electrode arranged directly above a second metal line within the first metal layer at a logic region adjacent to the memory region.Type: GrantFiled: November 8, 2016Date of Patent: May 29, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Wen-Chun You
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Publication number: 20180019390Abstract: Some embodiments relate to an integrated circuit device, which includes a bottom electrode, a dielectric layer, and top electrode. The dielectric layer is disposed over the bottom electrode. The top electrode is disposed over the dielectric layer, and an upper surface of the top electrode exhibits a recess. A via is disposed over the top electrode. The via makes electrical contact with only a tapered sidewall of the recess without contacting a bottom surface of the recess.Type: ApplicationFiled: September 26, 2017Publication date: January 18, 2018Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
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Patent number: 9780302Abstract: Some embodiments relate to an integrated circuit device. The integrated circuit device includes a resistive random access memory (RRAM) cell, which includes a top electrode and a bottom electrode that are separated by a RRAM dielectric layer. The top electrode of the RRAM cell has a recess in its upper surface. A via is disposed over the RRAM cell and contacts the top electrode within the recess.Type: GrantFiled: September 12, 2016Date of Patent: October 3, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
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Publication number: 20170256704Abstract: Some embodiments relate to a magnetoresistive random-access memory (MRAM) cell. The cell includes a bottom electrode having a central bottom electrode portion surrounded by a peripheral bottom electrode portion. Step regions of the conductive bottom electrode couple the central and peripheral bottom electrode portions to one another such that an upper surface of the central portion is recessed relative to an upper surface of the peripheral portion. A magnetic tunneling junction (MTJ) has MTJ outer sidewalls which are disposed over the bottom central electrode portion and which are arranged between the step regions. A top electrode is disposed over an upper surface of the MTJ. Other devices and methods are also disclosed.Type: ApplicationFiled: May 22, 2017Publication date: September 7, 2017Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tien-Wei Chiang, Wen-Chun You
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Patent number: 9666790Abstract: Some embodiments relate to a magnetoresistive random-access memory (MRAM) cell. The cell includes a bottom electrode having a central bottom electrode portion surrounded by a peripheral bottom electrode portion. Step regions of the conductive bottom electrode couple the central and peripheral bottom electrode portions to one another such that an upper surface of the central portion is recessed relative to an upper surface of the peripheral portion. A magnetic tunneling junction (MTJ) has MTJ outer sidewalls which are disposed over the bottom central electrode portion and which are arranged between the step regions. A top electrode is disposed over an upper surface of the MTJ. Other devices and methods are also disclosed.Type: GrantFiled: July 17, 2015Date of Patent: May 30, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tien-Wei Chiang, Wen-Chun You
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Publication number: 20170141301Abstract: The present disclosure relates to a resistive random access memory (RRAM) device. The RRAM device has a bottom electrode arranged over a bottom electrode via. A variable resistive dielectric layer is arranged over the bottom electrode. The variable resistive dielectric layer extends to within a recess in an upper surface of the bottom electrode. A top electrode is disposed over the variable resistive dielectric layer. A top electrode via extends outward from an upper surface of the top electrode at a position centered along a first axis that is laterally offset from a second axis centered upon the recess within the upper surface of the bottom electrode.Type: ApplicationFiled: July 29, 2016Publication date: May 18, 2017Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You
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Publication number: 20170053967Abstract: The present disclosure relates an integrated circuit (IC). A plurality of metal layers is disposed within an inter-layer dielectric (ILD) material over the substrate. A memory cell is disposed over a first metal layer at a memory region and comprising a bottom electrode directly above a first metal line within the first metal layer and a top electrode separated from the bottom electrode by a resistance switching element. A dummy structure comprises a dummy bottom electrode arranged directly above a second metal line within the first metal layer at a logic region adjacent to the memory region.Type: ApplicationFiled: November 8, 2016Publication date: February 23, 2017Inventors: Harry-Hak-Lay Chuang, Wen-Chun You
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Publication number: 20170018704Abstract: Some embodiments relate to a magnetoresistive random-access memory (MRAM) cell. The cell includes a bottom electrode having a central bottom electrode portion surrounded by a peripheral bottom electrode portion. Step regions of the conductive bottom electrode couple the central and peripheral bottom electrode portions to one another such that an upper surface of the central portion is recessed relative to an upper surface of the peripheral portion. A magnetic tunneling junction (MTJ) has MTJ outer sidewalls which are disposed over the bottom central electrode portion and which are arranged between the step regions. A top electrode is disposed over an upper surface of the MTJ. Other devices and methods are also disclosed.Type: ApplicationFiled: July 17, 2015Publication date: January 19, 2017Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tien-Wei Chiang, Wen-Chun You
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Publication number: 20160380193Abstract: Some embodiments relate to an integrated circuit device. The integrated circuit device includes a resistive random access memory (RRAM) cell, which includes a top electrode and a bottom electrode that are separated by a RRAM dielectric layer. The top electrode of the RRAM cell has a recess in its upper surface. A via is disposed over the RRAM cell and contacts the top electrode within the recess.Type: ApplicationFiled: September 12, 2016Publication date: December 29, 2016Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
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Patent number: 9502466Abstract: The present disclosure relates an integrated circuit (IC). The IC comprises a plurality of lower metal lines disposed within a lower inter-layer dielectric (ILD) layer over the substrate. The IC further comprises a plurality of memory cells disposed over the ILD layer and the lower metal lines at a memory region, a memory cell comprising a top electrode and a bottom electrode separated by a resistance switching element. The IC further comprises a dummy structure arranged directly above a first lower metal line at a logic region adjacent to the memory region, comprising a dummy bottom electrode and a dielectric mask on the dummy bottom electrode. The IC further comprises a top etch stop layer disposed on a bottom etch stop layer and extending upwardly along sidewalls of the dummy structure and overlying an upper surface of the dummy structure.Type: GrantFiled: July 28, 2015Date of Patent: November 22, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Wen-Chun You
