Abstract: An exposure apparatus includes a sensor for detecting light arriving from a projection optical system via a liquid provided on an image plane side of the projection optical system. The sensor includes a light transmissive member provided on a stage and a light receiving element for receiving light arriving from the projection optical system via the light transmissive member. The light transmissive member includes a first surface and a second surface. The first surface is arranged on the stage, comes into contact with the liquid, and is a surface on which the light arriving from the projection optical system is incident via the liquid. At least one of the first and second surfaces diffuses or diffracts the light having arrived from the projection optical system. The light receiving element receives the light that has been diffused or diffracted.

Abstract: There is provided an illumination method for illuminating an illumination objective surface by using a light from a light source. The illumination method includes setting control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light; illuminating the illumination objective surface with the light from the light source via the plurality of optical elements; monitoring integrated energy of the light from the light source; and correcting the control amount for the plurality of optical elements on the basis of a result of the monitoring of the integrated energy.

Abstract: An exposure apparatus includes an optical member that can be provided on a stage. The optical member has a first surface contacting a liquid when moved to face a projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.

Abstract: An exposure apparatus includes an optical member that can be provided on a stage. The optical member has a first surface contacting a liquid when moved to face a projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.

Abstract: An exposure apparatus irradiates a substrate with light via a projection system and liquid, and includes a stage that moves below the projection system, and a light-receiving element having a light-receiving surface. An optical member provided on the stage has a first surface contacting the liquid when moved to face the projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.

Abstract: There is provided a reformer support structure for a fuel cell module, the fuel cell module including a fuel cell body which includes a cell stack and a reformer disposed above the cell stack, and a housing which contains the fuel cell body. The reformer support structure includes a first member which includes a first engagement portion and is attached to the housing and a second member which includes a second engagement portion and is attached to the reformer. The reformer is supported by the housing by engaging the second engagement portion with the first engagement portion, an engagement part where the second engagement portion is engaged with the first engagement portion is provided above a bottom of the reformer, and the second engagement portion is slidable on the first engagement portion in a direction of thermal expansion of the reformer.

Abstract: To determine a composition of a hydrocarbon-based gaseous fuel to be supplied to a supply target by a fuel supply device. A speed of sound in the gaseous fuel is measured using an ultrasonic flow meter (101). A carbon number of the gaseous fuel is estimated on the basis of the measured speed of sound (102). The composition (ingredients and ingredient concentration) of the gaseous fuel is estimated on the basis of the estimated carbon number (103). A supply amount of fuel in a fuel supply system is controlled on the basis of the estimated composition.

Abstract: According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.

Abstract: To restrain the leakage of an exhaust gas from inside of a fuel cell module to the outside of a fuel cell system. A simplified airtight housing 4 constituting a SOFC system accommodates a fuel cell module 1, an exhaust gas processing unit 2, and a heat exchanger 3. A SOFC package 7 accommodates the housing and defines and forms an auxiliary machinery compartment 8 around the housing. The housing has an intake hole 41. A blower 17a disposed in the housing draws in air from the inside of the housing and supplies the air to air electrodes of fuel battery cells in the module through a cathode air supply passage 17. The suction of the air from the inside of the housing by the blower maintains the inside of the housing at a pressure that is lower than the pressure in the area surrounding the housing (the compartment).

Abstract: To allow the supply of an appropriate amount of gaseous fuel even if the composition of the gaseous fuel varies. A composition-independent flow meter 4 capable of measuring a flow rate without depending on the composition of the gaseous fuel is disposed in series with a thermal flow meter 3 in a supply pathway of the gaseous fuel. When the measured value of the thermal flow meter 3 and the measured value of the composition-independent flow meter 4 differ by a certain degree or higher, it is determined that there is an abnormal state, and the conversion factor with respect to the measured value of the thermal flow meter 3 is set. The composition of the gaseous fuel is estimated based on the set conversion factor, and the target supply amount of the gaseous fuel is corrected and controlled based on the estimated composition.

