Patents by Inventor Wolfgang Singer
Wolfgang Singer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190155034Abstract: An optical system for transmitting a source image is provided. Light having a field angle spectrum emanates from the source image. The optical system includes an optical waveguide arrangement, in which light can propagate by total internal reflection. The optical system also includes a diffractive optical input coupling arrangement for coupling the light emanating from the source image into the optical waveguide arrangement. The optical system further includes a diffractive optical output coupling arrangement for coupling the light that has propagated in the optical waveguide arrangement out from the optical waveguide arrangement. The disclosure also provides related methods.Type: ApplicationFiled: January 15, 2019Publication date: May 23, 2019Inventors: Wolfgang Singer, Bernd Kleemann, Artur Degen
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Patent number: 10281698Abstract: A laser scanning microscope (SR-LSM) and a method for correcting imaging errors in a laser scanning microscope. The SR-LSM includes an illumination device for providing an illumination spot; a scanner for moving the illumination spot to consecutive scanning positions over a sample to be examined; an adaptive optics unit for controlling a wavefront of the illumination spot with a control device and a detector for determining a spatially resolved imaging spot emitted by the sample. An evaluation unit is provided for determining a point-spread function (PSF) of the imaging spot at each scanning position, whereby a wavefront correction signal determined from the point-spread function (PSF) of a scanning position is supplied to the control device of the adaptive optics unit or is used in digital post-processing of the microscope image (e.g. by means of deconvolution).Type: GrantFiled: September 19, 2014Date of Patent: May 7, 2019Assignee: Carl Zeiss Microscopy GmbHInventors: Wolfgang Singer, Jorg Petschulat, Stefan Richter
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Patent number: 10191288Abstract: An optical system for transmitting a source image is provided. Light having a field angle spectrum emanates from the source image. The optical system includes an optical waveguide arrangement, in which light can propagate by total internal reflection. The optical system also includes a diffractive optical input coupling arrangement for coupling the light emanating from the source image into the optical waveguide arrangement. The optical system further includes a diffractive optical output coupling arrangement for coupling the light that has propagated in the optical waveguide arrangement out from the optical waveguide arrangement. The disclosure also provides related methods.Type: GrantFiled: June 14, 2018Date of Patent: January 29, 2019Assignee: Carl Zeiss AGInventors: Wolfgang Singer, Bernd Kleemann, Artur Degen
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Publication number: 20180299678Abstract: An optical system for transmitting a source image is provided. Light having a field angle spectrum emanates from the source image. The optical system includes an optical waveguide arrangement, in which light can propagate by total internal reflection. The optical system also includes a diffractive optical input coupling arrangement for coupling the light emanating from the source image into the optical waveguide arrangement. The optical system further includes a diffractive optical output coupling arrangement for coupling the light that has propagated in the optical waveguide arrangement out from the optical waveguide arrangement. The disclosure also provides related methods.Type: ApplicationFiled: June 14, 2018Publication date: October 18, 2018Inventors: Wolfgang Singer, Bernd Kleemann, Artur Degen
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Patent number: 10073256Abstract: An apparatus for imaging a sample arranged in a first medium in an object plane. The apparatus includes an optical transmission system which images the sample in the object plane in an intermediate image in an intermediate image plane. The object plane and the intermediate image plane form an angle not equal to 90° with an optical axis of the transmission system. The apparatus further comprises an optical imaging system having an objective. The object plane may be imaged on a detector without distortion. The optical transmission system is symmetrical with respect to a pupil plane, the object plane, and the intermediate image plane to satisfy the Scheimpflug condition. The intermediate image lies in a second medium having a refractive index virtually identical to that of the first medium. A lens group of a subsystem arranged closest to the sample or intermediate image comprises at least one catadioptric assembly.Type: GrantFiled: May 27, 2014Date of Patent: September 11, 2018Assignees: CARL ZEISS MICROSCOPY GMBH, CARL ZEISS AGInventors: Wolfgang Singer, Ralf Wolleschensky, Wilhelm Ulrich, David Shafer, Artur Degen
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Patent number: 10048478Abstract: An optical transmission system configured to image a selected region of a sample arranged in a first medium in an object plane on or in a sample carrier, which includes plane-parallel plate, from the object plane into an intermediate image plane in a second medium. The plane-parallel plate is located between the optical transmission system and the sample during the imaging. The object plane and the intermediate image plane form an angle between 0° and 90° with an optical axis of the transmission system. The optical transmission system is positioned relative to region of the sample such that the sample is located within the focal length of the lens of the optical transmission system closest to the sample. The intermediate image plane and the object plane are located on the same side of the optical transmission system, and the intermediate image is a virtual image.Type: GrantFiled: November 13, 2014Date of Patent: August 14, 2018Assignee: Carl Zeiss Microscopy GmbHInventors: Artur Degen, Michael Gölles, Jörg Siebenmorgen, Helmut Lippert, Thomas Kalkbrenner, Ingo Kleppe, Matthias Wald, Lars-Christian Wittig, Wolfgang Singer, Ralf Wolleschensky
