Patents by Inventor Wilfried E. A. Haensch

Wilfried E. A. Haensch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120313216
    Abstract: An example embodiment is a complementary transistor inverter circuit. The circuit includes a semiconductor-on-insulator (SOI) substrate, a lateral PNP bipolar transistor fabricated on the SOI substrate, and a lateral NPN bipolar transistor fabricated on the SOI substrate. The lateral PNP bipolar transistor includes a PNP base, a PNP emitter, and a PNP collector. The lateral NPN bipolar transistor includes a NPN base, a NPN emitter, and a NPN collector. The PNP base, the PNP emitter, the PNP collector, the NPN base, the NPN emitter, and the NPN collector abut the buried insulator of the SOI substrate.
    Type: Application
    Filed: June 12, 2011
    Publication date: December 13, 2012
    Applicant: International Business Machines Corporation
    Inventors: Jin Cai, Robert H. Dennard, Wilfried E. Haensch, Tak H. Ning
  • Publication number: 20120299125
    Abstract: A method of forming a gate structure with a self-aligned contact is provided and includes sequentially depositing a sacrificial layer and a secondary layer onto poly-Si disposed at a location of the gate structure, encapsulating the sacrificial layer, the secondary layer and the poly-Si, removing the sacrificial layer through openings formed in the secondary layer and forming silicide within at least the space formally occupied by the sacrificial layer.
    Type: Application
    Filed: August 7, 2012
    Publication date: November 29, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Wilfried E.A. Haensch, Shu-Jen Han, Chung-Hsun Lin
  • Patent number: 8318568
    Abstract: A method for fabricating an FET device characterized as being a tunnel FET (TFET) device is disclosed. The method includes processing a gate-stack, and processing the adjoining source and drain junctions, which are of a first conductivity type. A hardmask is formed covering the gate-stack and the junctions. A tilted angle ion implantation is performed which is received by a first portion of the hardmask, and it is not received by a second portion of the hardmask due to the shadowing of the gate-stack. The implanted portion of the hardmask is removed and one of the junctions is exposed. The junction is etched away, and a new junction, typically in-situ doped to a second conductivity type, is epitaxially grown into its place. A device characterized as being an asymmetrical TFET is also disclosed.
    Type: Grant
    Filed: April 14, 2010
    Date of Patent: November 27, 2012
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Kangguo Cheng, Wilfried E. Haensch, Ali Khakifirooz, Isaac Lauer, Ghavam G. Shahidi
  • Publication number: 20120292702
    Abstract: A three dimensional integrated circuit includes a silicon substrate, a first source region disposed on the substrate, a first drain region disposed on the substrate, a first gate stack portion disposed on the substrate, a first dielectric layer disposed on the first source region, the first drain region, the first gate stack portion, and the substrate, a second dielectric layer formed on the first dielectric layer, a second source region disposed on the second dielectric layer, a second drain region disposed on the second dielectric layer, and a second gate stack portion disposed on the second dielectric layer, the second gate stack portion including a graphene layer.
    Type: Application
    Filed: July 27, 2012
    Publication date: November 22, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, Wilfried E. Haensch, Fei Liu, Zihong Liu
  • Publication number: 20120286350
    Abstract: An FET device characterized as being an asymmetrical tunnel FET (TFET) is disclosed. The TFET includes a gate-stack, a channel region underneath the gate-stack, a first and a second junction adjoining the gate-stack and being capable for electrical continuity with the channel. The first junction and the second junction are of different conductivity types. The TFET also includes spacer formations in a manner that the spacer formation on one side of the gate-stack is thinner than on the other side.
    Type: Application
    Filed: July 26, 2012
    Publication date: November 15, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Bruce B. Doris, Kangguo Cheng, Wilfried E. Haensch, Ali Khakifirooz, Isaac Lauer, Ghavam G. Shahidi
  • Publication number: 20120280322
    Abstract: A field effect transistor device includes a gate stack disposed on a substrate a first contact portion disposed on a first distal end of the gate stack, a second contact portion disposed on a second distal end of the gate stack, the first contact portion disposed a distance (d) from the second contact portion, and a third contact portion having a width (w) disposed in a source region of the device, the distance (d) is greater than the width (w).
    Type: Application
    Filed: July 20, 2012
    Publication date: November 8, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Wilfried E. Haensch, Xinhui Wang, Keith Kwong Hon Wong
  • Publication number: 20120280290
    Abstract: A common cut mask is employed to define a gate pattern and a local interconnect pattern so that local interconnect structures and gate structures are formed with zero overlay variation relative to one another. A local interconnect structure may be laterally spaced from a gate structure in a first horizontal direction, and contact another gate structure in a second horizontal direction that is different from the first horizontal direction. Further, a gate structure may be formed to be collinear with a local interconnect structure that adjoins the gate structure. The local interconnect structures and the gate structures are formed by a common damascene processing step so that the top surfaces of the gate structures and the local interconnect structures are coplanar with each other.
