Combined susceptor, support, and lift system
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The dash-dash broken lines within the shaded area and the dash-dash broken lines in
Claims
The ornamental design for a combined susceptor, support, and lift system, as shown and described.
2093261 | September 1937 | Willson |
3407783 | October 1968 | Capita |
3549847 | December 1970 | Clark et al. |
3641974 | February 1972 | Yamada et al. |
3796182 | March 1974 | Rosler |
4499354 | February 12, 1985 | Hill et al. |
4522149 | June 11, 1985 | Garbis et al. |
4560420 | December 24, 1985 | Lord |
4710428 | December 1, 1987 | Tamamizu et al. |
4790258 | December 13, 1988 | Drage |
4821674 | April 18, 1989 | deBoer et al. |
4958061 | September 18, 1990 | Wakabayashi et al. |
4978567 | December 18, 1990 | Miller |
4986215 | January 22, 1991 | Yamada et al. |
4990374 | February 5, 1991 | Keeley et al. |
5033407 | July 23, 1991 | Mizuno et al. |
5044943 | September 3, 1991 | Bowman et al. |
5071670 | December 10, 1991 | Kelly |
5074017 | December 24, 1991 | Toya et al. |
5098198 | March 24, 1992 | Nulman et al. |
5108792 | April 28, 1992 | Anderson et al. |
5119540 | June 9, 1992 | Kong et al. |
5119541 | June 9, 1992 | Ohmi et al. |
5121531 | June 16, 1992 | Severns et al. |
5156820 | October 20, 1992 | Wong et al. |
5188501 | February 23, 1993 | Tomita et al. |
5199483 | April 6, 1993 | Bahng |
5200157 | April 6, 1993 | Toya et al. |
5242501 | September 7, 1993 | McDiarmid |
5292554 | March 8, 1994 | Sinha et al. |
5298465 | March 29, 1994 | Levy |
5304248 | April 19, 1994 | Cheng et al. |
5306699 | April 26, 1994 | Eddy |
5308645 | May 3, 1994 | Zachman et al. |
5332442 | July 26, 1994 | Kubodera et al. |
5343938 | September 6, 1994 | Schmidt |
5354715 | October 11, 1994 | Wang et al. |
5356486 | October 18, 1994 | Sugarman et al. |
5370739 | December 6, 1994 | Foster et al. |
5383971 | January 24, 1995 | Selbrede |
5393349 | February 28, 1995 | Ohkase |
5403401 | April 4, 1995 | Haafkens et al. |
5421893 | June 6, 1995 | Perlov |
5427620 | June 27, 1995 | deBoer et al. |
5444217 | August 22, 1995 | Moore et al. |
5455069 | October 3, 1995 | Lee |
5456757 | October 10, 1995 | Aruga et al. |
5461214 | October 24, 1995 | Peck et al. |
5467220 | November 14, 1995 | Xu |
5492566 | February 20, 1996 | Sumnitsch |
5514439 | May 7, 1996 | Sibley |
5516367 | May 14, 1996 | Lei et al. |
5527393 | June 18, 1996 | Sato et al. |
5549756 | August 27, 1996 | Sorensen et al. |
5551985 | September 3, 1996 | Brors et al. |
5558717 | September 24, 1996 | Zhao |
5584936 | December 17, 1996 | Pickering et al. |
5588827 | December 31, 1996 | Muka |
5620525 | April 15, 1997 | van de Ven et al. |
5645646 | July 8, 1997 | Beinglass et al. |
5656093 | August 12, 1997 | Burkhart et al. |
5683518 | November 4, 1997 | Moore et al. |
5690742 | November 25, 1997 | Ogata et al. |
5700725 | December 23, 1997 | Hower et al. |
5738165 | April 14, 1998 | Imai |
5761023 | June 2, 1998 | Lue et al. |
5795178 | August 18, 1998 | Schilder |
5800622 | September 1, 1998 | Takemi et al. |
5803977 | September 8, 1998 | Tepman et al. |
5834737 | November 10, 1998 | Hirose et al. |
