Abstract: According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

Abstract: An inspection method and an inspection apparatus using an electron beam enabling more detailed and quantitative evaluation at a high throughput level. The method comprises the steps of irradiating, based on previously prepared information concerning a defect position on the surface of a sample, the defect and its vicinity with an electron beam a plurality of times at predetermined intervals; detecting an electron signal secondarily generated from the sample surface by the electron beam; imaging an electron signal detected by the previously specified n-th or later electron beam irradiation; and measuring the resistance or a leakage amount of the defective portion of the sample surface in accordance with the degree of charge relaxation by monitoring the charge relaxation state of the sample surface based on the electron beam image information.

Abstract: According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

Abstract: The present invention is related to a stereoscopic map displaying method beneficial for a navigation system in which map information is selected from a database according to a current location of a mobile object. The map database for storing map information comprises a plurality of types of information regarding a first map mesh provided with height information and a second map mesh with no height information wherein there is provided information for identifying that the second map mesh has no height information. A mode of a mark representing the moving display device is switched in accordance with a result whether first map data or second map data is utilized and displayed on the display apparatus superposing graphics data.

Abstract: A pattern inspecting method and apparatus in which changed particles irradiate an object substrate having patterns formed thereon, sequential detection on a time division basis utilizing a plurality of sensors at, at least one of a secondary electron, reflected electron and transparent electron generated from the object substrate which is irradiated is effected and digital images at a rate higher than a rate obtained with a plurality of the sensors or with a discrete sensor forming divided sensors by a time-series processing of the signal obtained through the detection on a time division basis is obtained. A defect of the patterns formed on the object substrate is detected in accordance with the obtained digital images.

Abstract: An inspection method and an inspection apparatus using an electron beam enabling more detailed and quantitative evaluation at a high throughput level. The method comprises the steps of irradiating, based on previously prepared information concerning a defect position on the surface of a sample, the defect and its vicinity with an electron beam a plurality of times at predetermined intervals; detecting an electron signal secondarily generated from the sample surface by the electron beam; imaging an electron signal detected by the previously specified n-th or later electron beam irradiation; and measuring the resistance or a leakage amount of the defective portion of the sample surface in accordance with the degree of charge relaxation by monitoring the charge relaxation state of the sample surface based on the electron beam image information.

Abstract: In order to provide a navigation system intelligibly providing various information which contains information to vary with time and is expected by the user, without increasing quantity of the information to be transmitted to a terminal mounted on a car, a navigation system is constituted with an information offering equipment and an information display system, and said information offering equipment has an individual information reception means to obtain individual information through a network and a data transmission means to transmit the received information to the information display system, and said information display system has a data receiver receiving the data from the information offering equipment, a map display means, an icon display means displaying the receive data on a map, an icon select means, and a detailed information display means which displays the detailed information of an icon selected.

Abstract: In order to provide a navigation system intelligibly providing various information which contains information to vary with time and is expected by the user, without increasing quantity of the information to be transmitted to a terminal mounted on a car, a navigation system is constituted with an information offering equipment and an information display system, and said information offering equipment has an individual information reception means to obtain individual information through a network and a data transmission means to transmit the received information to the information display system, and said information display system has a data receiver receiving the data from the information offering equipment, a map display means, an icon display means displaying the receive data on a map, an icon select means, and a detailed information display means which displays the detailed information of an icon selected.

Abstract: In the detecting system for irradiating the electron beam and detecting the secondary electron thereof, an area of the detector is an important factor for high-speed detection. For the technique of the current electron optical system and detector, a detector of the area larger than a constant area is necessary and detection of 200 Msps or more by receiving limitation on the frequency inversely proportional to the area is substantially difficult. For example, for detection at 400 Msps under the condition that the required area is 4 mm square and the rate for 4 mm square is defined as 150 Msps, four discrete high-speed detectors of 2 mm square are arranged to amplify and then add the signals for A/D conversion. Otherwise, the secondary electron is sequentially inputted to the detector of 8 mm square with the secondary electron deflector, the secondary electron is detected at 100 Msps and arranged after the A/D conversion. In any case, the area of 4 mm square and rate of 400 Msps can be attained.

Abstract: A method for reducing organic solvents remaining in tris-(2,3-epoxypropyl)-isocyanurate crystals, which comprises pulverizing, as a material, crystal particles of tris-(2,3-epoxypropyl)-isocyanurate obtained by a recrystallization method, while evaporating a volatile component from the surface of the particles.

