Patents by Inventor Xiaolei Wang
Xiaolei Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Method for forming gate structure, method for forming semiconductor device, and semiconductor device
Patent number: 8921171Abstract: A method for forming a gate structure, comprising: providing a substrate, where the substrate includes a nMOSFET area and a pMOSFET area, each of the nMOSFET area and the pMOSFET area has a gate trench, and each of the gate trenches is provided at a bottom portion with a gate dielectric layer; forming a gate dielectric capping layer on the substrate; forming an etching stop layer on the gate dielectric capping layer; forming an oxygen scavenging element layer on the etching stop layer; forming a first work function adjustment layer on the oxygen scavenging element layer; etching the first work function adjustment layer above the nMOSFET area; forming a second work function adjustment layer on the surface of the substrate; metal layer depositing and annealing to fill the gate trenches with a metal layer; and removing the metal layer outside the gate trenches.Type: GrantFiled: July 24, 2012Date of Patent: December 30, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Hong Yang, Xueli Ma, Wenwu Wang, Kai Han, Xiaolei Wang, Huaxiang Yin, Jiang Yan -
Publication number: 20140317494Abstract: A method for a device to update an electronic document includes obtaining data update information and use record information of the electronic document, the data update information including a first position in the electronic document where an updating is to be performed, the use record information including a second position; determining whether the first position in the data update information is before the second position in the use record information; adjusting the use record information according to the data update information, if it is determined that the first position in the data update information is before the second position in the use record information; and updating the electronic document according to the data update information and the adjusted use record information.Type: ApplicationFiled: January 8, 2014Publication date: October 23, 2014Applicant: Xiaomi Inc.Inventors: Lei Zhang, Xiaolei Wang, Ruiheng Qiu, Dong Wang, Yi Wang
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Publication number: 20140297792Abstract: It is provided are a server including: a storage module for storing original files and characteristics of the original files; an encoding module for encoding the original files stored in the storage module to generate encoded symbols; an information acquisition module for communicating with at least one transmission node and acquiring state information from the at least one transmission node; a control module for calculating a number of the encoded symbols to be sent to the at least one transmission node for caching based on the characteristics of the original files stored in the storage module and the state information of the at least one transmission node acquired by the information acquisition module; and a communication module for sending the encoded symbols to the at least one transmission node based on the number of the encoded symbols calculated by the control module.Type: ApplicationFiled: March 11, 2014Publication date: October 2, 2014Applicant: Hitachi, Ltd.Inventors: Chunguang LIU, Peng YANG, Xiaolei WANG, Yanan BAO, Sheng ZHOU, Mika MIZUTANI, Zhisheng NIU
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Publication number: 20140288081Abstract: Compounds of general formula I: and compositions comprising compounds of general formula I that modulate pyruvate kinase are described herein. Also described herein are methods of using the compounds that modulate pyruvate kinase in the treatment of diseases.Type: ApplicationFiled: March 14, 2014Publication date: September 25, 2014Applicant: AGIOS PHARMACEUTICALS, INCInventors: Giovanni Cianchetta, Janeta Popovici-Muller, Robert Zahler, Sheldon Cao, Xiaolei Wang, Zhixiong Ye
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Patent number: 8633098Abstract: The present invention relates to the field of semiconductor manufacturing. The present invention provides a method of manufacturing a semiconductor device, which comprises: providing a semiconductor substrate; forming an interface layer, a gate dielectric layer and a gate electrode on the substrate; forming a metal oxygen absorption layer on the gate electrode; performing a thermal annealing process on the semiconductor device so that the metal oxygen absorption layer absorbs oxygen in the interface layer and the thickness of the interface layer is reduced. By means of the present invention, the thickness of the interface layer can be reduced on one hand, and on the other hand the metal in the metal oxygen absorption layer is made to diffuse into the gate electrode and/or the gate dielectric layer through the annealing process, which further achieves the effects of adjusting the effective work function and controlling the threshold voltage.Type: GrantFiled: September 28, 2010Date of Patent: January 21, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Kai Han, Wenwu Wang, Xiaolei Wang, Shijie Chen, Dapeng Chen
