Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: A semiconductor device includes a second deep layer between a first deep layer and first current distribution layer and a base region in an active region and in a part of an inactive region adjacent to the active region. The second deep layer has a second stripe portion including lines connecting to the base region and the first deep layer. The semiconductor device further includes a second current distribution layer between the first current distribution layer and the base region and arranged between the lines of the second stripe portion. The first deep layer has a first stripe portion including a plurality of lines, and each line has an end portion connecting to a frame-shaped portion and an inner portion on an inner side of the end portion. The width of the end portion is equal to or greater than the inner portion.

Abstract: A substrate processing apparatus includes a vacuum chamber, a rotary table rotatably provided in the vacuum chamber, a stage having a mounting surface on which a substrate is mounted at a position spaced apart from a rotation center of the rotary table, a lift pin configured to be displaced relative to the stage through a through-hole of the stage to raise and lower the substrate, and a gas suctioning section configured to apply a suction force to the substrate via the through-hole when the lift pin is being lowered. The stage includes a groove on the mounting surface, the groove communicating with the through-hole and extending from the through-hole toward a center of the stage.

Abstract: A substrate processing apparatus includes a vacuum chamber, a rotary table in the vacuum chamber, a stage, and a support that supports at least either the rotary table or stage, the support having a thermal expansion coefficient greater than the rotary table or stage that is supported. The rotary table or stage includes a protruding portion protruding toward the support. The support includes a base portion, an insertion portion protruding from a center of the base portion and being inserted into the protruding portion, and an outer edge protruding portion protruding from the base portion. An outer clearance formed between the outer edge protruding portion and the protruding portion is set to be smaller than an inner clearance formed between the insertion portion and the protruding portion at a first temperature, and the outer clearance becomes greater than the inner clearance at a second temperature higher than the first temperature.

Abstract: A substrate processing apparatus includes: a processing chamber; a rotary table rotatably provided inside the processing chamber; a stage that is rotatable relative to the rotary table at a position spaced apart from a rotation center of the rotary table; a process gas supplier provided above the rotary table; a separation gas supplier to supply a separation gas to separation regions, each of the separation regions being adjacent to a processing region; and a gas exhauster including exhaust ports communicating with an inside of the processing chamber, wherein the exhaust ports are provided in the processing region between the separation regions and are provided above the rotary table.

Abstract: A substrate processing apparatus includes a processing chamber; a rotary table that is rotatably provided in the processing chamber; a heater provided below the rotary table; a partition, provided between the rotary table and the heater with a gap with respect to a lower surface of the rotary table, configured to partition the processing chamber into a first region in which the rotary table is provided and a second region in which the heater is provided; a first processing region in which a first processing gas is supplied to an upper surface of the rotary table; a second processing region in which a second processing gas is supplied to the upper surface of the rotary table; and a separation region in which a separation gas for separating the first and second processing gas is supplied to the upper surface of the rotary table.

Abstract: An image forming apparatus includes a rotatable photosensitive member, a charging member, a developing device, a blade, a detecting portion, and a controller. The controller causes the photosensitive member to rotate through one full circumference or more on the following conditions during a predetermined operation: (i) a voltage which is a discharge start voltage or more is applied to the charging member, and (ii) an operation condition of the developing device is a first condition on which an amount of fog toner deposited from the developer carrying member on the photosensitive member is smaller than an amount of the fog toner on a second condition which is an operation condition of the developing device during a sheet interval before the image formation during the continuous image formation is interrupted.

Abstract: A cleaning process (blasted-particles cleaning process) includes performing, a plural number of consecutive cycles, an ultrasonic cleaning treatment including immersing a turbine rotor blade in a water basin and conducting an ultrasonic wave into the water basin to clean the turbine rotor blade, and a pressurized-water cleaning treatment including spraying pressurized water into an internal cooling flow channel after the ultrasonic cleaning treatment is performed. The cleaning process is performed after a bonding coat layer removing process of removing a bonding coat layer (first coating layer) by chemical treatment, and a cleaning process of cleaning the turbine blade by blast treatment. Heat tinging process is then performed.

Abstract: An image forming apparatus includes an image bearing member; an intermediary image transfer belt; primary and secondary transfer members; a first cleaning member; a second cleaning member; an electrical discharge member; a voltage source for supplying a voltage to produce the discharge current; and a controller, which controls the voltage source such that an absolute value of a first current balance is not more than 50% of an absolute value of a second current balance. The first current balance is a sum of a primary transferring current, a secondary-transfer current, a first cleaning current, a second cleaning current and a discharge current at the time when an image region on the belt passes the primary transfer member, the secondary transfer member, the first cleaning member, the second cleaning member and the discharge member, respectively, and the second balance is the first balance minus the discharge current.

Abstract: An image forming apparatus includes an image bearing member; an intermediary image transfer belt; primary and secondary transfer members; a first cleaning member; a second cleaning member; an electrical discharge member; a voltage source for supplying a voltage to produce the discharge current; and a controller, which controls the voltage source such that an absolute value of a first current balance is not more than 50% of an absolute value of a second current balance. The first current balance is a sum of a primary transferring current, a secondary-transfer current, a first cleaning current, a second cleaning current and a discharge current at the time when an image region on the belt passes the primary transfer member, the secondary transfer member, the first cleaning member, the second cleaning member and the discharge member, respectively, and the second balance is the first balance minus the discharge current.

