Abstract: There is provided an electromagnetic operation device for a vacuum circuit breaker, which controls by its electromagnetic operation, a speed of contact switching operation of a vacuum switch tube used in the vacuum circuit breaker, the electromagnetic operation device including a closing drive coil for the vacuum switch tube; and a first temperature sensor that measures a temperature surrounding the closing drive coil, wherein a current caused to flow through the closing drive coil is controlled based on the temperature measured by the first temperature sensor.

Abstract: Provided is a cover opening/closing apparatus which includes: a wafer conveyance port having an opening edge and configured to be opened/closed by an opening/closing door; and a cover removal apparatus installed on the opening/closing door and configured to remove a cover of a FOUP which is formed with a substrate outlet having a opening edge. When the cover removal apparatus removes the cover of the FOUP, the opening edge of the substrate outlet is closely contacted with the opening edge of the wafer conveyance port. The cover removal apparatus includes: a latch key which is engaged with the cover of the FOUP, a driving unit configured to drive the latch key, and an accommodation unit configured to accommodate the driving unit. The cover opening/closing apparatus further includes an exhaust system configured to exhaust a space within the accommodation unit.

Abstract: When a command for outputting a movement amount at a specific reference value is included in a command block, a numerical controller which controls a position of a control axis in synchronization with a reference value by using tabular data registers the reference value and the movement amount of the command in a shift table while associating the reference value with the movement amount. Then, when the current reference value reaches the reference value registered in the shift table, the numerical controller superposes the movement amount of the control axis that is associated with the reference value in the shift table on a distributed movement amount to the control axis, and outputs the superposed movement amount as a movement amount of the control axis.

Abstract: A substrate conveying method conveying a layered body having first and second substrates stacked with a spacer member provided between their respective bottom surfaces facing each other includes receiving the first substrate by holding the first substrate from below its bottom surface using a first holding mechanism provided on a side of a first fork provided above a second fork, and turning the first fork upside down and placing the received first substrate on the second fork; receiving the spacer member held in a substrate holding part by holding the spacer member from above using a second holding mechanism provided on the same side of the first fork as the first holding mechanism, and placing the received spacer member on the first substrate; and holding the second substrate from above its top surface using the first holding mechanism, and placing the received second substrate on the spacer member.

Abstract: A numerical controller using table format data, the numerical controller including a memory which stores table format data, in which time or a position of a spindle or feed shaft serving as a reference is arranged so as to correspond to a position of a spindle or feed shaft other than the spindle or feed shaft of which position serves as a reference or an output of an auxiliary function, a reference value counter which inputs the time or the position of the spindle or feed shaft serving as a reference, wherein the position of the spindle or feed shaft other than the spindle or feed shaft of which position serves as a reference or the output of the auxiliary function is controlled.

Abstract: A toner image for measurement of an area coverage modulation of 90% or more is formed on a photosensitive drum in a non-image formation, and a setting condition for defining a developability of a toner image in an image formation is set so that a detection result of an optical sensor detecting the toner image for measurement becomes a preset target value. The target value is set to be lower as a value of the setting condition increases from a lower side to a higher side of the developability. The target value is set so that a color difference ?E of an image having half the maximum image density obtained after the setting condition is set with respect to an image having half the maximum image density obtained after the setting condition is set in a setting mode with use of unused developer is 6.5 or less.

Abstract: Removal control performing both first and second control in series is performed. The first control involves rotating the plurality of developer bearing members in a state in which the developing bias is applied to the plurality of developer bearing members so that force acting on opposite-polarity particles from a normally charged toner in the direction of moving the particles from the developer bearing member toward the image bearing member. The second control involves rotating one developer bearing member at a faster circumferential velocity than the other developer bearing member in a state in which the developing bias is applied to the plurality of developer bearing members or the developing bias is turned off so that the force acting on the opposite-polarity particles from the normally charged toner in the direction of moving the particles from the developer bearing member toward the image bearing member.

Abstract: A numerical controller drives motors for respective axes of a machine tool by using an NC program and table-format data that command positions of those axes with reference to a position of a reference axis. The numerical controller generates, based on a movement command commanded by the NC program, interpolation data for an axis to be controlled by the movement command, generates, based on the table-format data, interpolation data for an axis to be controlled by the table-format data, and further generates interpolation data obtained by selection from or superposition of these two pieces of interpolation data.

Abstract: A numerical controller has a first axis (reference axis) and a second axis (superimposed axis), and performs superimposed control which superimposes a movement amount of the reference axis on a movement amount of the superimposed axis, and thereby controls the movement of the superimposed axis. The numerical controller controls an acceleration start time of the axis to be accelerated, in a superimposition interval in which the reference axis is accelerated and the superimposed axis is decelerated (or reference axis is decelerated and superimposed axis is accelerated). After the axis to be decelerated is sufficiently decelerated, the axis to be accelerated is accelerated, and a moving speed of the superimposed axis does not exceed a speed limit of a machine in an acceleration/deceleration interval.