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Method for Forming Gate Structure, Method for Forming Semiconductor Device, and Semiconductor Device
Publication number: 20140015062Abstract: An embodiment of the present disclosure provides a method for forming a gate structure, comprising: providing a substrate, where the substrate includes a nMOSFET area and a pMOSFET area, each of the nMOSFET area and the pMOSFET area has a gate trench, and each of the gate trenches is provided at a bottom portion with a gate dielectric layer; forming a gate dielectric capping layer on a surface of the substrate; forming an oxygen scavenging element layer on the gate dielectric capping layer; forming an etching stop layer on the oxygen scavenging element layer; forming a work function adjustment layer on the etching stop layer; performing metal layer deposition and annealing process to fill the gate trenches with a metal layer; and removing the metal layer outside the gate trenches.Type: ApplicationFiled: July 24, 2012Publication date: January 16, 2014Inventors: Hong Yang, Xueli Ma, Wenwu Wang, Kai Han, Xiaolei Wang, Huaxiang Yin, Jiang Yan -
Method for Forming Gate Structure, Method for Forming Semiconductor Device, and Semiconductor Device
Publication number: 20140015063Abstract: A method for forming a gate structure, comprising: providing a substrate, where the substrate includes a nMOSFET area and a pMOSFET area, each of the nMOSFET area and the pMOSFET area has a gate trench, and each of the gate trenches is provided at a bottom portion with a gate dielectric layer; forming a gate dielectric capping layer on the substrate; forming an etching stop layer on the gate dielectric capping layer; forming an oxygen scavenging element layer on the etching stop layer; forming a first work function adjustment layer on the oxygen scavenging element layer; etching the first work function adjustment layer above the nMOSFET area; forming a second work function adjustment layer on the surface of the substrate; metal layer depositing and annealing to fill the gate trenches with a metal layer; and removing the metal layer outside the gate trenches.Type: ApplicationFiled: July 24, 2012Publication date: January 16, 2014Inventors: Hong Yang, Xueli Ma, Wenwu Wang, Kai Han, Xiaolei Wang, Huaxiang Yin, Jiang Yan -
Patent number: 8624325Abstract: The present invention provides a semiconductor device, comprising: a semiconductor substrate having a first region and a second region; a first gate structure belong to a PMOS device on the first region; a second gate structure belong to an nMOS device on the second region; a multiple-layer first sidewall spacer on sidewalls of the first gate structure, wherein a layer of the multiple-layer first sidewall spacer adjacent to the first gat structure is an oxide layer; a multiple-layer second sidewall spacer on sidewalls of the second gate structure, wherein a layer of the multiple layers of second sidewall spacer adjacent to the first gat structure is a nitride layer. Application of the present invention may alleviate the oxygen vacancy in a high-k gate dielectric in a pMOS device, and further avoid the problem of EOT growth of an nMOS device during the high-temperature thermal treatment process, and therefore effectively improve the overall performance of the high-k gate dielectric CMOS device.Type: GrantFiled: June 23, 2010Date of Patent: January 7, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Wang Wenwu, Shijie Chen, Xiaolei Wang, Kai Han, Dapeng Chen
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Publication number: 20130335424Abstract: A character display technique relating to computer information processing to improve the display of characters. Whether a thickening process on a glyph outline corresponding to a character to be displayed is needed is determined by calculating a mean grayscale value of pixels of a grayscale bitmap of the glyph outline. if thickening is to be performed, the thickening amount is determined on the basis of the mean grayscale value of pixels, and the thickened glyph outline is output for display, thereby minimizing problems of fading of the displayed color, fuzzy strokes and the like due to strokes that are too narrow, and thus improving the character display effect.Type: ApplicationFiled: December 20, 2012Publication date: December 19, 2013Applicants: Peking University Founder Group Co. Ltd., Founder Information Industry Holdings Co., Ltd., Beijing Founder Apabi Technology Ltd.Inventors: Xiaolei Wang, Lei Zhang, Li Ding