Abstract: In order to provide a charged-particle beam apparatus and an automatic astigmatism adjustment method that are capable of adjusting astigmatism and a focus in a short period of time and with a high degree of precision, the present invention implements fast, precise and automatic astigmatism and focus adjustment by detection of an astigmatic difference's direction and magnitude as well as a focal offset in processing to process a small number of 2-dimensional pictures obtained by varying a focus in two different scanning directions, and by transformation of the direction and magnitude into two kinds of astigmatism correction quantity to be used for correction of the astigmatism as well as transformation of the focal offset into a focus correction quantity to be used for correction of the focus.

Abstract: The present invention aims to prevent degradation in performance due to a change in image quality and deflection distortions or the like in the vicinity of both ends of a scan area and detect a defect in a sample such as a semiconductor wafer or the like with high accuracy when the defect is inspected by use of an electron beam image, and allow a monitor to confirm an image area to be checked. The present invention is provided with means for comparing and checking defects in the sample, based on an image signal in which the neighborhoods of both ends of horizontal and vertical scan areas are respectively deleted under control of a blanking signal and a vertical synchronizing signal.

Abstract: The present invention aims to prevent degradation in performance due to a change in image quality and deflection distortions or the like in the vicinity of both ends of a scan area and detect a defect in a sample such as a semiconductor wafer or the like with high accuracy when the defect is inspected by use of an electron beam image, and allow a monitor to confirm an image area to be checked. The present invention is provided with means for comparing and checking defects in the sample, based on an image signal in which the neighborhoods of both ends of horizontal and vertical scan areas are respectively deleted under control of a blanking signal and a vertical synchronizing signal.

Abstract: A process for producing &bgr;-form tris-(2,3-epoxypropyl)-isocyanurate crystals containing from 2 to 15 wt % of a-form tris-(2,3-epoxypropyl)-isocyanurate in the interior of the crystals, which comprises the following steps (A), (B), (C) and (D):

Abstract: The present invention is related to a stereoscopic map displaying method beneficial for a navigation system in which map information is selected from a map database according to a current location of a mobile object. The map database for storing map information comprises a plurality of types of information regarding a first map mesh provided with height information and a second map mesh with no height information wherein there is provided information for identifying that the second map mesh has no height information.

Abstract: In the detecting system for irradiating the electron beam and detecting the secondary electron thereof, an area of the detector is an important factor for high-speed detection. For the technique of the current electron optical system and detector, a detector of the area larger than a constant area is necessary and detection of 200 Msps or more by receiving limitation on the frequency inversely proportional to the area is substantially difficult.

Abstract: The present invention is related to a stereoscopic map displaying method beneficial for a navigation system in which map information is selected from a map database according to a current location of a mobile object. The map database for storing map information comprises a plurality of types of information regarding a first map mesh provided with height information and a second map mesh with no height information wherein there is provided information for identifying that the second map mesh has no height information.

Abstract: A method for reducing organic solvents remaining in tris-(2,3-epoxypropyl)-isocyanurate crystals, which comprises pulverizing, as a material, crystal particles of tris-(2,3-epoxypropyl)-isocyanurate obtained by a recrystallization method, while evaporating a volatile component from the surface of the particles.

Abstract: A process for producing an isocyanurate derivative of the formula (1): wherein one each of X1, X2, of Y1, Y2 and of Z1, Z2, a R COO group and the other is a OH group and each R is a C1-7 organic group, having an ionic chlorine atom content of from 0.1 to 5 ppm, which comprises reacting (A) tris-(2,3-epoxypropyl) isocyanurate containing from 10 to 3,000 ppm of hydrolyzable chlorine and (B) a carboxyl group-containing compound, in the presence of (C) an arylphosphine and/or a phosphonium salt comprising a non-halogen anion, until the concentration of the epoxy group in the reaction solution decreases to a 0.3 to 0.6 eq/kg, and then maintaining the reaction solution at 80 to 130° C. for H hours, where 0.2×2,5n≦H≦2×2.5n, where n=0.1(110−T), where T is the temperature (° C.), to bring the epoxy group concentration in the reaction solution to a level of less than 0.1 eq/kg.

Abstract: The method entails using three dimensional map data including information Indicating horizontal locations of map constituent elements such as topographical features, roads, buildings and information indicating heights or elevations or altitudes of at least some of the map constituent elements located in parts of available horizontal map area. A perspective map looking from a view point toward a ground plane is generated by executing coordinate transformation procedures on the map information, and a scenery Image corresponding to the perspective map is displayed on a display device. The view point for generating the perspective map Is established above a height of a map element existing at a location specified in response to the current location of the moving object, and the height of the view point Is renewed with movement of the object. The view point setting unit repeats Its view point setting procedure when renewed location information has movement of the moving object.