Abstract: Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers are disposed to convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit that stores carriers; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers.

Abstract: Disclosed is a magnetic annealing apparatus which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a horizontal state.

Abstract: A support member includes: a mounting unit having a first main surface and a second main surface, the first main surface being configured to mount a first object to be processed thereon and the second main surface being configured to mount a second object to be processed thereon; and a wall installed in a part of the outer peripheral portion along the outer periphery of the mounting unit, the wall having a first portion protruding in a vertical direction than the first object to be processed mounted on the first main surface of the mounting unit. The inner peripheral surface of the first portion of the wall is formed in a first shape that allows the first object to be processed to be held by the first portion of the wall.

Abstract: In a gas-turbine-stator-vane insert removing device with which welding metal that connects an insert collar, which protrudes outward from an outer circumferential surface of an insert, and a stator-vane-outer-shroud non-gas path surface, which surrounds the periphery of the insert collar, is removed by means of an arc discharge repeated at a short cycle between an electrode and a gas-turbine stator vane, a bottom surface of the electrode has the same plan-view shape as a plan-view shape of the welding metal.

Abstract: There is provided an electromagnetic operation device for a vacuum circuit breaker, which controls by its electromagnetic operation, a speed of contact switching operation of a vacuum switch tube used in the vacuum circuit breaker, the electromagnetic operation device including a closing drive coil for the vacuum switch tube; and a first temperature sensor that measures a temperature surrounding the closing drive coil, wherein a current caused to flow through the closing drive coil is controlled based on the temperature measured by the first temperature sensor.

Abstract: A substrate holder has two holder constituting bodies, each having a plurality of columns arranged on an imaginary circle, and substrate holding sections that hold circumferential portions of respective substrates. The holder constituting bodies hold the substrates so that either their front surfaces or their back surfaces face upward with a substrate having an upward facing front and a substrate having an upward facing rear being alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between a first pair of vertically adjacent substrates with their respective front surfaces facing each other is set to ensure treatment uniformity, and to be larger than a distance between a second pair of vertically adjacent substrates with their respective back surfaces facing each other.

Abstract: A film deposition apparatus includes a separation member that extends to cover a rotation center of the turntable and two different points on a circumference of the turntable above the turntable, thereby separating the inside of the chamber into a first area and a second area; a first reaction gas supplying portion that supplies a first reaction gas toward the turntable in the first area; a second reaction gas supplying portion that supplies a second reaction gas toward the turntable in the second area; a first evacuation port that evacuates the first reaction gas and the first separation gas that converges with the first reaction gas; and a second evacuation port that evacuates the second reaction gas and the first separation gas that converges with the second reaction gas. The separation member has a bent portion that substantially fills in a gap between the turntable and the chamber.

Abstract: A substrate holder has two holder constituting bodies, each having a plurality of columns arranged on an imaginary circle, and substrate holding sections that hold circumferential portions of respective substrates. The holder constituting bodies hold the substrates so that either their front surfaces or their back surfaces face upward with a substrate having an upward facing front and a substrate having an upward facing rear being alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between a first pair of vertically adjacent substrates with their respective front surfaces facing each other is set to ensure treatment uniformity, and to be larger than a distance between a second pair of vertically adjacent substrates with their respective back surfaces facing each other.

Abstract: A film deposition apparatus includes a turntable provided in the chamber and having on a first surface a substrate receiving area in which a substrate is placed; first and second reaction gas supplying portions supplying first and second reaction gases to the first surface, respectively; a separation gas supplying portion provided between the first reaction gas supplying portion and the second reaction gas supplying portion and supplying a separation gas that separates the first reaction gas and the second reaction gas; an evacuation port that evacuates the chamber; a space defining member provided for at least one of the first and second reaction gas supplying portions and defining a first space between the at least one of the first and second reaction gas supplying portions and the turntable and a second space so that the separation gas is likely to flow through the second space rather than the first space.

Abstract: A switchgear operating apparatus provided with an electronic switching device (7) connected to a negative electrode side of a DC power supply and a plurality of operating coils (4) which are simultaneously energized and controlled by the electronic switching device (7) for performing on/off operations of a three-phase switchgear includes diodes (6a, 6b, 6c) connected between the individual operating coils (4) and the electronic switching device (7), and a voltage detector (9) for detecting potential differences applied to the individual diodes (6a, 6b, 6c) and the electronic switching device (7).

Abstract: Provided is a transporting apparatus which suppresses wafers accommodated therein from being contaminated by particles existing inside the transporting apparatus even when wafers charged with electricity are accommodated in the accommodating apparatus. The transporting apparatus includes: a holding table including a first positioning pin that positions an article to be transported and configured to transfer an object to be processed which is accommodated in the article; an arm unit configured to grasp the article so as to dispose the article on the holding table; and a support unit configured to fix the article disposed on the holding table. In particular, at least one of the first positioning pin, the arm unit, and the support unit includes a ground element.