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Patent number: 8563415Abstract: The present invention relates to a method of manufacturing a semiconductor device. After depositing the metal gate electrode material, a layer of oxygen molecule catalyzing layer having a catalyzing function to the oxygen molecules is deposited, and afterwards, a low-temperature PMA annealing process is used to decompose the oxygen molecules in the annealing atmosphere into more active oxygen atoms. These oxygen atoms are diffused into the high-k gate dielectric film through the metal gate to supplement the oxygen vacancies in the high-k film, in order to alleviate oxygen vacancies in the high-k film and improve the quality of the high-k film. According to the present invention, the oxygen vacancies and defects of high-k gate dielectric film will be alleviated, and further, growth of SiOx interface layer having a low dielectric constant caused by the traditional PDA high temperature process may be prevented.Type: GrantFiled: June 24, 2010Date of Patent: October 22, 2013Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Wenwu Wang, Shijie Chen, Xiaolei Wang, Kai Han, Dapeng Chen
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Publication number: 20130232110Abstract: A method and an apparatus for saving a document are disclosed. The method comprises combining data which have been modified but not saved and incremental saving data to be combined. The method further comprises replacing the incremental saving data with the combined data.Type: ApplicationFiled: March 1, 2013Publication date: September 5, 2013Applicants: BEIJING FOUNDER APABI TECHNOLOGY LTD., PEKING UNIVERSITY FOUNDER GROUP CO., LTD.Inventors: Yun LI, Xiaolei WANG, Lei ZHANG
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Patent number: 8507991Abstract: A semiconductor device is provided. A multi-component high-k interface layer containing elements of the substrate is formed from an ultra-thin high-k dielectric material in a single-layer structure of atoms by rapid annealing in the manufacturing of a CMOS transistor by the replacement gate process, and a high-k gate dielectric layer with a higher dielectric constant and a metal gate layer are formed thereon. The EOT of the device is effectively decreased, and the diffusion of atoms in the high-k gate dielectric layer from an upper level thereof is effectively prevented by the optimized high-k interface layer at high-temperature treatment.Type: GrantFiled: June 14, 2012Date of Patent: August 13, 2013Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Wenwu Wang, Kai Han, Shijie Chen, Xiaolei Wang, Dapeng Chen
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Publication number: 20120261761Abstract: A semiconductor device is provided. A multi-component high-k interface layer containing elements of the substrate is formed from an ultra-thin high-k dielectric material in a single-layer structure of atoms by rapid annealing in the manufacturing of a CMOS transistor by the replacement gate process, and a high-k gate dielectric layer with a higher dielectric constant and a metal gate layer are formed thereon. The EOT of the device is effectively decreased, and the diffusion of atoms in the high-k gate dielectric layer from an upper level thereof is effectively prevented by the optimized high-k interface layer at high-temperature treatment.Type: ApplicationFiled: June 14, 2012Publication date: October 18, 2012Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Wenwu Wang, Kai Han, Shijie Chen, Xiaolei Wang, Dapeng Chen
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Patent number: 8222099Abstract: A semiconductor device and a method of manufacturing the same are provided. A multi-component high-k interface layer containing elements of the substrate is formed from a ultra-thin high-k dielectric material in a single-layer structure of atoms by rapid annealing in the manufacturing of a CMOS transistor by the replacement gate process, and a high-k gate dielectric layer with a higher dielectric constant and a metal gate layer are formed thereon. The EOT of the device is effectively decreased, and the diffusion of atoms in the high-k gate dielectric layer from an upper level thereof is effectively prevented by the optimized high-k interface layer at high-temperature treatment. Thus, the present invention may also avoid the growth of the interface layers and the degradation of carrier mobility.Type: GrantFiled: June 24, 2010Date of Patent: July 17, 2012Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Wenwu Wang, Kai Han, Shijie Chen, Xiaolei Wang, Dapeng Chen
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Publication number: 20120021596Abstract: The present invention relates to the field of semiconductor manufacturing. The present invention provides a method of manufacturing a semiconductor device, which comprises: providing a semiconductor substrate; forming an interface layer, a gate dielectric layer and a gate electrode on the substrate; forming a metal oxygen absorption layer on the gate electrode; performing a thermal annealing process on the semiconductor device so that the metal oxygen absorption layer absorbs oxygen in the interface layer and the thickness of the interface layer is reduced. By means of the present invention, the thickness of the interface layer can be reduced on one hand, and on the other hand the metal in the metal oxygen absorption layer is made to diffuse into the gate electrode and/or the gate dielectric layer through the annealing process, which further achieves the effects of adjusting the effective work function and controlling the threshold voltage.Type: ApplicationFiled: September 28, 2010Publication date: January 26, 2012Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Kai Han, Wenwu Wang, Xiaolei Wang, Shijie Chen, Dapeng Chen