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Publication number: 20160268499Abstract: A method of forming a magnetoresistive random access memory (MRAM) device including a perpendicular MTJ (magnetic tunnel junction) is provided. The method includes forming a magnetic tunneling junction (MTJ) over a bottom electrode layer. A top electrode layer is formed over an upper surface of the MTJ, and a hard mask is formed over an upper surface of the top electrode layer. A first etch is performed through the top electrode layer, through regions of the MTJ unmasked by the hard mask, to form a top electrode and an etched MTJ. Sidewall spacers are formed extending from an upper surface of the hard mask or the top electrode, along sidewalls of the top electrode and the etched MTJ, to a point below or about even with an upper surface of the bottom electrode. A resulting MRAM device structure is also provided.Type: ApplicationFiled: March 12, 2015Publication date: September 15, 2016Inventors: Wen-Chun You, Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Ting Chu, Yu-Wen Liao
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Publication number: 20160268507Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, protection spacers and a second electrode. The first electrode has a top surface and a first outer sidewall surface on the memory region. The resistance variable layer has a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection spacers are disposed over a portion of the top surface of the first electrode and surround the second portion of the resistance variable layer. The protection spacers are configurable to protect at least one conductive path in the resistance variable layer. The protection spacers have a second outer sidewall surface substantially aligned with the first outer sidewall surface of the first electrode.Type: ApplicationFiled: May 23, 2016Publication date: September 15, 2016Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You, Wen-Ting Chu, Yu-Wen Liao
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Patent number: 9444045Abstract: Some embodiments relate to an integrated circuit device. The integrated circuit device includes a resistive random access memory (RRAM) cell, which includes a top electrode and a bottom electrode that are separated by a RRAM dielectric layer. The top electrode of the RRAM cell has a recess in its upper surface. A via is disposed over the RRAM cell and contacts the top electrode within the recess.Type: GrantFiled: October 12, 2015Date of Patent: September 13, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
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Patent number: 9425392Abstract: The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell. The method forms a bottom electrode over a bottom electrode via. The method further forms a variable resistive dielectric layer over the bottom electrode, and a top electrode over the variable resistive dielectric layer. The method forms a top electrode via vertically extending outward from an upper surface of the top electrode at a position centered along a first axis that is laterally offset from a second axis centered upon the bottom electrode via. The top electrode via has a smaller width than the top electrode. Laterally offsetting the top electrode via from the bottom electrode via provides the top electrode via with good contact resistance.Type: GrantFiled: July 20, 2015Date of Patent: August 23, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You
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Patent number: 9368722Abstract: One embodiment in the present disclosure provides a resistor in a resistive random access memory (RRAM). The resistor includes a first electrode; a resistive layer on the first electrode; an electric field enhancement array in the resistive layer; and a second electrode on the resistive layer. The electric field enhancement array includes a plurality of electric field enhancers arranged in a same plane. One embodiment in the present disclosure provides a method of manufacturing a resistor structure in an RRAM. The method comprises (1) forming a first resistive layer on a first electrode; (2) forming a metal layer on the resistive layer; (3) patterning the metal layer to form a metal dot array on the resistive layer; and (4) forming a second electrode on the metal dot array. The metal dot array comprises a plurality of metal dots, and a distance between adjacent metal dots is less than 40 nm.Type: GrantFiled: September 6, 2013Date of Patent: June 14, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Sheng-Hung Shih, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Chih-Yang Chang, Chin-Chieh Yang, Hsia-Wei Chen, Wen-Chun You, Chih-Ming Chen
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Patent number: 9349953Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, protection spacers and a second electrode. The first electrode has a top surface and a first outer sidewall surface on the memory region. The resistance variable layer has a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection spacers are disposed over a portion of the top surface of the first electrode and surround the second portion of the resistance variable layer. The protection spacers are configurable to protect at least one conductive path in the resistance variable layer. The protection spacers have a second outer sidewall surface substantially aligned with the first outer sidewall surface of the first electrode.Type: GrantFiled: May 16, 2013Date of Patent: May 24, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Yu-Wen Liao, Chin-Chieh Yang, Wen-Chun You, Sheng-Hung Shih, Wen-Ting Chu
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Publication number: 20160035975Abstract: Some embodiments relate to an integrated circuit device. The integrated circuit device includes a resistive random access memory (RRAM) cell, which includes a top electrode and a bottom electrode that are separated by a RRAM dielectric layer. The top electrode of the RRAM cell has a recess in its upper surface. A via is disposed over the RRAM cell and contacts the top electrode within the recess.Type: ApplicationFiled: October 12, 2015Publication date: February 4, 2016Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
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Publication number: 20150325786Abstract: The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell. The method forms a bottom electrode over a bottom electrode via. The method further forms a variable resistive dielectric layer over the bottom electrode, and a top electrode over the variable resistive dielectric layer. The method forms a top electrode via vertically extending outward from an upper surface of the top electrode at a position centered along a first axis that is laterally offset from a second axis centered upon the bottom electrode via. The top electrode via has a smaller width than the top electrode. Laterally offsetting the top electrode via from the bottom electrode via provides the top electrode via with good contact resistance.Type: ApplicationFiled: July 20, 2015Publication date: November 12, 2015Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You