    Type: Application
    Filed: May 6, 2011
    Publication date: November 8, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ali Khakifirooz, Kangguo Cheng, Bruce B. Doris, Wilfried E. Haensch, Balasubramanian S. Haran, Pranita Kulkarni
  • Publication number: 20120235143
    Abstract: A vertical heterojunction bipolar transistor (HBT) includes doped polysilicon having a doping of a first conductivity type as a wide-gap-emitter with an energy bandgap of about 1.12 eV and doped single crystalline Ge having a doping of the second conductivity type as the base having the energy bandgap of about 0.66 eV. Doped single crystalline Ge having of doping of the first conductivity type is employed as the collector. Because the base and the collector include the same semiconductor material, i.e., Ge, having the same lattice constant, there is no lattice mismatch issue between the collector and the base. Further, because the emitter is polycrystalline and the base is single crystalline, there is no lattice mismatch issue between the base and the emitter.
    Type: Application
    Filed: March 15, 2011
    Publication date: September 20, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jin Cai, Kevin K. Chan, Wilfried E. Haensch, Tak H. Ning
  • Publication number: 20120193712
    Abstract: A semiconductor device which includes fins of a semiconductor material formed on a semiconductor substrate and then a gate electrode formed over and in contact with the fins. An insulator layer is deposited over the gate electrode and the fins. A trench opening is then etched in the insulator layer. The trench opening exposes the fins and extends between the fins. The fins are then silicided through the trench opening. Then, the trench opening is filled with a metal in contact with the silicided fins to form a local interconnect connecting the fins.
    Type: Application
    Filed: January 27, 2011
    Publication date: August 2, 2012
    Applicant: International Business Machines Corporation
    Inventors: Andres Bryant, Huiming Bu, Dechao Guo, Wilfried E. Haensch, Chun-Chen Yeh
  • Publication number: 20120181508
    Abstract: A three dimensional integrated circuit includes a silicon substrate, a first source region disposed on the substrate, a first drain region disposed on the substrate, a first gate stack portion disposed on the substrate, a first dielectric layer disposed on the first source region, the first drain region, the first gate stack portion, and the substrate, a second dielectric layer formed on the first dielectric layer, a second source region disposed on the second dielectric layer, a second drain region disposed on the second dielectric layer, and a second gate stack portion disposed on the second dielectric layer, the second gate stack portion including a graphene layer.
    Type: Application
    Filed: January 19, 2011
    Publication date: July 19, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, Wilfried E. Haensch, Fei Liu, Zihong Liu
  • Publication number: 20120175749
    Abstract: A structure comprises first and at least second fin structures are formed. Each of the first and at least second fin structures has a vertically oriented semiconductor body. The vertically oriented semiconductor body is comprised of vertical surfaces. A doped region in each of the first and at least second fin structures is comprised of a concentration of dopant ions present in the semiconductor body to form a first resistor and at least a second resistor, and a pair of merged fins formed on outer portions of the doped regions of the first and at least second fin structures. The pair of merged fins is electrically connected so that the first and at least second resistors are electrically connected in parallel with each other.
    Type: Application
    Filed: January 6, 2011
    Publication date: July 12, 2012
    Applicant: International Business Machines Corporation
    Inventors: Wilfried E. Haensch, Pranita Kulkarni, Tenko Yamashita
  • Publication number: 20120173036
    Abstract: A mechanism is provided for minimizing reliability problems in a three-dimensional (3D)) integrated circuit. A set of sensors are interrogated for current data. A direction of force and a magnitude of the force are determined based on the current data for each sensor in the set of sensors for each of one or more directions between the sensor and at least one neighboring sensor thereby forming a set of forces. Each of the set of forces is used to identify one or more points of stress that are at or above the predetermined force threshold. Responsive to identifying at least one point of stress that is at or above the predetermined force threshold, one or more temperature actuation actions are initiated in order to reduce at least one point of stress in the region where the at least one point of stress is identified.
    Type: Application
    Filed: January 4, 2011
    Publication date: July 5, 2012
  • Publication number: 20120118383
    Abstract: An autonomous integrated circuit (IC) includes a solar cell formed on a bottom substrate of a silicon-on-insulator (SOI) substrate as a handle substrate; an insulating layer of the SOI substrate located on top of the solar cell; and a device layer formed on a top semiconductor layer of the SOI substrate located on top of the insulating layer, wherein a top contact of the device layer is electrically connected to a bottom contact of the solar cell such that the solar cell is enabled to power the device layer.
    Type: Application
    Filed: November 15, 2010
    Publication date: May 17, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Norma E. Sosa Cortes, Wilfried E. Haensch, Steven J. Koester, Devendra K. Sadana, Katherine L. Saenger, Ghavam Shahidi, Davood Shahrjerdi
  • Publication number: 20120112285
    Abstract: The present invention relates to methods and devices for reducing the threshold voltage difference between an n-type field effect transistor (n-FET) and a p-type field effect transistor (p-FET) in a complementary metal-oxide-semiconductor (CMOS) circuit located on a silicon-on-insulator (SOI) substrate. Specifically, a substrate bias voltage is applied to the CMOS circuit for differentially adjusting the threshold voltages of the n-FET and the p-FET. For example, a positive substrate bias voltage can be used to reduce the threshold voltage of the n-FET but increase that of the p-FET, while a negative substrate bias voltage can be used to increase the threshold voltage of the n-FET but reduce that of the p-FET. Further, two or more substrate bias voltages of different magnitudes and/or directions can be used for differentially adjusting the n-FET and p-FET threshold voltages in two or more different CMOS circuits or groups of CMOS circuits.