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Publication number: 20120012939Abstract: The present invention provides a semiconductor device, comprising: a semiconductor substrate having a first region and a second region; a first gate structure belong to a PMOS device on the first region; a second gate structure belong to an nMOS device on the second region; a multiple-layer first sidewall spacer on sidewalls of the first gate structure, wherein a layer of the multiple-layer first sidewall spacer adjacent to the first gat structure is an oxide layer; a multiple-layer second sidewall spacer on sidewalls of the second gate structure, wherein a layer of the multiple layers of second sidewall spacer adjacent to the first gat structure is a nitride layer. Application of the present invention may alleviate the oxygen vacancy in a high-k gate dielectric in a pMOS device, and further avoid the problem of EOT growth of an nMOS device during the high-temperature thermal treatment process, and therefore effectively improve the overall performance of the high-k gate dielectric CMOS device.Type: ApplicationFiled: June 23, 2010Publication date: January 19, 2012Applicant: INSTITUE OF MICROELELCTRONICS, CHINESE ACADEMY OF SCINECESInventors: Wang Wenwu, Shijie Chen, Xiaolei Wang, Kai Han, Dapeng Chen
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Publication number: 20110260255Abstract: The present invention relates to a method of manufacturing a semiconductor device. After depositing the metal gate electrode material, a layer of oxygen molecule catalyzing layer having a catalyzing function to the oxygen molecules is deposited, and afterwards, a low-temperature PMA annealing process is used to decompose the oxygen molecules in the annealing atmosphere into more active oxygen atoms. These oxygen atoms are diffused into the high-k gate dielectric film through the metal gate to supplement the oxygen vacancies in the high-k film, in order to alleviate oxygen vacancies in the high-k film and improve the quality of the high-k film. According to the present invention, the oxygen vacancies and defects of high-k gate dielectric film will be alleviated, and further, growth of SiOx interface layer having a low dielectric constant caused by the traditional PDA high temperature process may be prevented.Type: ApplicationFiled: June 24, 2010Publication date: October 27, 2011Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Wenwu Wang, Shijie Chen, Xiaolei Wang, Kai Han, Dapeng Chen
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Publication number: 20110254063Abstract: The present invention provides a MOS device, which comprises: a substrate; an interface layer thin film formed on the substrate; a high k gate dielectric layer formed on the interface layer thin film; and a metal gate formed on the high k gate dielectric layer. The metal gate comprises, upwardly in order, a metal gate work function layer, an oxygen absorption element barrier layer, a metal gate oxygen absorbing layer, a metal gate barrier layer and a polysilicon layer.Type: ApplicationFiled: September 27, 2010Publication date: October 20, 2011Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Shijie Chen, Wenwu Wang, Xiaolei Wang, Kai Han
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Publication number: 20110254093Abstract: A semiconductor device and a method of manufacturing the same are provided. A multi-component high-k interface layer containing elements of the substrate is formed from a ultra-thin high-k dielectric material in a single-layer structure of atoms by rapid annealing in the manufacturing of a CMOS transistor by the replacement gate process, and a high-k gate dielectric layer with a higher dielectric constant and a metal gate layer are formed thereon. The EOT of the device is effectively decreased, and the diffusion of atoms in the high-k gate dielectric layer from an upper level thereof is effectively prevented by the optimized high-k interface layer at high-temperature treatment. Thus, the present invention may also avoid the growth of the interface layers and the degradation of carrier mobility.Type: ApplicationFiled: June 24, 2010Publication date: October 20, 2011Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Wenwu Wang, kai Han, Shijie Chen, Xiaolei Wang, Dapeng Chen
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Publication number: 20110227163Abstract: The present invention relates to a semiconductor device. Interface layers of different thickness or different materials are used in the NMOS region and the PMOS region of the semiconductor substrate, which not only effectively reduce EOT of the device, especially EOT of the PMOS device, but also increase the electron mobility of the device, especially the electron mobility of the NMOS device, thereby effectively improving the overall performance of the device.Type: ApplicationFiled: June 23, 2010Publication date: September 22, 2011Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Wengwu Wang, Shijie Chen, Kai Han, Xiaolei Wang, Dapeng Chen