Abstract: A method for introducing air into the gaps between neighboring conducting structures in a microelectronics fabrication in order to reduce the capacitative coupling between them. A patterned metal layer is deposited on a substrate. The layer is lined with a CVD-oxide. A disposable gap-filling material is deposited over the lined metal layer. A two layer “air-bridge” is formed over the gap-fill by depositing a layer of TiN over a layer of CVD-oxide. This structure is rendered porous by several chemical processes. An oxygen plasma is passed through the porous air-bridge to react with and dissolve the gap-fill beneath it. The reaction products escape through the porous air-bridge resulting in air-filled gaps.

Abstract: A method of forming a metal interconnect within a fluorinated silica glass dielectric layer while preventing outgassing from the fluorinated silica glass dielectric layer comprising the following steps. A semiconductor structure having a semiconductor device structure formed therein is provided. A metal line is formed over the semiconductor structure. The metal line being electrically connected with the semiconductor device structure. An insulating layer is formed over the semiconductor structure, covering the metal line. A fluorinated silica glass dielectric layer is formed over the insulating layer. The fluorinated silica glass dielectric layer is planarized to form a planarized fluorinated silica glass dielectric layer. The planarized fluorinated silica glass dielectric layer and the insulating layer are patterned to form a via opening to the metal line, and exposing portions of the patterned fluorinated silica glass dielectric layer within the via opening.

Abstract: A brushless generator includes an inner stator mounted to the generator front cover. An internal space is thus realized between the generator rear cover and the rotor. A small heat dissipating fan is positioned between the rear cover and rotor and mounted on the rotor for rotation therewith. An exciting coil is mounted on the inner stator, the exciting coil ground terminal being directly connected to the inner stator. The other terminal of the exciting coil is connected through an insulated wire to a bolt mounting the generator designation strip which is used as an electrical conductor for electrically connecting the exciting coil to a voltage regulator mounted on the generator rear cover.

Abstract: A fluidized bed boiler and a high temperature separator used therein. Each separator consists of a horizontal S-shaped passage formed in a casted block and having an inlet for receiving flue gases from the boiler. A divider wall divides a portion of the passage into a dense-phase gas bypass and a vertical-flow ash collecting chamber. As a result flyash of a diameter (50 .mu.m) can be separated, and the combustion cycle efficiency can reach over 98%.