Abstract: A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates substrates and spacer members to transport a substrate or a spacer member between the accommodating part and the first fork. A first grip module is disposed on a first surface of the second fork to hold and support the substrate from an upward direction. A second grip module is disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.

Abstract: A numerical controller configured for operation based on tabular data identifies a control command, calculates an operating time to achieve a target state for the control command, determines a time, an axis position, or a spindle position, which serves as a reference for the start of the operation, and starts the operation.

Abstract: An image forming apparatus includes an image carrying member for carrying a toner image; an intermediary member for carrying the toner image transferred from the image carrying member; a first transfer member for transferring the toner image from the intermediary member onto a sheet, the first transfer member having a first resistance and being contacted to the intermediary member; a second transfer member for transferring the toner image from the intermediary member onto the sheet, the second transfer member having a second resistance higher than the first resistance and being contacted to the intermediary member at a position downstream of the first transfer member; and a voltage applying source, connected to both of said first and second transfer members, for applying the same voltage to the first and second transfer members to transfer the toner image onto the sheet.

Abstract: Positions to be synchronized with a reference value are stored as command data in table format. Velocity changing points of a tool path designated by the table format data are calculated. Two intersection points between the tool path and a circle or a sphere having a designated radius and centered on the velocity changing point are connected by a smooth curved tool path according to a multidimensional function or the like. In this way, the table format data is corrected.

Abstract: A substrate holder has two holder constituting bodies, each having a plurality of columns arranged on an imaginary circle, and substrate holding sections that hold circumferential portions of respective substrates. The holder constituting bodies hold the substrates so that either their front surfaces or their back surfaces face upward with a substrate having an upward facing front and a substrate having an upward facing rear being alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between a first pair of vertically adjacent substrates with their respective front surfaces facing each other is set to ensure treatment uniformity, and to be larger than a distance between a second pair of vertically adjacent substrates with their respective back surfaces facing each other.

Abstract: An activated gas injector includes a flow passage defining member partitioned into a gas activation passage and a gas introduction passage by a partition wall; a gas introduction port through which a process gas is introduced into the gas introduction passage; a pair of electrodes to be supplied with electrical power to activate the process gas, wherein the electrodes extend along the partition wall in the gas activation passage; through-holes formed in the partition wall and arranged along a longitudinal direction of the electrodes, wherein the through-holes allow the process gas to flow from the gas introduction passage to the gas activation passage; and gas ejection holes provided in the gas activation passage along the longitudinal direction of the electrodes, wherein the gas ejection holes allow the process gas activated in the gas activation passage to be ejected therefrom.

Abstract: A substrate conveying container opening/closing device includes an elevator carriage provided in a substrate transfer area and configured to be moved up and down by an elevator mechanism, a cover member for opening and closing an opening of a wall, a seal member for sealing a gap between the cover member and the periphery of the opening, a lid detaching/attaching mechanism provided in the cover member and configured to detach and attach the lid, a guide unit provided in the elevator carriage and configured to guide the cover member upward so that the cover member can advance from a retracting position toward the wall, a guideway provided in the wall to extend in a direction perpendicular to a seal surface of the opening, and a rotating body provided in the cover member and configured to roll downward along the guideway as the elevator carriage is moved downward.

Abstract: In an image forming apparatus, a voltage applied to a pre-transfer charger is set to the highest voltage, and is then reduced at a position corresponding to a predetermined range from a leading edge of a recording material, to suppress a phenomenon of backward scattering of toner formed just before entering a transfer nip, when a burr formed on the leading edge of the recording material exits the transfer nip.

Abstract: A film deposition apparatus is provided with a gas nozzle in which ejection holes that eject a reaction gas are formed along a longitudinal direction of the gas nozzle, and a flow regulation member that protrudes from the gas nozzle in either one of upstream and downstream directions of a rotation direction of a turntable. In such a configuration, a separation gas flowing from an upstream side of the rotation direction to the gas nozzle is restricted from flowing between the gas nozzle and the turntable on which a substrate is placed, and the reaction gas flowing upward from the turntable is restricted by the separation gas, thereby impeding a reaction gas concentration in a process area from being lowered.

Abstract: A first transfer inner roller and a first transfer outer roller are arranged such that the leading edge of a recording material is pressed against an intermediate transfer member on the downstream side of an upstream side transfer portion to change a traveling direction of the recording material.

Abstract: A method for managing an atmosphere in a storage container in a processing apparatus including a substrate transfer region and a container transfer region which are partitioned by a partition wall; a load port; a container keeping rack; and a cover opening/closing mechanism, includes substituting the internal atmosphere of the storage container that stores non-processed substrates with the inert gas for using the cover opening/closing mechanism; transferring the storage container of which the internal atmosphere has been substituted with the inert gas, to the container keeping rack and placing and keeping the storage container on the container keeping rack; and putting the storage container on standby on the container keeping rack while maintaining the atmosphere substituted with the inert gas.