Abstract: A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.

Abstract: An active portion of a piezoelectric actuator includes a first region provided in a region opposed to a recess and extending in a first direction, and a second region provided in a region corresponding to a central part in the first direction of the recess, and being configured such that a laminated body including the active portion and a vibration plate has a thickness larger than a thickness of a portion corresponding to the first region and that deformation of the second region is suppressed as compared to deformation of the first region when a voltage is applied between a first electrode and a second electrode.

Abstract: A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.

Abstract: The vibration plate, the first electrode, the piezoelectric layer, and the second electrode are stacked in this order from the pressure chamber plate side in an active area facing the pressure chamber. An area located outwardly from the active area in a longitudinal direction of the pressure chamber includes a first area in which the piezoelectric layer, the second electrode, the insulating layer, and the first conductive layer are stacked in this order, and a second area in which the piezoelectric layer and the insulating layer are stacked in this order without the second electrode and the first conductive layer.

Abstract: A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

Abstract: A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

Abstract: The interface region may include a region in which first intensity is higher than second intensity and in which the first intensity is higher than third intensity, where a degree of orientation of the (?211) crystal face of the second layer is denoted as the first intensity, the degree of orientation of the (?111) crystal face of the second layer is denoted as the second intensity, and the degree of orientation of the (002) crystal face of the second layer is denoted as the third intensity. The surface-layer region may include a region in which the first intensity is higher than the third intensity and in which the second intensity is higher than the third intensity.

Abstract: The piezoelectric material has, when viewed in the stacking direction, a first region including a border between an end of the active portion and the non-active portion in an extending direction of the individual electrode, the piezoelectric material has a second region different from the first region, and the piezoelectric material in the first region is thicker than the piezoelectric material in the second region.

Abstract: A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.

Abstract: An active portion of a piezoelectric actuator includes a first region provided in a region opposed to a recess and extending in a first direction, and a second region provided in a region corresponding to a central part in the first direction of the recess, and being configured such that a laminated body including the active portion and a vibration plate has a thickness larger than a thickness of a portion corresponding to the first region and that deformation of the second region is suppressed as compared to deformation of the first region when a voltage is applied between a first electrode and a second electrode.

Abstract: The interface region may include a region in which first intensity is higher than second intensity and in which the first intensity is higher than third intensity, where a degree of orientation of the (?211) crystal face of the second layer is denoted as the first intensity, the degree of orientation of the (?111) crystal face of the second layer is denoted as the second intensity, and the degree of orientation of the (002) crystal face of the second layer is denoted as the third intensity. The surface-layer region may include a region in which the first intensity is higher than the third intensity and in which the second intensity is higher than the third intensity.

Abstract: A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

Abstract: The piezoelectric material has, when viewed in the stacking direction, a first region including a border between an end of the active portion and the non-active portion in an extending direction of the individual electrode, the piezoelectric material has a second region different from the first region, and the piezoelectric material in the first region is thicker than the piezoelectric material in the second region.

Abstract: A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.

Abstract: A lithium secondary battery (solid electrolyte battery) includes a positive electrode which includes a positive electrode active material layer containing lithium oxide, a negative electrode which includes a negative electrode active material layer, a first solid electrolyte layer which is provided in contact with the positive electrode active material layer between the positive electrode and the negative electrode and contains lithium and oxygen, and a second solid electrolyte layer which is provided in contact with the negative electrode active material layer between the positive electrode and the negative electrode and contains lithium, nitrogen, and oxygen. It is preferred that each of the first solid electrolyte layer and the second solid electrolyte layer further contains boron.

Abstract: A lithium secondary battery (solid electrolyte battery) includes a positive electrode which includes a positive electrode active material layer containing lithium oxide, a negative electrode which includes a negative electrode active material layer, a first solid electrolyte layer which is provided in contact with the positive electrode active material layer between the positive electrode and the negative electrode and contains lithium and oxygen, and a second solid electrolyte layer which is provided in contact with the negative electrode active material layer between the positive electrode and the negative electrode and contains lithium, nitrogen, and oxygen. It is preferred that each of the first solid electrolyte layer and the second solid electrolyte layer further contains boron.

Abstract: In an electrophoretic material, first particles which are charged with a first polarity and second particles which are charged with a second polarity are dispersed in a solvent. A volume, which is obtained by dividing a volume of the solvent by a total number of particles, is called free volume, and a radius of a spherical space, which is occupied by sum of an average volume of the particles and the free volume, is called a free volume radius. A first particle average radius is greater than a second particle average radius. A difference between the free volume radius and the first particle average radius is greater than the second particle average radius.

Abstract: An electrode composite body includes a composite body which includes an active material molded body that is constituted by a porous body in which a plurality of active material particles are three-dimensionally connected to each other, and which has a communication hole, a solid electrolyte layer which is formed on a surface, which includes a surface of the communication hole of the active material molded body, of the active material molded body, and includes granular bodies (solid electrolyte particles) containing a solid electrolyte, and an electron conduction layer which covers at least a part of one of the active material molded body and the solid electrolyte layer in the communication hole, and has electron conductivity, and a current collector that is provided on one surface of the composite body to be joined to the active material molded body.

Abstract: A precursor of a solid electrolyte is melted at a temperature lower than the melting point of an active material, a liquid electrolyte material is placed on a surface of an active material molded body having voids among multiple active material particles of the active material, and the liquid electrolyte material is solidified, whereby a solid electrolyte layer is formed.

Abstract: One semiconductor device includes a plurality of first element-separating regions formed on a semiconductor substrate so as to extend along a first direction (Y direction), a plurality of second element-separating regions formed so as to extend along a second direction (X direction) that intersects with the first direction (Y direction), a plurality of active regions insulated and separated by the first element-separating regions and the second element-separating regions a plurality of gate electrodes (word lines) formed so as to extend along the first direction (Y direction), and an embedded diffusion layer that is formed in a position deeper than the first element-separating regions and the second element-separating regions, and that has an inverse characteristic to the active regions.