Patents by Inventor Wen-Shun Lo
Wen-Shun Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220384465Abstract: A memory device includes a substrate, a first transistor, a second transistor, and a capacitor. The first transistor is over the substrate and includes a select gate. The second transistor is over the substrate and connected to the first transistor in series, in which the second transistor includes a floating gate. The capacitor is over the substrate and connected to the second transistor, wherein the capacitor includes a top electrode, a bottom electrode in the substrate, and an insulating layer between the top electrode and the bottom electrode. The insulating layer includes nitrogen. A nitrogen concentration of the insulating layer increases in a direction from the top electrode to the bottom electrode.Type: ApplicationFiled: May 27, 2021Publication date: December 1, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Shun LO, Tai-Yi WU, YingKit Felix Tsui
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Publication number: 20210272990Abstract: In some embodiments, a photodetector is provided. The photodetector includes a first well having a first doping type disposed in a semiconductor substrate. A second well having a second doping type opposite the first doping type is disposed in the semiconductor substrate on a side of the first well. A first doped buried region having the second doping type is disposed in the semiconductor substrate, where the first doped buried region extends laterally through the semiconductor substrate beneath the first well and the second well. A second doped buried region having the second doping type is disposed in the semiconductor substrate and vertically between the first doped buried region and the first well, where the second doped buried region contacts the first well such that a photodetector p-n junction exists along the second doped buried region and the first well.Type: ApplicationFiled: May 19, 2021Publication date: September 2, 2021Inventors: Wen-Shun Lo, Felix Ying-Kit Tsui
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Patent number: 11018168Abstract: In some embodiments, a photodetector is provided. The photodetector includes a first well having a first doping type disposed in a semiconductor substrate. A second well having a second doping type opposite the first doping type is disposed in the semiconductor substrate on a side of the first well. A first doped buried region having the second doping type is disposed in the semiconductor substrate, where the first doped buried region extends laterally through the semiconductor substrate beneath the first well and the second well. A second doped buried region having the second doping type is disposed in the semiconductor substrate and vertically between the first doped buried region and the first well, where the second doped buried region contacts the first well such that a photodetector p-n junction exists along the second doped buried region and the first well.Type: GrantFiled: May 10, 2019Date of Patent: May 25, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wen-Shun Lo, Felix Ying-Kit Tsui
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Patent number: 10985240Abstract: A Schottky diode device includes a substrate having a first conductivity type, a first well region having a second conductivity type disposed in the substrate, and a first doped region having the second conductivity type in the first well region, wherein the first doped region includes a first portion and a second portion, and the first portion and the second portion have different doping concentrations. The first portion includes a region having at least four sides, from a top-view perspective, abutting the second portion.Type: GrantFiled: May 12, 2020Date of Patent: April 20, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Patent number: 10964586Abstract: A semiconductor structure includes a substrate having a first region and a second region defined thereon, a first isolation in the first region, a second isolation in the second region, and a region surrounding the first isolation in the substrate. The substrate includes a first material, and the region includes the first material and a second material. The first isolation has a first width, the second isolation has a second width, and the first width is greater than the second width. A bottom and sidewalls of the first isolation are in contact with the region, and a bottom and sidewalls of the second isolation are in contact with the substrate.Type: GrantFiled: December 20, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Publication number: 20200286987Abstract: A Schottky diode device includes a substrate having a first conductivity type, a first well region having a second conductivity type disposed in the substrate, and a first doped region having the second conductivity type in the first well region, wherein the first doped region includes a first portion and a second portion, and the first portion and the second portion have different doping concentrations. The first portion includes a region having at least four sides, from a top-view perspective, abutting the second portion.Type: ApplicationFiled: May 12, 2020Publication date: September 10, 2020Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Patent number: 10763329Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a channel region, a pair of source/drain regions and a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The channel region includes a pair of first sides opposing to each other in a channel length direction, and a pair of second sides opposing to each other in a channel width direction. The source/drain regions are adjacent to the pair of first sides of the channel region in the channel length direction. The threshold voltage adjusting region covers the pair of second sides of the channel region in the channel width direction, and exposing the pair of first sides of