D404370 | January 19, 1999 | Kimura |
5879128 | March 9, 1999 | Tietz |
5895530 | April 20, 1999 | Shrotriya et al. |
5938850 | August 17, 1999 | Arami et al. |
5960159 | September 28, 1999 | Ikeda et al. |
5997588 | December 7, 1999 | Goodwin et al. |
6001183 | December 14, 1999 | Gurary et al. |
6020212 | February 1, 2000 | Mathis |
6068441 | May 30, 2000 | Raaijmakers et al. |
6077357 | June 20, 2000 | Rossman et al. |
6086680 | July 11, 2000 | Foster et al. |
6090212 | July 18, 2000 | Mahawili |
6093252 | July 25, 2000 | Wengert et al. |
6167834 | January 2, 2001 | Wang et al. |
6203622 | March 20, 2001 | Halpin et al. |
6293749 | September 25, 2001 | Raaijmakers et al. |
6325858 | December 4, 2001 | Wengert et al. |
6331023 | December 18, 2001 | Goodwin et al. |
6343183 | January 29, 2002 | Halpin et al. |
6394797 | May 28, 2002 | Sugaya et al. |
6402850 | June 11, 2002 | Beinglass et al. |
6464790 | October 15, 2002 | Sherstinsky et al. |
6515261 | February 4, 2003 | Smargiassi |
D475271 | June 3, 2003 | Hannon |
6608287 | August 19, 2003 | Halpin et al. |
6634882 | October 21, 2003 | Goodman |
6668501 | December 30, 2003 | Adebar |
6709267 | March 23, 2004 | Hawkins et al. |
D496008 | September 14, 2004 | Takahashi et al. |
6893507 | May 17, 2005 | Goodman et al. |
7033445 | April 25, 2006 | Keeton et al. |
D525127 | July 18, 2006 | Cogley et al. |
D564345 | March 18, 2008 | Prada |
D568914 | May 13, 2008 | Or |
D600223 | September 15, 2009 | Aggarwal et al. |
7601224 | October 13, 2009 | Foree |
7602224 | October 13, 2009 | Foree |
7638003 | December 29, 2009 | Satoh et al. |
7648579 | January 19, 2010 | Goodman et al. |
7722441 | May 25, 2010 | Goela et al. |
7740703 | June 22, 2010 | Hasegawa et al. |
D630657 | January 11, 2011 | Nakamura |
D635597 | April 5, 2011 | Tiner |
D640715 | June 28, 2011 | Tiner |
8055336 | November 8, 2011 | Schulman |
D650818 | December 20, 2011 | Tiner |
8088225 | January 3, 2012 | Goodman et al. |
8287648 | October 16, 2012 | Reed et al. |
8366830 | February 5, 2013 | Nakamura et al. |
8394229 | March 12, 2013 | Aggarwal et al. |
8801857 | August 12, 2014 | Aggarwal et al. |
D712242 | September 2, 2014 | Deneve |
D716644 | November 4, 2014 | Daniels |
D728098 | April 28, 2015 | Schad |
D743357 | November 17, 2015 | Vyne |
D777851 | January 31, 2017 | Simonetti |
9558985 | January 31, 2017 | Wang et al. |
D784276 | April 18, 2017 | Tiner |
9633889 | April 25, 2017 | Cuvalci et al. |
10068791 | September 4, 2018 | Parsey, Jr. et al. |
D830981 | October 16, 2018 | Jeong et al. |
10242890 | March 26, 2019 | Volfovski et al. |
10376916 | August 13, 2019 | Ranish et al. |
D864134 | October 22, 2019 | Watarai et al. |
10590535 | March 17, 2020 | Huggare |
10770336 | September 8, 2020 | Hill |
D914620 | March 30, 2021 | Rokkam et al. |
11018047 | May 25, 2021 | Rokkam |
D920936 | June 1, 2021 | Rokkam et al. |
D930456 | September 14, 2021 | VanVolkinburg |
D930503 | September 14, 2021 | Hankinson |
20020011211 | January 31, 2002 | Halpin |
20020043337 | April 18, 2002 | Goodman et al. |
20030000472 | January 2, 2003 | Lim et al. |
20030049580 | March 13, 2003 | Goodman |
20040060512 | April 1, 2004 | Waldhauer et al. |
