Patents by Inventor Xing Lin

Xing Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12272527
    Abstract: A system and method suitable for removing both carbon-based contaminants and oxygen-based contaminants from a substrate within a single process chamber are disclosed.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: April 8, 2025
    Assignee: ASM IP Holding B.V.
    Inventors: Xing Lin, Chuang Wei, Wentao Wang, Peipei Gao, Fei Wang, Bubesh Babu Jotheeswaran
  • Patent number: 12254215
    Abstract: A memory device and a management method thereof are provided. The memory device includes a controller and at least one memory channel. The memory channel includes at least one memory chip. The at least one memory chip is commonly coupled to the controller through an interrupt signal wire. The at least one memory chip generates at least one local interrupt signal and performs a logic operation on the at least one local interrupt signal to generate a common interrupt signal. The interrupt signal wire is configured to transmit the common interrupt signal to the controller.
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: March 18, 2025
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Jia-Xing Lin, Nai-Ping Kuo, Shih-Chou Juan, Chien-Hsin Liu, Shunli Cheng
  • Patent number: 12234554
    Abstract: Systems of reducing devitrification within a chemical vapor deposition system can include a susceptor support ring that is configured to be positioned between a gas inlet and a gas outlet of a chamber passage. An example system can also include a getter support comprising a support base and one or more recesses therein. Each of the one or more recesses can be arranged to receive corresponding one or more support elements that are configured to support the getter plate. At least a portion of the getter support may include a coating comprising silicon carbide (SiC) having a thickness of at least about 50 microns. The getter support may be arranged to be disposed a maximum distance of between about 1 mm and about 10 mm from the susceptor support ring.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: February 25, 2025
    Assignee: ASM IP Holding B.V.
    Inventors: Rutvij Naik, Junwei Su, Wentao Wang, Chuqin Zhou, Xing Lin
  • Publication number: 20250034714
    Abstract: A reflector includes a reflector body having a slotted surface, a planar surface, and an ellipsoidal surface. The planar surface is opposite the slotted surface and is separated from the slotted surface by a thickness of the reflector body. The ellipsoidal surface is offset from the planar surface, is opposite the slotted surface and separated from the slotted surface by the thickness of the reflector body and spans the slotted surface of the reflector body. The ellipsoidal surface defines an elliptical profile that is orthogonal relative to the planar surface to concentrate heat flux at a distal focus of the elliptical profile using electromagnetic radiation reflected by the ellipsoidal surface of the reflector body. Semiconductor processing systems and material layer deposition methods are also described.
    Type: Application
    Filed: July 25, 2024
    Publication date: January 30, 2025
    Inventors: Wentao Wang, Peipei Gao, Kishor Patil, Aniket Chitale, Fan Gao, Xing Lin, Alexandros Demos, Amir Kajbafvala, Emesto Suarez, Arun Murali, Caleb Miskin, Bubesh Babu Jotheeswaran
  • Publication number: 20250038039
    Abstract: A lift pin includes a lift pin body arranged along a lift pin axis having a contact pad, a stem segment, a neck segment, and a span feature. The contact pad is defined at a first end of the lift pin body, the stem segment extends from the contact pad, and the neck segment extends from the stem segment. The span feature is defined at a second end of the lift pin body, is connected to the contact pad by the neck segment and the stem segment, and has a minor and major widths. The minor width is equivalent to a neck diameter defined by the neck segment, the major with is greater than the minor width, and the major width is greater than a stem diameter defined by the stem segment. Lift pin arrangements, semiconductor processing systems, and methods of making semiconductor processing systems are also described.
    Type: Application
    Filed: July 26, 2024
    Publication date: January 30, 2025
    Inventors: Ion Hong Chao, Kai Zhou, Peipei Gao, Wentao Wang, Han Ye, Kishor Patil, Fan Gao, Xing Lin, Alexandros Demos
  • Publication number: 20240425986
    Abstract: Methods and apparatuses for decoupling the tuning of cross-substrate thickness variation and cross-substrate resistance variation in a gas injection system are described. A controller in a gas injection system may deposit, via control of the plurality of first mass flow controllers (MFCs) and the plurality of second MFCs, a material layer deposited on a substrate. The controller may adjust, via control of the plurality of first MFCs, a cross-substrate thickness variation of the material layer. The controller may adjust, via control of the plurality of second MFCs and independent of the cross-substrate thickness variation, cross-substrate resistivity variation of the material layer.