the channel region in the channel length direction.Type: GrantFiled: July 1, 2019Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Patent number: 10692788Abstract: A conductive-insulator-semiconductor (CIS) device with low flicker noise is provided. In some embodiments, the CIS device comprises a semiconductor substrate, a pair of source/drain regions, a selectively-conductive channel, and a gate electrode. The pair of source/drain regions is in the semiconductor substrate, and the source/drain regions are laterally spaced. The selectively-conductive channel is in the semiconductor substrate, and extends laterally in a first direction, from one of the source/drain regions to another one of the source/drain regions. The gate electrode comprises a pair of peripheral segments and a central segment. The peripheral segments extend laterally in parallel in the first direction. The central segment covers the selectively-conductive channel and extends laterally in a second direction transverse to the first direction, from one of the peripheral segments to another one of the peripheral segments. A method for manufacturing the CIS device is also provided.Type: GrantFiled: August 28, 2017Date of Patent: June 23, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wen-Shun Lo, Ching-Hsien Huang, Yu-Chi Chang
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Patent number: 10665727Abstract: Present disclosure provides a semiconductor structure, including a semiconductor substrate having a top surface, a first well region of a first conductivity type in the semiconductor substrate, a second well region of a second conductivity type in the semiconductor substrate, laterally surrounding the first well region, and an isolation region in the first well region and the second well region in proximity to the top surface. The first well region includes a first lighter doped region in proximity to the top surface, and a heavier doped region under the first lighter doped region. Present disclosure also provides a method for manufacturing the semiconductor structure described herein.Type: GrantFiled: July 13, 2018Date of Patent: May 26, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Felix Ying-Kit Tsui
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Patent number: 10658456Abstract: The present disclosure provides a method of manufacturing a Schottky diode. The method includes: providing a substrate; forming a first well region in the substrate; defining a first portion and a second portion on a surface of the first well region and performing a first ion implantation on the first portion while keeping the second portion from being implanted; forming a first doped region by heating the substrate to cause dopant diffusion between the first portion and the second portion; and forming a metal-containing layer on the first doped region to obtain a Schottky barrier interface.Type: GrantFiled: December 17, 2018Date of Patent: May 19, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Publication number: 20200135540Abstract: A semiconductor structure includes a substrate having a first region and a second region defined thereon, a first isolation in the first region, a second isolation in the second region, and a region surrounding the first isolation in the substrate. The substrate includes a first material, and the region includes the first material and a second material. The first isolation has a first width, the second isolation has a second width, and the first width is greater than the second width. A bottom and sidewalls of the first isolation are in contact with the region, and a bottom and sidewalls of the second isolation are in contact with the substrate.Type: ApplicationFiled: December 20, 2019Publication date: April 30, 2020Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Publication number: 20200098803Abstract: In some embodiments, a photodetector is provided. The photodetector includes a first well having a first doping type disposed in a semiconductor substrate. A second well having a second doping type opposite the first doping type is disposed in the semiconductor substrate on a side of the first well. A first doped buried region having the second doping type is disposed in the semiconductor substrate, where the first doped buried region extends laterally through the semiconductor substrate beneath the first well and the second well. A second doped buried region having the second doping type is disposed in the semiconductor substrate and vertically between the first doped buried region and the first well, where the second doped buried region contacts the first well such that a photodetector p-n junction exists along the second doped buried region and the first well.Type: ApplicationFiled: May 10, 2019Publication date: March 26, 2020Inventors: Wen-Shun Lo, Felix Ying-Kit Tsui
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Publication number: 20200020813Abstract: Present disclosure provides a semiconductor structure, including a semiconductor substrate having a top surface, a first well region of a first conductivity type in the semiconductor substrate, a second well region of a second conductivity type in the semiconductor substrate, laterally surrounding the first well region, and an isolation region in the first well region and the second well region in proximity to the top surface. The first well region includes a first lighter doped region in proximity to the top surface, and a heavier doped region under the first lighter doped region. Present disclosure also provides a method for manufacturing the semiconductor structure described herein.Type: ApplicationFiled: July 13, 2018Publication date: January 16, 2020Inventors: WEN-SHUN LO, FELIX YING-KIT TSUI