Abstract: A support structure for a suspended injector includes a suspended injector having a tubular vertical portion extending in a vertical direction, one or more chamfered portions formed by chamfering an outer peripheral surface near an upper end of the tubular vertical portion, a pair of holding members each having a flat surface formed on an inner peripheral surface of each of the pair of holding members to engage with each of the chamfered portions, each of the pair of holding members holding the tubular vertical portion of the suspended injector by sandwiching the tubular vertical portion of the suspended injector from both sides each of the pair of holding members, and a support structure part configured to fixedly support the pair of holding members, and configured to suspend and support the suspended injector.

Abstract: An image forming apparatus includes a photosensitive member; a charging device, a developing device, a transfer device, and a controller. The controller is capable of executing an operation in a first mode in which an image forming operation is controlled so that an exposure start enable timing is set during movement of the photosensitive member through one full circumference from first passing, through an exposure position, of a region of the photosensitive member which has passed through a charging position, and executing an operation in a second mode in which an image forming operation is controlled so that the exposure start enable timing is set after the movement of the photosensitive member. On the basis of image information of the first sheet of an image forming job, the controller selects an executing mode from a plurality of modes including at least the first mode and the second mode.

Abstract: A film deposition apparatus for sequentially supplying reaction gases, which mutually react, into a chamber to deposit a film on a substrate includes a turntable rotatable and including a concave portion on an upper surface, a bottom portion of the concave portion having a through hole, a substrate supporting member attachable to and detachable from the concave portion, an upper surface of the substrate supporting member mounting the substrate, a lower surface of the substrate supporting member having a first protruding portion, a drive mechanism moving up and down the turntable and revolving the turntable, a lid member located lower than the turntable, an upper surface of the lid member having a second protruding portion, and a control unit revolving the turntable to cause the first protruding portion to contact the second protruding portion and cause the substrate supporting member to be spun a predetermined angle relative to the turntable.

Abstract: A developing device includes a developing container, a developing sleeve, a magnet and grooves provided at a surface of the sleeve and formed along a direction crossing a circumferential direction of the sleeve. In a cross-section, each of the grooves is formed by a flat bottom portion contacting a carrier particle and a pair of side surface portions provided in both sides of the flat bottom portion with respect to the circumferential direction of the sleeve and satisfies the following relationship: r<w<2r, 2×r<L, and r/2?s<2r. In the above, r is a volume-average particle size of the carrier particles, w is a length of the flat bottom portion, L is a width between the side surface portions at the surface of the sleeve, and s is a depth of each of the grooves.

Abstract: An image forming apparatus includes a photosensitive member; a charging device, a developing device, a transfer device, and a controller. The controller is capable of executing an operation in a first mode that an image forming operation is controlled so that an exposure start enable timing is set during movement of the photosensitive member through one full circumference from first passing, through an exposure position, of a region of the photosensitive member which has passed through a charging position, and executing an operation in a second mode that an image forming operation is controlled so that the exposure start enable timing is set after the movement of the photosensitive member. On the basis of image information of the first sheet of an image forming job, the controller selects an executing mode from a plurality of modes including at least the first mode and the second modes.

Abstract: A magnetic annealing apparatus is provided which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a vertical state.

Abstract: A method for managing an atmosphere in a storage container in a processing apparatus including a substrate transfer region and a container transfer region which are partitioned by a partition wall; a load port; a container keeping rack; and a cover opening/closing mechanism, includes substituting the internal atmosphere of the storage container that stores non-processed substrates with the inert gas for using the cover opening/closing mechanism; transferring the storage container of which the internal atmosphere has been substituted with the inert gas, to the container keeping rack and placing and keeping the storage container on the container keeping rack; and putting the storage container on standby on the container keeping rack while maintaining the atmosphere substituted with the inert gas.

Abstract: A numerical controller controls a position of a control axis in synchronization with a reference value by using tabular data. When the numerical controller sequentially reads a command block from the tabular data and analyzes the command block so as to acquire a reference value and a coordinate value of a control point, the numerical controller outputs a reference value of the control point, which is shifted based on a shift amount specified by a shift command, in command blocks subsequent to the command block which includes the shift command, in a case where the shift command for shifting a reference value is included in the read command block.

Abstract: An fouling cleaning process (blasted-particles cleaning process) of performing, at least once, ultrasonic cleaning treatment (Steps S22 and S25) of immersing a turbine rotor blade in a water basin and conducting an ultrasonic wave into the water basin to clean the turbine rotor blade, and pressurized-water cleaning treatment (Steps S23 and S26) of spraying pressurized water into an internal cooling flow channel after the ultrasonic cleaning treatment is performed, after a bonding coat layer removing process of removing a bonding coat layer (first coating layer) by chemical treatment and a cleaning process of cleaning the turbine blade by blast treatment, and then heat tinging process is performed.

Abstract: A numerical controller drives motors for respective axes of a machine tool by using an NC program and table-format data that command positions of those axes with reference to a position of a reference axis. The numerical controller generates, based on a movement command commanded by the NC program, interpolation data for an axis to be controlled by the movement command, generates, based on the table-format data, interpolation data for an axis to be controlled by the table-format data, and further generates interpolation data obtained by selection from or superposition of these two pieces of interpolation data.