    Type: Application
    Filed: June 18, 2024
    Publication date: December 26, 2024
    Inventors: Junwei Su, Jiwen Xiang, Zhizhong Chen, Yang Wang, Xing Lin
  • Publication number: 20240429038
    Abstract: In some embodiments, a method for semiconductor processing preclean includes removing an oxide layer from a substrate using anhydrous hydrogen fluoride in combination with water vapor. A system for the preclean may be configured to separate the anhydrous hydrogen fluoride and the water vapor until they are delivered to a common volume near the substrate. Corrosion within components of the system may be limited by purification of anhydrous hydrogen fluoride, passivation of components, changing component materials, and heating components. Passivation may be achieved by filling a gas delivery component with anhydrous hydrogen fluoride and allowing the anhydrous hydrogen fluoride to remain in the gas delivery component to form a passivation layer. Consistent water vapor delivery may be achieved in part by heating components using heaters.
    Type: Application
    Filed: September 6, 2024
    Publication date: December 26, 2024
    Inventors: Chuang Wei, Aditya Chaudhury, Prahlad Kulkarni, Xing Lin, Xiaoda Sun, Woo Jung Shin, Bubesh Babu Jotheeswaran, Fei Wang, Qu Jin, Aditya Walimbe, Rajeev Reddy Kosireddy, Yen Chun Fu, Amin Azimi
  • Publication number: 20240376634
    Abstract: A liquid precursor container includes an inner container, an outer container, and a baffle member. The inner container has an inner base portion, an inner intermediate portion extending from the inner base portion, and an inner lid portion coupled to the inner base portion by the inner intermediate portion. The outer container envelops the inner container and has an outer base portion spaced apart from the inner base portion, an outer intermediate portion extending from the outer base portion and about the inner intermediate portion of the inner container, and an outer lid portion coupled to the outer base portion by the outer intermediate portion of the outer container. The baffle member is arranged between the inner lid portion of the inner container and the outer lid portion of the outer container to circulate liquid coolant about the inner container to cool a liquid precursor contained within the inner container.
    Type: Application
    Filed: May 10, 2024
    Publication date: November 14, 2024
    Inventors: Krishnaswamy Mahadevan, Fan Gao, Peipei Gao, Xing Lin
  • Publication number: 20240376597
    Abstract: A liquid precursor container is provided. The liquid precursor container includes an inner container, an outer container, and a baffle member. The inner container has an inner base portion, an inner intermediate portion extending upwards from the inner base portion, and an inner lid portion coupled to the inner base portion by the inner intermediate portion. The outer container has an outer base portion spaced apart from the inner base portion of the inner container and an outer intermediate portion extending upwards from the outer base portion and about the inner intermediate portion of the inner container. The baffle member is arranged between the inner intermediate portion of the inner container and the outer intermediate portion of the outer container, extends upwards from the outer base portion of the outer container, and terminates between the inner lid portion and the inner base portion of the inner container.
    Type: Application
    Filed: May 10, 2024
    Publication date: November 14, 2024
    Inventors: Fan Gao, Krishnaswamy Mahadevan, Peipei Gao, Xing Lin, Jingxuan Lyu
  • Patent number: 12112938
    Abstract: In some embodiments, a method for semiconductor processing preclean includes removing an oxide layer from a substrate using anhydrous hydrogen fluoride in combination with water vapor. A system for the preclean may be configured to separate the anhydrous hydrogen fluoride and the water vapor until they are delivered to a common volume near the substrate. Corrosion within components of the system may be limited by purification of anhydrous hydrogen fluoride, passivation of components, changing component materials, and heating components. Passivation may be achieved by filling a gas delivery component with anhydrous hydrogen fluoride and allowing the anhydrous hydrogen fluoride to remain in the gas delivery component to form a passivation layer. Consistent water vapor delivery may be achieved in part by heating components using heaters.
    Type: Grant
    Filed: March 17, 2022
    Date of Patent: October 8, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Chuang Wei, Aditya Chaudhury, Prahlad Kulkarni, Xing Lin, Xiaoda Sun, Woo Jung Shin, Bubesh Babu Jotheeswaran, Fei Wang, Qu Jin, Aditya Walimbe, Rajeev Reddy Kosireddy, Yen Chun Fu, Amin Azimi
  • Patent number: 12086717
    Abstract: An all-optical Diffractive Deep Neural Network (D2NN) architecture learns to implement various functions or tasks after deep learning-based design of the passive diffractive or reflective substrate layers that work collectively to perform the desired function or task. This architecture was successfully confirmed experimentally by creating 3D-printed D2NNs that learned to implement handwritten classifications and lens function at the terahertz spectrum. This all-optical deep learning framework can perform, at the speed of light, various complex functions and tasks that computer-based neural networks can implement, and will find applications in all-optical image analysis, feature detection and object classification, also enabling new camera designs and optical components that can learn to perform unique tasks using D2NNs. In alternative embodiments, the all-optical D2NN is used as a front-end in conjunction with a trained, digital neural network back-end.