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Publication number: 20180161374Abstract: This document provides methods and materials for treating multiple system atrophy in a mammal. Specifically, the methods comprises intrathecally administering to the mammal a composition comprising autologous mesenchymal stem cells (e.g. adipose deprived mesenchymal stem cells) to treat multiple system atrophy. Further disclosed is the composition comprising from about 5×10(6) to about 5×10(8) autologous mesenchymal stem cells.Type: ApplicationFiled: June 15, 2016Publication date: June 14, 2018Applicant: Mayo Foundation for Medical Education and ResearchInventors: Wolfgang Singer, Phillip Low
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Patent number: 9804378Abstract: An arrangement for light sheet microscopy including illumination optics with an illumination objective for illuminating a sample, located in a medium on a sample carrier aligned with respect to a plane reference surface, with a light sheet. The arrangement also includes detection optics with a detection objective. The arrangement further includes a separating layer system with at least one layer separating the medium from the illumination and detection objectives. The separating layer system contacts the medium by a base surface aligned parallel to the reference surface. A correction lens system, with at least one correction lens serving to reduce those aberrations which occur as a result of the oblique passage of illumination light and/or of light to be detected through interfaces of the separating layer system, is arranged between illumination objective and separating layer system and/or between detection objective and separating layer system.Type: GrantFiled: November 13, 2014Date of Patent: October 31, 2017Assignee: Carl Zeiss Microscopy GmbHInventors: Wolfgang Singer, David Shafer, Artur Degen, Jörg Siebenmorgen
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Publication number: 20170262968Abstract: An object (100) is illuminated sequentially using at least two illumination geometries (110-1, 110-2). An intensity image of the object (100) is captured for each one of the at least two illumination geometries (110-1, 110-2). The intensity images are combined for producing a results image. Combining is carried out in such a way that the results image satisfies a predetermined optimization criterion. By way of example, the optimization criterion may relate to an image contrast, an edge steepness or an image sharpness. Optimization may be carried out with a spatial resolution.Type: ApplicationFiled: September 15, 2015Publication date: September 14, 2017Applicant: Carl Zeiss Microscopy GmbHInventors: Lars Stoppe, Christoph Husemann, Wolfgang Singer
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Publication number: 20170168284Abstract: An optical device comprises a light source and a detector, and also a sample holder, which is configured to fix an object in the optical path of light. A scanning optical unit is configured, for a multiplicity of scanning positions, in each case selectively to direct light incident from different angular ranges from the object onto the detector. On the basis of a three-dimensional light field represented by corresponding measurement data of the multiplicity of scanning positions, a spatially resolved imaging of the object is generated, said imaging comprising at least two images from different object planes of the object.Type: ApplicationFiled: December 9, 2016Publication date: June 15, 2017Inventors: Wolfgang Singer, Ralf Wolleschensky, Ingo Kleppe, Toufic Jabbour, Michael Gölles, Kai Wicker
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Patent number: 9645503Abstract: A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.Type: GrantFiled: March 14, 2014Date of Patent: May 9, 2017Assignee: Carl Zeiss SMT GmbHInventors: Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes, Wolfgang Singer
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Publication number: 20170123198Abstract: The invention relates to a device for optical examination of a specimen with a cryo-immersion objective, having a stative, to which the cryo-immersion objective is fixed, wherein the cryo-immersion objective has a plurality of optical components, in particular lenses, and wherein the cryo-immersion objective has an optical front component which is in contact during operation with a coolable immersion liquid, having a specimen carrier for a specimen to be examined, having means for providing a cooled immersion liquid between the optical front component and the specimen to be examined on or against the specimen carrier. The device is characterised in that insulating means are present for interrupting a heat transition between the stative and the optical front component.Type: ApplicationFiled: October 28, 2016Publication date: May 4, 2017Applicant: Carl Zeiss Microscopy GmbHInventors: Wolfgang Singer, Aksel Goehnermeier, Guenter Rudolph, Johannes Ruoff, Christian Dietrich, Rong Dong
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Patent number: 9606339Abstract: A mirror (M) of a projection exposure apparatus for microlithography configured for structured exposure of a light-sensitive material and a method for producing a mirror (M). The mirror (M) has a substrate body (B), a first mirror surface (S) and a second mirror surface (S?). The first mirror surface (S) is formed on a first side (VS) of the substrate body (B). The second mirror surface (S?) is formed on a second side (RS) of the substrate body (B), the second side being different from the first side of the substrate body (B). The mirror (M) may be embodied, in particular, such that the substrate body (B) is produced from a glass ceramic material.Type: GrantFiled: February 6, 2012Date of Patent: March 28, 2017Assignee: Carl Zeiss SMT GmbHInventors: Jochen Hetzler, Ralf Mueller, Wolfgang Singer
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Publication number: 20160349512Abstract: Provided is an optical element with a Fresnel structure with several Fresnel segments. Each Fresnel segment has an optically active facet, the shape of which is part of a predetermined surface. The predetermined surfaces of the optically active facets differ in terms of their curvature profile.Type: ApplicationFiled: July 25, 2014Publication date: December 1, 2016Applicant: Carl Zeiss AGInventors: Christoph MENKE, Eduard SCHMIDT, Wolfgang SINGER, Norbert KERWIEN