20040229002 | November 18, 2004 | Davis et al. |
20050092439 | May 5, 2005 | Keeton et al. |
20050150462 | July 14, 2005 | Seo |
20050284372 | December 29, 2005 | Murugesh et al. |
20060057826 | March 16, 2006 | De Boer |
20060156981 | July 20, 2006 | Fondurulia |
20090280248 | November 12, 2009 | Goodman et al. |
20100031884 | February 11, 2010 | Aggarwal et al. |
20100107974 | May 6, 2010 | Givens et al. |
20100158644 | June 24, 2010 | Takizawa et al. |
20130109192 | May 2, 2013 | Hawkins et al. |
20130276695 | October 24, 2013 | Pitney |
20140251208 | September 11, 2014 | Samir et al. |
20140290573 | October 2, 2014 | Okabe et al. |
20160002778 | January 7, 2016 | Ravi et al. |
20160133504 | May 12, 2016 | Chu et al. |
20170226785 | August 10, 2017 | Vierke |
20180094350 | April 5, 2018 | Verghese et al. |
20180135166 | May 17, 2018 | Sakurai |
20190051555 | February 14, 2019 | Hill et al. |
20190229008 | July 25, 2019 | Rokkam |
20190311941 | October 10, 2019 | Moos et al. |
20190355612 | November 21, 2019 | Sakurai |
20200234996 | July 23, 2020 | Rokkam et al. |
20200365444 | November 19, 2020 | Hill |
20200373187 | November 26, 2020 | Singu et al. |
20210125853 | April 29, 2021 | Rathi et al. |
20210183686 | June 17, 2021 | Kim |
20210210373 | July 8, 2021 | Singu |
20210343577 | November 4, 2021 | Yamamoto |
102308362 | January 2012 | CN |
103733327 | April 2014 | CN |
106463365 | February 2017 | CN |
0339279 | November 1989 | EP |
0448346 | March 1991 | EP |
0445596 | September 1991 | EP |
0634785 | January 1995 | EP |
0669640 | August 1995 | EP |
0766289 | April 1997 | EP |
0840358 | May 1998 | EP |
0877414 | November 1998 | EP |
2181458 | April 1987 | GB |
H07-58039 | March 1995 | JP |
2000-269310 | September 2000 | JP |
2002-184843 | June 2002 | JP |
2002-526915 | August 2002 | JP |
2003-124167 | April 2003 | JP |
2006-228802 | August 2006 | JP |
2007-502022 | February 2007 | JP |
D1422195 | August 2014 | JP |
D1547357 | April 2016 | JP |
2016-154196 | August 2016 | JP |
2017-195301 | October 2017 | JP |
D1570747 | February 2018 | JP |
D1570748 | February 2018 | JP |
10-1999-0069084 | September 1999 | KR |
1999-0069091 | September 1999 | KR |
10-0460338 | November 2004 | KR |
10-2007-0098025 | October 2007 | KR |
D111900 | July 2006 | TW |
D136587 | August 2010 | TW |
D184695 | August 2017 | TW |
D191199 | June 2018 | TW |
WO 1996/30713 | October 1996 | WO |
WO 1997/08743 | March 1997 | WO |
WO 2010/016964 | February 2010 | WO |
- “Shaping the Future in Semiconductor Processing.” Advertisement for Morton International, Inc., Ceramic Solutions. vol. 73, No. 7, Jul. 1994: advertisements (circa 1993).
- European Search Report dated Apr. 12, 2022 for Application No. 21211688.3-1211.
Type: Grant
Filed: Dec 4, 2020
Date of Patent: Jun 18, 2024
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Peipei Gao (Tempe, AZ), Wentao Wang (Phoenix, AZ), Xing Lin (Chandler, AZ), Han Ye (Phoenix, AZ), Ion Hong Chao (Gilbert, AZ), Siyao Luan (Phoenix, AZ), Alexandros Demos (Scottsdale, AZ), Fan Gao (Chandler, AZ)
Primary Examiner: Christy Nemeth
Assistant Examiner: Leah E Hoeferkamp
Application Number: 29/760,951