Abstract: An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.

Abstract: To stably supply a gaseous fuel by setting a calorific value as a management value even if a composition of the fuel varies. A composition-independent flow meter 4 is disposed in series with a thermal flow meter 3 in a supply pathway of the fuel. When the measured values of the both flow meters 3,4 differ by a certain degree, it is determined that there is an abnormal state, and the conversion factor with respect to the thermal flow meter 3 is set. The composition of the fuel is estimated based on the conversion factor, and the calorific value of the fuel is estimated based on the composition. The supply amount of the fuel by a supply device 2 is adjusted based on the calorific value of the fuel so that the target supply calorific value per unit time is obtained.

Abstract: An exposure apparatus irradiates a substrate with light via a projection system and liquid, and includes a stage that moves below the projection system, and a light-receiving element having a light-receiving surface. An optical member provided on the stage has a first surface contacting the liquid when moved to face the projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.

Abstract: There is provided an illumination method for illuminating an illumination objective surface by using a light from a light source. The illumination method includes setting control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light; illuminating the illumination objective surface with the light from the light source via the plurality of optical elements; monitoring integrated energy of the light from the light source; and correcting the control amount for the plurality of optical elements on the basis of a result of the monitoring of the integrated energy.

Abstract: An exposure apparatus includes an optical element via which a patterned beam is projected onto a substrate through exposure liquid filled in a space between the optical element and the substrate. The apparatus also includes a member having a flow passage in which exposure liquid flows, the flow passage being in fluidic communication with the space. The apparatus also includes a cleaning system which cleans the member.

Abstract: A cleaning of a liquid immersion exposure apparatus is performed at a different time than an exposure operation. A stage is placed under a liquid supply inlet during a cleaning operation. The cleaning operation is performed at the different time than the exposure operation in which an immersion liquid is supplied onto a substrate held on a holder of the stage. The immersion liquid is supplied from a liquid supply inlet during the cleaning operation. The immersion liquid is supplied to a portion of the stage different from a portion at which the substrate is held by the holder of the stage.

Abstract: A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

Abstract: A fuel cell module includes a vaporizer; a reformer; a cell stack; and a housing which accommodates in inside thereof the vaporizer, the reformer, and the cell stack and includes in inside thereof a wall portion defining an exhaust gas flow channel, wherein the wall portion comprises an inner wall portion; and an outer wall portion, and defines the exhaust gas flow channel communicating to the accommodation chamber between the inner wall portion and the outer wall portion, and the vaporizer is disposed in the exhaust gas flow channel at a position below the reformer and the cell stack so that the vaporizer is spaced from the reformer, and further, spaced from the outer wall portion.

Abstract: A fuel cell module includes a power generating unit including a cell stack having connected therein a plurality of cells that generate power by using a hydrogen-containing gas and an oxidant, and a housing accommodating the power generating unit. The housing includes an accommodation chamber having a power generating unit arrangement surface where the power generating unit is disposed and a first side wall section and accommodating the power generating unit, and an oxidant flow channel that is formed on the outside of the accommodation chamber, with the first side wall section being interposed therebetween, and allows the oxidant to pass therethrough. A through hole is formed that connects the accommodation chamber with the oxidant flow channel and serves to supply the oxidant to the cell stack.

Abstract: A fuel cell system includes: a hydrogen generating unit that generates hydrogen-containing gas using hydrogen-containing fuel; a cell stack that performs power generation using the hydrogen-containing gas; a current acquiring unit that acquires an electric current of the power generation in the cell stack; a power generation state determination value acquiring unit that acquires a power generation state determination value based on measurement results of a power generation parameter of the power generation in the cell stack; an estimate value acquiring unit that acquires an estimated value of the power generation parameter that is predetermined for the electric current; a comparing unit that compares the power generation state determination value and the estimated value; and a supply amount adjusting unit that adjusts a supply amount of the hydrogen-containing fuel based on an increase or a decrease of the power generation state determination value in relation to the estimated value.