Abstract: To provide a substrate storage container that enables efficient replacement of the air inside the container main body with a substrate protecting gas. The substrate storage container includes: a container main body 1 capable of accommodating a plurality of semiconductor wafers W; an air feed valve for supplying a purge gas into the container main body 1; and an air replacement unit 40 that blows out the purge gas from the air feed valve into the interior of the container main body 1. The container main body 1 is formed in a front open box form with the air feed valve attached to the rear of the bottom plate 6. The air replacement unit 40 includes a housing 41 for reserving the purge gas from the air feed valve and a cover 52 that covers the open front 42 of the housing 41. The bottom of the housing 41 is connected to the air feed valve so as to flow the purge gas while the housing 41 is supported at the upper portion thereof by a rear wall 18 of the container main body 1.

Abstract: A superheated steam recycling apparatus includes a superheated steam generating part; a steam supply flow path for supplying saturated steam to the superheated steam generating part; a superheated steam utilization part that is supplied with superheated steam generated by the superheated steam generating part; a steam return flow path for returning used steam having passed through the superheated steam utilization part to the superheated steam generating part; and a flowmeter that measures a flow rate of the used steam returned to the superheated steam generating part, and on the basis of the difference between a desired flow rate of the superheated steam to be generated by the superheated steam generating part and the flow rate of the used steam obtained by the flowmeter, controls a flow rate of the saturated steam to be supplied to the superheated steam generating part through the steam supply flow path.

Abstract: The present invention allows individual control of an output voltage of a main transformer and an output voltage of a teaser transformer while utilizing output characteristics of the respective transformer when a Scott connected transformer has control equipment arranged on the input side thereof, including first control equipment arranged in one of two phases of the main transformer on the input side in order to control a voltage or a current and second control equipment arranged in one end of a primary coil of the teaser transformer on the input side in order to control a voltage or a current, the control equipment controlling an output voltage of the main transformer and an output voltage of the teaser transformer individually.

Abstract: The present invention allows individual control of an output voltage of a main transformer and an output voltage of a teaser transformer while utilizing output characteristics of the respective transformer when a Scott connected transformer has control equipment arranged on the input side thereof, including first control equipment arranged in one of two phases of the main transformer on the input side in order to control a voltage or a current and second control equipment arranged in one end of a primary coil of the teaser transformer on the input side in order to control a voltage or a current, the control equipment controlling an output voltage of the main transformer and an output voltage of the teaser transformer individually.

Abstract: The present invention allows individual control of an output voltage of a main transformer and an output voltage of a teaser transformer while utilizing output characteristics of the respective transformer when a Scott connected transformer has control equipment arranged on the input side thereof, including first control equipment arranged in one of two phases of the main transformer on the input side in order to control a voltage or a current and second control equipment arranged in one end of a primary coil of the teaser transformer on the input side in order to control a voltage or a current, the control equipment controlling an output voltage of the main transformer and an output voltage of the teaser transformer individually.

Abstract: The present invention is one that uniformly and simultaneously heats a plurality of cup-shaped or annular metallic bodies to improve productivity, and has a plurality of divided core parts formed by dividing an annular core; configured such that a plurality of divided end parts of the divided core part are respectively attached with metallic bodies W made of non-magnetic metal; and inductively heats the metallic bodies W through input windings provided in outer or inner circumferential parts of the metallic bodies W.

Abstract: An induction heating apparatus capable of heating a conductive plate member throughout in a widthwise direction is disclosed. Specifically, the present invention is configured to have flat-shaped coils, each forming a magnetic path in a center portion thereof, provided on upper and lower sides of the conductive plate member so as to heat the conductive plate member and to have circumferential coils provided on right and left end sides of magnetic metal casings through which the circumferential magnetic paths of the flat-shaped coils pass, whereby magnetic paths of the circumferential coils pass through both end portions of the conductive plate member.

Abstract: The present invention intends to highly accurately control a temperature of superheated steam at a high response speed, and provides a superheated steam generator that inductively heats a heating metal body in contact with steam using an induction coil, and thereby heats the steam in contact with the heating metal body to generate superheated steam. In addition, a frequency of an AC power supply connected to the induction coil is 50 Hz or 60 Hz, and a thickness between an induction coil side surface of the heating metal body facing toward the induction coil and a steam contact surface of the heating metal body in contact with the steam is 10 mm or less.

Abstract: In order to improve heat recovery efficiency in purifying oil from an organic substance using superheated steam, the present invention provides an oil purifying apparatus for thermally decomposing an organic substance with superheated steam and purifying oil from gas components generated by thermal decomposition, which includes: a heat treatment container for storing the organic substance; and a superheated steam generating part for generating the superheated steam to be supplied into the heat treatment container, and the superheated steam generating part is provided in the heat treatment container.