    Type: Application
    Filed: January 5, 2012
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jin Cai, Wilfried E. Haensch, Tak H. Ning
  • Publication number: 20120038429
    Abstract: An oscillator circuit includes a field effect transistor (FET), the FET comprising a channel, source, drain, and gate, wherein at least the channel comprises graphene; an LC component connected to the FET, the LC component comprising at least one inductor and at least one capacitor; and a feedback loop connecting the FET source to the FET drain via the LC component.
    Type: Application
    Filed: August 13, 2010
    Publication date: February 16, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Wilfried E. Haensch, Yong Liu, Zihong Liu
  • Patent number: 8106458
    Abstract: The present invention relates to methods and devices for reducing the threshold voltage difference between an n-type field effect transistor (n-FET) and a p-type field effect transistor (p-FET) in a complementary metal-oxide-semiconductor (CMOS) circuit located on a silicon-on-insulator (SOI) substrate. Specifically, a substrate bias voltage is applied to the CMOS circuit for differentially adjusting the threshold voltages of the n-FET and the p-FET. For example, a positive substrate bias voltage can be used to reduce the threshold voltage of the n-FET but increase that of the p-FET, while a negative substrate bias voltage can be used to increase the threshold voltage of the n-FET but reduce that of the p-FET. Further, two or more substrate bias voltages of different magnitudes and/or directions can be used for differentially adjusting the n-FET and p-FET threshold voltages in two or more different CMOS circuits or groups of CMOS circuits.
    Type: Grant
    Filed: January 5, 2009
    Date of Patent: January 31, 2012
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Wilfried E. Haensch, Tak H. Ning
  • Patent number: 8080838
    Abstract: A FINFET-containing structure having multiple FINs that are merged together without source/drain contact pads or a local interconnect is provided. The structure includes a plurality of semiconducting bodies (i.e., FINs) which extend above a surface of a substrate. A common patterned gate stack surrounds the plurality of semiconducting bodies and a nitride-containing spacer is located on sidewalls of the common patterned gate stack. An epitaxial semiconductor layer is used to merge each of the semiconducting bodies together.
    Type: Grant
    Filed: May 1, 2009
    Date of Patent: December 20, 2011
    Assignee: International Business Machines Corporation
    Inventors: Leland Chang, Wilfried E. Haensch, Meikei Ieong, Ghavam Shahidi, Huiling Shang
  • Publication number: 20110254080
    Abstract: A method for fabricating an FET device characterized as being a tunnel FET (TFET) device is disclosed. The method includes processing a gate-stack, and processing the adjoining source and drain junctions, which are of a first conductivity type. A hardmask is formed covering the gate-stack and the junctions. A tilted angle ion implantation is performed which is received by a first portion of the hardmask, and it is not received by a second portion of the hardmask due to the shadowing of the gate-stack. The implanted portion of the hardmask is removed and one of the junctions is exposed. The junction is etched away, and a new junction, typically in-situ doped to a second conductivity type, is epitaxially grown into its place. A device characterized as being an asymmetrical TFET is also disclosed.
    Type: Application
    Filed: April 14, 2010
    Publication date: October 20, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Bruce B. Doris, Kangguo Cheng, Wilfried E. Haensch, Ali Khakifirooz, Isaac Lauer, Ghavam G. Shahidi
  • Publication number: 20110248321
    Abstract: A method for forming a field effect transistor includes forming a gate stack, a spacer adjacent to opposing sides of the gate stack, a silicide source region and a silicide drain region on opposing sides of the spacer, epitaxially growing silicon on the source region and the drain region; forming a liner layer on the gate stack and the spacer, removing a portion of the liner layer to expose a portion of the hardmask layer, removing the exposed portions of the hardmask layer to expose a silicon layer of the gate stack, removing exposed silicon to expose a portion of a metal layer of the gate stack, the source region, and the drain region; and depositing a conductive material on the metal layer of the gate stack, the silicide source region, and the silicide drain region.
    Type: Application
    Filed: April 9, 2010
    Publication date: October 13, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Wilfried E. Haensch, Xinhui Wang, Keith Kwong Hon Wong
  • Publication number: 20110248362
    Abstract: A method of forming a gate structure with a self-aligned contact is provided and includes sequentially depositing a sacrificial layer and a secondary layer onto poly-Si disposed at a location of the gate structure, encapsulating the sacrificial layer, the secondary layer and the poly-Si, removing the sacrificial layer through openings formed in the secondary layer and forming silicide within at least the space formally occupied by the sacrificial layer.
    Type: Application
    Filed: April 7, 2010
    Publication date: October 13, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Wilfried E.A. Haensch, Shu-Jen Han, Chung-Hsun Lin