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Publication number: 20160291304Abstract: An arrangement for light sheet microscopy including illumination optics with an illumination objective for illuminating a sample, located in a medium on a sample carrier aligned with respect to a plane reference surface, with a light sheet. The arrangement also includes detection optics with a detection objective. The arrangement further includes a separating layer system with at least one layer separating the medium from the illumination and detection objectives. The separating layer system contacts the medium by a base surface aligned parallel to the reference surface. A correction lens system, with at least one correction lens serving to reduce those aberrations which occur as a result of the oblique passage of illumination light and/or of light to be detected through interfaces of the separating layer system, is arranged between illumination objective and separating layer system and/or between detection objective and separating layer system.Type: ApplicationFiled: November 13, 2014Publication date: October 6, 2016Applicant: Carl Zeiss Microscopy GMBHInventors: Wolfgang SINGER, David SHAFER, Artur DEGEN, Jörg SIEBENMORGEN
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Publication number: 20160291303Abstract: An optical transmission system configured to image a selected region of a sample arranged in a first medium in an object plane on or in a sample carrier, which includes plane-parallel plate, from the object plane into an intermediate image plane in a second medium. The plane-parallel plate is located between the optical transmission system and the sample during the imaging. The object plane and the intermediate image plane form an angle between 0° and 90° with an optical axis of the transmission system. The optical transmission system is positioned relative to region of the sample such that the sample is located within the focal length of the lens of the optical transmission system closest to the sample. The intermediate image plane and the object plane are located on the same side of the optical transmission system, and the intermediate image is a virtual image.Type: ApplicationFiled: November 13, 2014Publication date: October 6, 2016Applicant: Carl Zeiss Microscopy GmbHInventors: Artur DEGEN, Michael Gölles, Jörg SIEBENMORGEN, Helmut Lippert, Thomas Kalkbrenner, Ingo Kleppe, Matthias Wald, Lars-Christian Wittig, Wolfgang SINGER, Ralf WOLLESCHENSKY
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Publication number: 20160274343Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.Type: ApplicationFiled: November 23, 2015Publication date: September 22, 2016Inventors: David R. Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Murai Von Buenau, Hans-Juergen Mann, Alexander Epple, Susanne Beder, Wolfgang Singer
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Patent number: 9341953Abstract: A microlithographic illumination system can include a light distribution device that can generate a two-dimensional intensity distribution in a first illumination plane. A first raster array of optical raster elements can generates a raster array of secondary light sources. A device with an additional optical effect can be disposed spatially adjacent to the two raster arrays. The device can be configured as an illumination angle variation device. The device can influence the intensity and/or the phase and/or the beam direction of the illumination light. The influence can be such that an intensity contribution of raster elements to the total illumination intensity can vary across the illumination field. This can enable the illumination intensity to be influenced across the illumination field in a defined manner with respect to the total illumination intensity and/or with respect to the intensity contributions from different directions of illumination.Type: GrantFiled: February 27, 2014Date of Patent: May 17, 2016Assignee: Carl Zeiss SMT GmbHInventors: Markus Deguenther, Michael Layh, Michael Gerhard, Bruno Thome, Wolfgang Singer
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Publication number: 20160131884Abstract: An apparatus for imaging a sample arranged in a first medium in an object plane. The apparatus includes an optical transmission system which images the sample in the object plane in an intermediate image in an intermediate image plane. The object plane and the intermediate image plane form an angle not equal to 90° with an optical axis of the transmission system. The apparatus further comprises an optical imaging system having an objective. The object plane may be imaged on a detector without distortion. The optical transmission system is symmetrical with respect to a pupil plane, the object plane, and the intermediate image plane to satisfy the Scheimpflug condition. The intermediate image lies in a second medium having a refractive index virtually identical to that of the first medium. A lens group of a subsystem arranged closest to the sample or intermediate image comprises at least one catadioptric assembly.Type: ApplicationFiled: May 27, 2014Publication date: May 12, 2016Applicants: Carl Zeiss Microscopy GmbH, Carl Zeiss AGInventors: Wolfgang SINGER, Ralf WOLLESCHENSKY, Wilhelm ULRICH, David SHAFER, Artur DEGEN
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Patent number: 9316918Abstract: A collector transfers an emission of an EUV radiation source to a main intensity spot. The collector has at least one collector subunit including at least one grazing incidence mirror. The grazing incidence mirror transfers EUV radiation from the radiation source to an intensity spot. At least one ellipsoid mirror of the collector has an ellipsoidal mirror surface. The ellipsoidal mirror surface is impinged by an angle of incidence above a critical grazing incidence angle. No more than one collector subunit is arranged in the beam path of an EUV radiation source between a position of the EUV radiation source and the intensity spot. At least some of the EUV rays are only reflected in a grazing manner.Type: GrantFiled: September 25, 2012Date of Patent: April 19, 2016Assignee: Carl Zeiss SMT GmbHInventors: Hans-Juergen Mann, Wolfgang Singer