Abstract: The present invention intends to suppress energy consumption despite making it possible to generate superheated steam in a short period of time. Specifically, the present invention includes: a steam generating part that generates steam; a superheated steam generating part that generates superheated steam; and an on/off valve that switches the supply of the steam to the superheated steam generating part or the stop of the supply, wherein the on/off valve switches the supply of the steam or the stop of the supply, and thereby switching is performed between a waiting state that is a state where the steam generating part generates the steam and a state where the supply of the steam is stopped, and a supply state where the steam is supplied to the superheated steam generating part.

Abstract: This invention provides a fluid heating device that is free from breakage even though a conductor tube is transformed due to being heated. Concretely, this invention is provided with an electrical connecting member that constitutes a short circuit by electrically connecting each of required portions of the conductor tube, and uses the electrical connecting member that is transformable in accordance with a transformation resulting from a temperature change of the conductor tube.

Abstract: An object of this invention is to detect breakage of a conductor tube before it happens and to prevent leakage of the heated fluid. More concretely, this invention is a fluid heating device that applies heat to a fluid that flows in the conductor tube of a helical shape by applying induction heat to the conductor tube and that comprises an electrical connecting member that constitutes a short circuit by electrically connecting each of required portions of the conductor tube, and a potential measuring instrument that measures a potential of the conductor tube.

Abstract: The present invention is one that heats the inside of the spinning pack in a short period of time while keeping temperature of an outer circumferential part of a spinning pack less than a maximum allowable temperature, and provided with: a magnetic path forming member that forms a magnetic path with a spinning pack arrangement space where the spinning pack is arranged to occupy the space and be positioned intermediate respective ends of the magnetic path forming member that border the space; and a magnetic flux generating winding that is provided so as to be wound to surround the spinning pack arrangement space.

Abstract: The present invention for eliminating a need for a temperature detecting element adapted to measure the temperature of a roll main body provides an induction heated roll apparatus including: a roll main body; a magnetic flux generating mechanism including an iron core and a winding; and a power supply circuit provided with a control element adapted to control AC current or AC voltage. The apparatus calculates the temperature of the roll main body using an AC current value obtained by an AC current detecting part, an AC voltage value obtained by an AC voltage detecting part, a power factor obtained by a power factor detecting part, a winding resistance value of the winding, and an excitation resistance obtained from characteristics of a relationship between a magnetic flux density and an excitation resistance of a magnetic circuit including the iron core and the roll main body as parameters.

Abstract: A superheated steam recycling apparatus includes a superheated steam generating part; a steam supply flow path for supplying saturated steam to the superheated steam generating part; a superheated steam utilization part that is supplied with superheated steam generated by the superheated steam generating part; a steam return flow path for returning used steam having passed through the superheated steam utilization part to the superheated steam generating part; and a flowmeter that measures a flow rate of the used steam returned to the superheated steam generating part, and on the basis of the difference between a desired flow rate of the superheated steam to be generated by the superheated steam generating part and the flow rate of the used steam obtained by the flowmeter, controls a flow rate of the saturated steam to be supplied to the superheated steam generating part through the steam supply flow path.

Abstract: The present invention intends to detect the temperature of an induction coil without providing a temperature sensor inside a roll main body, and includes: a DC voltage application part that controls a DC power supply to intermittently apply DC voltage to the induction coil; a resistance value calculation part that calculates a resistance value of the induction coil from the DC voltage applied by the DC voltage application part and DC current flowing through the induction coil; a relational data storage part that stores relational data indicating a resistance value versus temperature relationship between the resistance value of the induction coil and the temperature of the induction coil; and a coil temperature calculation part that calculates the temperature of the induction coil from the resistance value obtained by the resistance value calculation part and the resistance value versus temperature relationship indicated by the relational data.

Abstract: For heating a mold efficiently and uniformly and for protecting an induction coil from corrosive gases, an upper plate that contacts an upper end face of a mold, and a lower plate that contacts a lower end face of the mold are provided, and an induction coil, provided to each plate, has a voltage applied by a commercial power supply. Each plate has a metal plate body in which a recessed housing portion that houses the induction coil is formed, and a cover that closes the recessed housing portion in a state where the induction coil is housed therein. A cover placement portion having a step that is greater than or equal to the thickness of the metal cover is formed in the metal plate body, and a plurality of jacket chambers in which a gas-liquid two phase heating medium is enclosed are formed in the metal plate body.

Abstract: The present invention intends to eliminate the need for a temperature detecting element adapted to measure the temperature of a roll main body in an induction-heated roller apparatus, and includes an impedance calculation part that calculates the impedance of a winding, a relational data storage part that stores relational data indicating the relationship between the impedance of the winding and the temperature of the roll main body, and a roll temperature calculation part that calculates the temperature of the roll main body from the impedance obtained by the impedance calculation part and the relational data stored in the relational data storage part.