Abstract: Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.

Abstract: Techniques are provided for implementing a hash building process and an append hash building process. The hash building process builds in-memory hash entries for bins of keys stored within sorted logs of a log structured merge tree used to store keys of a key-value store. The in-memory hash entries can be used to identify the starting locations of bins of keys within the log structured merge tree so that a key within a bin can be searched for from the starting location of the bin as opposed to having to search the entire log structured merge tree. The append hash building process builds two hashes that can be used to more efficiently locate keys and/or ranges of keys within an unsorted append log that would otherwise require a time consuming binary search of the entire append log.

Abstract: A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.

Abstract: A multi-spray RRC process with dynamic control to improve final yield and further reduce resist cost is disclosed. In one embodiment, a method, includes: dispensing a first layer of solvent on a semiconductor substrate while spinning at a first speed for a first time period; dispensing the solvent on the semiconductor substrate while spinning at a second speed for a second time period so as to transform the first layer to a second layer of the solvent; dispensing the solvent on the semiconductor substrate while spinning at a third speed for a third time period so as to transform the second layer to a third layer of the solvent; dispensing the solvent on the semiconductor substrate while spinning at a fourth speed for a fourth time period so as to transform the third layer to a fourth layer of the solvent; and dispensing a first layer of photoresist on the fourth layer of the solvent while spinning at a fifth speed for a fifth period of time.

Abstract: Failover methods and systems for a networked storage environment are provided. In one aspect, a read request associated with a first storage object is received, during a replay of entries of a log stored in a non-volatile memory of a second storage node for a failover operation initiated in response to a failure at a first storage node. The second storage node operates as a partner node of the first storage node. The read request is processed using a filtering data structure that is generated from the log prior to the replay and identifies each log entry. The read request is processed when the log does not have an entry associated with the read request, and when the filtering data structure includes an entry associated with the read request, the requested data is located at the non-volatile memory.

Abstract: Techniques are provided for implementing a garbage collection process and a prediction read ahead mechanism to prefetch keys into memory to improve the efficiency and speed of the garbage collection process. A log structured merge tree is used to store keys of key-value pairs within a key-value store. If a key is no longer referenced by any worker nodes of a distributed storage architecture, then the key can be freed to store other data. Accordingly, garbage collection is performed to identify and free unused keys. The speed and efficiency of garbage collection is improved by dynamically adjusting the amount and rate at which keys are prefetched from disk and cached into faster memory for processing by the garbage collection process.

Abstract: An example apparatus includes bias control circuitry and sampling circuitry. The example sampling circuitry includes a first switch coupled to a first capacitor in series between an input voltage terminal and a common mode voltage terminal, the first switch including a first terminal coupled to the input voltage terminal. Additionally, the example sampling circuitry includes a second switch coupled to a second capacitor in series between the input voltage terminal and the common mode voltage terminal, the second switch including a first terminal coupled to the input voltage terminal. The example sampling circuitry also includes a third switch including a first terminal, a second terminal, and a control terminal, the first terminal of the third switch coupled to a power supply terminal, the second terminal of the third switch coupled between the first switch and the first capacitor, the control terminal coupled to the bias control circuitry.

Abstract: Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.

Abstract: Techniques are provided for compacting indirect blocks. For example, an object is represented as a structure comprising data blocks within which data of the object is stored and indirect blocks comprising block numbers of where the data blocks are located in storage. Block numbers within a set of indirect blocks are compacted into a compacted indirect block comprising a base block number, a count of additional block numbers after the base block number in the compacted indirect block, and a pattern of the block numbers in the compacted indirect block. The compacted indirect block is stored into memory for processing access operations to the object. Storing compacted indirect blocks into memory allows for more block numbers to be stored within memory. This improves the processing of access operations because reading the block numbers from memory is faster than loading the block numbers from disk.

Abstract: A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.

Abstract: In an embodiment a system includes: an automated vehicle configured to traverse a first predetermined path; and a sensor system located on the automated vehicle, the sensor system configured to detect a vertical obstacle along the first predetermined path along one or two floorboards ahead of the automated vehicle, wherein the automated vehicle is configured to traverse a second predetermined path in response to detecting the vertical obstacle.

Abstract: In an embodiment a system includes: an automated vehicle configured to traverse a first predetermined path; and a sensor system located on the automated vehicle, the sensor system configured to detect a vertical obstacle along the first predetermined path along one or two floorboards ahead of the automated vehicle, wherein the automated vehicle is configured to traverse a second predetermined path in response to detecting the vertical obstacle.

Abstract: An operation method of a mobility aid includes following steps: detecting a distance between the mobility aid and a sensing target by a distance sensor; detecting a three-axis angle of the mobility aid by an inertial measurement unit; loading and executing an artificial intelligence model from a storage device by a processing device to calculate a suggested speed value according to the artificial intelligence model and an input parameter set, wherein the input parameter set comprises the distance and the three-axis angle; and moving the mobility aid by a power output device according to the suggested speed value.

Abstract: A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.

Abstract: An electronic device and a power management method thereof are provided. The power management method includes: detecting a plurality of status information of a plurality of operation statuses of a battery set; determining an information value range within which each of the status information of each of the operation statuses falls, calculating a weighting value of each of the operation statuses according to the information value range; and calculating a weighting value sum corresponding to the weighting values of the operation statuses to set a load capacity of the battery set according to the weighting value sum.

Abstract: A gas tube, a gas supply system containing the same and a semiconductor manufacturing method using the same are provided. The gas tube includes a porous material body and a resistant sheath surrounding the porous material body. The porous material body has a hollow tube structure and an empty cavity inside the hollow tube structure. The porous material body is hydrophobic and has a plurality of pores therein. The resistant sheath is disposed on the porous material body and surrounds the porous material body. The resistant sheath includes a plurality of holes penetrating through the resistant sheath.

Abstract: A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.

Abstract: The present disclosure provides a measuring system. The measuring system includes an insulative tube, a capacitor and a static charge meter. The insulative tube is configured to allow a fluid to flow therethrough. The capacitor is disposed on a surface of a section of the insulative tube. The capacitor includes a first metallic layer, a second metallic layer opposite to the first metallic layer, and a dielectric layer sandwiched between the first metallic layer and the second metallic layer. The static charge meter is electrically coupled to the capacitor and configured to measure static charge accumulated inside the section of the insulative tube.

Abstract: Techniques are provided for compacting indirect blocks. For example, an object is represented as a structure comprising data blocks within which data of the object is stored and indirect blocks comprising block numbers of where the data blocks are located in storage. Block numbers within a set of indirect blocks are compacted into a compacted indirect block comprising a base block number, a count of additional block numbers after the base block number in the compacted indirect block, and a pattern of the block numbers in the compacted indirect block. The compacted indirect block is stored into memory for processing access operations to the object. Storing compacted indirect blocks into memory allows for more block numbers to be stored within memory. In this way, the block numbers are read from memory is faster than loading the block numbers from disk.

Abstract: Techniques are provided for implementing a defragmentation process during a merge operation performed by a re-compaction process upon a log structured merge tree. The log structured merge tree is used to store keys of key-value pairs within a key-value store. As the log structured merge tree fills with keys over time, the re-compaction process is performed to merge keys down to lower levels of the log structured merge tree to re-compact the keys. Re-compaction can result in fragmentation because there is a lack of spatial locality of where the re-compaction operations re-writes the keys within storage. Fragmentation increases read and write amplification when accessing the keys stored in different locations within the storage. Accordingly, the defragmentation process is performed during a last merge operation of the re-compaction process in order to store keys together within the storage, thus reducing read and write amplification when accessing the keys.