Abstract: An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.

Abstract: A method for classifying defects includes imaging an inspected object. An image of a defect candidate is extracted from an image obtained by said imaging step. Said extracted defect candidate image is classified into a first category. Said extracted defect candidate image is classified into a second category. Said extracted defect candidate image and information relating to said classification into said first category and information relating to said classification into said second category are displayed on a screen.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed.

Abstract: In order to allow critical flaws in an inspected item to be known early during a production process, the present invention includes the following steps: a step for detecting defects in a production process for the inspected item and storing defect positions; a step for collecting detailed defect information and storing the detailed information in association with defect positions; a step for storing positions at which flaws were generated based on a final inspection of the inspected item; a step for comparing defect positions with positions at which flaws were generated; and a step for classifying and displaying information based on the comparison results.

Abstract: According to the present invention, an upper body which is relatively light in weight is connected to a lower body which contains a paper conveying path and a transfer portion disposed in the paper conveying path, and support portions formed in the lower body are brought into abutment with an image forming portion comprising an image carrier unit and a developing unit, the image carrier unit having an image carrier, and in this state the image forming portion is fixed by a retaining device.

Abstract: A slice selection gradient magnetic field used in a pulse sequence for generating a spin echo signal is applied in such a fashion that its polarity at the time of a 90.degree. pulse becomes opposite to the one at the time of 180 .degree. pulse, in order to expand a dynamic range of blood flow speed measurement. When the blood flow speed contains a component in a slice vertical direction, the gradient magnetic field in the slice vertical direction is adjusted so that the phase changes of two sets of flow encoded pulses contained in the slice vertical direction are opposite to each other.The flow speed in the direction of the readout gradient magnetic field, which is a lateral direction of the slice plane, is purely measured by cancelling influences of the flow in the slice vertical direction.

Abstract: A paper supply device for an electrostatic photographic printer which can significantly reduce the area for installation of the printer. A housing of the printer includes a base and a cover connected for pivotal motion in a vertical plane relative to each other. A picture image forming means including a photosensitive member and so on is mounted on the base. A paper supply cassette is mounted on the cover. Paper is drawn out from the paper supply cassette by means of a paper supply roller and then guided to the picture image forming means by a paper guide which includes a guide plate mounted on the cover and another guide plate mounted on the base and disposed in opposing relationship to the guide plate on the cover. A gear wheel connected to the paper supply roll is meshed, when the cover is closed, with another driving gear wheel mounted on the base and connected to a motor.

Abstract: A looped strip connected to an elevator car is moved with the car and provided with floor indication cams at intervals equal to distances between adjacent landing floors. Immediately before the car already decelerated reaches a desired one of the floors, the corresponding cam engages one of two spaced switches to operate it. This instructs the car to further decelerate and the car is stopped on the desired floor upon that corresponding cam disengaging from the operated switch with the cam located between the switches in their inoperative position.

Abstract: A slice selection gradient magnetic field used in a pulse sequence for generating a spin echo signal is applied in such a fashion that its polarity at the time of a 90.degree. pulse becomes opposite to the one at the time of 180.degree. pulse, in order to expand a dynamic range of blood flow speed measurement. When the blood flow speed contains a component in a slice vertical direction, the gradient magnetic field in the slice vertical direction is adjusted so that the phase changes of two sets of flow encoded pulses contained in the slice vertical direction are opposite to each other.The flow speed in the direction of the readout gradient magnetic field, which is a lateral direction of the slice plane, is purely measured by canceling influences of the flow in the slice vertical direction.