    Type: Grant
    Filed: May 12, 2023
    Date of Patent: September 10, 2024
    Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Aydogan Ozcan, Yair Rivenson, Xing Lin, Deniz Mengu, Yi Luo
  • Publication number: 20240292644
    Abstract: A light-emitting device and method for using quantum dot LEDs are provided in the present application. The light-emitting device includes at least one quantum dot LED, wherein the quantum dot LED includes a first electrode, an electron transport layer, a quantum dot layer, a hole transport layer, and a second electrode which are sequentially stacked; a fluorescence quantum yield of quantum dots in the quantum dot layer is equal to or greater than 50%; a ratio of an average photon voltage to an operating voltage of the quantum dot LED is equal to or greater than 1; electroluminescence of the quantum dot LED includes thermoelectrically-assisted up-conversion luminescence. The quantum dot LED can achieve higher external power conversion efficiency in the light-emitting device.
    Type: Application
    Filed: July 12, 2022
    Publication date: August 29, 2024
    Inventors: Xiaogang PENG, Xing LIN, Xingliang DAI
  • Publication number: 20240232617
    Abstract: A dual adaptive training method of photonic neural networks (PNN), includes constructing, in a computer, a PNN numerical model including a PNN physical model and a systematic error prediction network model, where the PNN physical model is an error-free ideal PNN physical model of a PNN physical system, the systematic error prediction network model is an error model of the PNN physical system; determining measurement values of the PNN physical system and measurement values of the PNN numerical model, where the measurement values of the PNN physical system include final output values of the PNN physical system, and the measurement values of the PNN numerical model include final output values of the PNN numerical model; determining a similarity loss function based on comparison results between the measurement values of the PNN physical system and the measurement values of the PNN numerical model; determining a task loss function based on fused results of the measurement values of the PNN physical system and the
    Type: Application
    Filed: December 22, 2023
    Publication date: July 11, 2024
    Inventors: Xing Lin, Zhengyang DUAN, Haiou ZHANG, Hang CHEN, Ziyang ZHENG, Hongkai XIONG
  • Patent number: 12006572
    Abstract: A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: June 11, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Xing Lin, Peipei Gao, Prajwal Nagaraj, Mingyang Ma, Wentao Wang, Ion Hong Chao, Alexandros Demos, Paul Ma, Hichem M'Saad
  • Publication number: 20240175130
    Abstract: Methods and systems for growing silicon carbide epitaxial layers are described. In one example, a reactor system with multiple reactor modules may include a heating load/lock chamber and a cooling load/lock chamber. In another example, a reactor may be heated by separate sets of coils inductively heating a susceptor, which heats graphite near one or more wafers. Multiple pyrometers may measure the temperature of the graphite walls at different locations. Based on temperature differences and/or temperature gradients, a temperature controller may adjust power provided to one or more sets of coils. In yet another example, separations between a wafer carrier and a wafer may be adjusted.
    Type: Application
    Filed: November 29, 2023
    Publication date: May 30, 2024
    Inventors: Hichem M’Saad, Ivo Johannes Raaijmakers, Xing Lin, Wentao Wang, Herbert Terhorst
  • Publication number: 20240175138
    Abstract: Systems and methods controlling the pressure differential between two sealed chambers connected by a gate valve in preparation for a gate valve opening event. Such systems and methods may adjust gas pressure in at least one of the chambers, if needed, until the pressure differential between the two chambers is at a predetermined pressure differential level. In some more specific examples, one chamber may constitute a substrate handling chamber, the other chamber may constitute a reaction chamber (e.g., for depositing one or more layers on a surface of a substrate), and the gate valve opening event may allow a substrate to be transferred from one chamber to the other (e.g., from the reaction chamber into the substrate handling chamber).
    Type: Application
    Filed: November 22, 2023
    Publication date: May 30, 2024
    Inventors: Fan Gao, Peipei Gao, Xing Lin, Arun Murali, Gregory Deye, Frederick Aryeetey, Amir Kajbafvala, Caleb Miskin, Alexandros Demos
  • Patent number: D1028913
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: May 28, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Rutvij Naik, Junwei Su, Wentao Wang, Chuqin Zhou, Xing Lin
  • Patent number: D1030687
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: June 11, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Shujin Huang, Junwei Su, Wentao Wang, Xing Lin
  • Patent number: D1031676
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: June 18, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Peipei Gao, Wentao Wang, Xing Lin, Han Ye, Ion Hong Chao, Siyao Luan, Alexandros Demos, Fan Gao
  • Patent number: D1067204
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: March 18, 2025
    Assignee: ASM IP Holding B.V.
    Inventors: Shujin Huang, Junwei Su, Wentao Wang, Xing Lin