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Patent number: 10515845Abstract: A method for manufacturing a semiconductor structure including isolations includes receiving a substrate including a first region and a second region; forming a patterned hard mask, the patterned hard mask including a first opening exposing a portion of the first region and a second opening exposing a portion of the second region; removing portions of the substrate to form a first trench in the first region and to form a second trench in the second region; performing an ion implantation to a portion of the patterned hard mask in the first region and a portion of the substrate exposed from the first trench; enlarging the first opening to form a third opening over the first trench and enlarging the second opening to form a fourth opening over the second trench; and forming a first isolation by filling the first trench and a second isolation by filling the second trench.Type: GrantFiled: February 22, 2018Date of Patent: December 24, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Publication number: 20190326400Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a channel region, a pair of source/drain regions and a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The channel region includes a pair of first sides opposing to each other in a channel length direction, and a pair of second sides opposing to each other in a channel width direction. The source/drain regions are adjacent to the pair of first sides of the channel region in the channel length direction. The threshold voltage adjusting region covers the pair of second sides of the channel region in the channel width direction, and exposing the pair of first sides of the channel region in the channel length direction.Type: ApplicationFiled: July 1, 2019Publication date: October 24, 2019Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Patent number: 10340343Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a pair of source/drain regions and a a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The source/drain regions are adjacent to two opposing sides of the channel region in a channel length direction. The threshold voltage adjusting region is adjacent to two opposing sides of the channel region in a channel width direction, wherein the threshold voltage adjusting region and the channel region have the same doping type.Type: GrantFiled: January 4, 2018Date of Patent: July 2, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
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Publication number: 20190140045Abstract: The present disclosure provides a method of manufacturing a Schottky diode. The method includes: providing a substrate; forming a first well region in the substrate; defining a first portion and a second portion on a surface of the first well region and performing a first ion implantation on the first portion while keeping the second portion from being implanted; forming a first doped region by heating the substrate to cause dopant diffusion between the first portion and the second portion; and forming a metal-containing layer on the first doped region to obtain a Schottky barrier interface.Type: ApplicationFiled: December 17, 2018Publication date: May 9, 2019Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Publication number: 20190139816Abstract: A method for manufacturing a semiconductor structure including isolations includes receiving a substrate including a first region and a second region; forming a patterned hard mask, the patterned hard mask including a first opening exposing a portion of the first region and a second opening exposing a portion of the second region; removing portions of the substrate to form a first trench in the first region and to form a second trench in the second region; performing an ion implantation to a portion of the patterned hard mask in the first region and a portion of the substrate exposed from the first trench; enlarging the first opening to form a third opening over the first trench and enlarging the second opening to form a fourth opening over the second trench; and forming a first isolation by filling the first trench and a second isolation by filling the second trench.Type: ApplicationFiled: February 22, 2018Publication date: May 9, 2019Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Publication number: 20190131401Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a pair of source/drain regions and a a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The source/drain regions are adjacent to two opposing sides of the channel region in a channel length direction. The threshold voltage adjusting region is adjacent to two opposing sides of the channel region in a channel width direction, wherein the threshold voltage adjusting region and the channel region have the same doping type.Type: ApplicationFiled: January 4, 2018Publication date: May 2, 2019Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
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Publication number: 20190067138Abstract: A conductive-insulator-semiconductor (CIS) device with low flicker noise is provided. In some embodiments, the CIS device comprises a semiconductor substrate, a pair of source/drain regions, a selectively-conductive channel, and a gate electrode. The pair of source/drain regions is in the semiconductor substrate, and the source/drain regions are laterally spaced. The selectively-conductive channel is in the semiconductor substrate, and extends laterally in a first direction, from one of the source/drain regions to another one of the source/drain regions. The gate electrode comprises a pair of peripheral segments and a central segment. The peripheral segments extend laterally in parallel in the first direction. The central segment covers the selectively-conductive channel and extends laterally in a second direction transverse to the first direction, from one of the peripheral segments to another one of the peripheral segments. A method for manufacturing the CIS device is also provided.Type: ApplicationFiled: August 28, 2017Publication date: February 28, 2019Inventors: Wen-Shun Lo, Ching-Hsien Huang, Yu-Chi Chang