Abstract: According to an embodiment of present disclosure, a spacer is provided. The spacer includes at least a protrusion formed to protrude from an outer periphery of the spacer. The protrusion serves to locate the spacer in place in a transfer mechanism configured to transfer the spacer when the spacer is fixed by the transfer mechanism in such a way that the protrusion comes in contact with the transfer mechanism, and configured to allow the spacer to rotate or move in case the spacer is deviated from a predetermined transfer position when the spacer is engaged with the transfer mechanism.

Abstract: Provided is a cover opening/closing apparatus which includes: a wafer conveyance port having an opening edge and configured to be opened/closed by an opening/closing door; and a cover removal apparatus installed on the opening/closing door and configured to remove a cover of a FOUP which is formed with a substrate outlet having a opening edge. When the cover removal apparatus removes the cover of the FOUP, the opening edge of the substrate outlet is closely contacted with the opening edge of the wafer conveyance port. The cover removal apparatus includes: a latch key which is engaged with the cover of the FOUP, a driving unit configured to drive the latch key, and an accommodation unit configured to accommodate the driving unit. The cover opening/closing apparatus further includes an exhaust system configured to exhaust a space within the accommodation unit.

Abstract: An image forming apparatus comprising an image carrying member for carrying a toner image; a intermediary member for carrying the toner image transferred from said image carrying member; a first transfer member for transferring the toner image from said intermediary member onto a sheet, said first transfer member having first resistance and being contacted to said intermediary member; a second transfer member for transferring the toner image from said intermediary member onto the sheet, said second transfer member having second resistance higher than the first resistance and being contacted to said intermediary member at a position downstream of said first transfer member; and voltage applying means, connected to both of said first transfer member and said second transfer member, for applying the same voltage to said first transfer member and to said second transfer member to transfer the toner image onto the sheet.

Abstract: A toner image for measurement of an area coverage modulation of 90% or more is formed on a photosensitive drum in a non-image formation, and a setting condition for defining a developability of a toner image in an image formation is set so that a detection result of an optical sensor detecting the toner image for measurement becomes a preset target value. The target value is set to be lower as a value of the setting condition increases from a lower side to a higher side of the developability. The target value is set so that a color difference ?E of an image having half the maximum image density obtained after the setting condition is set with respect to an image having half the maximum image density obtained after the setting condition is set in a setting mode with use of unused developer is 6.5 or less.

Abstract: A surge absorbing circuit capable of absorbing surge stably without affecting a signal on a signal line even in the case of a high frequency signal, and an electronic device using the surge absorbing circuit. The surge absorbing circuit includes at least one surge suppression circuit, the at least one surge suppression circuit including, with respect to the same signal line at least: a power supply; a diode connected between the signal line and the power supply; and a power supply line for connecting the diode and the power supply to each other. In each of the at least one surge suppression circuit, a direction of the diode and a voltage of the power supply with respect to the signal line are determined so that the diode is reversely biased.

Abstract: An outer diameter of a transfer counter roller is made larger than that of a transfer roller to reduce an electrical discharge phenomenon and influence on a toner image.

Abstract: A capacitor capacitance diagnosis device includes a power supply which is for charging a capacitor, a discharge circuit which is connected to the capacitor in parallel to discharge energy of the capacitor, a resistance dividing circuit which is for measuring voltage drop value during discharging, a measurement circuit which measures divided voltage, and a diagnosis circuit which determines adequacy of capacitor capacitance from a time change in voltage due to the discharge. This makes it possible to diagnose adequacy of capacitor capacitance of an electric power apparatus during operation.

Abstract: A substrate holder has two holder constituting bodies, each having a plurality of columns arranged on an imaginary circle, and substrate holding sections that hold circumferential portions of respective substrates. The holder constituting bodies hold the substrates so that either their front surfaces or their back surfaces face upward with a substrate having an upward facing front and a substrate having an upward facing rear being alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between a first pair of vertically adjacent substrates with their respective front surfaces facing each other is set to ensure treatment uniformity, and to be larger than a distance between a second pair of vertically adjacent substrates with their respective back surfaces facing each other.

Abstract: A surge absorbing circuit capable of absorbing surge stably without affecting a signal on a signal line even in the case of a high frequency signal, and an electronic device using the surge absorbing circuit. The surge absorbing circuit includes at least one surge suppression circuit, the at least one surge suppression circuit including, with respect to the same signal line at least: a power supply; a diode connected between the signal line and the power supply; and a power supply line for connecting the diode and the power supply to each other. In each of the at least one surge suppression circuit, a direction of the diode and a voltage of the power supply with respect to the signal line are determined so that the diode is reversely biased.